Abstract: A writing apparatus irradiates a predetermined position on an irradiation target with multiple charged particle beams to write a predetermined pattern on the irradiation target. The writing apparatus includes a beam generation mechanism generating multiple charged particle beams; a blanking aperture mechanism comprising a limiting aperture substrate shielding the generated multiple charged particle beams and a deflector deflecting the multiple charged particle beams in a predetermined direction, and blanking the multiple charged particle beams; a stage having the irradiation target mounted thereon and being movable; a driver moving the limiting aperture substrate; and a controller controlling the writing apparatus.

Abstract: In one embodiment, a multi-charged-particle-beam writing method includes dividing a data path into a plurality of first blocks based on at least either one of each of a plurality of input/output circuits and a plurality of wiring groups, and calculating a first shift amount for multiple beams for each of the plurality of first blocks. The data path is for inputting control data to a cell array on a blanking aperture array substrate. The control data is for controlling ON/OFF of each beam of the multiple beams. Each of the plurality of wiring groups includes a plurality of pieces of wiring connected to the plurality of input/output circuits and grouped together based on inter-wiring distance. The first shift amount is due to at least one of an electric field and a magnetic field for each of the plurality of first blocks. An irradiation position or a dose of the multiple beams is corrected based on the first shift amount, and irradiation is performed.

Abstract: The disclosed secondary battery includes a positive electrode and a negative electrode, wherein the negative electrode includes a first layer including at least a negative electrode active material layer, and the first layer further includes a fire retardant including a halogen atom.

Abstract: A positive electrode (11) according to one embodiment is provided with: a positive electrode collector (30); a first middle layer (32) disposed on one of two surfaces of the positive electrode collector (30), the surface being on the inner circumferential side when the positive electrode collector (30) is wound; a second middle layer (34) that is disposed on the other surface that is on the outer circumferential side; and a positive electrode mixed material layer (36) disposed on the first middle layer (32) and on the second middle layer (34). The first middle layer (32) and the second middle layer (34) contain insulating particles and an electrical conductor, and the thickness of the first middle layer (32) is less than the thickness of the second middle layer (34).

Abstract: The disclosed secondary battery is a non-aqueous electrolyte secondary battery including a positive electrode and a negative electrode. The positive electrode includes a first layer containing a positive electrode active material, and the first layer further contains a flame retardant containing a halogen atom. The first layer can contain carbon nanotubes. The first layer may include a second layer and a third layer disposed nearer to a surface of the positive electrode than the second layer, a content of the flame retardant in the third layer being higher than that in the second layer.

Abstract: According to one embodiment, a charged particle beam writing apparatus includes, a writing mechanism, a writing control circuit, a deflection operation control circuit configured to generate control data for controlling the blanking of each of the charged particle beams based on the shot data, a storage, a blanking control circuit configured to control the blanking based on the control data, and a detector. The writing control circuit is configured to, when the detector detects the abnormality during the writing, interrupt the writing, and generate interrupt position information at a position where the writing is interrupted based on the shot data which has been stored at the storage and is related to the control data that has not been used for controlling the blanking.

Abstract: An electron beam writing apparatus comprising, a cathode configured to emit an electron beam, a condition controller configured to change a condition under which the electron beam is emitted from the cathode in a plurality of ways, and a prediction unit configured to predict a life span of the cathode based on a temporal change in an amount of fluctuation of a beam characteristic of the electron beam to a change in the condition when the condition is changed.

Abstract: This secondary battery positive electrode is provided with a positive-electrode current collector, a positive-electrode mixture layer, and an intermediate layer disposed between the positive-electrode current collector and the positive-electrode mixture layer. The intermediate layer comprises: a first intermediate layer that includes a non-oxide conductive inorganic compound and a positive-electrode active material; and a second intermediate layer that includes an insulating inorganic material and a non-oxide conductive inorganic compound. The conductive inorganic compound becomes an insulating oxide at 300° C. or above.

Abstract: A charged particle beam adjustment method includes scanning, with a charged particle beam an emission current of which is set to a first adjustment value smaller than a target value, an aperture substrate including a hole disposed to be a focus position of the charged particle beam using each of lens values in an electron lens and calculating first resolution, calculating a first function of lens values and the first resolution and calculating a lens value range, scanning, with the charged particle beam the emission current of which is set to a second adjustment value, the aperture substrate using each of lens values set to avoid the lens value range and calculating second resolution, calculating a second function of lens values and the second resolution and estimating a lens value at a just focus, and adjusting the electron lens to the lens value at the just focus.

Abstract: A writing apparatus of the embodiments of the present invention is a writing apparatus that irradiates a predetermined position on an irradiation target with multiple charged particle beams to write a predetermined pattern on the irradiation target, the apparatus comprising: a beam generation mechanism configured to generate multiple charged particle beams; a blanking aperture mechanism configured to perform blanking control of the generated multiple charged particle beams; a stage configured to have the irradiation target mounted thereon and to be movable; and a controller configured to control the writing apparatus, wherein the controller controls the blanking aperture mechanism and the stage to move the stage in an in-plane direction of a surface of the irradiation target during a blanking period in preparatory phase for writing.

Abstract: The purpose of the present invention is to correct a beam irradiation position shift caused by charging phenomena with high accuracy.

Abstract: An icemaking system includes: a refrigerant circuit that executes a vapor compression refrigeration cycle; a circulation circuit that circulates solution as a cooling target of the refrigerant circuit; and a control device that controls refrigerant evaporation temperature at the refrigerant circuit. The circulation circuit includes a solution flow path of: an ice generator; a solution tank that stores the solution; and a pump that pressure feeds the solution to the solution flow path. The refrigerant circuit includes: an evaporator of the ice generator; a compressor; a condenser; and an expansion valve. The control device includes a central processing unit (CPU) that adjusts to lower evaporation temperature at the evaporator as the solution has higher solute concentration.

Abstract: In one embodiment, a multi-charged-particle-beam writing method includes dividing a data path into a plurality of first blocks based on at least either one of each of a plurality of input/output circuits and a plurality of wiring groups, and calculating a first shift amount for multiple beams for each of the plurality of first blocks. The data path is for inputting control data to a cell array on a blanking aperture array substrate. The control data is for controlling ON/OFF of each beam of the multiple beams. Each of the plurality of wiring groups includes a plurality of pieces of wiring connected to the plurality of input/output circuits and grouped together based on inter-wiring distance. The first shift amount is due to at least one of an electric field and a magnetic field for each of the plurality of first blocks. An irradiation position or a dose of the multiple beams is corrected based on the first shift amount, and irradiation is performed.

Abstract: This separator for a nonaqueous electrolyte secondary battery comprises a porous substrate, a heat-resistant layer that is formed on the porous substrate, and clusters of filler particles that are present in dot shapes on the surface of the heat-resistant layer. The filler particles are particles of a compound including at least one of phosphorus, silicon, boron, nitrogen, potassium, sodium, and bromine, and the transformation point at which the filler particles transform from a solid phase to a liquid phase or thermally decompose is in the range 180° C.-1000° C. This separator electrode for a nonaqueous electrolyte secondary battery can suppress heat production of the battery during a nail puncture test, while also suppressing an increase in battery resistance.

Abstract: This electrode for a nonaqueous electrolyte secondary battery comprises a current collector, an active material layer formed on the current collector, and a filler particle aggregate present in an island shape on a surface of the active material layer, wherein said filler particles are compound particles containing at least one element selected from phosphorus, silicon, boron, nitrogen, potassium, sodium, and bromine, and the transformation point at which the same transforms from a solid phase to a liquid phase or undergoes thermal decomposition is in the range of 180-1000° C.

Abstract: A positive electrode used in a secondary cell that is an example of the present embodiment is provided with a positive electrode collector, an intermediate layer formed on the positive electrode collector, and a positive electrode mixture layer formed on the intermediate layer. The positive electrode mixture layer has a thermally expandable material and a positive electrode active material. The thermally expandable material content of the positive electrode mixture layer is at least 0.1% by mass and less than 5% by mass. The intermediate layer has an insulating inorganic material and a conductive agent. The insulating inorganic material content of the intermediate layer is 80-99% by mass.

Abstract: According to one embodiment, a charged particle beam writing apparatus includes, a writing mechanism, a writing control circuit, a deflection operation control circuit configured to generate control data for controlling the blanking of each of the charged particle beams based on the shot data, a storage, a blanking control circuit configured to control the blanking based on the control data, and a detector. The writing control circuit is configured to, when the detector detects the abnormality during the writing, interrupt the writing, and generate interrupt position information at a position where the writing is interrupted based on the shot data which has been stored at the storage and is related to the control data that has not been used for controlling the blanking.

Abstract: A secondary battery positive electrode is provided with: a positive electrode current collector; a positive electrode mixture layer; and an intermediate layer disposed between the positive electrode current collector and the positive electrode mixture layer. The intermediate layer comprises first particles configured from an electrically conductive material, and second particles which are configured from an insulating inorganic material and have an average grain size greater than an average grain size of the first particles. The volume ratio of the first particles in the intermediate layer is not less than 25% and less than 70%. The volume ratio of the second particles in the intermediate layer is not less than 30% and less than 75%. The density of the intermediate layer is greater than 1 g/cm3 and not more than 2.5 g/cm3.

Abstract: An electron beam writing apparatus comprising, a cathode configured to emit an electron beam, a condition controller configured to change a condition under which the electron beam is emitted from the cathode in a plurality of ways, and a prediction unit configured to predict a life span of the cathode based on a temporal change in an amount of fluctuation of a beam characteristic of the electron beam to a change in the condition when the condition is changed.

Abstract: A negative-electrode active material for secondary batteries according to one aspect of the present invention comprises: core particles comprising a material which occludes and releases lithium metal; a first layer, which has been formed on the surface of each core particle; and a second layer, which has been formed on the first layer. The first layer comprises at least one substance selected from among amorphous carbon, carbon nanotubes, carbon nanofibers, and electroconductive polymers. The second layer comprises at least one inorganic compound selected from among oxides, phosphoric acid compounds, silicic acid compounds, and boric acid compounds.