Patents by Inventor Takatoshi ORUI

Takatoshi ORUI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220199412
    Abstract: An etching method in accordance with the present disclosure includes providing a substrate, which includes a silicon-containing film, in a chamber; and etching the silicon-containing film with a chemical species in plasma generated from a process gas supplied in the chamber. The process gas includes a phosphorus gas component and a fluorine gas component.
    Type: Application
    Filed: March 11, 2022
    Publication date: June 23, 2022
    Applicant: Tokyo Electron Limited
    Inventors: Takahiro YOKOYAMA, Maju TOMURA, Yoshihide KIHARA, Ryutaro SUDA, Takatoshi ORUI
  • Patent number: 11367965
    Abstract: Disclosed is a liquid crystal panel of a scanning antenna including a transmission and/or reception region in which a plurality of antenna units are arrayed, and a non-transmission and/or reception region, the liquid crystal panel including: a TFT substrate provided with a first dielectric substrate, a TFT supported by the first dielectric substrate, a gate bus line, a source bus line, and a patch electrode; a slot substrate provided with a second dielectric substrate, and a slot electrode formed on a first main surface of the second dielectric substrate and including a slot arranged so as to correspond to the patch electrode; a liquid crystal layer provided between the TFT substrate and the slot substrate and including a plurality of liquid crystal regions; and a plurality of sealing portions that respectively surround the plurality of liquid crystal regions and bond the TFT substrate and the slot substrate together.
    Type: Grant
    Filed: August 3, 2017
    Date of Patent: June 21, 2022
    Assignee: SHARP KABUSHIKI KAISHA
    Inventors: Tadashi Ohtake, Takatoshi Orui, Wataru Nakamura, Kiyoshi Minoura, Masanobu Mizusaki
  • Publication number: 20220157610
    Abstract: An etching method in accordance with the present disclosure includes providing a substrate, which includes a silicon-containing film, in a chamber; and etching the silicon-containing film with a chemical species in plasma generated from a process gas supplied in the chamber. The process gas includes a phosphorus gas component and a fluorine gas component.
    Type: Application
    Filed: February 8, 2022
    Publication date: May 19, 2022
    Applicant: Tokyo Electron Limited
    Inventors: Takahiro YOKOYAMA, Maju TOMURA, Yoshihide KIHARA, Ryutaro SUDA, Takatoshi ORUI
  • Publication number: 20220148884
    Abstract: An etching method that is disclosed includes providing a substrate into a chamber. The substrate has a silicon-containing film including a silicon nitride film. The etching method includes generating plasma from a processing gas in the chamber to etch the silicon-containing film. The processing gas includes a fluorine-containing gas and a boron-containing gas. In the etching, a temperature of a substrate support supporting the substrate is set to a temperature of less than 0° C.
    Type: Application
    Filed: November 3, 2021
    Publication date: May 12, 2022
    Applicant: Tokyo Electron Limited
    Inventors: Takatoshi ORUI, Ryutaro SUDA, Maju TOMURA, Yoshihide KIHARA
  • Publication number: 20220093367
    Abstract: A disclosed etching method includes (a) forming a protective film on a surface in a chamber. The etching method further includes (b) etching an etch film of a substrate by using hydrogen fluoride within the chamber. The substrate includes the etch film and a mask provided on the etch film. The protective film is formed of the same type of material as a material of the mask.
    Type: Application
    Filed: September 9, 2021
    Publication date: March 24, 2022
    Applicant: Tokyo Electron Limited
    Inventors: Koki TANAKA, Ryu NAGAI, Takatoshi ORUI, Ryutaro SUDA
  • Patent number: 11024960
    Abstract: A scanning antenna includes a TFT substrate including a plurality of TFTs supported by a first dielectric substrate and a plurality of patch electrodes, a slot substrate including a slot electrode supported by a second dielectric substrate, a liquid crystal layer provided between the TFT substrate and the slot substrate, and a reflective conductive plate disposed opposing the second dielectric substrate across a dielectric layer. The slot electrode includes a plurality of slots disposed corresponding to the plurality of patch electrodes, each patch electrode is connected to a drain of the corresponding TFT, the slot electrode includes Cu layers, and lower metal layers and/or an upper metal layer, and the lower metal layer and/or the upper metal layer decrease about a half or more of a tensile stress of the Cu layer.
    Type: Grant
    Filed: January 11, 2018
    Date of Patent: June 1, 2021
    Assignee: SHARP KABUSHIKI KAISHA
    Inventors: Takatoshi Orui, Tadashi Ohtake, Wataru Nakamura, Kiyoshi Minoura, Kenichi Kitoh
  • Publication number: 20210143028
    Abstract: An etching method enables plasma etching of a silicon-containing film with reduced lateral etching. The etching method includes providing a substrate in a chamber included in a plasma processing apparatus. The substrate includes a silicon-containing film. The etching method further includes setting a flow rate proportion of a phosphorus-containing gas with respect to a total flow rate of the process gas so as to establish a predetermined ratio of an etching rate of an alternate stack of a silicon oxide film and a silicon nitride film to an etching rate of the silicon oxide film.
    Type: Application
    Filed: November 6, 2020
    Publication date: May 13, 2021
    Applicant: Tokyo Electron Limited
    Inventors: Takahiro YOKOYAMA, Maju TOMURA, Yoshihide KIHARA, Ryutaro SUDA, Takatoshi ORUI
  • Publication number: 20210143016
    Abstract: An etching method of an exemplary embodiment involves providing a substrate in a chamber of a plasma treatment system. The substrate includes a silicon-containing film. The method further involves etching the silicon-containing film by a chemical species in plasma generated from a process gas in the chamber. The process gas contains a halogen gas component and phosphorous gas component.
    Type: Application
    Filed: July 16, 2020
    Publication date: May 13, 2021
    Applicant: Tokyo Electron Limited
    Inventors: Takahiro YOKOYAMA, Maju TOMURA, Yoshihide KIHARA, Ryutaro SUDA, Takatoshi ORUI
  • Patent number: 10998629
    Abstract: A liquid crystal panel of a scanning antenna includes a TFT substrate provided with a first dielectric substrate, a TFT supported by the first dielectric substrate, a gate bus line, a source bus line, and a patch electrode; a slot substrate provided with a second dielectric substrate, and a slot electrode that is formed on a first main surface of the second dielectric substrate and includes a slot arranged so as to correspond to the patch electrode; and a liquid crystal layer provided between the TFT substrate and the slot substrate. One of the TFT substrate and the slot substrate includes a projecting layer formed of resin and disposed on the liquid crystal layer side of the patch electrode or the slot electrode in a region surrounded by a sealing portion. The projecting layer is arranged so as not to overlap the patch electrode or the slot.
    Type: Grant
    Filed: July 28, 2017
    Date of Patent: May 4, 2021
    Assignee: SHARP KABUSHIKI KAISHA
    Inventors: Tadashi Ohtake, Takatoshi Orui, Wataru Nakamura, Kiyoshi Minoura, Masanobu Mizusaki
  • Publication number: 20210098875
    Abstract: A liquid crystal panel of a scanning antenna includes a TFT substrate provided with a first dielectric substrate, a TFT supported by the first dielectric substrate, a gate bus line, a source bus line, and a patch electrode; a slot substrate provided with a second dielectric substrate, and a slot electrode that is formed on a first main surface of the second dielectric substrate and includes a slot arranged so as to correspond to the patch electrode; and a liquid crystal layer provided between the TFT substrate and the slot substrate. One of the TFT substrate and the slot substrate includes a projecting layer formed of resin and disposed on the liquid crystal layer side of the patch electrode or the slot electrode in a region surrounded by a sealing portion. The projecting layer is arranged so as not to overlap the patch electrode or the slot.
    Type: Application
    Filed: July 28, 2017
    Publication date: April 1, 2021
    Inventors: TADASHI OHTAKE, TAKATOSHI ORUI, WATARU NAKAMURA, KIYOSHI MINOURA, MASANOBU MIZUSAKI
  • Publication number: 20200381822
    Abstract: A scanning antenna includes a TFT substrate including a plurality of TFTs supported by a first dielectric substrate and a plurality of patch electrodes, a slot substrate including a slot electrode supported by a second dielectric substrate, a liquid crystal layer provided between the TFT substrate and the slot substrate, and a reflective conductive plate disposed opposing the second dielectric substrate across a dielectric layer. The slot electrode includes a plurality of slots disposed corresponding to the plurality of patch electrodes, each patch electrode is connected to a drain of the corresponding TFT, the slot electrode includes Cu layers, and lower metal layers and/or an upper metal layer, and the lower metal layer and/or the upper metal layer decrease about a half or more of a tensile stress of the Cu layer.
    Type: Application
    Filed: January 11, 2018
    Publication date: December 3, 2020
    Inventors: Takatoshi ORUI, Tadashi OHTAKE, Wataru NAKAMURA, Kiyoshi MINOURA, Kenichi KITOH
  • Patent number: 10840266
    Abstract: The scanning antenna (1000) is a scanning antenna in which antenna units (U) are arranged, the scanning antenna including: a TFT substrate (101) including: a first dielectric substrate (1), TFTs, gate bus lines, source bus lines, and patch electrodes (15); a slot substrate (201) including: a second dielectric substrate (51), and a slot electrode (55); a liquid crystal layer (LC) provided between the TFT substrate and the slot substrate; and a reflective conductive plate (65). The slot electrode includes slots (57) arranged in correspondence with the plurality of patch electrodes, and a thickness of the second dielectric substrate (51) is smaller than the thickness of the first dielectric substrate (1) at least in a region where the antenna units (U) are arranged.
    Type: Grant
    Filed: February 13, 2017
    Date of Patent: November 17, 2020
    Assignee: SHARP KABUSHIKI KAISHA
    Inventors: Takatoshi Orui, Makoto Nakazawa, Wataru Nakamura, Kiyoshi Minoura, Tadashi Ohtake, Fumiki Nakano
  • Patent number: 10777887
    Abstract: A scanning antenna includes a TFT substrate including a first dielectric substrate, a plurality of TFTs, a plurality of gate bus lines, a plurality of source bus lines, and a plurality of patch electrodes, a slot substrate including a second dielectric substrate and a slot electrode (55) formed on the first main surface of the second dielectric substrate, a liquid crystal layer provided between the TFT substrate and the slot substrate, and a reflective conductive plate provided opposing a second main surface opposite to the first main surface of the second dielectric substrate via a dielectric layer, and the slot electrode includes a plurality of slots arranged in accordance with the plurality of patch electrodes, and a groove configured to divide the slot electrode into two or more sections, and the TFT substrate includes an opposing metal part arranged opposing the groove, and when viewed from a normal line direction of the first dielectric substrate, the groove is covered with the opposing metal part in th
    Type: Grant
    Filed: October 7, 2016
    Date of Patent: September 15, 2020
    Assignee: SHARP KABUSHIKI KAISHA
    Inventors: Takatoshi Orui, Kiyoshi Minoura, Shigeyasu Mori, Makoto Nakazawa, Fumiki Nakano
  • Publication number: 20200279873
    Abstract: The scanning antenna (1000) is a scanning antenna in which antenna units (U) are arranged, the scanning antenna including: a TFT substrate (101) including: a first dielectric substrate (1), TFTs, gate bus lines, source bus lines, and patch electrodes (15); a slot substrate (201) including: a second dielectric substrate (51), and a slot electrode (55); a liquid crystal layer (LC) provided between the TFT substrate and the slot substrate; and a reflective conductive plate (65). The slot electrode includes slots (57) arranged in correspondence with the plurality of patch electrodes, and a thickness of the second dielectric substrate (51) is smaller than the thickness of the first dielectric substrate (1) at least in a region where the antenna units (U) are arranged.
    Type: Application
    Filed: February 13, 2017
    Publication date: September 3, 2020
    Inventors: TAKATOSHI ORUI, MAKOTO NAKAZAWA, WATARU NAKAMURA, KIYOSHI MINOURA, TADASHI OHTAKE, FUMIKI NAKANO
  • Patent number: 10756409
    Abstract: A scanning antenna including: a TFT substrate including a first dielectric substrate, a TFT, a gate bus line, a source bus line, and a patch electrode; a slot substrate including a second dielectric substrate and a slot electrode formed on a first main surface of the second dielectric substrate; a liquid crystal layer provided between the TFT substrate and the slot substrate; and a reflective conductive plate. The scanning antenna has a tiling structure in which a plurality of scanning antenna portions are bonded together, and each of the plurality of scanning antenna portions includes a TFT substrate portion and a slot substrate portion.
    Type: Grant
    Filed: October 6, 2016
    Date of Patent: August 25, 2020
    Assignee: SHARP KABUSHIKI KAISHA
    Inventors: Kiyoshi Minoura, Shigeyasu Mori, Makoto Nakazawa, Fumiki Nakano, Takatoshi Orui
  • Patent number: 10720701
    Abstract: A scanning antenna is a scanning antenna in which antenna units U are arranged, and includes a TFT substrate including a first dielectric substrate, TFTs, a plurality of gate bus lines, source bus lines, and patch electrodes; a slot substrate including a second dielectric substrate, and a slot electrode formed on a first main surface of the second dielectric substrate; a liquid crystal layer LC provided between the TFT substrate and the slot substrate; and a reflective conductive plate provided opposing a second main surface of the second dielectric substrate opposite to the first main surface via a dielectric layer. The slot electrode includes slots arranged in correspondence with the plurality of patch electrodes, and each of the patch electrodes is connected to a drain of a corresponding TFT and is supplied with a data signal from a corresponding source bus line while selected by a scanning signal supplied from the gate bus line of the corresponding TFT.
    Type: Grant
    Filed: October 6, 2016
    Date of Patent: July 21, 2020
    Assignee: SHARP KABUSHIKI KAISHA
    Inventors: Fumiki Nakano, Kiyoshi Minoura, Shigeyasu Mori, Makoto Nakazawa, Takatoshi Orui
  • Patent number: 10637156
    Abstract: A scanning antenna includes a TFT substrate including a first dielectric substrate, TFTs supported by the first dielectric substrate, gate bus lines, source bus lines, and patch electrodes; a slot substrate including a second dielectric substrate, and a slot electrode formed on a first main surface of the second dielectric substrate; a liquid crystal layer provided between the TFT substrate and the slot substrate; and a reflective conduction plate facing a second main surface of the second dielectric substrate—on a side opposite the first main surface with a dielectric layer therebetween. The slot electrode includes slots disposed corresponding to the patch electrodes, and each of the patch electrodes is connected to the drain of a corresponding TFT.
    Type: Grant
    Filed: May 19, 2017
    Date of Patent: April 28, 2020
    Assignee: SHARP KABUSHIKI KAISHA
    Inventors: Tadashi Ohtake, Kiyoshi Minoura, Makoto Nakazawa, Takatoshi Orui, Wataru Nakamura
  • Patent number: 10498019
    Abstract: A scanning antenna (1000) in which a plurality of antenna units (U) are arranged, the scanning antenna including: a TFT substrate (101) including a first dielectric substrate (1), TFTs, gate bus lines, source bus lines, and patch electrodes (15); a slot substrate (201) including a second dielectric substrate (51) and a slot electrode (55) formed on a first main surface of the second dielectric substrate; a liquid crystal layer (LC) provided between the TFT substrate and the slot substrate; and a reflective conductive plate (65) disposed opposing via a dielectric layer (54) a second main surface opposite to the first main surface of the second dielectric substrate, (51) wherein the slot electrode includes slots disposed corresponding to the respective patch electrodes, and a heater part (68) is further provided on the outside of the TFT substrate (101) or on the outside of the slot substrate (201).
    Type: Grant
    Filed: October 17, 2016
    Date of Patent: December 3, 2019
    Assignee: SHARP KABUSHIKI KAISHA
    Inventors: Tadashi Ohtake, Kiyoshi Minoura, Makoto Nakazawa, Takatoshi Orui, Wataru Nakamura, Fumiki Nakano
  • Publication number: 20190190162
    Abstract: Disclosed is a liquid crystal panel of a scanning antenna including a transmission and/or reception region in which a plurality of antenna units are arrayed, and a non-transmission and/or reception region, the liquid crystal panel including: a TFT substrate provided with a first dielectric substrate, a TFT supported by the first dielectric substrate, a gate bus line, a source bus line, and a patch electrode; a slot substrate provided with a second dielectric substrate, and a slot electrode formed on a first main surface of the second dielectric substrate and including a slot arranged so as to correspond to the patch electrode; a liquid crystal layer provided between the TFT substrate and the slot substrate and including a plurality of liquid crystal regions; and a plurality of sealing portions that respectively surround the plurality of liquid crystal regions and bond the TFT substrate and the slot substrate together.
    Type: Application
    Filed: August 3, 2017
    Publication date: June 20, 2019
    Applicant: SHARP KABUSHIKI KAISHA
    Inventors: TADASHI OHTAKE, TAKATOSHI ORUI, WATARU NAKAMURA, KIYOSHI MINOURA, MASANOBU MIZUSAKI
  • Publication number: 20190148838
    Abstract: A scanning antenna includes a TFT substrate including a first dielectric substrate, TFTs supported by the first dielectric substrate, gate bus lines, source bus lines, and patch electrodes; a slot substrate including a second dielectric substrate, and a slot electrode formed on a first main surface of the second dielectric substrate; a liquid crystal layer provided between the TFT substrate and the slot substrate; and a reflective conduction plate facing a second main surface of the second dielectric substrate—on a side opposite the first main surface with a dielectric layer therebetween. The slot electrode includes slots disposed corresponding to the patch electrodes, and each of the patch electrodes is connected to the drain of a corresponding TFT.
    Type: Application
    Filed: May 19, 2017
    Publication date: May 16, 2019
    Applicants: SHARP KABUSHIKI KAISHA, SHARP KABUSHIKI KAISHA
    Inventors: TADASHI OHTAKE, KIYOSHI MINOURA, MAKOTO NAKAZAWA, TAKATOSHI ORUI, WATARU NAKAMURA