Abstract: A transport arm of a semiconductor substrate transport apparatus carries a semiconductor substrate both into and out of a semiconductor substrate processing chamber in each operation of the transport arm, shortening operation time and prolonging the operating life of the apparatus. First and second arms are rotatably mounted at the leading end of an extensible arm of the semiconductor substrate transport apparatus, each including a substrate holding portion at the leading end for supporting a semiconductor substrate. The first and second arms are turned by an arm driving device while in the semiconductor substrate processing chamber.

Abstract: A semiconductor device producing apparatus includes a processing chamber having an opening and capable of being vacuum sealed, a carrier member including a substrate holder, an arm member, and a substrate carrier which vertically reciprocates in the opening of the processing chamber. A vacuum bellows is divided into an upper bellows and a lower bellows that are attached to a hollow flange therebetween. The upper bellows is a double structure having an inner bellows and an outer bellows. An air inlet is formed in the hollow flange and air is introduced through the inlet into a ring-shaped space between the inner bellows and the outer bellows. Therefore, thrust caused by the vacuum in the processing chamber and applied to the hollow flange is cancelled by the pressure of the introduced air whereby a load on the driving part is relieved. As a result, a small-sized and inexpensive semiconductor device producing apparatus is obtained.

Abstract: A five-speed automatic transmission includes a main transmission and an over-drive transmission of a front disposition type. The main transmission includes three sets of planetary gears, a clutch for engaging and disengaging speed-change elements of the planetary gear sets, and a brake for fixing and releasing the speed change elements, and provides for four forward speed ranges and one reverse speed range. In the over-drive transmission of a front disposition type, a speed change element of an over-drive planetary gear set connected to an input element of the main transmission is adapted to be engaged, disengaged and fixed for achieving either a directly coupled stage or an over-drive stage. The over-drive transmission releases the direct coupling for reverse driving operation. One of the clutches of the main transmission for achieving the directly coupled stage and one of the brakes for achieving the low speed stage are engageable in the reverse driving operation.

Abstract: Discloses a torque converter device with a light stator and turbine. The torque converter device comprises a converter cover, a turbine hub, a washer provided between the cover and the hub, and an oil flow passage provided between the washer and the turbine hub to lighten the stator.

Abstract: An automatic transmission comprising a torque converter and a change speed transmission having a plurality of planetary gearsets and friction elements is provided with an input shaft supported by a transmission case. On the input shaft is mounted a small-diameter first drum. In the first drum are mounted a first clutch having a clutch piston, friction plates, separate plates and a clutch hub. On the input shaft is further mounted a large diameter second drum, in which are disposed a second clutch having a clutch piston, friction plates, separate plates and a clutch hub.The friction plates and separate plates in the second drum are disposed radially outside on top of the friction plates and separate plates in the first drum.

Abstract: A transfer portion connected to the output shaft of a transmission portion has a front planetary gear unit the output element of which is connected to the front wheels and a rear planetary gear unit the output element of which is connected to the rear wheels, the two units being connected to each other by a common element. The output shaft of the transmission portion is directly connected to the input element of either of the planetary gear units, while the same is connected to the input element of the other planetary gear unit via a clutch C.sub.3. Furthermore, the input element of the other planetary gear unit is connected to the case via a brake B.sub.4. Therefore, the reduction function can be realized in cooperation with the two planetary gear units. As a result, the four-wheel drive device is lightened.

Abstract: A power delivery system, which includes an input shaft, an output shaft disposed concentrically with the input shaft, a fluid coupling and a power cut-off device interposed between the input and output shafts, and a case containing the fluid coupling, characterized in that the power cut-off device is located on a radially inner side of the fluid coupling, and an oil pump for supplying oil into the fluid coupling case is positioned within the case adjacent the radially inward periphery of the power cut-off device.