Abstract: A lump management apparatus comprising a management computer which is connected with inspection/manufacturing apparatus computers, and includes a transmission/reception function to transmit/receive each information item of the operation conditions set to the respective inspection/manufacturing apparatuses or the maintenance information from each sensor unit to/from the respective apparatus computers, a change function to intensively manage the operation conditions set to the respective apparatus computers in a lump and change the operation conditions in a lump with respect to the computer of the specified each inspection/manufacturing apparatus, a notification function to intensively manage the maintenance information from each sensor unit in a lump, predict an abnormality of the respective inspection/manufacturing apparatuses, and notify a warning at the time of occurrence of the abnormality, and a display function to display each information item of the operation conditions of the respective inspection/manu

Abstract: A defect detecting apparatus comprising an illuminating unit which irradiates an object with illumination an image sensing unit which senses an image of the object an angle controller which controls an inclination angle of at least one of the illuminating unit and the image sensing unit, an image processor which senses images of the object while the angle controller changes the inclination angle of at least one of the illuminating unit and the image sensing unit and obtains a relationship between each inclination angle and optical information corresponding to the each inclination angle, and a determination unit which determines an image sensing condition suited to observation in accordance with the relationship wherein the angle controller sets the inclination angle of the illuminating unit or the image sensing unit on the basis of a determination result from the determination unit such that the inclination angle matches the image sensing condition.

Abstract: A defect detecting apparatus comprising an illuminating unit which irradiates an object with illumination an image sensing unit which senses an image of the object an angle controller which controls an inclination angle of at least one of the illuminating unit and the image sensing unit, an image processor which senses images of the object while the angle controller changes the inclination angle of at least one of the illuminating unit and the image sensing unit and obtains a relationship between each inclination angle and optical information corresponding to the each inclination angle, and a determination unit which determines an image sensing condition suited to observation in accordance with the relationship wherein the angle controller sets the inclination angle of the illuminating unit or the image sensing unit on the basis of a determination result from the determination unit such that the inclination angle matches the image sensing condition.