Abstract: An oscillator device and a method of producing the same, that enables adjustment of an inertia moment or a gravity center position of an oscillating member through wide range and at high speed, wherein the oscillating member oscillates about an oscillation axis 17 and it includes a movable element 11 and a mass adjusting member 19, a cavity 30 being defined between the movable member 11 and a portion of the mass adjusting member 19, such that, in response to irradiation of the mass adjusting member 19 with a laser beam, a material of the mass adjusting member contiguous to the cavity 30 is partly removed, the material being removed thereby including a portion of the mass adjusting member not irradiated with the laser beam.

Abstract: A method of manufacturing an oscillator based on etching a monocrystal silicon substrate, the method including a mask forming step for forming, on the monocrystal silicon substrate, an etching mask having a pattern with a repetition shape comprised of a plurality of mutually coupled oscillators each including a torsion spring between a supporting base plate and a movable member, an etching step for etching the monocrystal silicon substrate while using the etching mask as a mask, to form on the monocrystal silicon substrate a repetition shape comprised of a plurality of corresponding mutually coupled oscillators, and a dicing step for determining a width of the movable member and the supporting base plate of each of the oscillators in the repetition shape, which width is effective to determine a resonance frequency of the individual oscillators required when these are used as oscillators, and for cutting by dicing the movable member and the supporting base plate between adjoining oscillators, at the determined

Abstract: A method of manufacturing a structure includes a first step of forming, on a monocrystal silicon substrate having a (100) surface as a principal surface, a basic etching mask corresponding to a target shape and having at least a first structure with a projecting corner and a second structure adjoining the first structure with an opening intervening therebetween, and a correction etching mask extending from the projecting corner of an etching mask of the first structure and connected to an etching mask of the second structure, and a second step of performing anisotropic etching of the monocrystal silicon substrate having the basic etching mask and the correction etching mask to form the target shape.

Abstract: A swing member device comprises a swingable part supported by a supporting part to be swingable around a torsional axis on a supporting base in at least one intrinsic oscillation mode: the swing member device having a temperature-raising unit for raising the temperature of ambient atmosphere in the region of swing motion of the swingable part, the temperature-raising unit raising the temperature of the ambient atmosphere to enable decrease of an influence of an unsteady dragging force caused by the ambient atmosphere.

Abstract: Disclosed is an oscillator device that includes an oscillating system having a first oscillator, a second oscillator, a first torsion spring for connecting the first and second oscillators each other, and a second torsion spring being connected to the second oscillator and having a common torsional axis with the first torsion spring; a supporting system for supporting the oscillating system; a driving system for driving the oscillating system so that at least one of the first and second oscillators produces oscillation as can be expressed by an equation that contains a sum of a plurality of time functions; a signal producing system for producing an output signal corresponding to displacement of at least one of the first and second oscillators; and a drive control system for controlling the driving system on the basis of the output signal of the signal producing system so that at least one of amplitude and phase of the time function takes a predetermined value.

Abstract: An excitation current processor of a current controller processes the excitation current corresponding to the magnetic flux instruction from the magnetic flux instruction processor. It multiplies this excitation current with a boost coefficient to obtain an excitation current instruction. Here, the boost coefficient is determined based on the difference obtained by subtracting the magnetic flux estimation value processed by the magnetic flux processor based on the excitation current feedback from the voltage conversion device from the magnetic flux instruction input from the magnetic flux instruction processor. Further, the boost coefficient can be found from the function of time from the start of the rise of the magnetic flux.

Abstract: An oscillator device includes an oscillation system having at least one oscillator configured to oscillate, the oscillation system having a plurality of natural oscillation modes with a plurality of frequencies which frequencies are mutually in a relationship of integral-number ratio, a driving system configured to drive the at least one oscillation system, and a drive control system configured to control the driving system, wherein the drive control system applies to the driving system a driving signal in the form of a rectangular pulse based on combining a plurality of rectangular pulse signals corresponding to the plurality of natural oscillation modes, respectively.

Abstract: A fixed-position stop control apparatus (10) includes: a move-instruction generating means (22) for generating a move instruction for each control cycle; a position loop control means (25) for position controlling a rotation shaft (61) for each control cycle according to the move instruction generated by the move-instruction generating means; and a speed loop control means (35) for speed controlling the rotation shaft according to one of a speed instruction generated by a higher level control apparatus (45) and a predetermined speed instruction, thereby switching the speed control of the rotation shaft by the speed loop control means to the position control of the rotation shaft by the position loop control means. In this fixed-position stop control apparatus, the move instruction generated by the move-instruction generating means has acceleration smaller than the acceleration corresponding to the acceleration and deceleration ability of the rotation shaft.

Abstract: A motor control apparatus for computing or outputting motor load information, comprises: a storage unit which stores a function or table obtained in advance based on parameters used for the computation of the load information and on an actually measured value of a motor output or motor torque; and a load meter computing unit which computes the load information from the function or table stored in the storage unit by using the parameters used for the computation of the load information. With the above configuration, the load meter is computed in such a manner as to accurately indicate the load condition of a motor in real time over the entire speed range of the motor including the nonlinear control region of the motor, and the motor is controlled using the thus computed value or the computed value is displayed on a display unit.

Abstract: A servo control device that displays, by a two-dimensional image, evaluation of control precision of a servo system, includes: an instruction unit that instructs a position instruction having periodicity; a unit that records a track of position data based on a position feedback of a servo system according to the position instruction; and a first drawing unit that draws position data based on the position feedback, data before a quarter cycle or after a quarter cycle of the position data or position data based on the position instruction before a quarter cycle or after a quarter cycle, on a two-dimensional plane including orthogonal two axes, as the axis data of the orthogonal two axes respectively.

Abstract: An oscillator device and a method of producing the same, that enables adjustment of an inertia moment or a gravity center position of an oscillating member through wide range and at high speed, wherein the oscillating member oscillates about an oscillation axis 17 and it includes a movable element 11 and a mass adjusting member 19, a cavity 30 being defined between the movable member 11 and a portion of the mass adjusting member 19, such that, in response to irradiation of the mass adjusting member 19 with a laser beam, a material of the mass adjusting member contiguous to the cavity 30 is partly removed, the material being removed thereby including a portion of the mass adjusting member not irradiated with the laser beam.

Abstract: A fixed-position stop control apparatus (10) includes: a move-instruction generating means (22) for generating a move instruction for each control cycle; a position loop control means (25) for position controlling a rotation shaft (61) for each control cycle according to the move instruction generated by the move-instruction generating means; and a speed loop control means (35) for speed controlling the rotation shaft according to one of a speed instruction generated by a higher level control apparatus (45) and a predetermined speed instruction, thereby switching the speed control of the rotation shaft by the speed loop control means to the position control of the rotation shaft by the position loop control means. In this fixed-position stop control apparatus, the move instruction generated by the move-instruction generating means has acceleration smaller than the acceleration corresponding to the acceleration and deceleration ability of the rotation shaft.

Abstract: The invention relates to a numerical control (NC) device, and provides a servo control device that displays, by a two-dimensional image, evaluation of control precision of a servo system, and that can adjust the servo system according to a visual method, and provides a method of adjusting the servo system. The control device includes: an instruction unit that instructs a position instruction having periodicity; a unit that records a track of position data based on a position feedback of a servo system according to the position instruction; and a first drawing unit that draws position data based on the position feedback, data before a quarter cycle or after a quarter cycle of the position data or position data based on the position instruction before a quarter cycle or after a quarter cycle, on a two-dimensional plane including orthogonal two axes, as the axis data of the orthogonal two axes respectively.

Abstract: Disclosed is a method for detecting an angular difference between a motor magnetic pole position and an encoder reference position in a permanent magnet synchronous motor equipped with an incremental encoder, wherein a DC current command for supplying a monotonically decreasing DC current is applied to the permanent magnet motor for DC excitation, and the angular difference is detected by detecting an amount of rotor movement due to the DC excitation by using the incremental encoder. By applying a DC excitation current command for supplying a monotonically decreasing DC current rather than supplying a DC current of constant magnitude as in the prior art, it becomes possible, without estimating the initial magnetic pole position, to shorten the time required for the motor rotor to stop, while preventing the phenomenon in which the rotor does not stop at the magnetic pole position but oscillates around that position.

Abstract: A controller for a vector control of an induction motor, which is capable of easily determining a rotor resistance for use in calculation of a slip frequency. A temperature sensor is provided for detecting a temperature of a stator. Information on relation between the rotor temperature and the rotor resistance predetermined based on measurement is stored in a table. In driving the induction motor, the rotor resistance for the stator temperature detected by the temperature sensor is read from the table. A torque command I2 is divided by a magnetic flux command ?2 and the obtained quotient is multiplied by the read value of the rotor resistance to obtain the slip frequency ?s, so that the vector control is performed based on the obtained slip frequency ?s. The value of the rotor resistance is easily determined by simply referring the table without complicated calculation.

Abstract: The PWM frequency to be input to a current controller that generates voltage commands for a spindle motor inverter unit is switched between multiple levels according to a current feedback value to suppress heat generation in the spindle motor and drive unit.

Abstract: A motor controller capable of obtaining information on offsets, amplitudes and a phase difference of analog feedback signals from encoders without using special measuring device. The analog feedback signals from the encoders are A/D converted and the offsets, the amplitudes and the phase difference of A-phase and B-phase analog feedback signals are obtained based on the converted digital signals by an arithmetic section. The obtained offsets, amplitudes and phase difference are displayed by a display section of the motor controller and/or a display section of a numerical controller as a host controller. Further, the obtained offsets and amplitudes are compared with respective reference values for determining acceptability of the feedback signals from the encoders and the results of the comparison is displayed by the display section and/or the display section of the numerical controller.

Abstract: A controller for a vector control of an induction motor, which is capable of easily determining a rotor resistance for use in calculation of a slip frequency. A temperature sensor is provided for detecting a temperature of a stator. Information on relation between the rotor temperature and the rotor resistance predetermined based on measurement is stored in a table. In driving the induction motor, the rotor resistance for the stator temperature detected by the temperature sensor is read from the table. A torque command I2 is divided by a magnetic flux command &PHgr;2 and the obtained quotient is multiplied by the read value of the rotor resistance to obtain the slip frequency &ohgr;s, so that the vector control is performed based on the obtained slip frequency &ohgr;s. The value of the rotor resistance is easily determined by simply referring the table without complicated calculation.

Abstract: A motor controller capable of obtaining information on offsets, amplitudes and a phase difference of analog feedback signals from encoders without using special measuring device. The analog feedback signals from the encoders are A/D converted and the offsets, the amplitudes and the phase difference of A-phase and B-phase analog feedback signals are obtained based on the converted digital signals by an arithmetic section. The obtained offsets, amplitudes and phase difference are displayed by a display section of the motor controller and/or a display section of a numerical controller as a host controller. Further, the obtained offsets and amplitudes are compared with respective reference values for determining acceptability of the feedback signals from the encoders and the results of the comparison is displayed by the display section and/or the display section of the numerical controller.

Abstract: A storage battery-based DC power supply system with continuous float charging adapted to automatic continuous recharging of storage battery connected to load is disclosed. Selective recharging at the full-charge voltage and float charging voltage is performed in response to the accumulated ampere-hour value of discharge current from the storage battery, when such value reaches a predetermined threshold value set to prevent excessive recharging, which can damage storage battery.