Abstract: A piezoelectric microphone includes a plate, a support portion that is provided around the plate, connection portions that connect the plate and the support portion on two or more sides of the plate, and a detection portion including a lower electrode, a piezoelectric film, and an upper electrode which are stacked in this order. The detection portion is stacked on the connection portion . An inflection point of a cross-sectional deformation curve in a case in which the plate and the connection portion are deformed by sound pressure is present in a region in which the detection portion is not stacked.

Abstract: A piezoelectric actuator part which generates a driving force to rotate a mirror part about a rotation axis includes a first actuator part and a second actuator part having a both-end supported beam structure in which base end parts on both sides in an axial direction of the rotation axis are fixed. Upper electrodes and lower electrodes of the first actuator part and the second actuator part are divided to correspond to a stress distribution of principal stresses in a piezoelectric body during resonance mode vibration, a piezoelectric portion corresponding to positions of a first piezoelectric conversion part and third piezoelectric conversion parts and a piezoelectric portion corresponding to positions of second piezoelectric conversion parts and a fourth piezoelectric conversion part generate stresses in opposite directions.

Abstract: A piezoelectric microphone includes a plate, a support portion that is provided around the plate, connection portions that connect the plate and the support portion on two or more sides of the plate, and a detection portion including a lower electrode, a piezoelectric film, and an upper electrode which are stacked in this order. The detection portion is stacked on the connection portion . An inflection point of a cross-sectional deformation curve in a case in which the plate and the connection portion are deformed by sound pressure is present in a region in which the detection portion is not stacked.

Abstract: Provided are a piezoelectric element having high stability, which operates with high efficiency, and a method for manufacturing the piezoelectric element. The piezoelectric element (10) has a laminate structure in which a first electrode (14), a first piezoelectric film (16), a second electrode (18), an adhesion layer (20), an interlayer (22), a third electrode (24), a second piezoelectric film (26), and a fourth electrode (28) are laminated in this order on a silicon substrate (12). The interlayer (22) is formed of a material different from that of the second electrode (18) and has a thickness of 0.4 ?m to 10 ?m. A device having a diaphragm structure or a cantilever structure is formed by removing a part of the silicon substrate (12). The respective layers (14 to 28) laminated on the silicon substrate (12) can be formed using a thin film formation method represented by a vapor phase epitaxial method.

Abstract: A piezoelectric actuator part which generates a driving force to rotate a mirror part about a rotation axis includes a first actuator part and a second actuator part having a both-end supported beam structure in which base end parts on both sides in an axial direction of the rotation axis are fixed. The first actuator part has a first electrode part and second electrode parts. The second actuator part has third electrode parts and a fourth electrode part. The arrangement of the each electrode part constituting an upper electrode corresponds to a stress distribution of principal stresses in a piezoelectric body during resonance mode vibration, and a piezoelectric portion corresponding to positions of the first electrode part and the third electrode parts and a piezoelectric portion corresponding to positions of the second electrode parts and the fourth electrode part generate stresses in opposite directions.

Abstract: Provided is an ultrasonic cutting element including a blade arm having a primary vibration plate and a blade portion fixed to one end of the primary vibration plate, a counter mass arm including one or more secondary vibration plates, a holding member to which vibration ends of the blade arm and the counter mass arm are respectively connected and which holds the blade arm and the counter mass arm in parallel, and a driving portion being a piezoelectric actuator that imparts ultrasonic vibrations to at least one of the primary vibration plate or the secondary vibration plate, in which the blade arm and the counter mass arm respectively bending-vibrate in a primary surface direction in a resonant mode in which the arms vibrate in mutually opposite phases as flexural vibrators.

Abstract: Provided is an ultrasonic cutting element including a blade arm having a primary vibration plate and a blade portion fixed to one end of the primary vibration plate, a counter mass arm including one or more secondary vibration plates, a holding member to which vibration ends of the blade arm and the counter mass arm are respectively connected and which holds the blade arm and the counter mass arm in parallel, and a driving portion being a piezoelectric actuator that imparts ultrasonic vibrations to at least one of the primary vibration plate or the secondary vibration plate, in which the blade arm and the counter mass arm respectively bending-vibrate in a primary surface direction in a resonant mode in which the arms vibrate in mutually opposite phases as flexural vibrators.

Abstract: A mirror driving device is provided. A pair of piezoelectric actuator units are disposed at both sides of a mirror unit so as to sandwich the mirror unit, and each piezoelectric actuator unit is connected with an end portion of the mirror unit through a linking unit. The linking unit has a structure including one or more plate-shaped members whose longitudinal direction is a direction perpendicular to a rotation axis, and functions as a plate-shaped hinge unit in which a plate-shaped member is deformed so as to be deflected in the thickness direction by the drive of the piezoelectric actuator unit. The linking unit is provided with a sensor unit that detects the stress to be generated in the linking unit during the rotational drive of the mirror unit by a resonant vibration.

Abstract: A first lamination step of forming lower electrode films on both surfaces of a diaphragm and directly forming a first Pb-containing perovskite oxide film which has a larger thermal expansion coefficient than that of the diaphragm and has a columnar structure on a front surface of the lower electrode film; and a second lamination step of directly forming a second Pb-containing perovskite oxide film on a front surface of the lower electrode film are sequentially performed. The second Pb-containing perovskite oxide film is formed under a condition that a difference between a molar ratio RA1 of Pb to a B-site element in the first Pb-containing perovskite oxide film and a molar ratio RB1 of Pb to a B-site element in the second Pb-containing perovskite oxide film after the second lamination step is 0.056 or less.

Abstract: A piezoelectric element is obtained using a method including: preparing a first structure; preparing a second structure; disposing a first facing electrode layer of the first structure to face a first surface of a vibration plate substrate and bonding the first structure to the first surface of the vibration plate substrate; processing the vibration plate substrate into a vibration plate by polishing or etching a second surface of the vibration plate substrate to which the first structure is bonded; preparing a laminate structure by disposing a second facing electrode layer of the second structure to face an exposed surface of the vibration plate and bonding the second structure to the vibration plate; and removing at least a part of a first silicon substrate of the first structure and a second silicon substrate of the second structure from the laminate structure.

Abstract: A piezoelectric actuator includes a piezoelectric element that includes a piezoelectric unit including a ferroelectric, which has an asymmetric bipolar P-E curve, a capacitor connected to the piezoelectric unit in series, and a resistor connected to the capacitor in series and connected to the ferroelectric in parallel; and a drive unit that inputs a drive waveform Vd, which includes a DC offset component of which polarity is opposite to polarization of the ferroelectric, to the piezoelectric element to drive the piezoelectric element. A value of a coercive electric field Ec1, a value of a coercive electric field Ec2, the capacitance Cs of the capacitor, the capacitance Cpz of the ferroelectric, combined resistance Rp of the resistance of the resistor and the resistance of the ferroelectric, and a fundamental angular frequency ? of the drive waveform satisfy Expressions I to III, wherein 1 / 3 ? ? Ec 1 + Ec 2 ? / ? Ec 1 - Ec 2 ? Expression ? ? I C s ? 1.

Abstract: A first lamination step of forming lower electrode films on both surfaces of a diaphragm and directly forming a first Pb-containing perovskite oxide film which has a larger thermal expansion coefficient than that of the diaphragm and has a columnar structure on a front surface of the lower electrode film; and a second lamination step of directly forming a second Pb-containing perovskite oxide film on a front surface of the lower electrode film are sequentially performed. The second Pb-containing perovskite oxide film is formed under a condition that a difference between a molar ratio RA1 of Pb to a B-site element in the first Pb-containing perovskite oxide film and a molar ratio RB1 of Pb to a B-site element in the second Pb-containing perovskite oxide film Ether the second lamination step is 0.056 or less.

Abstract: In a mirror drive device, a first and second actuator sections are arranged on both sides of a mirror supporting section that supports a mirror section so as to sandwich the mirror supporting section. Division of an upper and lower electrodes of each of the first and second actuator sections is performed correspondingly to stress distribution of principal stresses in a piezoelectric body in resonant mode vibration, and a piezoelectric body portion corresponding to positions of a first and third upper electrode sections, and a piezoelectric body portion corresponding to positions of a second and fourth upper electrode sections have stresses in opposite directions to each other. Division of the lower electrodes is performed similar to the upper electrodes, and drive voltages having the same phase can be respectively applied to the upper and lower electrode sections of the piezoelectric body portions that are different due to a division arrangement.

Abstract: A piezoelectric actuator includes a piezoelectric element that includes a piezoelectric unit including a ferroelectric, which has an asymmetric bipolar P-E curve, a capacitor connected to the piezoelectric unit in series, and a resistor connected to the capacitor in series and connected to the ferroelectric in parallel; and a drive unit that inputs a drive waveform Vd, which includes a DC offset component of which polarity is opposite to polarization of the ferroelectric, to the piezoelectric element to drive the piezoelectric element. A value of a coercive electric field Ec1, a value of a coercive electric field Ec2, the capacitance Cs of the capacitor, the capacitance Cpz of the ferroelectric, combined resistance Rp of the resistance of the resistor and the resistance of the ferroelectric, and a fundamental angular frequency ? of the drive waveform satisfy Expressions I to III, wherein 1 / 3 ? ? Ec 1 + Ec 2 ? / ? Ec 1 - Ec 2 ? Expression ? ? I C s ? 1.

Abstract: A piezoelectric actuator part which generates a driving force to rotate a mirror part about a rotation axis includes a first actuator part and a second actuator part having a both-end supported beam structure in which base end parts on both sides in an axial direction of the rotation axis are fixed. The first actuator part has a first electrode part and second electrode parts. The second actuator part has third electrode parts and a fourth electrode part. The arrangement of the each electrode part constituting an upper electrode corresponds to a stress distribution of principal stresses in a piezoelectric body during resonance mode vibration, and a piezoelectric portion corresponding to positions of the first electrode part and the third electrode parts and a piezoelectric portion corresponding to positions of the second electrode parts and the fourth electrode part generate stresses in opposite directions.

Abstract: A piezoelectric actuator part which generates a driving force to rotate a mirror part about a rotation axis includes a first actuator part and a second actuator part having a both-end supported beam structure in which base end parts on both sides in an axial direction of the rotation axis are fixed. Upper electrodes and lower electrodes of the first actuator part and the second actuator part are divided to correspond to a stress distribution of principal stresses in a piezoelectric body during resonance mode vibration, a piezoelectric portion corresponding to positions of a first piezoelectric conversion part and third piezoelectric conversion parts and a piezoelectric portion corresponding to positions of second piezoelectric conversion parts and a fourth piezoelectric conversion part generate stresses in opposite directions.

Abstract: One or more vibration plate layers of a diaphragm part are formed by a thin film forming technique. When a resonance frequency in a resonance vibration mode calculated from dimensions of a structure of an angular velocity sensor and an elastic parameter of a material thereof is defined as f kilohertz, a mass of a weight part is defined as M milligrams, a circumference of the diaphragm part is defined as r meters, a stress applied to a piezoelectric layer is defined as ?p pascals, a thickness thereof is defined as tp meters, a stress applied to an n-th layer from the weight part in a vibration plate portion constituted by a plurality of layers including a lower electrode and the vibration plate layers is defined as ?n pascals, and a thickness thereof is defined as tn meters (where n is a natural number), Teff expressed by Teff=r(?ptp+??ntn)/M satisfies {(?0.36f2+210)/33}?Teff?{(0.44f2+210)/33}.

Abstract: A producing method for a diaphragm-type resonant MEMS device includes forming a first silicon oxide film, forming a second silicon oxide film, forming a lower electrode, forming a piezoelectric film, forming an upper electrode, laminating the first silicon oxide film, the second silicon oxide film, the lower electrode, the piezoelectric film, and the upper electrode in this order on a first surface of a silicon substrate, and etching the opposite side surface of the first surface of the silicon substrate by deep reactive ion etching to form a diaphragm structure, in which the proportion R2 of the film thickness t2 of the second silicon oxide film with respect to the sum of the film thickness t1 of the first silicon oxide film and the film thickness t2 of the second silicon oxide film satisfies the following condition: 0.10 ?m?t1?2.00 ?m; and R2?0.70.

Abstract: In a mirror drive device, a first actuator section and a second actuator section are arranged on both sides of a mirror supporting section that supports a mirror section so as to sandwich the mirror supporting section. The upper electrode of a first actuator section includes a first electrode section and a second electrode section, and an upper electrode of a second actuator section includes a third electrode section and a fourth electrode section. The arrangements of the electrode sections correspond to stress distribution of principal stresses in the piezoelectric body in resonant mode vibration, and in a piezoelectric body portion that corresponds to positions of the first electrode section and the third electrode section and a piezoelectric body portion that corresponds to positions of the second electrode section and the fourth electrode section, stresses in opposite directions to each other are generated.

Abstract: Provided are a piezoelectric element having high stability, which operates with high efficiency, and a method for manufacturing the piezoelectric element. The piezoelectric element (10) has a laminate structure in which a first electrode (14), a first piezoelectric film (16), a second electrode (18), an adhesion layer (20), an interlayer (22), a third electrode (24), a second piezoelectric film (26), and a fourth electrode (28) are laminated in this order on a silicon substrate (12). The interlayer (22) is formed of a material different from that of the second electrode (18) and has a thickness of 0.4 ?m to 10 ?m. A device having a diaphragm structure or a cantilever structure is formed by removing a part of the silicon substrate (12). The respective layers (14 to 28) laminated on the silicon substrate (12) can be formed using a thin film formation method represented by a vapor phase epitaxial method.