Patents by Inventor Takuya Sugawara
Takuya Sugawara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20110151138Abstract: The method for depositing a film of the present invention comprises the first irradiation step of irradiating particles having energy on a surface of a substrate 101, the first film deposition step of depositing a first film 103 on the surface of the substrate 101 subjected to the first irradiation step by using a dry process, and the second film deposition step of depositing a second film 105 having oil repellency on a surface of the first film 103. According to the present invention, a method for depositing a film enabling production of an oil-repellent substrate comprising an oil-repellent film having abrasion resistance of a practically sufficient level can be provided.Type: ApplicationFiled: August 24, 2009Publication date: June 23, 2011Applicant: SHINCRON Co., Ltd.Inventors: Ichiro Shiono, Ekishu Nagae, Yousong Jiang, Takuya Sugawara
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Publication number: 20110151247Abstract: The method for depositing a film of the present invention comprises the first film deposition step of depositing a first film 103 having hardness higher than hardness of a substrate 101 on a surface of the substrate 101, the first irradiation step of irradiating particles having energy on the first film 103, and the second film deposition step of depositing an oil-repellent film 105 on a surface of the first film 103 subjected to the first irradiation step. According to the present invention, a method for depositing a film enabling production of an oil-repellent substrate comprising an oil-repellent film having abrasion resistance of a practically sufficient level can be provided.Type: ApplicationFiled: August 24, 2009Publication date: June 23, 2011Applicant: SHINCRON Co., Ltd.Inventors: Ichiro Shiono, Ekishu Nagae, Yousong Jiang, Takuya Sugawara
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Patent number: 7955922Abstract: A method for manufacturing a fin-type field effect transistor simply and securely by using a SOI (Silicon On Insulator) wafer, capable of suppressing an undercut formation, is disclosed. The method includes forming a fin-shaped protrusion by selectively dry-etching a single crystalline silicon layer until an underlying buried oxide layer is exposed; forming a sacrificial oxide film by oxidizing a surface of the protrusion including a damage inflicted thereon; and forming a fin having a clean surface by removing the sacrificial oxide film by etching, wherein an etching rate r1 of the sacrificial oxide film is higher than an etching rate r2 of the buried oxide layer during the etching.Type: GrantFiled: January 11, 2008Date of Patent: June 7, 2011Assignee: Tokyo Electron LimitedInventors: Hajime Nakabayashi, Takuya Sugawara, Takashi Kobayashi, Junichi Kitagawa, Yoshitsugu Tanaka
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Publication number: 20110124175Abstract: An alteration method of a titanium nitride film, comprising exposing a titanium nitride film formed on a semiconductor substrate to plasma obtained by exciting a process gas that includes noble gas or nitrogen and excludes oxygen, thereby increasing a specific resistance of the titanium nitride film.Type: ApplicationFiled: July 8, 2009Publication date: May 26, 2011Inventors: Takuya Sugawara, Yoshihiro Sato
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Patent number: 7759598Abstract: A method for hydrogen sintering a substrate including a semiconductor device formed thereon comprises the steps of exciting a processing gas comprising a noble gas and a hydrogen gas to form a plasma comprising hydrogen radicals and hydrogen ions, and exposing the substrate to the plasma. A preferred method comprises forming a gate insulation film on a substrate, forming a polysilicon electrode on the gate insulation film, and exposing the polysilicon electrode to an atmosphere comprising hydrogen radicals and hydrogen ions.Type: GrantFiled: April 25, 2007Date of Patent: July 20, 2010Assignee: Tokyo Electron LimitedInventors: Takuya Sugawara, Seiji Matsuyama, Masaru Sasaki
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Publication number: 20100105215Abstract: An insulting film is modified by subjecting the insulting film to a modification treatment comprising a combination of a plasma treatment and a thermal annealing treatment. There is provided a method of enhancing the characteristic of an insulating film by improving deterioration in the characteristic of the insulating film due to carbon, a suboxide, a dangling bond or the like contained in the insulating film.Type: ApplicationFiled: December 7, 2009Publication date: April 29, 2010Applicant: TOKYO ELECTRON LIMITEDInventors: Takuya SUGAWARA, Yoshihide TADA, Genji NAKAMURA, Shigenori OZAKI, Toshio NAKANISHI, Masaru SASAKI, Seiji MATSUYAMA, Kazuhide HASEBE, Shigeru NAKAJIMA, Tomonori FUJIWARA
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Publication number: 20100096707Abstract: In a process involving the formation of an insulating film on a substrate for an electronic device, the insulating film is formed on the substrate surface by carrying out two or more steps for regulating the characteristic of the insulating film involved in the process under the same operation principle. The formation of an insulating film having a high level of cleanness can be realized by carrying out treatment such as cleaning, oxidation, nitriding, and a film thickness reduction while avoiding exposure to the air. Further, carrying out various steps regarding the formation of an insulating film under the same operation principle can realize simplification of the form of an apparatus and can form an insulating film having excellent property with a high efficiency.Type: ApplicationFiled: December 28, 2009Publication date: April 22, 2010Applicant: TOKYO ELECTRON LIMITEDInventors: Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Shigenori Ozaki, Toshio Nakanishi, Masaru Sasaki, Seiji Matsuyama
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Publication number: 20100068896Abstract: A method of processing a substrate to form a thin film into which an impurity is introduced, the method including forming a thin film on the substrate; and introducing the impurity to the thin film by irradiating a gas cluster ion beam, which is generated by ionizing and accelerating a gas cluster of the impurity, onto the thin film.Type: ApplicationFiled: September 16, 2009Publication date: March 18, 2010Applicant: TOKYO ELECTRON LIMITEDInventors: Takuya SUGAWARA, Koji YAMASHITA
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Patent number: 7662236Abstract: In a process involving the formation of an insulating film on a substrate for an electronic device, the insulating film is formed on the substrate surface by carrying out two or more steps for regulating the characteristic of the insulating film involved in the process under the same operation principle. The formation of an insulating film having a high level of cleanness can be realized by carrying out treatment such as cleaning, oxidation, nitriding, and a film thickness reduction while avoiding exposure to the air. Further, carrying out various steps regarding the formation of an insulating film under the same operation principle can realize simplification of the form of an apparatus and can form an insulating film having excellent property with a high efficiency.Type: GrantFiled: June 25, 2008Date of Patent: February 16, 2010Assignee: Tokyo Electron LimitedInventors: Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Shigenori Ozaki, Toshio Nakanishi, Masaru Sasaki, Seiji Matsuyama
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Publication number: 20100035439Abstract: The invention includes inserting an object to be processed into a processing vessel, which can be maintained vacuum, and making the processing vessel vacuum; performing a sequence of forming a ZrO2 film on a substrate by alternately supplying zirconium source and an oxidizer into the processing vessel for a plurality of times and a sequence of forming SiO2 film on the substrate by alternately supplying silicon source and an oxidizer into the processing vessel for one or more times, wherein the number of times of performing each of the sequences is adjusted such that Si concentration of the films is from about 1 atm % to about 4 atm %; and forming a zirconia-based film having a predetermined thickness by performing the film forming sequences for one or more cycles, wherein one cycle indicates that each of the ZrO2 film forming sequences and the SiO2 film forming sequences are repeated for the adjusted number of times of performances.Type: ApplicationFiled: August 6, 2009Publication date: February 11, 2010Applicant: TOKYO ELECTRON LIMITEDInventors: Yoshihiro Ishida, Katsushige Harada, Takuya Sugawara
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Patent number: 7655574Abstract: An insulting film is modified by subjecting the insulting film to a modification treatment comprising a combination of a plasma treatment and a thermal annealing treatment. There is provided a method of enhancing the characteristic of an insulating film by improving deterioration in the characteristic of the insulating film due to carbon, a suboxide, a dangling bond or the like contained in the insulating film.Type: GrantFiled: November 30, 2005Date of Patent: February 2, 2010Assignee: Tokyo Electron LimitedInventors: Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Shigenori Ozaki, Toshio Nakanishi, Masaru Sasaki, Seiji Matsuyama, Kazuhide Hasebe, Shigeru Nakajima, Tomonori Fujiwara
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Patent number: 7622402Abstract: The surface of an insulating film disposed on an electronic device substrate is irradiated with plasma based on a process gas comprising at least an oxygen atom-containing gas, to thereby form an underlying film at the interface between the insulating film and the electronic device substrate. A good underlying film is provided at the interface between the insulating film and the electronic device substrate, so that the thus formed underlying film can improve the property of the insulating film.Type: GrantFiled: March 31, 2003Date of Patent: November 24, 2009Assignee: Tokyo Electron LimitedInventors: Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Shigenori Ozaki, Toshio Nakanishi, Masaru Sasaki, Seiji Matsuyama, Kazuhide Hasebe, Shigeru Nakajima, Tomonori Fujiwara
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Patent number: 7560396Abstract: An electronic device material comprising at least an electronic device substrate and a silicon oxynitride film disposed on the substrate is provided. The silicon oxynitride film is characterized by containing nitrogen atoms in a large amount in the vicinity of the oxynitride film surface when the nitrogen content distribution in the thickness direction of the silicon oxynitride film is examined by SIMS (secondary ion mass spectrometry) analysis. By virtue of this constitution, an electronic device material comprising an oxynitride film having an excellent effect of preventing penetration of boron and having excellent gate leak properties can be obtained.Type: GrantFiled: March 31, 2003Date of Patent: July 14, 2009Assignee: Tokyo Electron LimitedInventors: Takuya Sugawara, Shigenori Ozaki, Masaru Sasaki
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Publication number: 20090163036Abstract: A substrate processing method includes the step of forming an oxide film by oxidizing a silicon substrate surface and the step of nitriding the oxide film to form an oxynitride film, wherein there is provided a step of purging oxygen after the oxidizing step but before said nitriding step from an ambient in which said nitriding processing is conducted.Type: ApplicationFiled: February 25, 2009Publication date: June 25, 2009Applicant: TOKYO ELECTRON LIMITEDInventors: Takuya Sugawara, Seiji Matsuyama, Masaru Sasaki
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Patent number: 7517818Abstract: A method and system for forming a nitrided germanium-containing layer by plasma processing. The method includes providing a germanium-containing substrate in a process chamber, generating a plasma from a process gas containing N2 and a noble gas, where the plasma conditions are selected effective to form plasma excited N2 species while controlling formation of plasma excited N species, and exposing the substrate to the plasma to form a nitrided germanium-containing layer on the substrate. A method is also provided that includes exposing a germanium-containing dielectric layer to liquid or gaseous H2O to alter the thickness and chemical composition of the layer.Type: GrantFiled: October 31, 2005Date of Patent: April 14, 2009Assignees: Tokyo Electron Limited, The Board of Trustees of the Leland Stanford Junior UniversityInventors: Takuya Sugawara, Paul C. McIntyre
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Patent number: 7517751Abstract: A substrate processing method includes the step of forming an oxide film by oxidizing a silicon substrate surface and the step of nitriding the oxide film to form an oxynitride film, wherein there is provided a step of purging oxygen after the oxidizing step but before said nitriding step from an ambient in which said nitriding processing is conducted.Type: GrantFiled: March 10, 2005Date of Patent: April 14, 2009Assignee: Tokyo Electron LimitedInventors: Takuya Sugawara, Seiji Matsuyama, Masaru Sasaki
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Patent number: 7517812Abstract: A method and system for forming a nitrided germanium-containing layer by plasma processing. The method includes providing a germanium-containing substrate in a process chamber, generating a plasma from a process gas containing N2 and a noble gas, where the plasma conditions are selected effective to form plasma excited N2 species while controlling formation of plasma excited N species, and exposing the substrate to the plasma to form a nitrided germanium-containing layer on the substrate. A method is also provided that includes exposing a germanium-containing dielectric layer to liquid or gaseous H2O to alter the thickness and chemical composition of the layer.Type: GrantFiled: October 31, 2005Date of Patent: April 14, 2009Assignees: Tokyo Electron Limited, The Board of Trustees of the Leland Stanford Junior UniversityInventors: Takuya Sugawara, Paul C. McIntyre
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Publication number: 20090035950Abstract: A substrate processing method comprises the step of forming an oxide film on a silicon substrate surface, and introducing nitrogen atoms into the oxide film by exposing the oxide film to nitrogen radicals excited in plasma formed by a microwave introduced via a planar antenna.Type: ApplicationFiled: August 29, 2008Publication date: February 5, 2009Applicant: TOKYO ELECTRON LIMITEDInventors: Seijii Matsuyama, Takuya Sugawara, Shigenori Ozaki, Toshio Nakanishi, Masaru Sasaki
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Publication number: 20080274370Abstract: In a process involving the formation of an insulating film on a substrate for an electronic device, the insulating film is formed on the substrate surface by carrying out two or more steps for regulating the characteristic of the insulating film involved in the process under the same operation principle. The formation of an insulating film having a high level of cleanness can be realized by carrying out treatment such as cleaning, oxidation, nitriding, and a film thickness reduction while avoiding exposure to the air. Further, carrying out various steps regarding the formation of an insulating film under the same operation principle can realize simplification of the form of an apparatus and can form an insulating film having excellent property with a high efficiency.Type: ApplicationFiled: June 25, 2008Publication date: November 6, 2008Applicant: TOKYO ELECTRON LIMITEDInventors: Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Shigenori Ozaki, Toshio Nakanishi, Masaru Sasaki, Seiji Matsuyama
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Patent number: 7446052Abstract: In a process involving the formation of an insulating film on a substrate for an electronic device, the insulating film is formed on the substrate surface by carrying out two or more steps for regulating the characteristic of the insulating film involved in the process under the same operation principle. The formation of an insulating film having a high level of cleanness can be realized by carrying out treatment such as cleaning, oxidation, nitriding, and a film thickness reduction while avoiding exposure to the air. Further, carrying out various steps regarding the formation of an insulating film under the same operation principle can realize simplification of the form of an apparatus and can form an insulating film having excellent property with a high efficiency.Type: GrantFiled: March 31, 2003Date of Patent: November 4, 2008Assignee: Tokyo Electron LimitedInventors: Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Shigenori Ozaki, Toshio Nakanishi, Masaru Sasakii, Seiji Matsuyama