Abstract: An organic light-emitting display device includes a pixel including a first region to display an image, a second region to transmit external light, and a third region between the first region and the second region. The pixel includes a pixel electrode in the first region, a pixel-defining layer in at least the first region, an auxiliary electrode in at least the third region, and an intermediate layer on the pixel electrode. The pixel-defining layer includes a first opening exposing a portion of the pixel electrode and a second opening corresponding to at least the second region and third region. The pixel electrode is exposed via the first opening, and the intermediate layer includes an organic emission layer. An opposite electrode is on the intermediate layer and contacts the auxiliary electrode in the third region.

Abstract: An organic light-emitting display apparatus includes a pixel electrode with at least one opening; an intermediate layer disposed on the pixel electrode that includes an organic emission layer; an opposite electrode disposed on the intermediate layer; and a driving circuit that includes an upper conductive layer that overlaps the at least one opening of the pixel electrode in a plan view, and that is electrically connected to the pixel electrode.

Abstract: An organic light-emitting display apparatus includes an organic light-emitting diode, a driving transistor arranged to receive a first driving voltage and to supply a driving current to the organic light-emitting diode, a data line arranged to transfer a sustain voltage and a data voltage, a sensing transistor which is connected to the data line, and which is arranged to transfer the sustain voltage to an anode of the organic light-emitting diode in response to a sensing control signal, a switching transistor which is connected to the data line, and which is arranged to transfer the data voltage to the driving transistor in response to a scan signal, and a data compensation unit arranged to compensate image data according to characteristic information of the organic light-emitting diode, the characteristic information transmitted to the data compensation unit through the sensing transistor and the data line.

Abstract: A temperature measuring method for measuring a temperature of a member corresponding to a measuring object arranged within a chamber of a plasma processing apparatus is provided. The temperature measuring method involves obtaining a function (f) for correcting a correction target temperature (Tmeas) according to a measurement window temperature (Tw), the function (f) being computed based on the correction target temperature (Tmeas) corresponding to a temperature of the measuring object measured via a measurement window arranged at the chamber, a reference temperature (Tobj) corresponding to a temperature of the measuring object measured without using the measurement window, and the measurement window temperature (Tw) corresponding to a temperature of the measurement window.

Abstract: In a plasma processing apparatus of an exemplary embodiment, energy of microwaves is introduced from an antenna into the processing container through a dielectric window. The plasma processing apparatus includes a central introducing unit and a peripheral introducing unit. A central introduction port of the central introducing unit injects a gas just below the dielectric window. A plurality of peripheral introduction ports of the peripheral introducing unit injects a gas towards a periphery of the placement region. The central introducing unit is connected to with a plurality of first gas sources including a reactive gas source and a rare gas source through a plurality of first flow rate control units. The peripheral introducing unit is connected to with a plurality of second gas sources including a reactive gas source and a rare gas source through a plurality of second flow rate control units.

Abstract: An organic light emitting display device of the present embodiments includes: a plurality of pixels positioned at intersections of scan lines, data lines, and emission control lines; a pixel unit, including the plurality of pixels, and divided into two or more blocks; a scan driver sequentially supplying scan signals to the scan lines; a data driver supplying data signals to the data lines in synchronization with the scan signals; and two or more emission drivers connected with emission control lines in the blocks, in which each emission driver supplies emission control signals to emission control lines connected thereto, and at least one or more emission control signals are supplied in each block simultaneously.

Abstract: A method of driving an organic light emitting display device includes compensating threshold voltages of driving transistors included in respective pixels while concurrently supplying scan signals to scan lines, lowering voltages of gate electrodes of the driving transistors and equalizing voltages of first electrodes and second electrodes of the driving transistors after the compensating of the threshold voltages, transmitting data signals to the pixels while progressively supplying the scan signals to the scan lines, and emitting light concurrently from the pixels in response to gray levels of the data signals.

Abstract: In a plasma processing apparatus of an exemplary embodiment, energy of microwaves is introduced from an antenna into the processing container through a dielectric window. The plasma processing apparatus includes a central introducing unit and a peripheral introducing unit. A central introduction port of the central introducing unit injects a gas just below the dielectric window. A plurality of peripheral introduction ports of the peripheral introducing unit injects a gas towards a periphery of the placement region. The central introducing unit is connected to with a plurality of first gas sources including a reactive gas source and a rare gas source through a plurality of first flow rate control units. The peripheral introducing unit is connected to with a plurality of second gas sources including a reactive gas source and a rare gas source through a plurality of second flow rate control units.

Abstract: A temperature measuring method for measuring a temperature of a member corresponding to a measuring object arranged within a chamber of a plasma processing apparatus is provided. The temperature measuring method involves obtaining a function (f) for correcting a correction target temperature (Tmeas) according to a measurement window temperature (Tw), the function (f) being computed based on the correction target temperature (Tmeas) corresponding to a temperature of the measuring object measured via a measurement window arranged at the chamber, a reference temperature (Tobj) corresponding to a temperature of the measuring object measured without using the measurement window, and the measurement window temperature (Tw) corresponding to a temperature of the measurement window.

Abstract: An optical monitor device of the present microwave plasma etching device has: a monitor head located in a position more radially inward than the edge of a semiconductor wafer W mounted on a susceptor, more radially outward than a coaxial pipe, and above a cover plate; an optical waveguide for monitoring provided vertically below the monitor head, and longitudinally traversing the cooling plate, a dielectric plate, and a dielectric window; and a monitor main body optically connected to the monitor head via an optical fiber.

Abstract: Disclosed is a microwave plasma processing apparatus. The microwave plasma processing apparatus includes a cooling plate. In addition, the microwave plasma processing apparatus includes an intermediate metal body installed on a processing container side of the cooling plate to be spaced apart from the cooling plate so that a spacing between the intermediate metal body and the cooling plate forms a waveguide of microwaves. The intermediate metal body is in contact with the cooling plate at one or plural convex portions arranged to block a portion of the waveguide. Further, the microwave plasma processing apparatus includes a coaxial waveguide configured to supply microwaves to the waveguide, a slot antenna plate configured to radiate microwaves via the waveguide, a dielectric window installed on the processing container side of the slot antenna plate, and a processing container installed to be sealed by the dielectric window.

Abstract: A method of driving an organic light emitting display device includes compensating threshold voltages of driving transistors included in respective pixels while concurrently supplying scan signals to scan lines, lowering voltages of gate electrodes of the driving transistors and equalizing voltages of first electrodes and second electrodes of the driving transistors after the compensating of the threshold voltages, transmitting data signals to the pixels while progressively supplying the scan signals to the scan lines, and emitting light concurrently from the pixels in response to gray levels of the data signals.

Abstract: An erasing TFT 13 is provided between a gate terminal of a driving TFT 11 and a control line Ei, and a gate terminal of the erasing TFT 13 is connected to the control line Ei. When performing data erase, a potential not lower than a sum of a potential of a power supply line Vp and a threshold voltage of the erasing TFT 13 is applied to the control line Ei before performing data write, and an organic EL element 15 is controlled to be in a non-light-emitting state. A high level potential applied to a control line Wi is a potential at which a writing TFT 12 is maintained in an OFF state when a potential applied to a data line Sj is a high level potential corresponding to the non-light-emitting state. Accordingly, it is possible to prevent electrooptic elements from emitting light unnecessarily along with changes of potentials of the control lines without increasing the number of power supply or wiring.

Abstract: A process monitoring device 11 includes a light source unit that outputs light; a light detection unit that detects an intensity of light; a first optical path 21 that guides the light outputted from the light source unit to a wafer W and guides reflection light from the wafer W to the light detection unit; a second optical path that has a light propagation characteristic equivalent to that of the first optical path 21 and guides the light outputted from the light source unit to the light detection unit without allowing the light to pass the wafer W; and a controller 17 that corrects intensity information of the light detected by the light detection unit via the first optical path 21 based on intensity information of the light detected by the light detection unit via the second optical path, and analyzes a structure of the wafer W.

Abstract: TFTs 10 and 15 and the organic EL device 17 are provided between a power line Vp and a common cathode Vcom, and a capacitor 16 and a TFT 11 are provided between a gate of the TFT 10 and a data line Sj. A TFT 12 is provided between the gate and a drain of the TFT 10, a TFT 13 is provided between an anode terminal of the organic EL device 17 and the common cathode Vcom, and a TFT 14 is provided between one electrode of the capacitor 16 and the power line Vp. Gates of the TFTs 11 to 13 are connected to a scanning line Gi, and gates of the TFTs 14 and 15 are connected to a scanning line Ei. When writing, a high potential is supplied to the scanning line Gi, and a low potential is supplied to the scanning line Ei a little after this. While the high potentials are supplied to the two scanning lines, the data line Sj is controlled to be in a high impedance state. In this manner, a pixel circuit configured by N-type transistors is driven using two types of scanning lines.

Abstract: In one embodiment of the present invention, to allow a circuit that compensates for variations in a threshold voltage of a drive element to operate properly and prevent luminances of other pixel circuits from fluctuating due to a compensation operation, a pixel circuit is disclosed. A driving TFT, a switching TFT, and an organic EL element are provided between a power supply wiring line and a common cathode, and a capacitor and a switching TFT are provided between a gate terminal of the driving TFT and a data line. A switching TFT is provided between a connection point B between the capacitor and the switching TFT and a reference supply wiring line, a switching TFT is provided between the gate terminal and a drain terminal of the driving TFT, and a switching TFT is provided between the gate terminal of the driving TFT and the connection point B.

Abstract: [Problem] To carry out high accuracy optical monitoring of the surface of a substrate to be treated inside a treatment vessel using non-coherent monitor light having a wide wavelength range, without affecting the uniformity of the electromagnetic radiation from a planar slot antenna. [Solution] The optical monitor device 100 of the present microwave plasma etching device has: a monitor head 102 located in a position more radially inward than the edge of a semiconductor wafer W mounted on a susceptor 12, more radially outward than a coaxial pipe 66, and above a cover plate 72; an optical waveguide 104 for monitoring provided vertically below the monitor head 102, and longitudinally traversing the cooling plate 72, a dielectric plate 54, and a dielectric window 52; and a monitor main body optically connected to the monitor head 102 via an optical fiber 106.

Abstract: A driving circuit includes digital/current converting (DCC) circuits one for each data line. The DCC circuit charges a capacitor with a reference current according to a supplied signal from a shift register. The DCC circuit stores a current value of the reference current and outputs the current value to a data line via a switching element turned on by a digital image data signal of a single line supplied from a line latch. The output value of each DCC circuit is reset one after another in every select scan period in which an OFF signal is sent to all the data lines. Thus, the reset of the output value and the output of the image data signal can be successively carried out within one frame period, so the data applied to the pixel circuit with the DCC circuits one for each data line.

Abstract: In one embodiment of the present invention, to allow a circuit that compensates for variations in a threshold voltage of a drive element to operate properly and prevent luminances of other pixel circuits from fluctuating due to a compensation operation, a pixel circuit is disclosed. A driving TFT, a switching TFT, and an organic EL element are provided between a power supply wiring line and a common cathode, and a capacitor and a switching TFT are provided between a gate terminal of the driving TFT and a data line. A switching TFT is provided between a connection point B between the capacitor and the switching TFT and a reference supply wiring line, a switching TFT is provided between the gate terminal and a drain terminal of the driving TFT, and a switching TFT is provided between the gate terminal of the driving TFT and the connection point B.

Abstract: In a pixel circuit 100, a switching TFT 114, a driving TFT 110, and an organic EL element 130 are provided between a power supply wiring line Vp and a common cathode Vcom and a capacitor 121 and a switching TFT 111 are provided between a gate terminal of the driving TFT 110 and a data line Sj. A switching TFT 112 is provided between a connection point A between the capacitor 121 and the switching TFT 111 and a power supply wiring line Vr, a switching TFT 113 is provided between the gate and drain terminals of the driving TFT 110, and a capacitor 122 is provided between the gate terminal of the driving TFT 110 and the power supply wiring line Vr. Thus, a display device is provided that can freely set a period during which variations in the threshold voltage of a drive element are compensated for, and performs high-quality display by holding a control terminal potential of the drive element during light emission from an electro-optical element.