Abstract: A vaporization system includes a vaporization chamber having a first portion and a second portion. A first fluid supply part is connected to the first portion of the vaporization chamber, and configured to supply a mixed fluid in which a first carrier gas and a liquid precursor are mixed, toward the second portion. A second fluid supply part is configured to supply a second carrier gas toward the mixed fluid at the second portion.

Abstract: An electro-optical device is provided with a plurality of data lines, a plurality of potential lines supplied with a predetermined potential, a driving transistor controlling a current level according to the voltage between the gate and the source, a first storage capacitor which holds the voltage between the gate and a source of the driving transistor, and a light-emitting element. One data line among the plurality of data lines and one potential line among the plurality of potential lines are arranged to be adjacent to each other, and a second storage capacitor holding the potential of the one data line is formed by the one data line and the one potential line.

Abstract: A putter head including a replaceable intermediate member that can be customized in size, shape, and performance according to user's preference is provided. A putter head according to an embodiment includes a front member having a shaft attachment portion and a front surface constituting a face surface, a rear member attached to a rear of the front member, and an intermediate member that is disposed between the front member and the rear member and is replaceable, and the intermediate member is selectable from a plurality of intermediate members formed in different sizes, shapes, or materials.

Abstract: Provided is a golf club that allows for adjustment of the swing balance in relation to the whole golf club. A golf club head in one embodiment includes a club head and a grip. The club head has a sole portion provided with one or more attachment recesses to which weight attachment members with different weights are attachable, and the grip is provided with an attachment recess to which the weight attachment members with different weights are attachable. The weight attachment members with different weights are interchangeable between the one or more attachment recesses of the club head and between the one or more attachment recesses of the club head and the attachment recess of the grip.

Abstract: A vaporization system includes a vaporization chamber having a first portion and a second portion. A first fluid supply part is connected to the first portion of the vaporization chamber, and configured to supply a mixed fluid in which a first carrier gas and a liquid precursor are mixed, toward the second portion. A second fluid supply part is configured to supply a second carrier gas toward the mixed fluid at the second portion.

Abstract: A vaporization system includes a vaporization chamber having a first portion and a second portion. A first fluid supply part is connected to the first portion of the vaporization chamber, and configured to supply a mixed fluid in which a first carrier gas and a liquid precursor are mixed, toward the second portion. A second fluid supply part is configured to supply a second carrier gas toward the mixed fluid at the second portion.

Abstract: There is provided a technique that includes: a process chamber accommodating substrate; a storage tank including bottom portion having recess and wall portion and storing liquid precursor; a vaporizing part vaporizing the stored liquid precursor to generate precursor gas; a supply part supplying the generated precursor gas to the process chamber; a sensor disposed in the recess and detecting liquid level of the stored liquid precursor; a replenishment part replenishing the liquid precursor in the storage tank; and a controller controlling the supply part to supply the precursor gas to the process chamber to perform a substrate processing process for processing the substrate, and controlling, each time when the substrate processing process is performed a predetermined number of times, the replenishment part, based on the detected liquid level, to replenish the liquid precursor in the storage tank so that the liquid level becomes a predetermined level.

Abstract: There is provided a technique that includes: a process chamber accommodating substrate; a storage tank including bottom portion having recess and wall portion and storing liquid precursor; a vaporizing part vaporizing the stored liquid precursor to generate precursor gas; a supply part supplying the generated precursor gas to the process chamber; a sensor disposed in the recess and detecting liquid level of the stored liquid precursor; a replenishment part replenishing the liquid precursor in the storage tank; and a controller controlling the supply part to supply the precursor gas to the process chamber to perform a substrate processing process for processing the substrate, and controlling, each time when the substrate processing process is performed a predetermined number of times, the replenishment part, based on the detected liquid level, to replenish the liquid precursor in the storage tank so that the liquid level becomes a predetermined level.

Abstract: A configuration capable of increasing an exhaust capability of an apparatus without degrading an operation of the apparatus includes: a processing furnace; an exhaust unit configured to exhaust a gas from a process chamber defined by the processing furnace, the exhaust unit having a first sidewall and a second sidewall opposite to the first sidewall; and an exhaust device disposed adjacent to the exhaust unit and connected to the exhaust unit via a connecting pipe provided with a vibration-absorbing member, the exhaust device having a first sidewall and a second sidewall opposite to the first sidewall, wherein the processing furnace, the exhaust unit and the exhaust device are disposed on a same plane, and only the first sidewall of the first and the second sidewalls of the exhaust device is disposed in a space defined by extensions of the first and the second sidewalls of the exhaust unit.

Abstract: A configuration capable of increasing an exhaust capability of an apparatus without degrading an operation of the apparatus includes: a processing furnace; an exhaust unit configured to exhaust a gas from a process chamber defined by the processing furnace, the exhaust unit having a first sidewall and a second sidewall opposite to the first sidewall; and an exhaust device disposed adjacent to the exhaust unit and connected to the exhaust unit via a connecting pipe provided with a vibration-absorbing member, the exhaust device having a first sidewall and a second sidewall opposite to the first sidewall, wherein the processing furnace, the exhaust unit and the exhaust device are disposed on a same plane, and only the first sidewall of the first and the second sidewalls of the exhaust device is disposed in a space defined by extensions of the first and the second sidewalls of the exhaust unit.

Abstract: A vaporization system includes a vaporization chamber having a first portion and a second portion. A first fluid supply part is connected to the first portion of the vaporization chamber, and configured to supply a mixed fluid in which a first carrier gas and a liquid precursor are mixed, toward the second portion. A second fluid supply part is configured to supply a second carrier gas toward the mixed fluid at the second portion.

Abstract: A film is efficiently formed by sufficiently supplying a source gas to substrates accommodated in a process chamber, and the uniformity of a film formed on the substrates is improved. A method of a semiconductor device manufacturing includes (a) supplying a source gas to an upper region of a process chamber through a first gas supply hole disposed at a front end of a first nozzle disposed in a lower region of the process chamber where the source gas is not pyrolyzed; (b) supplying the source gas to substrates disposed in the lower region and a middle region of the process chamber through a plurality of second gas supply holes of a second nozzle; and (c) supplying a reactive gas to substrates disposed in the lower region, the middle region and the upper region of the process chamber through a plurality of third gas supply holes of a third nozzle.

Abstract: Provided are a process for efficiently producing a rubber wet master batch in which a dispersibility of carbon black in the rubber is improved, in which a reinforcing property and an abrasion resistance of the rubber can be enhanced by using carbon black having a high surface activity, in which a yield of the carbon black in the wet master batch obtained is not reduced and in which a handling property of the carbon black is good as compared with master batches prepared by using a granulated and dried substance of carbon black prepared by a conventional wet method and non-granulated carbon black, a carbon black-containing rubber wet master batch obtained by the above process and a rubber composition and a tire prepared by using the master batch.

Abstract: A film is efficiently formed by sufficiently supplying a source gas to substrates accommodated in a process chamber, and the uniformity of a film formed on the substrates is improved. A method of a semiconductor device manufacturing includes (a) supplying a source gas to an upper region of a process chamber through a first gas supply hole disposed at a front end of a first nozzle disposed in a lower region of the process chamber where the source gas is not pyrolyzed; (b) supplying the source gas to substrates disposed in the lower region and a middle region of the process chamber through a plurality of second gas supply holes of a second nozzle; and (c) supplying a reactive gas to substrates disposed in the lower region, the middle region and the upper region of the process chamber through a plurality of third gas supply holes of a third nozzle.

Abstract: The present invention provides a modified natural rubber that offers higher efficiency of graft polymerization or attachment of a polar group-containing compounds, and that possesses excellent low loss factor, wear resistance and fracture resistance when used as a rubber composition, a rubber composition using the modified natural rubber and a tire using the rubber composition. In the present invention, a polar group-containing compound is graft polymerized or attached under mechanical shear force to a natural rubber raw material having a nitrogen content of 0.4 mass % or less.

Abstract: The present invention provides a modified natural rubber that offers higher efficiency of graft polymerization or attachment of a polar group-containing compounds, and that possesses excellent low loss factor, wear resistance and fracture resistance when used as a rubber composition, a rubber composition using the modified natural rubber and a tire using the rubber composition. In the present invention, a polar group-containing compound is graft polymerized or attached under mechanical shear force to a natural rubber raw material having a nitrogen content of 0.4 mass % or less.

Abstract: An operation body having a pointing function with respect to information includes a chassis having a reflection face, a circuit charging an inner second battery when receiving an electrical power from outside through a terminal exposed from the chassis, and a circuit transmitting switch information to outside cordlessly. On the other hand, an information-input device includes a chassis supporting a keyboard, and an optical system that transmits a light to an operation body operated on the chassis and receives a reflected light of the light. The chassis supporting the keyboard has a recess housing the operation body. The operation portion may be housed in the recess. The second battery is charged when the operation body is housed. And a light emitting of the optical system is stopped when the operation body is housed.

Abstract: A weight piece (14) containing 15 wt. % or greater of iron and tungsten, and having a specific gravity of 9 or larger, larger than a material of a head body (10) made of steel or pure iron, is joined to the head body (10) by welding.