Abstract: A system for performing digital lithography onto a subject is provided. The system utilizes pixel panels to generate pixel patterns. Mirrors are utilized to divert and align the pixel elements forming the patterns onto a subject. A gradient lens system positioned between the panels and the subject simultaneously directs the pixel elements to the subject. The pixel elements may overlapping, adjacent, or spaced as desired. The pixel elements may be directed to multiple surfaces simultaneously. One or more point array units may be utilized in the system to achieve higher resolution.

Abstract: A method and system for transporting objects without causing harmful physical contact is disclosed. The method and system can be used in a manufacturing process for fabricating spherical shaped semiconductor devices. The method cools the spherical shaped device and applies moisture such as de-ionized water. The moisture forms a coat of ice on an outer surface of the cooled spherical shaped device. The spherical shaped device with the coat of ice can then be easily transported, the ice preventing any harmful physical contact to the device.

Abstract: A system and method for polishing spherical shaped devices is disclosed. The system includes a carrier and an enclosure. The carrier has two projections so that when a device is placed between the projections, it contacts the carrier at two contact points. The enclosure matingly engages with the carrier so that it also contacts each device at two contact points. A movement system, such as a motor, provides relative movement between the carrier and the enclosure so that the four contact points polish each device. Also, the relative movement moves each device so that the device's entire outer surface is polished by the apparatus.

Abstract: A system and method for holding and aligning spherical shaped devices is disclosed. The system aligns spherical shaped devices that have at least two hollows formed on an outer surface thereof. The system includes a first knob for aligning with the first hollow and a second knob for aligning with the second hollow. The first knob is relatively small, as compared with the first hollow, while the second knob is relatively large, as compared with the second hollow. The system may also include a third knob for securing the spherical shaped device with the first and second knobs.

Abstract: A processing apparatus and method for positioning a device, in particular a spherical-shaped semiconductor device, is disclosed. The device to be processed is contained in a carrier fluid which is used to control the movement of the device. A physical deformity, previously induced onto the device, causes the device to align itself in a calculable manner within the fluid so as to reduce drag. The location and particular shape of the deformity define the specific alignment the device will achieve. Once roughly aligned, a plurality of energy sources project device shadows upon sensors that are sensitive to the energy source being used. The information acquired by the sensors is then used to calculate the position of the device.

Abstract: An exposure apparatus for a ball shaped substrate for manufacturing semiconductor devices. An exposure apparatus continually exposes light through a mask having a specified pattern to a surface of a ball shaped substrate. Holders each holding a ball shaped substrate are attached to an annular member that rotates continuously. Optics equipment guide the light from a light source to a surface of the substrate through a mask having a specified pattern. At the same time, optics equipment scans the light emission end to maintain the location relationship of the substrate with the annular member. The substrate is exposed while moving continuously.

Abstract: Apparatus and method for contactless capturing and transporting a restrained spherical-shaped semiconductor integrated circuit located within a transport tube or other component of a spherical-shaped semiconductor integrated circuit manufacturing system and restrained by a fluid flow within the transport tube or other component of the spherical-shaped semiconductor integrated circuit manufacturing system. The apparatus includes a diverging nozzle having an inlet aperture, an outlet aperture formed on an exterior side surface thereof and an interior sidewall which defines a generally frusto-conical shaped interior passageway through which gas flows. By repositioning the apparatus from a first position to a second position above, below or to one side of the first position, the restrained spherical object may be captured at an equilibrium position relative to the diverging nozzle.

Abstract: Apparatus and method for contactless capturing and transporting a restrained spherical-shaped semiconductor integrated circuit located within a transport tube or other component of a spherical-shaped semiconductor integrated circuit manufacturing system and restrained by a fluid flow within the transport tube or other component of the spherical-shaped semiconductor integrated circuit manufacturing system. The apparatus includes a diverging nozzle having an inlet aperture, an outlet aperture formed on an exterior side surface thereof and an interior sidewall which defines a generally frusto-conical shaped interior passageway through which gas flows. By repositioning the apparatus from a first position to a second position above, below or to one side of the first position, the restrained spherical object may be captured at an equilibrium position relative to the diverging nozzle.

Abstract: Sub-micron particles in fluid such as ultrapure water are detected or monitored by a simple apparatus in which a light beam from a coherent light source (1) is converged (2) in such a manner that the light beam is focussed in a stream (3) of particle-containing fluid, the light passed through the stream and diffracted by the particles is received by a photo-detector (4) which is positioned at an opposite side of the coherent light source with respect to the stream and substantially on an optical axis of the light beam, so that the number of particles in the stream is counted from electrical signals emitted by the photo-detector.