Abstract: In the present invention, an inspection contact structure is attached to the lower surface side of a circuit board in a probe card. In the inspection contact structure, elastic sheets with protruding conductive portions are respectively attached to both surfaces of a silicone substrate. The silicone substrate is formed with current-carrying paths passing therethrough in the vertical direction, and the sheet conductive portions are in contact with the current-carrying paths from above and below. The conductive portions on the upper side are in contact with connecting terminals of the circuit board. At the time of inspection of electric properties of a wafer, electrode pads on the wafer are pressed against the conductive portions on the lower side and thereby brought into contact with them.

Abstract: The probe card is configured such that the outline of the probe card is formed almost round shape and a plurality of connectors for being electrically connected with a tester are provided on the upper surface thereof along the outline. A substrate with many probes arranged thereon is provided on the bottom surface of the probe card. The substrate and the connectors are connected with one another via a flexible print wiring board.

Abstract: The present invention stably maintains contact between probe pins and a wafer. Screws are provided at a plurality of positions in an outer circumferential portion of a printed circuit board. On a lower surface side of the outer circumferential portion of the printed circuit board, a retainer plate is provided, and a bottom end surface of each of the screws is held down with the retainer plate. Turning each of the screws in a state where the bottom end surface of the each of the screws is held down with the retainer plate causes the outer circumferential portion of the printed circuit board to be moved up and down. Adjusting a height of the outer circumferential portion of the printed circuit board by turning each of the screws located at the plurality of positions enables parallelism of the entire probe card with respect to the wafer to be adjusted.

Abstract: A fluororubber sealant composition includes 100 parts by weight of a fluororubber, which is a copolymer having a cross-linking site derived from a bromine-containing and/or iodine-containing compound, capable of crosslinking with peroxide and having a component unit composition comprising 20 to 23% by mol of a perfluoromethyl vinylether component unit, 60 to 70% by mol of a vinylidene fluoride component unit, 10 to 20% by mol of a tetrafluoroethylene component unit, 0 to 10% by mol of hexafluoropropylene component unit (based on 100% of the total of the above component units), and a small amount of a bromide and/or iodide unsaturated fluorohydrocarbon component unit as a crosslinking site based on 100% by mol of the total of the above component units; and further comprising, based on 100 parts by weight of the fluororubber, 2 to 50 parts by weight of a bituminous fine powder; 0.5 to 6 parts by weight of an organoperoxide; and 1 to 10 parts by weight of a polyfunctional monomer.

Abstract: In the present invention, an inspection contact structure is attached to the lower surface side of a circuit board in a probe card. In the inspection contact structure, elastic sheets with protruding conductive portions are respectively attached to both surfaces of a silicon substrate. The silicon substrate is formed with current-carrying paths passing therethrough in the vertical direction, and the sheet conductive portions are in contact with the current-carrying paths from above and below. The conductive portions on the upper side are in contact with connecting terminals of the circuit board. At the time of inspection of electric properties of a wafer, electrode pads on the wafer are pressed against the conductive portions on the lower side and thereby brought into contact with them.

Abstract: A fluororubber sealant includes 100 parts by weight of a fluororubber, which is a copolymer having a cross-linking site derived from a bromine-containing and/or iodine-containing compound, capable of crosslinking with peroxide and having a component unit composition comprising 20 to 23% by mol of a perfluoromethyl vinylether component unit, 60 to 70% by mol of a vinylidene fluoride component unit, 10 to 20% by mol of a tetrafluoroethylene component unit, 0 to 10% by mol of hexafluoropropylene component unit (based on 100% of the total of the above component units), and a small amount of a bromide and/or iodide unsaturated fluorohydrocarbon component unit as a crosslinking site based on 100% by mol of the total of the above component units; and further comprising, based on 100 parts by weight of the fluororubber, 2 to 50 parts by weight of a bituminous fine powder; 0.5 to 6 parts by weight of an organoperoxide; and 1 to 10 parts by weight of a polyfunctional monomer.

Abstract: A butyl rubber composition, which comprises 100 parts by weight of butyl rubber and 30 to 150 parts be weight of carbon black having a CTAB specific surface area of 30 to 100 m2/g and preferably further contains 10 to 100 parts by weight of a flat filler having an average particle size of 1 to 40 &mgr;m and an aspect ratio of 5 or more and 0.05 to 5 parts by weight of a coupling agent of organometallic compound is provided. The butyl rubber composition can give vulcanization molded products capable of effectively sealing a carbon dioxide refrigerant without generation of blisters, etc. therein.

Abstract: A butyl rubber composition, which comprises 100 parts by weight of butyl rubber and 30 to 150 parts by weight of carbon black having a CTAB specific surface area of 30 to 100 m2/g and preferably further contains 10 to 100 parts by weight of a flat filler having an average particle size of 1 to 40 &mgr;m and an aspect ratio of 5 or more and 0.05 to 5 parts by weight of a coupling agent of organometallic compound is provided. The butyl rubber composition can give vulcanization molded products capable of effectively sealing a carbondioxide refrigerant without generation of blisters, etc therein.

Abstract: A conductor pattern test apparatus comprises a DC voltage power source for applying a predetermined DC voltage to an end of one of a plurality of conductor patterns arranged in parallel with each other, a current measurement circuit for measuring a current flowing to another conductor pattern adjacent to the one of the conductor patterns via the end by the DC voltage power source to the end, and a short-circuit position calculation circuit for calculating a resistance value from the end to a short-circuited part of the two conductor patterns adjacent to each other, based on the current value measured by the current measurement circuit and the voltage value applied by the DC power source, and locating a position of the short-circuited part based on the calculated resistance value and a resistance value of a conductor pattern having no short-circuit. A disconnect location is also obtained.

Abstract: A conductor pattern test apparatus comprises a DC voltage power source for applying a predetermined DC voltage to an end of one of a plurality of conductor patterns arranged in parallel with each other, a current measurement circuit for measuring a current flowing to another conductor pattern adjacent to the one of the conductor patterns via the end by the DC voltage power source to the end, and a short-circuit position calculation circuit for calculating a resistance value from the end to a short-circuited part of the two conductor patterns adjacent to each other, based on the current value measured by the current measurement circuit and the voltage value applied by the DC power source, and locating a position of the short-circuited part based on the calculated resistance value and a resistance value of a conductor pattern having no short-circuit. A disconnection position calculator calculates a capacitance value from voltage values.

Abstract: A fuel cell power plant comprised of a fuel cell main unit to which a fuel is supplied, a containment vessel for housing the fuel cell main unit; a purge gas supply pipe for introducing a purge gas which excludes combustion elements in the containment vessel; and a combustion element removal apparatus which is provided with the purge gas supply pipe and which effectively removes combustion elements in the purge gas before the purge gas is introduced in the containment vessel. The fuel call power plant may include a fuel reformer having at least a reforming space, and may use a reformed fuel gas or a used fuel gas as the purge gas from which the combustion elements are removed. The fuel reformer may include a burner for a reforming reaction, and in this case, the power plant may use a burner exhaust gas as the purge gas from which the combustion elements are removed.

Abstract: A fuel cell powerplant system comprises a fuel cell that houses in an airtight containment vessel a cell stack formed from many layers of individual fuel cells, a cooling water loop that cools the fuel cell, and a steam separator that is disposed on the side of an outlet of a fuel cell of the cooling loop and that discharges steam, and wherein one portion of the steam discharged from the steam separator is introduced via a purge steam line to the containment vessel or the cathode of the fuel cell for the purpose of purging containment vessel.

Abstract: A fuel cell generation system comprises a cell stack consisting of a plurality of cells, said cell having a fuel electrode, an oxidizer electrode, and an electrolyte layer located between said both electrodes, a fuel cell main body having a plurality of cooling plates for absorbing heat generated in said cell, said plate being located between said cells, and a cooling unit for supplying a coolant through said cooling plate. The system further provides a reference voltage source for supplying a reference voltage and a determining unit for comparing an output voltage of at least one cell located at the upper portion of the cell main body with the reference voltage and determining if an abnormal state occurs in the cooling unit based on the comparing result. The reference voltage is picked up out of a part of the cell stack.