Abstract: The purpose of the present invention is to reduce the risk of contamination in a clean air device in which a safety cabinet and clean booths are coupled. To achieve this, a clean air device in which a cabinet and clean booths are coupled, is configured such that the cabinet is equipped with: a work space which is formed on the inner side of a front shutter; and a circulation path which is formed from the lower surface, side surfaces, rear surface of the work space, and an outside portion of the cabinet so as to exhaust the air flowing into the work space. Pass boxes connected to the clean booths are provided to a portion of the side surfaces of the work space. Each of the pass boxes is formed by a pass box coupling inner surface, the outside of which has a space formed by a pass box coupling outer surface. The space communicates with the circulation path. The bottom of the pass box coupling outer surface is provided with a pass box coupling outer surface slit.

Abstract: A safety cabinet includes an operation stage on which an operation is performed, an operation space in which an operator performs the operation, a front panel disposed in front of the operation space, an operation opening connected to the operation space, exhausting means that suctions air from the operation opening and exhausts air in the operation space outside the safety cabinet through air purifying means, and visualizing means that visualizes an air flow in the operation space.

Abstract: An evaporator (2) comprising: a casing (5); a plurality of heat transfer tubes (12) which are immersed in a liquid refrigerant (RL) in a liquid-phase region (A1) and in the interior of which a fluid having a higher temperature than that of the liquid refrigerant (RL) flows; and a demister (7) which is provided so as to cover from above the liquid surface (Ls) of the liquid refrigerant (RL) accommodated in the liquid-phase region (A1), and which traps liquid droplets contained in evaporated gas refrigerant (RG). The demister (7) comprises inclined sections (13) which, when viewed in a cross section intersecting the axial line (O2) of the heat transfer tubes (12), separate from the liquid surface (Ls) toward the center portion of the casing (5) along the liquid surface (Ls).

Abstract: An object of the present invention is to provide a safety cabinet that allows a clearer observation of contamination of an operation stage surface. In order to realize the object, the safety cabinet is configured to include an operation space including an operation stage; a front panel formed in a front surface of the operation space; an operation opening provided in a lower portion of the front panel; a suction port that is provided in the vicinity of the operation opening on a front side of the operation stage to lead downward; and an air circulation path through which air suctioned from the suction port flows along a lower portion, a back surface, and an upper portion of the operation space, in which the operation stage is made of a transparent material, and a light source is provided to irradiate the operation stage with a light from a side of the operation stage, which is opposite to the operation space.

Abstract: Provided is a base unit including: a base unit chassis that supports a spindle motor; a heat dissipation member that dissipates heat generated from a stator of the spindle motor to a non-disk mounting side of the base unit chassis; and a means that suppresses heat transfer from a stator core to a bearing of the spindle motor.

Abstract: There is provided a safety cabinet in which a good operability is attained and it is possible to secure a sterility assurance level. There is provided a safety cabinet including an operation chamber, a front door that covers part of an opening of a front surface of the operation chamber, an operation opening below the front door, into which an operator can insert an hand and perform an operation, and a front slit, which takes in air inside the operation chamber and air in a room through the operation opening, on a front surface side of a lower portion of the operation chamber, the cabinet including sterilization gas generating means; and sealing means for sealing the operation opening during a sterilization operation.

Abstract: A table for a lithographic apparatus, the table having an encoder plate located on the table, a gap between the encoder plate and a top surface of the table, the gap located radially inward of the encoder plate relative to the periphery of the table, and a fluid extraction system with an opening in the surface of the gap to extract liquid from the gap.

Abstract: An object of the present invention is to provide a sterilization gas purifying closed system device that is capable of performing a sterilization process with an inexpensive configuration.

Abstract: A rotary machine of the present invention is provided with: a bearing including an inner ring secured to an outer peripheral surface of a rotating element, an outer ring disposed outside the inner ring, and a plurality of rolling elements interposed between the inner ring and the outer ring; a bearing housing disposed outside the bearing and to which the outer ring is secured; a casing disposed outside the bearing housing and to which the bearing housing is secured; and a temperature difference reducer to reduce a difference between a temperatures of the outer and inner rings.

Abstract: A substrate table to support a substrate on a substrate supporting area, the substrate table having a heat transfer fluid channel at least under the substrate supporting area, and a plurality of heaters and/or coolers to thermally control the heat transfer fluid in the channel at a location under the substrate supporting area.

Abstract: A resin belt includes: a plurality of teeth disposed at predetermined intervals along a longitudinal direction of the belt on a running surface of a belt body made of a thermoplastic resin; and a cloth covering the teeth, characterized in that: the cloth is a woven cloth obtained by weaving a thermoplastic synthetic resin fiber used as a warp yarn in the longitudinal direction of the belt and a fluorine resin fiber used as a weft yarn in a width direction of the belt; and a percentage of the fluorine resin fiber exposed on a side of a cloth surface of the teeth is 50% or more per unit area, and a percentage of the fluorine resin fiber exposed on a side of a bonded surface with the belt body is 50% or less per unit area.

Abstract: A resin belt includes: a plurality of teeth disposed at predetermined intervals along a longitudinal direction of the belt on a running surface of a belt body made of a thermoplastic resin; and a cloth covering the teeth. The cloth is a woven cloth obtained by weaving a thermoplastic synthetic resin fiber used as a warp yarn in the longitudinal direction of the belt and a fluorine resin fiber used as a weft yarn in a width direction of the belt. Crimp of the thermoplastic synthetic resin fiber used in the longitudinal direction of the belt is greater than crimp of the fluorine resin fiber used in the width direction of the belt.

Abstract: An apparatus and method for cleaning a contaminated surface of a lithographic apparatus are provided. A liquid confinement structure comprises at least two openings used to supply and extract liquid to a gap below the structure. The direction of flow between the openings can be switched. Liquid may be supplied to the gap radially outward of an opening adapted for dual flow. Supply and extraction lines to respectively supply liquid to and extract liquid from the liquid confinement structure have an inner surface that is resistant to corrosion by an organic liquid. A corrosive cleaning fluid can be used to clean photo resist contamination.

Abstract: A rotary machine system includes: a rotary machine including a gas seal portion; a gas seal device connected to the rotary machine and that supplies a seal gas to the gas seal portion; a pressure sensor that detects a pressure of the seal gas; a vent portion that discharges the seal gas discharged from the gas seal portion; and a vent pressure sensor that detects a pressure in the vent portion. The rotary machine includes: a casing through which a working fluid flows; a rotatable rotary shaft that passes; and the gas seal portion provided between the casing and the rotary shaft and that seals the working fluid by the seal gas having a pressure higher than a pressure of the working fluid in the casing. The gas seal device includes: a pressure regulating valve; and a control part that controls the pressure regulating valve.

Abstract: A region on a sidewall surface of at least one of a pair of side portions of a pneumatic tire includes a maximum tire width position. The region is provided with a plurality of recesses shaped as dimples varying periodically in size along a tire circumferential direction, and with a plurality of trough portions shaped as lines, disposed around each of the recesses, and extending unidirectionally so as to cover the recesses. The recesses are, for example, at least three types of circular recesses, each type having a different size. Here, the circular recesses vary stepwise in size along the tire circumferential direction. The bottom face of the circular recesses is spherical. The maximum depth of the circular recesses is constant irrespective of size, being from 0.3 mm to 1.5 mm.

Abstract: A rotary machine system includes: a rotary machine including a gas seal portion; a gas seal device connected to the rotary machine and that supplies a seal gas to the gas seal portion; and a connecting pipe that connects the gas seal portion and the gas seal device. The rotary machine includes a casing through which a working fluid flows; a rotatable rotary shaft; and the gas seal portion that seals the working fluid by the seal gas having a pressure higher than a pressure of the working fluid in the casing. The gas seal device includes: a seal gas supply pipe through which the seal gas delivered to the connecting pipe flows; a pressure regulating valve provided in the seal gas supply pipe and that adjusts the pressure of the seal gas supplied to the gas seal portion; and a control part.

Abstract: A table for a lithographic apparatus, the table having an encoder plate located on the table, a gap between the encoder plate and a top surface of the table, the gap located radially inward of the encoder plate relative to the periphery of the table, and a fluid extraction system with an opening in the surface of the gap to extract liquid from the gap.

Abstract: In a state where an operator performs operation using a safety cabinet while confirming standard operating procedures and sample data, a display device such as a monitor screen provided in the safety cabinet is arranged at a position that is not subject to effects of deterioration due to diffused reflection of light from a fluorescent lamp or sterilization lamp irradiation, and that does not generate resistance in an airflow path, while also protecting the display device from decontamination operation and preventing dirt from being adhered to a portion related to display.

Abstract: The purpose of the present invention is to provide a clean air device that can reduce the risk of contamination due to static electricity. Provided is a biosafety cabinet or a clean air device that connects a biosafety cabinet and a clean booth, wherein a static eliminator (ionizer) that generates a corona discharge by way of concentrating an electric field on a needle-shaped discharge electrode and eliminates static with ionized air is disposed directly above an air flow branching point where air supplied to a work space branches to the front face and to rear face inside the biosafety cabinet.