Patents by Inventor Takayuki Yamagishi

Takayuki Yamagishi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10867819
    Abstract: There is provided a vacuum processing apparatus for performing a vacuum process by supplying a processing gas onto a substrate arranged in a processing space kept in a vacuum atmosphere, the apparatus comprising: a first transfer space and a second transfer space in each of which the substrate is transferred; and an intermediate wall portion provided between the first transfer space and the second transfer space along the extension direction, wherein one or more processing spaces are arranged in the first transfer space along the extension direction, and two or more processing spaces are arranged in the second transfer space along the extension direction, and wherein a plurality of exhaust paths and a joined exhaust path where the plurality of exhaust paths are joined are formed in the intermediate wall portion.
    Type: Grant
    Filed: June 12, 2019
    Date of Patent: December 15, 2020
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Takayuki Yamagishi, Tamihiro Kobayashi
  • Patent number: 10707106
    Abstract: A wafer-processing apparatus includes: multiple discrete units of reactors disposed on the same plane; a wafer-handling chamber having a polygonal shape having multiple sides corresponding to and being attached to the multiple discrete units, respectively, and one additional side for a load lock chamber; a load lock chamber attached to the one additional side of the wafer-handling chamber; multiple discrete gas boxes for controlling gases corresponding to and being connected to the multiple discrete units, respectively; and multiple discrete electric boxes for controlling electric systems corresponding to and being detachably connected to the multiple discrete units, respectively, wherein the gas boxes and the electric boxes are arranged alternately as viewed from above under the multiple discrete units, and the electric boxes can be pulled out outwardly without being disconnected from the corresponding units so that sides of the gas boxes are accessible.
    Type: Grant
    Filed: March 3, 2016
    Date of Patent: July 7, 2020
    Assignee: ASM IP Holding B.V.
    Inventors: Yukihiro Mori, Takayuki Yamagishi
  • Patent number: 10630135
    Abstract: An electric power tool includes a terminal unit and a component. A signal line and a power line are coupled to the terminal unit. The signal line transmits signal. The power line supplies electric power. The terminal unit is mounted to the component. The terminal unit includes a signal terminal coupled to the signal line, and a power supply terminal coupled to the power line. The component includes a component-side signal terminal and a component-side power supply terminal. The component-side signal terminal is electrically conductive to the signal terminal of the mounted terminal unit. The component-side power supply terminal is electrically conductive to the power supply terminal of the mounted terminal unit.
    Type: Grant
    Filed: April 26, 2018
    Date of Patent: April 21, 2020
    Assignee: MAKITA CORPORATION
    Inventors: Hitoshi Sengiku, Hideyuki Goto, Takayuki Yamagishi
  • Publication number: 20190385873
    Abstract: There is provided a vacuum processing apparatus for performing a vacuum process by supplying a processing gas onto a substrate arranged in a processing space kept in a vacuum atmosphere, the apparatus comprising: a first transfer space and a second transfer space in each of which the substrate is transferred; and an intermediate wall portion provided between the first transfer space and the second transfer space along the extension direction, wherein one or more processing spaces are arranged in the first transfer space along the extension direction, and two or more processing spaces are arranged in the second transfer space along the extension direction, and wherein a plurality of exhaust paths and a joined exhaust path where the plurality of exhaust paths are joined are formed in the intermediate wall portion.
    Type: Application
    Filed: June 12, 2019
    Publication date: December 19, 2019
    Inventors: Takayuki YAMAGISHI, Tamihiro KOBAYASHI
  • Patent number: 10364496
    Abstract: A dual section module with mass flow controllers, for processing wafers, includes: dual process sections integrated together; at least one mass flow controller (MFC) each shared by the dual process sections and provided in a gas line branching into two gas lines, at a branching point, connected to the respective interiors of the dual process sections and arranged symmetrically between the dual process sections; and at least one mass flow controller (MFC) each unshared by the dual process sections and provided in a gas line connected to the interior of each dual process section.
    Type: Grant
    Filed: June 27, 2011
    Date of Patent: July 30, 2019
    Assignee: ASM IP Holding B.V.
    Inventor: Takayuki Yamagishi
  • Publication number: 20180337575
    Abstract: An electric power tool includes a terminal unit and a component. A signal line and a power line are coupled to the terminal unit. The signal line transmits signal. The power line supplies electric power. The terminal unit is mounted to the component. The terminal unit includes a signal terminal coupled to the signal line, and a power supply terminal coupled to the power line. The component includes a component-side signal terminal and a component-side power supply terminal. The component-side signal terminal is electrically conductive to the signal terminal of the mounted terminal unit. The component-side power supply terminal is electrically conductive to the power supply terminal of the mounted terminal unit.
    Type: Application
    Filed: April 26, 2018
    Publication date: November 22, 2018
    Inventors: Hitoshi SENGIKU, Hideyuki GOTO, Takayuki YAMAGISHI
  • Patent number: 9885112
    Abstract: A film forming apparatus includes a susceptor, and a shower head provided above the susceptor and having a first passage and a second passage independent of the first passage formed therein, wherein the first passage is formed through the shower head by being provided with a first cavity surrounded by a first upper wall and a first lower wall, a first thin hole formed in the first upper wall, and a plurality of second thin holes formed in the first lower wall, the height of the first upper wall in the vertical direction is reduced with increase in distance from the first thin hole, and the second passage is formed in the same manner as the first passage.
    Type: Grant
    Filed: December 2, 2014
    Date of Patent: February 6, 2018
    Assignee: ASM IP HOLDINGS B.V.
    Inventors: Naoto Tsuji, Kazuo Sato, Takayuki Yamagishi
  • Patent number: 9793148
    Abstract: A method for positioning wafers in dual wafer transport, includes: simultaneously moving first and second wafers placed on first and second end-effectors to positions over lift pins protruding from first and second susceptors, respectively; and correcting the positions of the first and second wafers without moving any of the lift pins relative to the respective susceptors or without moving the lift pins relative to each other, wherein when the first and second wafers are moved to the respective positions, the distance between the first wafer and tips of the lift pins of the first susceptor is substantially smaller than the distance between the second wafer and tips of the lift pins of the second susceptor.
    Type: Grant
    Filed: June 22, 2011
    Date of Patent: October 17, 2017
    Assignee: ASM Japan K.K.
    Inventors: Takayuki Yamagishi, Masaei Suwada, Hiroyuki Tanaka
  • Publication number: 20160181128
    Abstract: A wafer-processing apparatus includes: multiple discrete units of reactors disposed on the same plane; a wafer-handling chamber having a polygonal shape having multiple sides corresponding to and being attached to the multiple discrete units, respectively, and one additional side for a load lock chamber; a load lock chamber attached to the one additional side of the wafer-handling chamber; multiple discrete gas boxes for controlling gases corresponding to and being connected to the multiple discrete units, respectively; and multiple discrete electric boxes for controlling electric systems corresponding to and being detachably connected to the multiple discrete units, respectively, wherein the gas boxes and the electric boxes are arranged alternately as viewed from above under the multiple discrete units, and the electric boxes can be pulled out outwardly without being disconnected from the corresponding units so that sides of the gas boxes are accessible.
    Type: Application
    Filed: March 3, 2016
    Publication date: June 23, 2016
    Inventors: Yukihiro Mori, Takayuki Yamagishi
  • Patent number: 9370863
    Abstract: An anti-slip end-effector for transporting a workpiece, which is configured to be attached to a robotic arm, includes: a workpiece-supporting area for placing a workpiece thereon for transportation; at least one front protrusion disposed at a distal end of the workpiece-supporting area for engaging an edge of the workpiece to restrict movement of the workpiece placed on the workpiece-supporting area beyond the front protrusion; and at least one anti-slip protrusion disposed in the workpiece-supporting area for contacting and supporting the backside of the workpiece, said anti-slip protrusion having a top face having a static friction coefficient of 1.0 or more as measured against the backside of the workpiece, and having a surface roughness of less than 0.4 ?m.
    Type: Grant
    Filed: February 4, 2014
    Date of Patent: June 21, 2016
    Assignee: ASM IP Holding B.V.
    Inventors: Naoto Tsuji, Takayuki Yamagishi
  • Publication number: 20160153088
    Abstract: A film forming apparatus includes a susceptor, and a shower head provided above the susceptor and having a first passage and a second passage independent of the first passage formed therein, wherein the first passage is formed through the shower head by being provided with a first cavity surrounded by a first upper wall and a first lower wall, a first thin hole formed in the first upper wall, and a plurality of second thin holes formed in the first lower wall, the height of the first upper wall in the vertical direction is reduced with increase in distance from the first thin hole, and the second passage is formed in the same manner as the first passage.
    Type: Application
    Filed: December 2, 2014
    Publication date: June 2, 2016
    Applicant: ASM IP Holding B.V.
    Inventors: Naoto TSUJI, Kazuo SATO, Takayuki YAMAGISHI
  • Patent number: 9312155
    Abstract: A wafer-processing apparatus includes: eight or ten reactors with identical capacity for processing wafers on the same plane, constituting four or five discrete units, each unit having two reactors arranged side by side with their fronts aligned in a line; a wafer-handling chamber including two wafer-handling robot arms each having at least two end-effectors; a load lock chamber; and a sequencer for performing, using the two wafer-handling robot arms, steps of unloading/loading processed/unprocessed wafers from/to any one of the units, and steps of unloading/loading processed/unprocessed wafers from/to all the other respective units in sequence while the wafers are in the one of the units.
    Type: Grant
    Filed: June 6, 2011
    Date of Patent: April 12, 2016
    Assignee: ASM Japan K.K.
    Inventors: Yukihiro Mori, Takayuki Yamagishi
  • Publication number: 20150217456
    Abstract: An anti-slip end-effector for transporting a workpiece, which is configured to be attached to a robotic arm, includes: a workpiece-supporting area for placing a workpiece thereon for transportation; at least one front protrusion disposed at a distal end of the workpiece-supporting area for engaging an edge of the workpiece to restrict movement of the workpiece placed on the workpiece-supporting area beyond the front protrusion; and at least one anti-slip protrusion disposed in the workpiece-supporting area for contacting and supporting the backside of the workpiece, said anti-slip protrusion having a top face having a static friction coefficient of 1.0 or more as measured against the backside of the workpiece, and having a surface roughness of less than 0.4 ?m.
    Type: Application
    Filed: February 4, 2014
    Publication date: August 6, 2015
    Applicant: ASM IP Holding B.V.
    Inventors: Naoto Tsuji, Takayuki Yamagishi
  • Patent number: D732145
    Type: Grant
    Filed: June 13, 2014
    Date of Patent: June 16, 2015
    Assignee: ASM IP Holding B.V.
    Inventors: Takayuki Yamagishi, Naoto Tsuji, Kazuo Sato
  • Patent number: D732644
    Type: Grant
    Filed: February 4, 2014
    Date of Patent: June 23, 2015
    Assignee: ASM IP Holding B.V.
    Inventors: Takayuki Yamagishi, Kazuo Sato, Naoto Tsuji
  • Patent number: D733261
    Type: Grant
    Filed: January 8, 2015
    Date of Patent: June 30, 2015
    Assignee: ASM IP Holding B.V.
    Inventors: Takayuki Yamagishi, Kazuo Sato, Naoto Tsuji
  • Patent number: D733843
    Type: Grant
    Filed: December 5, 2014
    Date of Patent: July 7, 2015
    Assignee: ASM IP Holding, B.V.
    Inventors: Takayuki Yamagishi, Kazuo Sato, Naoto Tsuji
  • Patent number: D735836
    Type: Grant
    Filed: January 28, 2015
    Date of Patent: August 4, 2015
    Assignee: ASM IP Holding B.V.
    Inventors: Takayuki Yamagishi, Naoto Tsuji, Kazuo Sato
  • Patent number: D743513
    Type: Grant
    Filed: June 13, 2014
    Date of Patent: November 17, 2015
    Assignee: ASM IP Holding B.V.
    Inventors: Takayuki Yamagishi, Naoto Tsuji, Kazuo Sato
  • Patent number: D753269
    Type: Grant
    Filed: January 9, 2015
    Date of Patent: April 5, 2016
    Assignee: ASM IP Holding B.V.
    Inventors: Takayuki Yamagishi, Kazuo Sato, Naoto Tsuji