Abstract: A plasma etching method includes a plasma process of plasma-processing a surface of a photoresist, which has a predetermined pattern with plasma generated from a hydrogen-containing gas. Further, the plasma etching method includes an etching process of etching a silicon-containing film with plasma generated from a CF-based gas and a gas containing a CHF-based gas by using the plasma-processed photoresist as a mask. Furthermore, in the plasma etching method, the plasma process and the etching process are repeated at least two or more times.

Abstract: A coating apparatus includes: a slit nozzle that discharges a coating material from a discharge port in a slit shape; a moving mechanism that relatively moves the slit nozzle with respect to a substrate in a disk shape; and a control unit that controls the moving mechanism, wherein the control unit performs a first constant speed coating treatment of relatively moving the slit nozzle with respect to the substrate at a first speed, then an acceleration coating treatment of accelerating a relative moving speed of the slit nozzle with respect to the substrate to a second speed higher than the first speed, and then a second constant speed coating treatment of relatively moving the slit nozzle with respect to the substrate at the second speed.

Abstract: An acoustic conversion device includes: a driving unit including a pair of magnets disposed so as to face each other, a yoke to which the pair of magnets are attached, a coil to which driving current is supplied, a vibrating portion which vibrates when driving current is supplied to the coil, and an armature disposed between the pair of magnets with the vibrating portion being passed through the coil; and a diaphragm unit including a diaphragm, and a beam portion for propagating the vibration of the vibrating portion to the diaphragm; with a coil attachment portion to which the coil is attached, located in a state in parallel with the vibrating portion, being provided to the armature.

Abstract: A groove shape can be improved. A plasma etching method includes plasma-processing a photoresist film that is formed on a mask film and has a preset pattern; exposing an organic film formed under the mask film by etching the mask film with the pattern of the plasma-processed photoresist film; and etching the organic film by plasma of a mixture gas containing O2 (oxygen), COS (carbonyl sulfate) and Cl2 (chlorine).

Abstract: A control apparatus includes a first focus detection unit that performs focus detection by a phase difference method based on an image signal obtained from an image pickup element, a second focus detection unit that performs focus detection by a contrast method, and a control unit that performs focusing, the control unit performs the focusing, in a first mode, by using a detection result of the first focus detection unit, and performs the focusing, in a second mode, by selectively using one of the detection result of the first focus detection unit and a detection result of the second focus detection unit according to lens information, and the first mode is a mode in which the focusing is repeated, and the second mode is a mode in which a lens is stopped after the focusing.

Abstract: A steroid compound of the Formula (1): [wherein R1 represents a group selected from the group consisting of H, CH3, C2H5, C3H7 and CH (CH3)2, R2 represents a group selected from NH2, NHAc and OCOR1, R3 represents a group selected from the group consisting of CH3, COOCH3 and CH2OCOR1.

Abstract: Resist coating treatments for application of a resist solution to removal of a resist film on a wafer edge portion. A laser irradiation unit applies a laser light in a resist coating unit. At the time of resist coating treatment, the resist solution is discharged onto a central portion of the rotated wafer from a resist solution supply nozzle to form a resist film on the wafer. Thereafter, the laser irradiation unit moves to an outer peripheral portion of the wafer and applies the laser light onto the resist film on the outer peripheral portion to dry the resist film on the outer peripheral portion. The application of laser light is continued, and the solvent supply nozzle moves to a position above the edge portion and supplies solvent to the resist film on the edge portion. The solvent dissolves and removes the resist film on the edge portion.

Abstract: An acoustic conversion device includes: a driving unit including a pair of magnets, a yoke, a coil, a vibrating portion which vibrates when driving current is supplied to the coil, and an armature disposed between the pair of magnets with the vibrating portion being passed through the coil; and a diaphragm unit including a holding frame having an opening, a resin film adhered to the holding frame, a diaphragm held within the holding frame, and a beam portion for propagating the vibration of the vibrating portion to the diaphragm; with the beam portion being combined with one edge side of the diaphragm, a predetermined gap being formed between the other edge of the diaphragm, and the inner face of the holding frame, a reinforcing member being provided to the predetermined gap, and the diaphragm being combined with the holding frame by the resin film and the reinforcing member.

Abstract: An acoustic conversion device includes: a driving unit including magnets, a yoke, a coil, a vibrating portion, and an armature fixed to the yoke; a diaphragm unit including a holding frame fixed to the driving unit, with one face as a first-joint face jointed to the driving unit, and the other face as a second-joint face, a resin film adhered to the holding frame, a diaphragm held on the holding frame, and a beam portion propagating vibration from the vibrating portion to the diaphragm; and a storage unit including a case body for storing the driving unit and diaphragm unit; with the driving unit and diaphragm unit being stored in the case body, the case body being pressed against and deforming a sealing agent loaded in the second-joint face, from a side facing the second-joint face, thereby sealing each gap between the case body, cover body, and holding frame.

Abstract: A coating apparatus includes a nozzle, a moving mechanism, a pressure adjusting unit and a pressure control unit. The nozzle is provided with a storage chamber and a slit-like flow path, and configured to discharge the coating liquid from a discharge port formed at a front end of the flow path. The moving mechanism moves the nozzle and a substrate relatively to each other along the surface of the substrate. The pressure adjusting unit adjusts the pressure inside the storage chamber. The pressure control unit controls the pressure adjusting unit so as to adjust pressure inside the storage chamber. The pressure control unit controls the pressure adjusting unit such that the inside of the storage chamber becomes a negative pressure, and fills the coating liquid inside the storage chamber while slowly decreasing the negative pressure inside the storage chamber.

Abstract: Disclosed is a coating apparatus capable of enhancing the film thickness uniformity. The coating apparatus includes a nozzle and a moving mechanism. The nozzle includes a storage chamber that stores a coating liquid and a slit-like flow path that is in communication with the storage chamber, and discharges the coating liquid through a discharge port formed at a front end of the flow path. The moving mechanism moves the nozzle and the substrate relatively to each other along a surface of the substrate. Also, in the flow path provided in the nozzle, flow resistance at the central portion in the longitudinal direction is larger than that at both end portions in the longitudinal direction.

Abstract: An acoustic conversion device includes: a driving unit including a pair of magnets disposed so as to face each other, a yoke to which the pair of magnets are attached, a coil to which driving current is supplied, a vibrating portion which vibrates when driving current is supplied to the coil, and an armature disposed between the pair of magnets with the vibrating portion passed through the coil; and a diaphragm unit including a holding frame having an opening, a resin film adhered to the holding frame in a state covering the opening of the holding frame, a diaphragm held on the inner side of the holding frame in a state adhered to the resin film, and a beam portion of which the tip portion formed integrally with the diaphragm is combined with the vibrating portion of the armature, for propagating the vibration of the vibrating portion to the diaphragm.

Abstract: A fixed material transportation surface of the fixed material transportation apparatus is formed inclining so as to become higher toward a downstream side from an upstream side of transportation direction of the fixed material, and is transported while sucking the fixed material supplied on the fixed material transportation surface. Thus, since the cockling is drawn when the fixed material is transported while being raised to transportation direction on the fixed material transportation surface even if cockling extending to transportation direction generates on the fixed material after fixing, growth of the cockling can be prevented.

Abstract: A steroid compound of the Formula (1): [wherein R1 represents a group selected from the group consisting of H, CH3, C2H5, C3H7 and CH (CH3)2, R2 represents a group selected from NH2, NHAc and OCOR1, R3 represents a group selected from the group consisting of CH3, COOCH3 and CH2OCOR1.

Abstract: A vaporizing apparatus includes a heating plate disposed in a container to heat and vaporize a liquid chemical, a gas supply unit configured to supply a carrier gas carrying the chemical vaporized by the heating plate, into the container, a first detecting unit configured to detect the supply of the carrier gas into the container, and a second detecting unit configured to detect the vaporization of the liquid chemical by the heating plate.

Abstract: An acoustic conversion device includes: a driving unit including magnets, a yoke, a coil, a vibrating portion, and an armature fixed to the yoke; a diaphragm unit including a holding frame fixed to the driving unit, with one face as a first-joint face jointed to the driving unit, and the other face as a second-joint face, a resin film adhered to the holding frame, a diaphragm held on the holding frame, and a beam portion propagating vibration from the vibrating portion to the diaphragm; and a storage unit including a case body for storing the driving unit and diaphragm unit; with the driving unit and diaphragm unit being stored in the case body, the case body being pressed against and deforming a sealing agent loaded in the second-joint face, from a side facing the second-joint face, thereby sealing each gap between the case body, cover body, and holding frame.

Abstract: An acoustic conversion device includes: a driving unit including a pair of magnets disposed so as to face each other, a yoke to which the pair of magnets are attached, a coil to which driving current is supplied, a vibrating portion which vibrates when driving current is supplied to the coil, and an armature disposed between the pair of magnets with the vibrating portion passed through the coil; and a diaphragm unit including a holding frame having an opening, a resin film adhered to the holding frame in a state covering the opening of the holding frame, a diaphragm held on the inner side of the holding frame in a state adhered to the resin film, and a beam portion of which the tip portion formed integrally with the diaphragm is combined with the vibrating portion of the armature, for propagating the vibration of the vibrating portion to the diaphragm.

Abstract: An acoustic conversion device includes: a driving unit including a pair of magnets, a yoke, a coil, a vibrating portion which vibrates when driving current is supplied to the coil, and an armature disposed between the pair of magnets with the vibrating portion being passed through the coil; and a diaphragm unit including a holding frame having an opening, a resin film adhered to the holding frame, a diaphragm held within the holding frame, and a beam portion for propagating the vibration of the vibrating portion to the diaphragm; with the beam portion being combined with one edge side of the diaphragm, a predetermined gap being formed between the other edge of the diaphragm, and the inner face of the holding frame, a reinforcing member being provided to the predetermined gap, and the diaphragm being combined with the holding frame by the resin film and the reinforcing member.

Abstract: An acoustic conversion device includes: a driving unit including a pair of magnets disposed so as to face each other, a yoke to which the pair of magnets are attached, a coil to which driving current is supplied, a vibrating portion which vibrates when driving current is supplied to the coil, and an armature disposed between the pair of magnets with the vibrating portion being passed through the coil; and a diaphragm unit including a diaphragm, and a beam portion for propagating the vibration of the vibrating portion to the diaphragm; with a coil attachment portion to which the coil is attached, located in a state in parallel with the vibrating portion, being provided to the armature.

Abstract: On a medium transporting surface, a dimple extending continuously from a transportation upstream end of a medium to a transportation downstream end are formed. Hereby, a leading end of the medium, after pulled into the dimples once, is transported in the pulled state. Therefore, it is prevented that the leading end of the medium is curled up by a conventional partition wall provided in the direction perpendicular to the medium transporting direction, so that it is possible to prevent a stain on the medium caused by contact with a recording head.