Abstract: Provided is a capacitive transducer including an element including a plurality of cells: each of the plurality of cells including: a first electrode; and a vibrating film including a second electrode, the second electrode being opposed to the first electrode with a gap; and a vibrating film supporting portion that supports the vibrating film so as to form the gap, in which the element includes a first cell and a second cell, the first cell including the vibrating film having a first spring constant, the second cell including the vibrating film having a second spring constant lower than the first spring constant; and a voltage to be applied between the first electrode and the second electrode of the first cell is higher than a voltage to be applied between the first electrode and the second electrode of the second cell.

Abstract: Provided is a capacitive transducer having broadband frequency characteristics. The capacitive transducer includes an element which has multiple kinds of cells, each cell including: a first electrode; a vibrating film including a second electrode, the second electrode being opposed to the first electrode with a gap; and a support portion that supports the vibrating film so as to form the gap. The multiple kinds of cells have different ratios of an area of one of the first electrode and the second electrode to an area of the gap when viewed from a normal direction of the vibrating film. The first electrodes or the second electrodes in the multiple kinds of cells are electrically connected together.

Abstract: A method of manufacturing an oscillator device having first and second oscillators being driven at first and second driving resonance frequencies gf1 and gf2, the method including a first step for processing the two oscillators, wherein, when the two oscillators are going to be processed as oscillators having first and second resonance frequencies different from the two driving resonance frequencies with a certain dispersion range, the two oscillators are so processed that the first and second resonance frequencies different from the two driving resonance frequencies become equal to first and second resonance frequencies f1 and f2, respectively, which are included in adjustable resonance frequency ranges, respectively, and a second step for adjusting the first and second resonance frequencies f1 and f2 so that they become equal to the first and second driving resonance frequencies gf1 and gf2, respectively.

Abstract: The present invention relates to an electromechanical transducer and a method of producing it, in which the substrate rigidity is maintained to prevent the substrate from being broken during formation of dividing grooves or a film. The electromechanical transducer includes a plurality of elements each having at least one cell. An insulating layer is formed on a first substrate, and gaps are formed in the insulating layer. A second substrate is bonded to the insulating layer provided with the gaps. Then, dividing grooves are formed in the first substrate and are at least partially filled with an insulating member. Then, the thickness of the second substrate bonded to the insulating layer is reduced to form a film.

Abstract: To suggest an electromechanical transducer device with a high S/N ratio, an electromechanical transducer device includes a first substrate; electromechanical transducer elements two-dimensionally arrayed on a front surface of the first substrate and configured to provide conversion between acoustic waves and electric signals; an electric wiring substrate that is a second substrate electrically connected with a back surface of the first substrate; a first acoustic matching layer provided between the first substrate and the second substrate; an acoustic attenuating member arranged on a back surface of the second substrate; and a second acoustic matching layer provided between the second substrate and the acoustic attenuating member.

Abstract: A light deflector device includes a light deflector having an oscillation system, a driving unit for driving the oscillation system and a drive controlling unit for supplying a drive signal. The oscillation system simultaneously generates a first oscillating motion of a first frequency and a second oscillating motion of a second frequency. The drive controlling unit supplies a drive signal formed by synthetically combining a first signal having the first frequency and a second signal having the second frequency to the driving unit and, at the same time, another drive signal for changing at least the amplitude of the first oscillating motion, the amplitude of second oscillating motion or the relative phase difference of the first oscillating motion and the second oscillating motion to the driving unit in order to correct an offset of scanning light deflected by the light deflector.

Abstract: An electromechanical transducer with less characteristic variation and a method of manufacturing the electromechanical transducer is provided. The electromechanical transducer has a plurality of cells constituted of a first electrode, a vibration film provided with a second electrode provided so as to face the first electrode through a gap, and a supporting portion supporting the vibration film. A structure configured to reduce an uneven flatness between the vibration film and the supporting portion is provided at an outer peripheral portion of a gap while a portion of the supporting portion is interposed between the structure and the gap.

Abstract: Disclosed is an oscillator device that includes an oscillating system having a first oscillator, a second oscillator, a first torsion spring for connecting the first and second oscillators each other, and a second torsion spring being connected to the second oscillator and having a common torsional axis with the first torsion spring; a supporting system for supporting the oscillating system; a driving system for driving the oscillating system so that at least one of the first and second oscillators produces oscillation as can be expressed by an equation that contains a sum of a plurality of time functions; a signal producing system for producing an output signal corresponding to displacement of at least one of the first and second oscillators; and a drive control system for controlling the driving system on the basis of the output signal of the signal producing system so that at least one of amplitude and phase of the time function takes a predetermined value.

Abstract: In a fabrication method of fabricating a structure, a basic etching mask corresponding a target shape with a convex corner, and a correction etching mask with a first portion, a second portion and an opening portion are formed on a single-crystal silicon substrate, and the silicon substrate with the basic etching mask and the correction etching mask formed thereon is subjected to an anisotropic etching to form the silicon substrate having the target shape. The first portion extends in a <110> direction, respective ends of the first portion are connected to the basic etching mask. The second portion is connected to a side of the first portion extending in the <110> direction.

Abstract: A method of manufacturing an oscillator device having an oscillator supported relative to a fixed member by a torsion spring for oscillation around a torsion axis and arranged to be driven at a resonance frequency, which method includes a first step for determining an assumed value of an inertia moment weight of the oscillator, a second step for measuring the resonance frequency, a third step for calculating a spring constant of the torsion spring, from the assumed value of the inertia moment weight and the measured resonance frequency obtained at said first and second steps, a fourth step for calculating an adjustment amount for the inertia moment of the oscillator or for the spring constant of the torsion spring, based on the spring constant calculated at said third step and a target resonance frequency determined with respect to the resonance frequency of the oscillator, so as to adjust the resonance frequency to the target resonance frequency, and a fifth step for adjusting the resonance frequency of the

Abstract: A sensorless induction motor control device with a function of correcting a slip frequency wherein a slip frequency estimation unit estimates the slip frequency from at least one kind of current flowing through the motor. A voltage command value calculation unit calculates a D-phase voltage command value and a Q-phase voltage command value which are used for controlling a voltage applied to the motor using a Q-phase current command value calculated based on a difference between a speed estimation value, which is calculated using an estimation value of the slip frequency, and an externally supplied speed command value. An ideal voltage command value determination unit determines an ideal voltage command value using the speed command value and the Q-phase current command value. An actual voltage command value calculation unit calculates an actual voltage command value using the D-phase voltage command value and the Q-phase voltage command value.

Abstract: An electromechanical transducer includes a first electrode; a silicon oxide film disposed on the first electrode; and a vibration film including a silicon nitride film disposed on the silicon oxide film with a space therebetween and a second electrode disposed on the silicon nitride film so as to oppose the first electrode.

Abstract: A method of producing an electromechanical transducer includes forming an insulating film on a first electrode, forming a sacrificial layer on the insulating film, forming a first membrane on the sacrificial layer, forming a second electrode on the first membrane, forming an etching-hole in the first membrane and removing the sacrificial layer through the etching-hole, and forming a second membrane on the second electrode, and sealing the etching-hole. Forming the second membrane and sealing the etching-hole are performed in one operation.

Abstract: An electromechanical transducer includes a substrate, a first electrode disposed on the substrate, and a vibration film including a membrane disposed on the first electrode with a space therebetween and a second electrode disposed on the membrane so as to oppose the first electrode. The first electrode has a surface roughness value of 6 nm RMS or less.

Abstract: The controller controls a spindle connected to an induction motor via a belt by controlling the rotational velocity of the induction motor. The spindle has an encoder attached thereto for detecting the position of the spindle, but the induction motor does not have a velocity detector attached thereto. The velocity of the induction motor is estimated from the spindle velocity obtained from output of the encoder, and slip of the belt is detected based on the estimated velocity of the induction motor. When occurrence of slip of the belt is detected, the estimated velocity of the induction motor will not be used for the control of the induction motor.

Abstract: Provided is an ultrasonic detection device including: a capacitive electromechanical transducer including a cell that includes a first electrode and a second electrode disposed so as to oppose with a space; a voltage source for developing a potential difference between the first electrode and the second electrode; and an electric circuit for converting a current, which is caused by a change in electrostatic capacitance between the first electrode and the second electrode due to vibration of the second electrode, into a voltage, in which the capacitive electromechanical transducer provides an output current with a high-pass characteristic having a first cutoff frequency with respect to a frequency, the electric circuit provides an output with a low-pass characteristic having a second cutoff frequency with respect to the frequency, and the second cutoff frequency is smaller than the first cutoff frequency.

Abstract: A technology that makes it possible to adjust, through processing, an output signal sent from a capacitive electromechanical transducer apparatus such as a CMUT upon reception of an elastic wave is provided. A capacitive electromechanical transducer apparatus 100 includes cells 102 that include a first electrode 104 and second electrodes 106, each of which is disposed so as to be opposite the first electrode 104 with a cavity 105 therebetween. In the capacitive electromechanical transducer apparatus 100, at least one of the cells 102 includes a processed unit on which at least either addition of a material or removal of a material is performed as processing.

Abstract: An electromechanical transducer includes multiple elements each including at least one cellular structure, the cellular structure including: a semiconductor substrate, a semiconductor diaphragm, and a supporting portion for supporting the diaphragm so that a gap is formed between one surface of the substrate and the diaphragm. The elements are separated from one another at separating locations of a semiconductor film including the diaphragm. Each of the elements includes in a through hole passing through a first insulating layer including the supporting portion and the semiconductor substrate: a conductor which is connected to the semiconductor film including the diaphragm; and a second insulating layer for insulating the conductor from the semiconductor substrate.

Abstract: A sensorless induction motor control device with a function of correcting a slip frequency wherein a slip frequency estimation unit estimates the slip frequency from at least one kind of current flowing through windings included in the motor, a voltage command signal value calculation unit calculates a D-phase voltage command signal value and a Q-phase voltage command signal value which are used for controlling a voltage applied to the sensorless induction motor using a Q-phase current command signal value calculated based on a difference between a speed estimation value, which is calculated using an estimation value of the slip frequency, and an externally supplied speed command signal value, an ideal voltage command signal value determination unit determines an ideal voltage command signal value using the speed command signal value and the Q-phase current command signal value, an actual voltage command signal value calculation unit calculates an actual voltage command signal value using the D-phase voltage

Abstract: [Objective] To provide a gas sensor in which the insulation among conduction members is stably secured through stable maintenance of the insulation property of a separator provided within a sheath, whereby a normal output can be obtained from a detection element. [Means for Solution] Coating layers 64 and 69 of fluorine or a fluorine compound are formed on the surface of a separator 60 (a front separator 61 and a rear separator 66) of an NOx sensor. The coating layers 64 and 69 have water impermeability and water repellency. Even in the case where moisture contained in the atmosphere within a sheath 30 forms dew on the surface of the separator 60, the coating layers 64 and 69 having water impermeability prevent soaking of moisture into the separator 60, to thereby secure the insulation property of the separator 60.