Abstract: A radiographic system includes an imaging unit, a calculation processing unit. The imaging unit acquires a radiological image including a period pattern modulated by a photographic subject placed at a radiation irradiation field. The calculation processing unit generates a phase contrast image of the photographic subject based on the radiological image acquired by the imaging unit. The calculation processing unit is configured to performing an absorption image generation process, a spatial frequency process, and a phase contrast image generation process.

Abstract: One embodiment relates to a method of real-time three-dimensional electron beam imaging of a substrate surface. A primary electron beam is scanned over the substrate surface causing electrons to be emitted therefrom. The emitted electrons are simultaneously detection using a plurality of at least two off-axis sensors so as to generate a plurality of image data frames, each image data frame being due to electrons emitted from the substrate surface at a different view angle. The plurality of image data frames are automatically processed to generate a three-dimensional representation of the substrate surface. Multiple views of the three-dimensional representation are then displayed. Other embodiments, aspects and features are also disclosed.

Abstract: A moiré fringe difference detector detects a change in moiré fringes occurring in first and second differential phase images between actual radiography and preliminary radiography, and calculates a characteristic amount corresponding to the change. This characteristic amount is a period of an artifact occurring in a corrected differential phase image, which is obtained by subtracting the second differential phase image captured in the preliminary radiography from the first differential phase image captured in the actual radiography. A system controller compares this period with a view size of an X-ray image detector. When the period is smaller than the view size, a message to suggest re-execution of the preliminary radiography is displayed on a monitor. When the preliminary radiography is re-executed, a new second differential phase image obtained by the re-execution of the preliminary radiography is subtracted from the first differential phase image, to produce a new corrected differential phase image.

Abstract: A radiological image detection apparatus includes a first grating unit, a grating pattern unit, a radiological image detector, and an anti-scatter grating. The grating pattern unit has a period that substantially coincides with a pattern period of a radiological image formed by radiation having passed through the first grating unit. The radiological image detector detects the radiological image masked by the grating pattern unit. The anti-scatter grating is arranged on a path of the radiation incident onto the radiological image detector and removes scattered radiation. A smoothing process is performed for at least one of a surface and a backside of the anti-scatter grating intersecting with a traveling direction of the radiation.

Abstract: A radiographic apparatus includes a first grating unit, a grating pattern unit, a radiological image detector. The first grating unit has a plurality of radiation shield units that shields the radiation emitted from the radiation source and a substrate on which the first radiation shield units are arranged and which enables the radiation emitted from the radiation source to penetrate therethrough. The grating pattern unit has a period that substantially coincides with a pattern period of a radiological image. The radiological image detector detects the radiological image masked by the grating pattern unit and has a plurality of pixels converting and accumulating the radiation into charges and a substrate. A thermal expansion coefficient of the substrate of the first grating unit is the substantially same as a thermal expansion coefficient of the substrate of the radiological image detector.

Abstract: Defects observed by imaging tools may be classified by automatic comparison of features observed in a defect image with design information relating to corresponding portions of the image. Defect information may be generated from a defect image from a defect imaging tool. Design information relating to one or more structures to be formed on the substrate in a vicinity of the defect may be retrieved. The defect may be classified based on a combination of the defect information from the defect image and design information relating to one or more structures to be formed on the substrate in the vicinity of the defect.

Abstract: A radiographic system which detects a radiation image transmitted through a subject with a radiation image detector and generates a phase contrast image of the subject, includes: a calculation section that calculates a distribution of refraction angles of radiation incident on the radiation image detector and generates the phase contrast image on the basis of the distribution of refraction angles; and a storage section that stores a correction coefficient of each pixel for making sensitivities of pixels equal. The calculation section performs sensitivity correction on a refraction angle of radiation incident on each pixel of the radiation image detector, which is calculated by imaging the subject, using the correction coefficient of the pixel stored in the storage section and generates the phase contrast image of the subject on the basis of the distribution of corrected refraction angles.

Abstract: An X-ray imaging system includes an X-ray source, first and second absorption gratings, and an FPD. The first absorption grating passes X-ray emitted from the X-ray source to form a G1 image. The second absorption grating modulates intensity of the G1 image at each of relative positions to form two or more fringe images. The relative positions differ in phase with respect to a period pattern of the G1 image. The FPD detects two or more frames of image data of the fringe images. A defective pixel detector reads two or more frames of image data stored in a memory and obtains a characteristic value of an intensity modulated signal on a pixel-by-pixel basis based on the read image data. The defective pixel detector detects a defective pixel based on the characteristic value obtained.

Abstract: A radiation imaging system includes first and second gratings, a scanning system, a detector, an image generator, a storage, and a correction processing section. The first grating includes first grating modules arranged cylindrically about a virtual line. The virtual line passes through a focal point. The second grating includes second grating modules arranged cylindrically and coaxially about the virtual line with a larger radius. Grating lines of the first and second gratings are parallel with the virtual line. The scanning mechanism scans the second grating orthogonally to the virtual line. The detector is divided into segments corresponding to the second grating modules. The storage stores an offset value, per segment, corresponding to an inclination angle of the second grating module relative to scanning. The correction processing section corrects a phase differential image on a segment-by-segment basis based on the offset value.

Abstract: A front end rigid portion constitutes a front end of an endoscope insertion unit in an endoscope. The front end rigid portion is provided with an illumination optical system irradiating an observation target area with illumination light and an imaging optical system having an imaging element imaging the observation target area. The endoscope includes a heat emission member which is connected to the front end rigid portion and extends in the longitudinal direction of the endoscope insertion unit. The heat emission member is formed by mixing fiber-piece-shaped fillers with a resin material.

Abstract: Defects observed by imaging tools may be classified by automatic comparison of features observed in a defect image with design information relating to corresponding portions of the image. Defect information may be generated from a defect image from a defect imaging tool. Design information relating to one or more structures to be formed on the substrate in a vicinity of the defect may be retrieved. The defect may be classified based on a combination of the defect information from the defect image and design information relating to one or more structures to be formed on the substrate in the vicinity of the defect.

Abstract: One embodiment relates to an electron beam apparatus for automated imaging of a substrate surface. An electron source is configured to emit electrons, and a gun lens is configured to focus the electrons emitted by the electron source so as to form an electron beam. A condenser lens system is configured to receive the electron beam and to reduce its numerical aperture to an ultra-low numerical aperture. An objective lens is configured to focus the ultra-low numerical aperture beam onto the substrate surface. Other embodiments are also disclosed.