Abstract: Electric parts including semiconductor substrates, glass substrates and the like are washed with various cleaning solutions. After the cleaning, said parts are cleaned with either anolyte or catholyte electrolytic ionized water (EIW) produced from deionized water.

Abstract: An electrolytic ionized water (EIW) producing apparatus comprises an anode, a cathode, an electrolyzer which includes an anode chamber, a cathode chamber and an intermediate chamber, inlet lines for supplying an influent water to the three chambers, and outlet lines for discharging effluent water from the chambers. Further, an acidic electrolyte supplying unit is connected to the outlet line from the anode chamber, and an alkaline electrolyte supplying unit is connected to the outlet line from the cathode chamber. The electrolyte supplying units can selectively control at least the dosage level of elelctrolyte(s) to be supplied, the composition and concentration of the electrolyte(s) or pH of EIW after the addition of the electrolyte(s).

Abstract: In an electrolytic ionized water (EIW) producing apparatus, a three-chamber electrolyzer includes an anode chamber, a cathode chamber and an intermediate chamber. An influent such as deionized water is supplied to these chamber via inlet lines. Further an electrolyte supplying units are connected to the inlet lines of the anode chamber and the inlet line of the cathode chamber.