Abstract: An electron beam apparatus is provided for reliably measuring a potential contrast and the like at a high throughput in a simple structure. The electron beam apparatus for irradiating a sample, such as a wafer, formed with a pattern with an electron beam to evaluate the sample comprises an electron-optical column for accommodating an electron beam source, an objective lens, an E×B separator, and a secondary electron beam detector; a stage for holding the sample, and relatively moving the sample with respect to the electron-optical column; a working chamber for accommodating the stage and capable of controlling the interior thereof in a vacuum atmosphere; a loader for supplying a sample to the stage; a voltage applying mechanism for applying a voltage to the sample, and capable of applying at least two voltages to a lower electrode of the objective lens; and an alignment mechanism for measuring a direction in which dies are arranged on the sample.

Abstract: A solution containing a metal component of composite ultrafine metal particles each having a core substantially made of metal component and a covering layer made of an organic compound chemically bonded to the core having an average diameter ranging from 1 to 10 nm, uniformly dispersed in a solvent, forms a thin metal film on the surface of a transfer sheet, after which the transfer sheet, after which the transfer sheet is thermally decomposed to transfer the thin metal film to a substrate.

Abstract: An antenna unit comprises a hollow cylindrical member obtained by forming a flexible insulating film member into a hollow cylinder about a center axis and an antenna pattern composed of a plurality of conductors formed on a peripheral surface of the hollow cylindrical member. The antenna pattern comprises a helical pattern extending helically in a direction of the center axis and a loop pattern connected to an end portion of the helical pattern at an upper end portion of the hollow cylindrical member.

Abstract: A pole-type antenna unit has an pole-type antenna body having a cylinder extending up and down, a clip member, a universal joint for movably coupling the antenna body to the clip member. The clip member has an extending portion for extending from a bottom portion of the clip member, a ball joint provided to a tip of the extending portion, a half-cylinder mounted on the cylinder, and a grasping portion, fixed on the half-cylinder, for grasping the ball joint. The universal joint further has a non-slip ring-shaped packing disposed between the ball joint and the grasping portion. The grasping portion is fixed on the half-cylinder toward a lower position from a central portion thereof.

Abstract: The present invention provides an electron beam apparatus for irradiating a sample with primary electron beams to detect secondary electron beams generated from a surface of the sample by the irradiation for evaluating the sample surface. In the electron beam apparatus, an electron gun has a cathode for emitting primary electron beams. The cathode includes a plurality of emitters for emitting primary electron beams, arranged apart from one another on a circle centered at an optical axis of a primary electro-optical system. The plurality of emitters are arranged such that when the plurality of emitters are projected onto a straight line parallel with a direction in which the primary electron beams are scanned, resulting points on the straight line are spaced at equal intervals.

Abstract: For programs selected as those whose label is to be created, a list of available templates is displayed on a arrangement processing screen 200 together with contents of EPG information acquired from an EPG information DB. The EPG information is displayed on a left screen 210 and the templates list is displayed on a right screen 220, so that one template desired to be applied is selected on the right screen 220, according to which template, one or a plurality of the EPG information pieces whose label is desired to be created is selected on the left screen 210. Templates 230, 240, 250, and 260 constitute a label set comprised of a plurality of labels, thus enabling creating labels by incorporating information pieces of specified items.

Abstract: To program video-recording (YES at S1), the process receives EPG data to accumulate information of a program to be video-recorded into an EPG information DB (S4). To create a label immediately (YES at S5), the process uses the accumulated EPG information to create the label by arranging a template arbitrarily (S9). To create a label of a program previously video-recorded (YES at S7), the process searches the EPG information DB for the EPG information associated with video-recorded data during video-recording (S8). If there is a plurality of programs for which a label is to be created, the process determines whether they constitute a program series and, if such is the case, can use a dedicated template to create the label. If the plurality of programs does not constitute a program series, the process can use the template or arbitrarily arrange it to create the label.

Abstract: The present invention provides an electron beam apparatus for irradiating a sample with primary electron beams to detect secondary electron beams generated from a surface of the sample by the irradiation for evaluating the sample surface. In the electron beam apparatus, an electron gun has a cathode for emitting primary electron beams. The cathode includes a plurality of emitters for emitting primary electron beams, arranged apart from one another on a circle centered at an optical axis of a primary electro-optical system. The plurality of emitters are arranged such that when the plurality of emitters are projected onto a straight line parallel with a direction in which the primary electron beams are scanned, resulting points on the straight line are spaced at equal intervals.

Abstract: An antenna unit comprises a hollow cylindrical member obtained by forming a flexible insulating film member into a hollow cylinder, an antenna pattern composed of at least one conductor formed at the hollow cylindrical member, and a board mounted with a low-noise amplifier. A hollow cylindrical cover case covers the hollow cylindrical member and the board. A cable having one end is connected to the low-noise amplifier and extends downward from a lower end of the cover case. The antenna unit further comprises an undercap attached to the lower end of the cover case and a packing press-fitted into the undercap. The board is inserted in the packing.

Abstract: An antenna unit comprises a hollow cylindrical member obtained by forming a flexible insulating film member into a hollow cylinder and an antenna pattern composed of four conductors formed on an inner peripheral surface of the hollow cylindrical member. A phase shifter pattern is formed on the inner peripheral surface of the hollow cylindrical member so as to be electrically connected to the antenna pattern. The antenna unit further comprises a hollow cylindrical cover case covering the hollow cylindrical member and a shield member provided so as to cover the phase shifter pattern.

Abstract: An antenna unit comprises a hollow cylindrical member obtained by forming a flexible insulating film member into a hollow cylinder. An antenna pattern composed of at least one conductor is formed at the hollow cylindrical member. The antenna unit further comprises a board mounted with a low-noise amplifier and a hollow cylindrical cover case covering the hollow cylindrical member and the board. In order to reduce the size in longitudinal direction, a part of the board is inserted into the inside of the hollow cylindrical member.

Abstract: An antenna unit comprises a hollow cylindrical member obtained by forming a flexible insulating film member into a hollow cylinder and an antenna pattern composed of a plurality of conductors formed on a peripheral surface of said hollow cylindrical member. A phase shifter pattern is formed on the peripheral surface of the hollow cylindrical member so as to be electrically connected to the antenna pattern. The antenna unit further comprises a hollow cylindrical cover case covering the hollow cylindrical member and a characteristic adjusting member for adjusting an antenna frequency characteristic.

Abstract: The present invention provides an electron beam apparatus for irradiating a sample with primary electron beams to detect secondary electron beams generated from a surface of the sample by the irradiation for evaluating the sample surface. In the electron beam apparatus, an electron gun has a cathode for emitting primary electron beams. The cathode includes a plurality of emitters for emitting primary electron beams, arranged apart from one another on a circle centered at an optical axis of a primary electro-optical system. The plurality of emitters are arranged such that when the plurality of emitters are projected onto a straight line parallel with a direction in which the primary electron beams are scanned, resulting points on the straight line are spaced at equal intervals.

Abstract: A packet switching system including at least one switching node or local unit each including a label conversion unit for accommodating a plurality of packet circuits and performing conversion into output port information of a switch based on a logic channel on a packet circuit, a self-routing switch for performing switching based on the output port information, and a control unit for terminating a control packet and performing the call processing function. A switching node or tandem unit is provided including at least one self-routing switch for interconnecting the local units. A device is provided for setting, between the tandem unit and a destination-side local unit, the same logic channel as that between an originating-side local unit operative for information transfer and the tandem unit in respect of a call destined for a local unit other than this local unit and a device.

Abstract: Provided is an electron beam apparatus in which an electron beam emitted from an electron gun is separated by a plurality of apertures, images of said apertures are reduced in more than two stages to form multi-beams on a sample surface and to scan said sample thereby, and secondary electrons from said sample are passed through an objective lens, where distances between said secondary electrons are extended, further through an E×B separator, where said secondary electrons are separated from the primary beam, and finally onto secondary electron detectors, where said secondary electrons are detected, wherein a lens defined in the second step for reducing said image of the aperture is composed of two stage lens and an enlarged image of the secondary electron is formed on a position between a first and a second lenses of said two stage lens, thereby reducing an aberration of the optical system for detecting the secondary electrons and allowing as many multi-beams as possible to be formed in the vicinity of a sing

Abstract: An electron beam apparatus, in which an electron beam emitted from an electron gun having a cathode and an anode is focused and irradiated onto a sample, and secondary electrons emanated from the sample are directed into a detector, the apparatus further comprising means for optimizing irradiation of the electron beam emitted from the electron gun onto the sample, the optimizing means may be two-stage deflectors disposed in proximity to the electron gun which deflects and directs the electron beam emitted in a specific direction so as to be in alignment with the optical axis direction of the electron beam apparatus, the electron beam emitted in the specific direction being at a certain angle with respect to the optical axis due to the fact that, among the crystal orientations of said cathode, a specific crystal orientation allowing a higher level of electron beam emission out of alignment with the optical axis direction.

Abstract: An oral cavity cleaning tool for the purpose of sterilization of the inside of oral cavity is provided that carries out efficient sterilization by using effective chlorine that is obtained through electrolysis. The oral cavity cleaning tool comprises a block handle, a head section extending from the block handle, a pair of electrodes provided on the head section and a power source that supplies electric current to the pair of electrodes, wherein the electrodes are put into contact with an oral fluid that contains chloride ions thereby to cause electric current to flow between the electrodes, so that the chloride ions are transformed into effective chlorine.

Abstract: An electron beam apparatus having a longer life time of cathode, and allowing a plurality of electron beams to be arranged adequately around an optical axis and five or more electron beams to be formed from a single electron gun. The electron beams emitted from a cathode made of ZrO/W (tungsten zirconium oxide) or a cathode made of carbide of transition metal to the off-optical axis directions may be converged on a sample to scan it. The apparatus includes a plate for reducing a vacuum conductance defined between the electron gun chamber side and the sample side, and apertures are formed through the plate at locations offset from the optical axis allowing for the passage of the electron beams. In order to evaluate a pattern on the sample, the electron beam emitted from the electron gun is incident to the sample surface via an objective lens.