Abstract: Space cleaning device includes: hypochlorous acid water generator; mixing bath storing a mixture of the hypochlorous acid water and water; hypochlorous acid water supply unit; water supply unit; water level sensor detecting a water level of the water mixture; humidifying purifier micronizing the water mixture and releases the water mixture micronized into air; and control unit controlling operations of hypochlorous acid water supply unit and water supply unit. Control unit is configured, after supplying the hypochlorous acid water and the water to fill mixing bath with the water mixture, controls an operation of hypochlorous acid water supply unit to supply a predetermined amount of the hypochlorous acid water to mixing bath once in every predetermined time period, and controls an operation of water supply unit to supply the water to mixing bath based on information related to the water level of the water mixture received from water level sensor.

Abstract: A liquid crystal polymer film that includes: a benzene ring; a naphthalene ring; and a carboxymethyl group, wherein, in a 13C-NMR spectrum of a liquid crystal polymer film decomposed with supercritical methanol, an integral value CA of a peak derived from the benzene ring, an integral value CB of a peak derived from the naphthalene ring, and an integral value CC of a peak derived from the carboxymethyl group satisfy (CA+CB)/CC of 1.35 to 1.65.

Abstract: An optical signal emitting direction control method of a present embodiment includes arranging a transparent member to extend over an underwater space and an in-air space, causing an optical signal to enter the transparent member from the underwater space via a surface of an underwater portion of the transparent member immersed in the underwater space, and causing the optical signal entered the transparent member to be emitted into the in-air space via a surface of an in-air portion of the transparent member exposed to the in-air space.

Abstract: An electronic part includes: a chip part having a first main surface and a second main surface opposite to the first main surface, a wiring portion being derived from the chip part; and a substrate having a pad forming surface, pads to which the wiring portion can be connected being formed on the pad forming surface, in which a gap is formed between the second main surface and the pad forming surface while the wiring portion is connected to a predetermined pad of the pads.

Abstract: A method of manufacturing a mounting substrate, the method includes: transferring part or all of a plurality of devices on a device substrate onto a wiring substrate, and temporarily fixing the transferred devices to the wiring substrate with use of a fixing layer having viscosity, the device substrate including a support substrate and the plurality of devices fixed on the support substrate; and performing a reflow process on the wiring substrate to electrically connect the transferred devices with the wiring substrate, and thereby forming the mounting substrate.

Abstract: A method of manufacturing a mounting substrate, the method includes: transferring part or all of a plurality of devices on a device substrate onto a wiring substrate, and temporarily fixing the transferred devices to the wiring substrate with use of a fixing layer having viscosity, the device substrate including a support substrate and the plurality of devices fixed on the support substrate; and performing a reflow process on the wiring substrate to electrically connect the transferred devices with the wiring substrate, and thereby forming the mounting substrate.

Abstract: A magnetic levitation device includes a pair of magnets, a displacement detection means, and a control means. The pair of magnets generate magnetic force for supporting a ferromagnet in a noncontact manner. The displacement detection means detect the displacement of the ferromagnet in a lateral shift direction. The control means suppresses the vibration of the ferromagnet in a lateral shift direction. The control means controls the pair of magnets so that a stronger magnetic force acts on the ferromagnet that is displaced in a direction departing from the center of the vibration than when the ferromagnet is displaced in a direction returning to the center of the vibration.

Abstract: A magnetic levitation device includes a pair of magnets, a displacement detection means, and a control means. The pair of magnets generate magnetic force for supporting a ferromagnet in a noncontact manner. The displacement detection means detect the displacement of the ferromagnet in a lateral shift direction. The control means suppresses the vibration of the ferromagnet in a lateral shift direction. The control means controls the pair of magnets so that a stronger magnetic force acts on the ferromagnet that is displaced in a direction departing from the center of the vibration than when the ferromagnet is displaced in a direction returning to the center of the vibration.

Abstract: A piezoelectric vibration module includes a piezoelectric element, a wiring member connected to the piezoelectric element and drawn out to the outside, and an elastic plate bonded to one surface of the piezoelectric element, wherein the elastic plate is made of a silicone rubber.

Abstract: A piezoelectric vibration module includes a piezoelectric element, a wiring member connected to the piezoelectric element and drawn out to the outside, and an elastic plate bonded to one surface of the piezoelectric element, wherein the elastic plate is made of a silicone rubber.

Abstract: A method of manufacturing a mounting substrate, the method includes: transferring part or all of a plurality of devices on a device substrate onto a wiring substrate, and temporarily fixing the transferred devices to the wiring substrate with use of a fixing layer having viscosity, the device substrate including a support substrate and the plurality of devices fixed on the support substrate; and performing a reflow process on the wiring substrate to electrically connect the transferred devices with the wiring substrate, and thereby forming the mounting substrate.

Abstract: An object of the present invention is to provide a scanning electron microscope suitable for monitoring apparatus conditions of the microscope itself, irrespective of the presence of charge-up, specimen inclination, and the like. In order to achieve the object, proposed is a scanning electron microscope including a function to monitor the apparatus conditions on the basis of information obtained with an electron beam reflected before reaching a specimen. Specifically, for example, while applying a negative voltage to the specimen to reflect the electron beam before the electron beam reaches the specimen, and simultaneously supplying a predetermined signal to a deflector for alignment, the scanning electron microscope monitors changes of the detected positions of the reflected electrons of the electron beam. If the above-mentioned predetermined signal is under the condition where an alignment is properly performed, the changes of the detected positions of the electrons reflect deviation of an axis.

Abstract: A calibration standard specimen is provided to have formed therein calibrating patterns of a lattice shape discontinuously arrayed, and particular alignment patterns respectively disposed near the calibrating patterns so that the positioning of the specimen can be made to match the calibrating patterns to the measurement points.

Abstract: A method of transferring a device includes the steps of: arranging a first substrate, on which a device is provided with a release layer having a planar shape equal to or smaller than the device interposed therebetween, and a second substrate, on which an adhesive layer is provided, so as to be spaced from and opposite each other in a state where the device and the adhesive layer face each other; and irradiating a laser beam having an irradiation area larger than the base area of the release layer onto the entire surface of the release layer from the first substrate side so as to ablate the release layer, to separate the device from the first substrate, and to transfer the device on the second substrate.

Abstract: An object of the present invention is to provide a scanning electron microscope suitable for monitoring apparatus conditions of the microscope itself, irrespective of the presence of charge-up, specimen inclination, and the like. In order to achieve the object, proposed is a scanning electron microscope including a function to monitor the apparatus conditions on the basis of information obtained with an electron beam reflected before reaching a specimen. Specifically, for example, while applying a negative voltage to the specimen to reflect the electron beam before the electron beam reaches the specimen, and simultaneously supplying a predetermined signal to a deflector for alignment, the scanning electron microscope monitors changes of the detected positions of the reflected electrons of the electron beam. If the above-mentioned predetermined signal is under the condition where an alignment is properly performed, the changes of the detected positions of the electrons reflect deviation of an axis.

Abstract: An object of the present invention is to provide a scanning electron microscope suitable for monitoring apparatus conditions of the microscope itself, irrespective of the presence of charge-up, specimen inclination, and the like. In order to achieve the object, proposed is a scanning electron microscope including a function to monitor the apparatus conditions on the basis of information obtained with an electron beam reflected before reaching a specimen. Specifically, for example, while applying a negative voltage to the specimen to reflect the electron beam before the electron beam reaches the specimen, and simultaneously supplying a predetermined signal to a deflector for alignment, the scanning electron microscope monitors changes of the detected positions of the reflected electrons of the electron beam. If the above-mentioned predetermined signal is under the condition where an alignment is properly performed, the changes of the detected positions of the electrons reflect deviation of an axis.

Abstract: A method for surface modification is disclosed. The method includes the step of irradiating a material with ultrashort pulse laser light to form a modified region including an amorphous region and/or a strain region on a surface of the material.

Abstract: A method of transferring a device includes the steps of: arranging a first substrate, on which a device is provided with a release layer having a planar shape equal to or smaller than the device interposed therebetween, and a second substrate, on which an adhesive layer is provided, so as to be spaced from and opposite each other in a state where the device and the adhesive layer face each other; and irradiating a laser beam having an irradiation area larger than the base area of the release layer onto the entire surface of the release layer from the first substrate side so as to ablate the release layer, to separate the device from the first substrate, and to transfer the device on the second substrate.

Abstract: An object of the present invention is to provide a scanning electron microscope suitable for monitoring apparatus conditions of the microscope itself, irrespective of the presence of charge-up, specimen inclination, and the like. In order to achieve the object, proposed is a scanning electron microscope including a function to monitor the apparatus conditions on the basis of information obtained with an electron beam reflected before reaching a specimen. Specifically, for example, while applying a negative voltage to the specimen to reflect the electron beam before the electron beam reaches the specimen, and simultaneously supplying a predetermined signal to a deflector for alignment, the scanning electron microscope monitors changes of the detected positions of the reflected electrons of the electron beam. If the above-mentioned predetermined signal is under the condition where an alignment is properly performed, the changes of the detected positions of the electrons reflect deviation of an axis.

Abstract: [Problem]To provide an actuator drive device that eliminates the need for high voltage amplifiers. [Means for Solving Problem]The electrostatic actuator drive device comprises a variable capacitor 12 connected in series with an electrostatic actuator 10, and a constant voltage source 11 for applying a constant voltage between the both ends of the serial connected electrostatic actuator 10 and the variable capacitor 12. The capacitance of the variable capacitor 12 is varied under control of a controller 14 for adjusting the voltage to be applied to the electrostatic actuator 10. The constant voltage source 11 may be any forms to apply a constant high voltage. The electrostatic actuator 10 is equivalently a capacitor. In this device, the capacitance of one of series connected two capacitors is varied for adjusting the voltage to be applied to the other capacitor, or the electrostatic actuator 10.