Abstract: The present invention provides a method for applying an application liquid between a template and a substrate, and transferring the transfer pattern onto the application liquid. The template is inclinedly arranged with respect to the substrate in a manner that a first distance between a first end portion of the template and the substrate is a distance that causes a capillary action of the application liquid to occur, and a second distance between a second end portion of the template that opposes the first end portion and the substrate is a distance that does not cause the capillary action of the application liquid to occur. Thereafter, the application liquid is supplied from an outer side of the first end portion to the first end portion. Thereafter, the second end portion and the substrate are relatively moved so that the second distance becomes equal to the first distance.

Abstract: A fuel cell system includes: a fuel cell stack configured to have a plurality of unit fuel cells arranged on an identical plane; a chassis configured to cover at least one side of said fuel cell stack via an air flow space; and a condensation water holding member configured to be provided in at least a part between said fuel cell stack and said chassis, have a mesh shape and have a function for keeping moisture.

Abstract: The present invention provides a method for applying an application liquid between a template and a substrate, and transferring the transfer pattern onto the application liquid. The template is inclinedly arranged with respect to the substrate in a manner that a first distance between a first end portion of the template and the substrate is a distance that causes a capillary action of the application liquid to occur, and a second distance between a second end portion of the template that opposes the first end portion and the substrate is a distance that does not cause the capillary action of the application liquid to occur. Thereafter, the application liquid is supplied from an outer side of the first end portion to the first end portion. Thereafter, the second end portion and the substrate are relatively moved so that the second distance becomes equal to the first distance.

Abstract: In the present invention, a coating solution containing polysilazane is applied to a substrate to form a coating film. Thereafter, an ultraviolet ray is applied to the coating film formed on the substrate to cut a molecular bond of polysilazane in the coating film. Then, the coating film in which the molecular bond of polysilazane has been cut is oxidized while the coating film is being heated. Then, the oxidized coating film is baked at a baking temperature equal to or higher than a heating temperature when the coating film is oxidized.

Abstract: A developing apparatus has a substrate holder to hold a substrate, a heater which is provided in a substrate holder, and heats a substrate on a substrate holder for processing a resist film by PEB, a cooler to cool a substrate on a substrate holder, a developing solution nozzle to supply a developing solution to a substrate on a substrate holder, and a controller to control a heater, a cooler and a developing nozzle.

Abstract: In a template treatment of forming a film of a release agent on a treatment surface of a template, the treatment surface of the template is first cleaned. Thereafter, in a coating unit, the release agent is applied to the treatment surface of the template. The release agent on the template is then dried. Then, alcohol is applied to the release agent on the template to make the release agent adhere to the treatment surface of the template and to remove an unreacted portion of the release agent. Thereafter, the alcohol on the template is dried and removed. In this manner, a film of the release agent is formed in a predetermined film thickness on the treatment surface of the template.

Abstract: A developing apparatus has a substrate holder to hold a substrate, a heater which is provided in a substrate holder, and heats a substrate on a substrate holder for processing a resist film by PEB, a cooler to cool a substrate on a substrate holder, a developing solution nozzle to supply a developing solution to a substrate on a substrate holder, and a controller to control a heater, a cooler and a developing nozzle.

Abstract: A fluid pressure cylinder including a first damper and a second damper provided respectively on a head cover and a rod cover, which are disposed on both ends of the fluid pressure cylinder so as to face toward a piston. The first damper and the second damper are formed from an elastic material, and are made up from a main body portion against which the piston abuts, and a plurality of legs that project from the main body portion and which are gripped between the head cover and the rod cover and an inner wall surface of the cylinder tube.

Abstract: A developing apparatus has a substrate holder to hold a substrate, a heater which is provided in a substrate holder, and heats a substrate on a substrate holder for processing a resist film by PEB, a cooler to cool a substrate on a substrate holder, a developing solution nozzle to supply a developing solution to a substrate on a substrate holder, and a controller to control a heater, a cooler and a developing nozzle.

Abstract: A polymer electrolyte fuel cell includes a power generation part as an electrolyte membrane-electrode assembly formed of a solid polymer electrolyte membrane, a fuel electrode arranged in contact with one side of the solid polymer electrolyte membrane and an oxygen electrode arranged in contact with the other side of the membrane, and a fuel supply part for storing and supplying an alcohol fuel to the fuel electrode. The fuel supply part is composed of a high-concentration fuel tank for storing and supplying a highly-concentrated fuel and a water fuel tank for storing and supplying a water fuel. The fuel is gasified and supplied to the power generation part through a fuel gasification/supply layer provided between at least the high-concentration fuel tank and the fuel electrode.

Abstract: Cut lines (61) are formed in a wicking member (60) for supplying fuel to an anode (32) of a unit cell (11). This makes it possible to supply a sufficient amount of fuel to the anode because not only fuel propagation inside the wicking member (60) but also a capillary force obtained through the cut lines of the wicking member (60) can be utilized. This is so because not only fuel propagation through continuous pores inside the wicking member (60) but also fuel propagation through the cut lines (61) can effectively be utilized. This makes it possible to supply fuel for a long time period even when the amount is small and the concentration is low, thereby generating electric power for a long time.

Abstract: A fuel cell system which allows uniform fuel distribution to respective fuel cells, comprising: a plurality of fuel cells 5 each including an anode 2, a cathode 3 and an electrolyte membrane 4 disposed between the anode 2 and the cathode 3; and a fuel supply flow path 6 branched to supply fuel to each of the fuel cells 5. The sectional area of the fuel supply flow path in the downstream of each branch connection is narrower than that in the upstream. The above-described structure avoids the decrease in the fuel supply pressure due to the reduced sectional area in the downstream of the branch connection. Therefore, the fuel is supplied to the respective fuel cell with uniform pressure.

Abstract: A fuel cell system includes: a fuel cell stack configured to have a plurality of unit fuel cells arranged on an identical plane; a chassis configured to cover at least one side of said fuel cell stack via an air flow space; and a condensation water holding member configured to be provided in at least a part between said fuel cell stack and said chassis, have a mesh shape and have a function for keeping moisture.

Abstract: In the present invention, a coating solution containing polysilazane is applied to a substrate to form a coating film. Thereafter, an ultraviolet ray is applied to the coating film formed on the substrate to cut a molecular bond of polysilazane in the coating film. Then, the coating film in which the molecular bond of polysilazane has been cut is oxidized while the coating film is being heated. Then, the oxidized coating film is baked at a baking temperature equal to or higher than a heating temperature when the coating film is oxidized.

Abstract: A developing apparatus has a substrate holder to hold a substrate, a heater which is provided in a substrate holder, and heats a substrate on a substrate holder for processing a resist film by PEB, a cooler to cool a substrate on a substrate holder, a developing solution nozzle to supply a developing solution to a substrate on a substrate holder, and a controller to control a heater, a cooler and a developing nozzle.

Abstract: A substrate heating apparatus for heating a substrate coated with a film of chemically amplified resist within a period after exposure and before development, having a mounting table to mount the substrate substantially horizontal with the resist-coated film faced up, a fluid supply mechanism for supplying glycerin to the substrate, and a heating mechanism for heating the substrate on a mounting table, in a state that glycerin contacts a resist-coated film, wherein the substrate on a mounting table is heated, in a state that glycerin contacts the resist-coated film.

Abstract: Fuel cartridge 1501 has a double structure including case 1502 and inner container 1503 stored with liquid fuel 124. Case 1502 is made of a resin that is impact-resistant. Inner container 1503 is made of a resin resistant to liquid fuel.

Abstract: [Problems] Miniaturization and weight-saving of a fuel cell including a plurality of unit cells are intended together with higher integration of the unit cells. [Means for Solving Problems] A pair of electrode sheet 100a, 100b, each having a plurality of fuel electrodes 110a, 110b or a plurality of oxidant electrodes 112a, 112b supported by a resin section 102, are disposed on a single plane on the respective surfaces of a solid electrolyte membrane 105 to configure a plurality of unit cells. The fuel electrode and the oxidant electrode of the adjacent two unit cells existing on the respective surfaces of the solid electrolyte membrane are connected in series by using an electroconductive member penetrating the solid electrolyte membrane. Since the electroconductive member 108 extends along the stacking direction of the cell, no excess space is required to achieve the miniaturization of the fuel cell.

Abstract: A substrate processing apparatus for processing a substrate coated with a chemical amplification type resist and subjected to a light-exposure treatment comprises a substrate table on which is disposed a substrate, a heater for heating the substrate disposed on the substrate table, and an electric field forming mechanism for forming an electric field exerting force, which is directed toward the substrate, on the protons generated in the resist formed on the substrate disposed on the substrate table.

Abstract: A substrate processing apparatus for processing a substrate coated with a chemical amplification type resist and subjected to a light-exposure treatment comprises a substrate table on which is disposed a substrate, a heater for heating the substrate disposed on the substrate table, and an electric field forming mechanism for forming an electric field exerting force, which is directed toward the substrate, on the protons generated in the resist formed on the substrate disposed on the substrate table.