Patents by Inventor Takumi Ueno

Takumi Ueno has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9786576
    Abstract: A positive-type photosensitive resin composition includes (A) a phenol resin modified by a compound having an unsaturated hydrocarbon group having 4 to 100 carbon atoms; (B) a compound that produces an acid by light; (C) a thermal crosslinking agent; and (D) a solvent. The positive-type photosensitive resin composition according to the present invention can be developed by an alkaline aqueous solution, and an effect thereof is that a resist pattern having sufficiently high sensitivity and resolution, excellent adhesion, and good thermal shock resistance can be formed.
    Type: Grant
    Filed: November 7, 2008
    Date of Patent: October 10, 2017
    Assignee: HITACHI CHEMICAL COMPANY, LTD
    Inventors: Hiroshi Matsutani, Takumi Ueno, Alexandre Nicolas, Ken Nanaumi
  • Patent number: 8852726
    Abstract: A photosensitive polymer composition includes (a) a polyamide having a repeating unit represented by the following general formula (I): wherein U represents a tetravalent organic group, V represents a bivalent organic group and p is an integer representing a number of the repeating unit; (b) a compound which generates an acid upon receiving light; and (c) a compound represented by the following general formula (II): wherein m and n are each independently integer of 1 or 2, Rs are each independently hydrogen, alkyl group or acyl group, and R1 and R2 each independently represents fluoroalkyl group having 1 to 3 carbon atoms.
    Type: Grant
    Filed: June 21, 2012
    Date of Patent: October 7, 2014
    Assignee: Hitachi Chemical Dupont Microsystems Ltd.
    Inventors: Masayuki Ooe, Hiroshi Komatsu, Yoshiko Tsumaru, Dai Kawasaki, Kouji Katou, Takumi Ueno
  • Patent number: 8836089
    Abstract: The positive-type photosensitive resin composition according to the present invention comprises an alkali-soluble resin having a phenolic hydroxyl group, a compound that produces an acid by light, a thermal crosslinking agent, and a silane compound having at least one functional group selected from an epoxy group and a sulfide group.
    Type: Grant
    Filed: September 2, 2011
    Date of Patent: September 16, 2014
    Assignee: Hitachi Chemical Company, Ltd.
    Inventors: Akitoshi Tanimoto, Shigeru Nobe, Kei Kasuya, Hiroshi Matsutani, Takumi Ueno, Yu Aoki, Shingo Tahara
  • Publication number: 20130168859
    Abstract: The positive-type photosensitive resin composition according to the present invention comprises an alkali-soluble resin having a phenolic hydroxyl group, a compound that produces an acid by light, a thermal crosslinking agent, and a silane compound having at least one functional group selected from an epoxy group and a sulfide group.
    Type: Application
    Filed: September 2, 2011
    Publication date: July 4, 2013
    Inventors: Akitoshi Tanimoto, Shigeru Nobe, Kei Kasuya, Hiroshi Matsutani, Takumi Ueno, Yu Aoki, Shingo Tahara
  • Patent number: 8461699
    Abstract: The positive tone photosensitive composition of the invention comprises an alkali-soluble resin having a phenolic hydroxyl group, a compound producing an acid by light, a thermal crosslinking agent and an acrylic resin. It is possible to provide a positive tone photosensitive composition that can be developed with an aqueous alkali solution, has sufficiently high sensitivity and resolution, and can form a resist pattern with excellent adhesiveness and thermal shock resistance.
    Type: Grant
    Filed: December 16, 2009
    Date of Patent: June 11, 2013
    Assignee: Hitachi Chemical Company, Ltd.
    Inventors: Hiroshi Matsutani, Takumi Ueno, Alexandre Nicolas, Yukihiko Yamashita, Ken Nanaumi, Akitoshi Tanimoto
  • Patent number: 8426985
    Abstract: A positive tone photosensitive composition comprising: (A) an alkali-soluble resin having a phenolic hydroxyl group; (B) a phenol resin modified by a compound having an unsaturated hydrocarbon group containing 4 to 100 carbon atoms; (C) a compound that generates an acid by the action of light; (D) a thermal cross-linker that crosslinks the ingredient (A) and the ingredient (B) by heating; and (E) a solvent.
    Type: Grant
    Filed: September 2, 2009
    Date of Patent: April 23, 2013
    Assignee: Hitachi Chemical Company, Ltd.
    Inventors: Hiroshi Matsutani, Takumi Ueno, Alexandre Nicolas, Ken Nanaumi
  • Patent number: 8304149
    Abstract: A photosensitive polymer composition, having (a) a polymer selected from polyimide precursors and polyimides having an acid group protected by a protecting group and having no amino group (—NH2) at the end; and (b) a compound that generates an acid when exposed to light and capable of deprotecting the protecting group from the acid group, is employed to form layers of a semiconductor device.
    Type: Grant
    Filed: December 7, 2010
    Date of Patent: November 6, 2012
    Assignees: Hitachi Chemical Dupont Microsystems Ltd., Hitachi Chemical Dupont Microsystems L.L.C.
    Inventors: Masataka Nunomura, Masayuki Ooe, Hajime Nakano, Yoshiko Tsumaru, Takumi Ueno
  • Publication number: 20120263920
    Abstract: A photosensitive polymer composition includes (a) a polyamide having a repeating unit represented by the following general formula (I): wherein U represents a tetravalent organic group, V represents a bivalent organic group and p is an integer representing a number of the repeating unit; (b) a compound which generates an acid upon receiving light; and (c) a compound represented by the following general formula (II): wherein m and n are each independently integer of 1 or 2, Rs are each independently hydrogen, alkyl group or acyl group, and R1 and R2 each independently represents fluoroalkyl group having 1 to 3 carbon atoms.
    Type: Application
    Filed: June 21, 2012
    Publication date: October 18, 2012
    Inventors: Masayuki Ooe, Hiroshi Komatsu, Yoshiko Tsumaru, Dai Kawasaki, Kouji Katou, Takumi Ueno
  • Patent number: 8231959
    Abstract: A photosensitive polymer composition includes (a) a polyamide having a repeating unit represented by the following general formula (I): wherein U represents a tetravalent organic group, V represents a bivalent organic group and p is an integer representing a number of the repeating unit; (b) a compound which generates an acid upon receiving light; and (c) a compound represented by the following general formula (II): wherein m and n are each independently integer of 1 or 2, Rs are each independently hydrogen, alkyl group or acyl group, and R1 and R2 each independently represents fluoroalkyl group having 1 to 3 carbon atoms.
    Type: Grant
    Filed: December 16, 2004
    Date of Patent: July 31, 2012
    Assignee: Hitachi Chemical Dupont Microsystems Ltd.
    Inventors: Masayuki Ooe, Hiroshi Komatsu, Yoshiko Tsumaru, Dai Kawasaki, Kouji Katou, Takumi Ueno
  • Patent number: 8097386
    Abstract: A positive-type photosensitive resin composition for electronic materials having good film adhesiveness and sensitivity without causing a corrosion reaction to copper and copper alloys in metal wirings, a method for producing patterns and electronic parts are provided. The positive-type photosensitive resin composition includes (A) a polybenzoxazole precursor having a structure represented by the following general formula (I): wherein X represents a bivalent organic group, Y represents a tetravalent organic group, R1 represents a hydrogen atom or a monovalent organic group, and m represents an integer of 2 to 500 which represents a repeating unit number of the polymer, (B) a solvent, (C) a tetrazole derivative and (D) a compound which generates an acid by light.
    Type: Grant
    Filed: August 14, 2006
    Date of Patent: January 17, 2012
    Assignee: Hitachi Chemical DuPont Microsystems, Ltd.
    Inventors: Hajime Nakano, Noriyuki Yamazaki, Yoshiko Futagawa, Yoshika Satou, Dai Kawasaki, Takumi Ueno
  • Publication number: 20110254178
    Abstract: The positive tone photosensitive composition of the invention comprises an alkali-soluble resin having a phenolic hydroxyl group, a compound producing an acid by light, a thermal crosslinking agent and an acrylic resin. It is possible to provide a positive tone photosensitive composition that can be developed with an aqueous alkali solution, has sufficiently high sensitivity and resolution, and can form a resist pattern with excellent adhesiveness and thermal shock resistance.
    Type: Application
    Filed: December 16, 2009
    Publication date: October 20, 2011
    Inventors: Hiroshi Matsutani, Takumi Ueno, Alexandre Nicolas, Yukihiko Yamashita, Ken Nanaumi, Akitoshi Tanimoto
  • Publication number: 20110250396
    Abstract: A positive-type photosensitive resin composition includes (A) a phenol resin modified by a compound having an unsaturated hydrocarbon group having 4 to 100 carbon atoms; (B) a compound that produces an acid by light; (C) a thermal crosslinking agent; and (D) a solvent. The positive-type photosensitive resin composition according to the present invention can be developed by an alkaline aqueous solution, and an effect thereof is that a resist pattern having sufficiently high sensitivity and resolution, excellent adhesion, and good thermal shock resistance can be formed.
    Type: Application
    Filed: November 7, 2008
    Publication date: October 13, 2011
    Inventors: Hiroshi Matsutani, Takumi Ueno, Alexandre Nicolas, Ken Nanaumi
  • Publication number: 20110204528
    Abstract: A positive tone photosensitive composition comprising: (A) an alkali-soluble resin having a phenolic hydroxyl group; (B) a phenol resin modified by a compound having an unsaturated hydrocarbon group containing 4 to 100 carbon atoms; (C) a compound that generates an acid by the action of light; (D) a thermal cross-linker that crosslinks the ingredient (A) and the ingredient (B) by heating; and (E) a solvent.
    Type: Application
    Filed: September 2, 2009
    Publication date: August 25, 2011
    Inventors: Hiroshi Matsutani, Takumi Ueno, Alexandre Nicolas, Ken Nanaumi
  • Publication number: 20110076458
    Abstract: A photosensitive polymer composition, having (a) a polymer selected from polyimide precursors and polyimides having an acid group protected by a protecting group and having no amino group (—NH2) at the end; and (b) a compound that generates an acid when exposed to light and capable of deprotecting the protecting group from the acid group, is employed to form layers of a semiconductor device.
    Type: Application
    Filed: December 7, 2010
    Publication date: March 31, 2011
    Inventors: Masataka NUNOMURA, Masayuki Ooe, Hajime Nakano, Yoshiko Tsumaru, Takumi Ueno
  • Patent number: 7851128
    Abstract: A photosensitive polymer composition, having (a) a polymer selected from polyimide precursors and polyimides having an acid group protected by a protecting group and having no amino group (—NH2) at the end; and (b) a compound that generates an acid when exposed to light and capable of deprotecting the protecting group from the acid group, is employed to form layers of a semiconductor device.
    Type: Grant
    Filed: November 29, 2006
    Date of Patent: December 14, 2010
    Assignees: Hitachi Chemical Dupont Microsystems Ltd., Hitachi Chemical Dupont Microsystems L.L.C.
    Inventors: Masataka Nunomura, Masayuki Ooe, Hajime Nakano, Yoshiko Tsumaru, Takumi Ueno
  • Publication number: 20100227126
    Abstract: A positive-type photosensitive resin composition for electronic materials having good film adhesiveness and sensitivity without causing a corrosion reaction to copper and copper alloys in metal wirings, a method for producing patterns and electronic parts are provided. The positive-type photosensitive resin composition includes (A) a polybenzoxazole precursor having a structure represented by the following general formula (I): wherein X represents a bivalent organic group, Y represents a tetravalent organic group, R1 represents a hydrogen atom or a monovalent organic group, and m represents an integer of 2 to 500 which represents a repeating unit number of the polymer, (B) a solvent, (C) a tetrazole derivative and (D) a compound which generates an acid by light.
    Type: Application
    Filed: August 14, 2006
    Publication date: September 9, 2010
    Inventors: Hajime Nakano, Noriyuki Yamazaki, Yoshiko Futagawa, Yoshika Satou, Dai Kawasaki, Takumi Ueno
  • Publication number: 20080220222
    Abstract: A photosensitive polymer composition includes (a) a polyamide having a repeating unit represented by the following general formula (I): wherein U represents a tetravalent organic group, V represents a bivalent organic group and p is an integer representing a number of the repeating unit; (b) a compound which generates an acid upon receiving light; and (c) a compound represented by the following general formula (II): wherein m and n are each independently integer of 1 or 2, Rs are each independently hydrogen, alkyl group or acyl group, and R1 and R2 each independently represents fluoroalkyl group having 1 to 3 carbon atoms.
    Type: Application
    Filed: December 16, 2004
    Publication date: September 11, 2008
    Inventors: Ooe Masayuki, Hiroshi Komatsu, Yoshiko Tsumaru, Dai Kawasaki, Kouji Katou, Takumi Ueno
  • Patent number: 7220481
    Abstract: A high dielectric composite material obtained by subjecting submicron particles of an inorganic filler containing a metal as its essential component to an insulating treatment such as a chemical treatment, further subjecting to a surface treatment for improving their compatibility with organic resins, and then dispersing in an organic resin, has a dielectric constant of 15 or above, with its dielectric loss tangent in the frequency region of from 100 MHz to 80 GHz being 0.1 or less, and can therefore be used effectively for multilayer wiring boards and module substrates.
    Type: Grant
    Filed: February 5, 2002
    Date of Patent: May 22, 2007
    Assignee: Hitachi, Ltd.
    Inventors: Yuichi Satsu, Akio Takahashi, Tadashi Fujieda, Takumi Ueno, Haruo Akahoshi
  • Patent number: 7217992
    Abstract: Semiconductor devices,-semiconductor wafers, and semiconductor modules are provided: wherein the semiconductor device has a small warp; damages at chip edge and cracks in a dropping test are scarcely generated; and the semiconductor device is superior in mounting reliability and mass producibility. The semiconductor device 17 comprising: a semiconductor chip 64; a porous stress relaxing layer 3 provided on the plane, whereon circuits and electrodes are formed, of the semiconductor chip; a circuit layer 2 provided on the stress relaxing layer and connected to the electrodes; and external terminals 10 provided on the circuit layer; wherein an organic protecting film 7 is formed on the plane, opposite to the stress relaxing layer, of the semiconductor chip, and respective side planes of the stress relaxing layer, the semiconductor chip 6, and the protecting film 7 are exposed outside on a same plane.
    Type: Grant
    Filed: June 7, 2004
    Date of Patent: May 15, 2007
    Assignee: Renesas Technology Corp.
    Inventors: Masahiko Ogino, Takumi Ueno, Shuji Eguchi, Akira Nagai, Toshiya Satoh, Toshiaki Ishii, Hiroyoshi Kokaku, Tadanori Segawa, Nobutake Tsuyuno, Asao Nishimura, Ichiro Anjoh
  • Publication number: 20070072122
    Abstract: A photosensitive polymer composition, having (a) a polymer selected from polyimide precursors and polyimides having an acid group protected by a protecting group and having no amino group (—NH2) at the end; and (b) a compound that generates an acid when exposed to light and capable of deprotecting the protecting group from the acid group, is employed to form layers of a semiconductor device.
    Type: Application
    Filed: November 29, 2006
    Publication date: March 29, 2007
    Inventors: Masataka Nunomura, Masayuki Ooe, Hajime Nakano, Yoshiko Tsumaru, Takumi Ueno