Abstract: A lithographic apparatus is arranged to project a pattern from a patterning device onto a substrate through a liquid confined in a space adjacent the substrate. The apparatus includes a structure substantially parallel to a surface of a substrate table configured to hold the substrate, to divide the space into two parts. The structure has an aperture to allow transmission of the pattern and a recess at the bottom side of the structure to extract a fluid from the space.

Abstract: An electronic connector includes a plurality of pairs of terminal parts for transmitting an electric signal; and grounding parts shaped like plates and connected to have a ground potential, wherein the grounding parts have protrusions protruding on a side of the pairs of terminal parts, and the protrusions are respectively interposed between the pairs of terminal parts which are adjacent to each other.

Abstract: Exposure apparatus exposes a substrate by irradiating the substrate with exposure light via a projection optical system and a liquid. The exposure apparatus is provided with a liquid immersion mechanism for supplying the liquid and recovering the liquid. The liquid immersion mechanism has an inclined surface, which is opposite to a surface of the substrate and is inclined with respect to the surface of the substrate, and a liquid recovering port of the liquid immersion mechanism is formed in the inclined surface. A flat portion is provided between the substrate and the projection optical system. A liquid immersion area can be maintained to be small.

Abstract: A connector includes a plug connector and a jack connector configured to be connected with the plug connector. The plug connector includes a plug ground electrode, and a pair of plug terminals configured to transmit electric signals and having plug terminal connecting parts formed at first ends of the plug terminals. The jack connector includes a jack ground electrode, and a pair of jack terminals configured to transmit electric signals and having jack terminal connecting parts formed at first ends of the jack terminals. The jack terminal connecting parts are configured to be inserted between the plug terminal connecting parts and brought into contact with opposing surfaces of the plug terminal connecting parts when the jack connector is connected with the plug connector.

Abstract: A lithographic projection apparatus is arranged to project a pattern from a patterning device onto a substrate through a liquid confined to a space adjacent to the substrate. The apparatus includes a liquid diverter in the space to promote liquid flow across the space.

Abstract: Exposure apparatus exposes a substrate by irradiating the substrate with exposure light via a projection optical system and a liquid. The exposure apparatus is provided with a liquid immersion mechanism for supplying the liquid and recovering the liquid. The liquid immersion mechanism has an inclined surface, which is opposite to a surface of the substrate and is inclined with respect to the surface of the substrate, and a liquid recovering port of the liquid immersion mechanism is formed in the inclined surface. A flat portion is provided between the substrate and the projection optical system. A liquid immersion area can be maintained to be small.

Abstract: A connector includes: a housing; and a connector module; the connector module including: a projection portion that projects outside from the housing; a substrate composed of a material with thermal conductivity; and a terminal that is fixed to a lower part of the substrate and contacts on an external substrate.

Abstract: An exposure apparatus exposes a substrate by forming a liquid immersion region on the substrate, and projecting a pattern image onto the substrate via a projection optical system and a liquid that forms the liquid immersion region. The exposure apparatus includes a projection optical system having a plurality of optical elements, by which a pattern image is projected onto a substrate via a liquid to expose the substrate and a liquid recovery system that recovers the liquid along with a gas and has a separator that separates the recovered liquid and the recovered gas.

Abstract: Disclosed is a surface mount device to be mounted on a base member, including plural lead units, each of the plural lead units including, a lead including a body portion and a foot formed at an end of the lead; a solder portion formed at the foot of the lead to protrude toward the direction of the base member to have a summit portion, and a diffusion prevention portion provided on the lead for preventing a diffusion of a solder along the body portion of the lead.

Abstract: A connector 10 which comprises a plurality of signal contacts 11, each of which is provided with two aligned first connecting parts 12a at one end and two aligned second connecting parts 12b at the other end and which form balanced transmission lines, further comprises a first holding member 13 which holds the first connecting parts 12a of the plurality of signal contacts 11 and a second holding member 14 which holds the second connecting parts 12b, intermediate parts of the plurality of signal contacts 11 between the first holding member 13 and the second holding member 14 being exposed to the air.

Abstract: An exposure apparatus exposes a substrate by forming a liquid immersion region on the substrate, and projecting a pattern image onto the substrate via a projection optical system and a liquid that forms the liquid immersion region. The exposure apparatus includes a projection optical system having a plurality of optical elements, by which a pattern image is projected onto a substrate via a liquid to expose the substrate and a liquid recovery system that recovers the liquid along with a gas and has a separator that separates the recovered liquid and the recovered gas.

Abstract: A relay board for relaying plurality of electric wires to a transmission connector, the relay board provided with first and second front ground pads 12a, 12b which are arranged on a front surface, first and second back ground pads 13a, 13b which are arranged on a back surface, signal pads 14a to 15b which are arranged between the ground pads, a first via hole 17a which connected the first front ground pad 12a and the first back ground pad 13a, and a second via holes 17b which connects the second front ground pad 12b and second back ground pad 13b, the first via hole 17a and the second via hole 17b being arranged at the both sides of the signal pads. It is possible to provide an inexpensive relay board with excellent transmission characteristics and grounding characteristics.

Abstract: A connector includes a lead part configured to be connected to a board; and a solder sheet having a plate shape. The solder sheet is engaged with and fixed to the lead part with the lead part passing through a hole in the solder sheet. At least one of the lead part and the solder sheet has a structure configured to prevent the solder sheet from coming off the lead part.

Abstract: A connector includes a connector main body that connects with another connector, a lanyard part and a latch part provided at least on one of the side planes of the connector main body, and a hook provided on the latch part and protruding outward from the connector main body. The lanyard part includes a first lanyard bent part, a straight lanyard part, and a second lanyard bent part that are sequentially arranged in a connecting direction with respect to the another connector. The latch part includes a first latch bent part, a first latch straight part, and a second latch bent part that are sequentially arranged in the connecting direction. The first lanyard bent part includes a first lanyard opening into which the first latch bent part is inserted. The second lanyard bent part includes a second lanyard opening into which the second latch bent part is inserted.

Abstract: An optical module configured to perform conversion between an optical signal and an electrical signal includes a board having a flat-plate shape; a light-receiving part and a light-emitting part attached on a surface of the board, the light-receiving part being configured to receive a first optical signal input from an optical cable and the light-emitting part being configured to output a second optical signal based on an input electrical signal; and an optical deflection member configured to deflect the first optical signal substantially 90 degrees and output the first optical signal to the light-receiving part and to deflect the second optical signal input from the light-emitting part substantially 90 degrees and output the second optical signal to the optical cable, the optical deflection member including multiple optical waveguides arranged in a first array and a second array.

Abstract: A disclosed connector includes a signal contact whose first end portion is to be connected to a connection terminal of another connector, wherein the signal contact is formed of an electrically conductive material; an insulating part including a groove part in which a second end portion of the signal contact is placed; a floating lead that is placed in the groove part and movable in a longitudinal direction of the groove part, wherein first end portion of the floating lead is to be in contact with the second end portion of the signal contact placed in the groove part; and a solder member adapted to electrically connect the first portion of the floating lead and the second end portion of the signal contact.

Abstract: A liquid recovery system is used by an immersion exposure apparatus. The liquid recovery system comprises: a plate that has a first surface and a second surface on the side opposite the first surface; and a liquid recovery part, at least part of which opposes the second surface with a first gap interposed therebetween. The liquid recovery system recovers the liquid on a movable object that opposes the first surface of the plate via the liquid recovery part.

Abstract: An electronic connector includes a plurality of pairs of terminal parts for transmitting an electric signal; and grounding parts shaped like plates and connected to have a ground potential, wherein the grounding parts have protrusions protruding on a side of the pairs of terminal parts, and the protrusions are respectively interposed between the pairs of terminal parts which are adjacent to each other.

Abstract: A jack side connector configured to be connected to a plug side connector, the plug side connector including a plug side signal contact and a plug side ground contact extending from a holding part, the jack side connector includes a jack side signal contact and a jack side ground contact configured to come in contact with the plug side signal contact and the plug side ground contact, respectively, so that electric conduction between the plug side connector and the jack side connector is made when the plug side connector is connected to the jack side connector, wherein the jack side ground contact includes a first contact part and a second contact part, and when the plug side connector is connected to the jack side connector, the electric conduction between the plug side connector and the jack side connector is made by the first contact part and the second contact part.

Abstract: A liquid recovery system is used by an immersion exposure apparatus. The liquid recovery system comprises: a plate that has a first surface and a second surface on the side opposite the first surface; and a liquid recovery part, at least part of which opposes the second surface with a first gap interposed therebetween. The liquid recovery system recovers the liquid on a movable object that opposes the first surface of the plate via the liquid recovery part.