Abstract: A manufacturing method of a semiconductor device includes the steps of carrying a substrate in a processing chamber, bringing the processing chamber into a state at a first pressure by supplying a silicon compound gas which contains carbon and hydrogen into the processing chamber, forming a silicon oxide film on the substrate by irradiating a UV light to the silicon compound gas supplied into the processing chamber in the state kept at the first pressure, and decompression process to bring the processing chamber into a state at a second pressure lower than the first pressure. This makes it possible to form the dense silicon oxide film in the trench with high aspect ratio and small width.

Abstract: An electric steering lock device is provided that includes a column pipe, a steering shaft pivotably passed through the interior of the column pipe, and electric lock means that has an electric motor and that can switch in response to operation of the electric motor between a locked state in which pivoting of the steering shaft is prevented and an unlocked state in which pivoting of the steering shaft is permitted, wherein the electric lock means (15) is disposed within the column pipe (13). This can make breakage or unauthorized unlocking of the electric lock means difficult by unauthorized means.

Abstract: To provide a generator capable of generating plasma and ozone with high efficiency and easy to handle, with a simple structure. An electrode part 10 is formed of electrodes 11 and 12 without dielectric material interposed therebetween. An arc-extinguishing capacitor 13 as a charge storage part for storing charge is connected in series to the electrode part 10. An AC power source 15 generating plasma by causing self-arc-extinguishing discharge between the electrodes 11 and 12 by applying AC voltage to charge and discharge the arc-extinguishing capacitor 13, is connected to both ends of a circuit in which the electrode part 10 and the arc-extinguishing capacitor 13 are connected in series. The arc-extinguishing capacitor 13 and one electrode 12 of the electrode part 10 connected thereto are unitized, for making the electrode part multi-polarized.

Abstract: An electric steering lock system includes a planetary gear mechanism provided between a rotation member and an electric motor which operate to slide a locking member. The planetary gear mechanism includes: a first sun gear coupled to the electric motor in a relatively non-rotatable manner; a ring gear fixed to a casing and having inner teeth; first planetary gears carried on a first carrier and meshed with the first sun gear and the inner teeth; a second sun gear coupled to the first carrier in a relatively non-rotatable manner; a second sun gear which is carried on a second carrier connected to the rotation member in a relatively non-rotatable manner and which is meshed with the second sun gear and the inner teeth. A shaft has opposite ends coaxially coupled to the first sun gear and the rotation member respectively in a relatively rotatable manner. The first carrier and the second sun gear are supported on the shaft in a relatively rotatable manner.

Abstract: A method of manufacturing a semiconductor device which has a cleaning process for cleaning a surface of a substrate while rotating the substrate. The cleaning process includes the steps of cleaning the substrate surface by supplying a cleaning liquid to the substrate; rinsing the cleaned substrate surface by supplying a rinse liquid containing pure water to the substrate; and drying the rinsed substrate. In the rinsing step, HF is added to the rinse liquid.

Abstract: An electric driver includes a hook portion which is constituted by a hook-like portion and a connecting portion for connecting the hook-like portion to the handle. The hook-like portion is constituted by a base portion connected to the connecting portion and a bent portion continuous to the base portion and a front end portion continuous to the bent portion and arranged at a position substantially opposed to the base portion and can be deformed. The front end portion and the base portion can be proximate to and remote from each other. The connecting portion holds the hook-like portion in a state of being hung down in a direction substantially the same as a direction of extending the handle. The hook-like portion is held centering on a first rotating axis center extended in the direction of hanging down the hook-like portion pivotably relative to the handle.

Abstract: To obtain a micromachine for use as a high frequency filter having a high Q value and a higher frequency band. In a micromachine (20) including: an input electrode (7b), an output electrode (7a), and a support electrode (7c) disposed on a substrate (4); and a band-shaped vibrator electrode (15) formed by laying a beam (vibrating part) (16) over the output electrode (7a) with a space part (A) interposed between the output electrode (7a) and the vibrator electrode (15) in a state in which both end parts of the vibrator electrode (15) are supported on the input electrode (7b) and the substrate (4) with the support electrode (7c) interposed between the substrate (4) and the vibrator electrode (15), the entire surface of both end parts of the vibrator electrode (15) from an edge of the end parts to the beam (16) is completely fixed to the input electrode (7b) and the support electrode (7c).

Abstract: An electric steering lock system includes a planetary gear mechanism provided between a rotation member and an electric motor which operate to slide a locking member. The planetary gear mechanism includes: a first sun gear coupled to the electric motor in a relatively non-rotatable manner; a ring gear fixed to a casing and having inner teeth; first planetary gears carried on a first carrier and meshed with the first sun gear and the inner teeth; a second sun gear coupled to the first carrier in a relatively non-rotatable manner; a second sun gear which is carried on a second carrier connected to the rotation member in a relatively non-rotatable manner and which is meshed with the second sun gear and the inner teeth. A shaft has opposite ends coaxially coupled to the first sun gear and the rotation member respectively in a relatively rotatable manner. The first carrier and the second sun gear are supported on the shaft in a relatively rotatable manner.