Abstract: A stage includes a first member made of a material having a density of 5.0 g/cm3 or less, and a second member joined to the first member. The second member is made of a material having a linear expansion coefficient of 5.0×10?6/K or less and a thermal conductivity of 100 W/mK or more. A flow passage for a temperature control medium is formed in at least one of the first member and the second member.

Abstract: An animal appearance determination device comprises: an image data analysis unit which acquires a captured image including cattle being raised in a cattle barn and acquires, as first positional information, a position of an individual cattle in the cattle barn calculated on the basis of an image of the individual cattle in the captured image; a positional data analysis unit which acquires identification information obtained from a sensor device attached to the individual cattle and second positional information indicative of the position of the individual cattle in the cattle barn; and an individual recognition unit which, if the difference between the first positional information and the second positional information is determined to be not more than a predetermined threshold, records the first positional information and the identification information on the second positional information in association with the each other.

Abstract: This animal behavior recording device is provided with a processing unit which acquires animal behavior information, that is, information indicating the behavior of an animal, acquires animal position information, that is, information indicating the positions where the animal is present, estimates the behavior of the animal on the basis of the animal behavior information and the animal position information, and records the behavior in time series. Acceleration data acquired from an acceleration sensor disposed on the animal and/or angular velocity data acquired from an angular velocity sensor disposed on the animal can be used as the animal behavior information, and the processing unit is capable of estimating the behavior of the animal on the basis of one of the animal behavior information and the animal position information and correcting the estimated behavior by using the other information.

Abstract: A data collection device comprises: a data acquisition unit that continuously acquires position information indicating an activity amount of a cow; an identification unit that analyzes the position information of a prescribed time zone and identifies a trend pertaining to changes over time in the activity amount; and a data acquisition amount adjustment unit that adjusts the amount of acquired position information on the basis of the identified trend pertaining to changes over time in the activity amount. The data acquisition unit acquires the position information in line with the acquisition amount adjusted by the data acquisition amount adjustment unit.

Abstract: A method of additively manufacturing a high-purity silicon includes: turning an interior of a vacuum processing container into a high vacuum state; heating a base plate disposed in the interior of the vacuum processing container; depositing silicon powder on the base plate; forming a molten silicon layer by scanning an energy beam on the base plate; and forming a solidified silicon layer by cooling the molten silicon layer, wherein a cycle including the depositing the silicon powder, the forming the molten silicon layer, and the forming the solidified silicon layer is repeatedly executed.

Abstract: A substrate processing method of processing a substrate includes: forming a modification layer at least on a surface layer of a rear surface of the substrate or within the substrate by radiating a laser beam; and processing a front surface of the substrate in a state that the rear surface of the substrate is held. A modification device includes a laser irradiation unit configured to form a modification layer at least on a surface layer of the rear surface of the substrate or within the substrate by radiating a laser beam.

Abstract: A stage includes a first member made of a material having a density of 5.0 g/cm3 or less, and a second member joined to the first member. The second member is made of a material having a linear expansion coefficient of 5.0×10?6/K or less and a thermal conductivity of 100 W/mK or more. A flow passage for a temperature control medium is formed in at least one of the first member and the second member.

Abstract: A film forming apparatus is disclosed. The apparatus comprises a chamber; an exhaust unit configured to reduce the pressure in the chamber to a predetermined vacuum level; a holder disposed in the chamber and configured to hold a film forming target member on which a film is to be formed; a supply unit configured to supply a film forming material containing silicon to a surface of the film forming target member; and a heat source configured to perform heating at the predetermined vacuum level to melt the supplied film forming material.

Abstract: A film forming apparatus is disclosed. The apparatus comprises a chamber; an exhaust unit configured to reduce the pressure in the chamber to a predetermined vacuum level; a holder disposed in the chamber and configured to hold a film forming target member on which a film is to be formed; a supply unit configured to supply a film forming material containing silicon to a surface of the film forming target member; and a heat source configured to perform heating at the predetermined vacuum level to melt the supplied film forming material.

Abstract: A bonding apparatus includes a first holder configured to hold a first substrate divided into multiple chips with a tape and a ring frame therebetween, the first substrate being attached to the tape, and an edge of the tape being attached to the ring frame; a second holder configured to hold a second substrate, which is disposed on an opposite side to the tape with respect to the first substrate therebetween, while maintaining a distance from the first substrate; and a pressing device configured to press the multiple chips one by one with the tape therebetween to press and bond the corresponding chip to the second substrate.

Abstract: A gear housing for an electric power steering device has a front-side housing and a rear-side housing. The front-side housing has a worm wheel housing portion, a worm housing portion, and reinforcing ribs. The worm wheel housing portion has a worm wheel cylindrical portion and a ring shaped worm wheel bottom portion bent inward in a radial direction from a front end portion of the worm wheel cylindrical portion. The worm housing portion is provided on a part in a circumferential direction of an outer-diameter side portion of the worm wheel housing portion. The reinforcing ribs are provided on a front side surface of the front-side housing, extend in a direction in which an engagement reaction force acts between the worm wheel and a worm of the worm shaft, and span between the worm housing portion and the worm wheel bottom portion.

Abstract: A film forming apparatus is disclosed. The apparatus comprises a chamber; an exhaust unit configured to reduce the pressure in the chamber to a predetermined vacuum level; a holder disposed in the chamber and configured to hold a film forming target member on which a film is to be formed; a supply unit configured to supply a film forming material containing silicon to a surface of the film forming target member; and a heat source configured to perform heating at the predetermined vacuum level to melt the supplied film forming material.

Abstract: A stage includes a first member made of a material having a density of 5.0 g/cm3 or less, and a second member joined to the first member. The second member is made of a material having a linear expansion coefficient of 5.0×10?6/K or less and a thermal conductivity of 100 W/mK or more. A flow passage for a temperature control medium is formed in at least one of the first member and the second member.

Abstract: A substrate processing method of processing a substrate includes: forming a modification layer at least on a surface layer of a rear surface of the substrate or within the substrate by radiating a laser beam; and processing a front surface of the substrate in a state that the rear surface of the substrate is held. A modification device includes a laser irradiation unit configured to form a modification layer at least on a surface layer of the rear surface of the substrate or within the substrate by radiating a laser beam.

Abstract: A member to be used in a substrate processing apparatus is provided. The member is formed of aluminum containing silicon, and the silicon has a particle diameter of 1 ?m or less.

Abstract: A gear housing for an electric power steering device has a front-side housing and a rear-side housing. The front-side housing has a worm wheel housing portion, a worm housing portion, and reinforcing ribs. The worm wheel housing portion has a worm wheel cylindrical portion and a ring shaped worm wheel bottom portion bent inward in a radial direction from a front end portion of the worm wheel cylindrical portion. The worm housing portion is provided on a part in a circumferential direction of an outer-diameter side portion of the worm wheel housing portion. The reinforcing ribs are provided on a front side surface of the front-side housing, extend in a direction in which an engagement reaction force acts between the worm wheel and a worm of the worm shaft, and span between the worm housing portion and the worm wheel bottom portion.

Abstract: An etching method is provided. In the method, a substrate including an etching target film, a hard mask containing silicon and a patterned resist is provided. A protective film is formed on a surface of the substrate by generating a first plasma from one of a first gas containing carbon, fluorine and a dilute gas, and a second gas containing carbon, hydrogen and the dilute gas. The hard mask is etched by generating a second plasma from a third gas after performing the step of forming the protective film.

Abstract: Disclosed is a liquid coating method. The method executes processes of: coating a coating liquid in a spiral form on a surface of a substrate by ejecting the coating liquid from the ejection nozzle while moving the ejection nozzle in a predetermined direction between the rotary axis and a peripheral edge of the substrate during rotation of the substrate; making a linear velocity at an ejection position of the coating liquid from the ejection nozzle substantially constant by reducing a number of rotations of the substrate as the ejection position is positioned closer to the peripheral edge of the substrate; and making an ejection flow rate of the coating liquid ejected from the ejection nozzle substantially constant by changing a gap between the ejection port of the ejection nozzle and the surface of the substrate based on a flow rate of the coating liquid before ejection from the ejection nozzle.

Abstract: At least one of the vehicle body side through holes and the column side through hole is an adjusting long hole which is long in a direction in which a position of the steering wheel can be adjusted. A base end portion of the adjusting lever includes a lever side through hole penetrating through the base end portion in the width direction. The adjusting rod is press-fitted into the lever side through hole.

Abstract: Disclosed is a coating apparatus capable of enhancing the film thickness uniformity. The coating apparatus includes a nozzle and a moving mechanism. The nozzle includes a storage chamber that stores a coating liquid and a slit-like flow path that is in communication with the storage chamber, and discharges the coating liquid through a discharge port formed at a front end of the flow path. The moving mechanism moves the nozzle and the substrate relatively to each other along a surface of the substrate. Also, in the flow path provided in the nozzle, flow resistance at the central portion in the longitudinal direction is larger than that at both end portions in the longitudinal direction.