Abstract: Method of deflecting light includes the steps of providing a substrate and forming a supporting member on the substrate. Next forming step forms electrodes at predetermined positions on the substrate. Next forming step forms a plate-like-shaped thin film member including light reflecting means. Placing step places the plate-like-shaped thin film member on the supporting member so that an opposite surface thereof faces the electrodes. Forming step forms space regulating members on edges of the substrate for regulating a space formed above the substrate in which the plate-like-shaped thin film member is freely movable. Applying step applies predetermined voltages to the electrodes to change a tilt direction of the plate-like-shaped thin film member in accordance with the voltages applied to deflect the input light in an arbitrary direction.

Abstract: Method of deflecting light includes the steps of providing a substrate and forming a supporting member on the substrate. Next forming step forms electrodes at predetermined positions on the substrate. Next forming step forms a plate-like-shaped thin film member including light reflecting means. Placing step places the plate-like-shaped thin film member on the supporting member so that an opposite surface thereof faces the electrodes. Forming step forms space regulating members on edges of the substrate for regulating a space formed above the substrate in which the plate-like-shaped thin film member is freely movable. Applying step applies predetermined voltages to the electrodes to change a tilt direction of the plate-like-shaped thin film member in accordance with the voltages applied to deflect the input light in an arbitrary direction.

Abstract: Method of deflecting light includes the steps of providing a substrate and forming a supporting member on the substrate. Next forming step forms electrodes at predetermined positions on the substrate. Next forming step forms a plate-like-shaped thin film member including light reflecting means. Placing step places the plate-like-shaped thin film member on the supporting member so that an opposite surface thereof faces the electrodes. Forming step forms space regulating members on edges of the substrate for regulating a space formed above the substrate in which the plate-like-shaped thin film member is freely movable. Applying step applies predetermined voltages to the electrodes to change a tilt direction of the plate-like-shaped thin film member in accordance with the voltages applied to deflect the input light in an arbitrary direction.

Abstract: A miniaturized and highly integrated optical deflection apparatus is realized in which the number of electrodes for driving the optical deflection apparatus is reduced. The optical deflection apparatus implements a sheet member that is electrically floating and plural electrodes that are implemented on a substrate. The sheet member includes a member having a light reflection region and an electret member that is charged at a predetermined electric potential. The sheet member is tilted by applying an electric potential that is substantially equivalent to an electric potential of the electret member to one of the electrodes and applying a ground potential to another one of the electrodes.

Abstract: A method for driving a light deflector the method includes turning over a direction of an electric field acting on the plate shape member, in an optional period. In the method, the light deflector deflects a beam incident on a light reflection area by displacing a plate shape member having the light reflection area with an electrostatic force. The light deflector includes a substrate, a plurality of control members, a fulcrum member, the plate shape member, and a plurality of electrodes.

Abstract: An optical scanning device includes optical modulation means having an one-dimensional optical modulator array wherein a plurality of optical modulators are arranged one-dimensionally; lighting means; and a scanning optical system for deflecting the beams modulated by the optical modulators in the one-dimensional optical modulator array in a direction perpendicular to the arrangement direction of the optical modulators. A plurality of the one-dimensional optical modulator arrays are arranged in a direction perpendicular to the arrangement direction of the optical modulators. The beams modulated by respective optical modulators of the one-dimensional optical modulator arrays can be irradiated on a pixel in piles.

Abstract: Method of deflecting light includes the steps of providing a substrate and forming a supporting member on the substrate. Next forming step forms electrodes at predetermined positions on the substrate. Next forming step forms a plate-like-shaped thin film member including light reflecting means. Placing step places the plate-like-shaped thin film member on the supporting member so that an opposite surface thereof faces the electrodes. Forming step forms space regulating members on edges of the substrate for regulating a space formed above the substrate in which the plate-like-shaped thin film member is freely movable. Applying step applies predetermined voltages to the electrodes to change a tilt direction of the plate-like-shaped thin film member in accordance with the voltages applied to deflect the input light in an arbitrary direction.

Abstract: A center beam which is formed out of a thin film constituted to be combined with a light reflection film provided on one surface of the center beam, which has both ends fixed and which is deformed by an electronic force; a substrate electrode which is opposed to the center beam through a gap formed on the other surface of the center beam; an opposed surface which is a surface of the substrate electrode opposed to the center beam modulating the incident light on the light reflection film, the opposed surface restricting deformation of the center beam due to application of a driving voltage to the substrate electrode by abutting on the center beam; and a substrate which has the substrate electrode having the opposed surface, formed in a concave section, and which holds a to-be-held section of the center beam, are provided.

Abstract: A MOS field effect transistor device and fabrication method thereof are provided, which include a non-uniformly doped well region composed of (1) a first portion thereof which is contiguous to a source or drain region, and situated under a gate electrode, and has a first concentration of said first conductive type impurities, and (2) a second.sub.-- portion which has a second concentration higher than the first concentration of said first conductive type impurities. This structure of the field effect transistor has advantages such as, for example, suppressing short channel effects, increasing source or drain junction breakdown voltages and improving high frequency characteristics of the transistor.