Patents by Inventor Tao-Yi Fu
Tao-Yi Fu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7327464Abstract: A system and method for coherent optical inspection are described. In one embodiment, an illuminating beam illuminates a sample, such as a semiconductor wafer, to generate a reflected beam. A reference beam then interferes with the reflected beam to generate an interference pattern at a detector, which records the interference pattern. The interference pattern may then be compared with a comparison image to determine differences between the interference pattern and the comparison image. According to another aspect, the phase difference between the reference beam and the reflected beam may be adjusted to enhance signal contrast. Another embodiment provides for using differential interference techniques to suppress a regular pattern in the sample.Type: GrantFiled: April 23, 2007Date of Patent: February 5, 2008Assignee: KLA-Tencor Technologies CorporationInventors: Shiow-Hwei Hwang, Tao-Yi Fu
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Publication number: 20080007726Abstract: The broadband brightfield/darkfield wafer inspection system provided receives broadband brightfield illumination information via a defect detector, which signals for initiation of darkfield illumination. The defect detector forms a two dimensional histogram of the defect data and a dual mode defect decision algorithm and post processor assess defects. Darkfield radiation is provided by two adjustable height laser beams which illuminate the surface of the wafer from approximately 6 to 39 degrees. Each laser is oriented at an azimuth angle 45 degrees from the orientation of the manhattan geometry on the wafer, and 90 degrees in azimuth from one another. Vertical angular adjustability is provided by modifying cylindrical lens position to compensate for angular mirror change by translating an adjustable mirror, positioning the illumination spot into the sensor field of view, rotating and subsequently moving the cylindrical lens.Type: ApplicationFiled: August 14, 2007Publication date: January 10, 2008Applicant: KLA-Tencor CorporationInventors: Christopher Fairley, Tao-Yi Fu, Gershon Perelman, Bin-Ming Tsai
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Patent number: 7317527Abstract: A filter to selectively block light from passing through the filter and to selectively permit light to pass through the filter. The filter includes an array with a plurality of individually addressable filter elements. Each filter element is selectively settable to have a variable transmittance to the light of between substantially zero percent and substantially one hundred percent. In this manner, the filter according to the present invention provides areas that pass only a portion of the light, and thus can block the light using patterns other than just an abrupt on/off filtering. By so doing, the filter is able to dramatically reduce, and in some embodiments eliminate, the light ringing that typically accompanies such on/off filters.Type: GrantFiled: November 29, 2004Date of Patent: January 8, 2008Assignee: KLA-Tencor Technologies CorporationInventors: Dragos Maciuca, Grace H. Chen, Tao-Yi Fu
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Publication number: 20070195332Abstract: A system and method for coherent optical inspection are described. In one embodiment, an illuminating beam illuminates a sample, such as a semiconductor wafer, to generate a reflected beam. A reference beam then interferes with the reflected beam to generate an interference pattern at a detector, which records the interference pattern. The interference pattern may then be compared with a comparison image to determine differences between the interference pattern and the comparison image. According to another aspect, the phase difference between the reference beam and the reflected beam may be adjusted to enhance signal contrast. Another embodiment provides for using differential interference techniques to suppress a regular pattern in the sample.Type: ApplicationFiled: April 23, 2007Publication date: August 23, 2007Applicant: KLA-Tencor Technologies CorporationInventors: Shiow-Hwei Hwang, Tao-Yi Fu
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Patent number: 7259844Abstract: The broadband brightfield/darkfield wafer inspection system provided receives broadband brightfield illumination information via a defect detector, which signals for initiation of darkfield illumination. The defect detector forms a two dimensional histogram of the defect data and a dual mode defect decision algorithm and post processor assess defects. Darkfield radiation is provided by two adjustable height laser beams which illuminate the surface of the wafer from approximately 6 to 39 degrees. Each laser is oriented at an azimuth angle 45 degrees from the orientation of the manhattan geometry on the wafer, and 90 degrees in azimuth from one another. Vertical angular adjustability is provided by modifying cylindrical lens position to compensate for angular mirror change by translating an adjustable mirror, positioning the illumination spot into the sensor field of view, rotating and subsequently moving the cylindrical lens.Type: GrantFiled: January 12, 2007Date of Patent: August 21, 2007Assignee: KLA-Tencor CorporationInventors: Christopher R. Fairley, Tao-Yi Fu, Gershon Perelman, Bin-Ming Benjamin Tsai
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Publication number: 20070115461Abstract: The broadband brightfield/darkfield wafer inspection system provided receives broadband brightfield illumination information via a defect detector, which signals for initiation of darkfield illumination. The defect detector forms a two dimensional histogram of the defect data and a dual mode defect decision algorithm and post processor assess defects. Darkfield radiation is provided by two adjustable height laser beams which illuminate the surface of the wafer from approximately 6 to 39 degrees. Each laser is oriented at an azimuth angle 45 degrees from the orientation of the manhattan geometry on the wafer, and 90 degrees in azimuth from one another. Vertical angular adjustability is provided by modifying cylindrical lens position to compensate for angular mirror change by translating an adjustable mirror, positioning the illumination spot into the sensor field of view, rotating and subsequently moving the cylindrical lens.Type: ApplicationFiled: January 12, 2007Publication date: May 24, 2007Applicant: KLA-Tencor CorporationInventors: Christopher Fairley, Tao-Yi Fu, Gershon Perelman, Bin-Ming Tsai
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Patent number: 7209239Abstract: A system and method for coherent optical inspection are described. In one embodiment, an illuminating beam illuminates a sample, such as a semiconductor wafer, to generate a reflected beam. A reference beam then interferes with the reflected beam to generate an interference pattern at a detector, which records the interference pattern. The interference pattern may then be compared with a comparison image to determine differences between the interference pattern and the comparison image. According to another aspect, the phase difference between the reference beam and the reflected beam may be adjusted to enhance signal contrast. Another embodiment provides for using differential interference techniques to suppress a regular pattern in the sample.Type: GrantFiled: October 2, 2003Date of Patent: April 24, 2007Assignee: KLA-Tencor Technologies CorporationInventors: Shiow-Hwei Hwang, Tao-Yi Fu
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Publication number: 20070030477Abstract: Systems configured to generate output corresponding to defects on a specimen and systems configured to generate phase information about defects on a specimen are provided. One system includes an optical subsystem that is configured to create interference between a test beam and a reference beam. The test beam and the reference beam are reflected from the specimen. The system also includes a detector that is configured to generate output representative of the interference between the test and reference beams. The interference increases contrast between the output corresponding to the defects and output corresponding to non-defective portions of the specimen.Type: ApplicationFiled: August 2, 2006Publication date: February 8, 2007Applicant: KLA-TENCOR TECHNOLOGIES CORP.Inventors: Shiow-Hwei Hwang, Tao-Yi Fu, Xiumei Liu
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Patent number: 7164475Abstract: The broadband brightfield/darkfield wafer inspection system provided receives broadband brightfield illumination information via a defect detector, which signals for initiation of darkfield illumination. The defect detector forms a two dimensional histogram of the defect data and a dual mode defect decision algorithm and post processor assess defects. Darkfield radiation is provided by two adjustable height laser beams Vertical angular adjustability is provided by modifying cylindrical lens position to compensate for angular mirror change by translating an adjustable mirror, positioning the illumination spot into the sensor field of view, rotating and subsequently moving the cylindrical lens. A brightfield beamsplitter in the system is removable, and preferably replaced with a blank when performing darkfield illumination. Light level control for the system is provided by a dual polarizer first stage.Type: GrantFiled: November 4, 2004Date of Patent: January 16, 2007Assignee: KLA-Tencor Technologies CorporationInventors: Christopher R Fairley, Tao-Yi Fu, Gershon Perelman, Bin-Ming Benjamin Tsai
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Publication number: 20070007429Abstract: A semiconductor wafer inspection system and method is provided which uses a multiple element arrangement, such as an offset fly lens array. The preferred embodiment uses a laser to transmit light energy toward a beam expander, which expands the light energy to create an illumination field. An offset fly lens array converts light energy from the illumination field into an offset pattern of illumination spots. A lensing arrangement, including a first lens, a transmitter/reflector, an objective, and a Mag tube imparts light energy onto the specimen and passes the light energy toward a pinhole mask. The pinhole mask is mechanically aligned with the offset fly lens array. Light energy passing through each pinhole in the pinhole mask is directed toward a relay lens, which guides light energy onto a sensor. The offset fly lens array corresponds to the pinhole mask.Type: ApplicationFiled: September 15, 2006Publication date: January 11, 2007Applicant: KLA-Tencor CorporationInventors: Christopher Fairley, Tao-Yi Fu, Bin-Ming Tsai, Scott Young
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Patent number: 7109458Abstract: A semiconductor wafer inspection system and method is provided which uses a multiple element arrangement, such as an offset fly lens array. The preferred embodiment uses a laser to transmit light energy toward a beam expander, which expands the light energy to create an illumination field. An offset fly lens array converts light energy from the illumination field into an offset pattern of illumination spots. A lensing arrangement, including a first lens, a transmitter/reflector, an objective, and a Mag tube imparts light energy onto the specimen and passes the light energy toward a pinhole mask. The pinhole mask is mechanically aligned with the offset fly lens array. Light energy passing through each pinhole in the pinhole mask is directed toward a relay lens, which guides light energy onto a sensor. The offset fly lens array corresponds to the pinhole mask.Type: GrantFiled: March 14, 2005Date of Patent: September 19, 2006Assignee: KLA-Tencor CorporationInventors: Christopher R. Fairley, Tao-Yi Fu, Bin-Ming Benjamin Tsai, Scott A. Young
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Patent number: 7061625Abstract: In one embodiment, the present invention provides an interferometric inspection system for inspecting semiconductor samples. The system includes at least one illumination source for generating an illumination beam and an interferometric microscope module for splitting the illumination beam into a test beam directed to the semiconductor sample and a reference beam directed to a tilted reference mirror. The beams are combined to generate an interference image at an image sensor. The tilted reference mirror is tilted at a non-normal angle with respect to the reference beam that is incident on the mirror to thereby generate fringes in the interference image. The system also includes an image sensor for acquiring the interference image from the interferometric microscope module and generates an inherence signal.Type: GrantFiled: September 26, 2003Date of Patent: June 13, 2006Assignee: KLA-Tencor Technologies CorporationInventors: Shiow-Hwei Hwang, Tao-Yi Fu
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Publication number: 20050156098Abstract: A semiconductor wafer inspection system and method is provided which uses a multiple element arrangement, such as an offset fly lens array. The preferred embodiment uses a laser to transmit light energy toward a beam expander, which expands the light energy to create an illumination field. An offset fly lens array converts light energy from the illumination field into an offset pattern of illumination spots. A lensing arrangement, including a first lens, a transmitter/reflector, an objective, and a Mag tube imparts light energy onto the specimen and passes the light energy toward a pinhole mask. The pinhole mask is mechanically aligned with the offset fly lens array. Light energy passing through each pinhole in the pinhole mask is directed toward a relay lens, which guides light energy onto a sensor. The offset fly lens array corresponds to the pinhole mask.Type: ApplicationFiled: March 14, 2005Publication date: July 21, 2005Inventors: Christopher Fairley, Tao-Yi Fu, Bin-Ming Tsai, Scott Young
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Patent number: 6867406Abstract: A semiconductor wafer inspection system and method is provided which uses a multiple element arrangement, such as an offset fly lens array. The preferred embodiment uses a laser to transmit light energy toward a beam expander, which expands the light energy to create an illumination field. An offset fly lens array converts light energy from the illumination field into an offset pattern of illumination spots. A lensing arrangement, including a first lens, a transmitter/reflector, an objective, and a Mag tube imparts light energy onto the specimen and passes the light energy toward a pinhole mask. The pinhole mask is mechanically aligned with the offset fly lens array. Light energy passing through each pinhole in the pinhole mask is directed toward a relay lens, which guides light energy onto a sensor. The offset fly lens array corresponds to the pinhole mask.Type: GrantFiled: March 23, 2000Date of Patent: March 15, 2005Assignee: KLA-Tencor CorporationInventors: Christopher R. Fairley, Tao-Yi Fu, Bin-Ming Benjamin Tsai, Scott A. Young
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Publication number: 20050052643Abstract: Methods and systems for inspection of a specimen using different parameters are provided. One computer-implemented method includes determining optimal parameters for inspection based on selected defects. This method also includes setting parameters of an inspection system at the optimal parameters prior to inspection. Another method for inspecting a specimen includes illuminating the specimen with light having a wavelength below about 350 nm and with light having a wavelength above about 350 nm. The method also includes processing signals representative of light collected from the specimen to detect defects or process variations on the specimen. One system configured to inspect a specimen includes a first optical subsystem coupled to a broadband light source and a second optical subsystem coupled to a laser. The system also includes a third optical subsystem configured to couple light from the first and second optical subsystems to an objective, which focuses the light onto the specimen.Type: ApplicationFiled: September 3, 2004Publication date: March 10, 2005Inventors: Steve Lange, Paul Marella, Nat Ceglio, Shiow-Hwei Hwang, Tao-Yi Fu
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Publication number: 20040252297Abstract: The broadband brightfield/darkfield wafer inspection system provided receives broadband brightfield illumination information via a defect detector, which signals for initiation of darkfield illumination. The defect detector forms a two dimensional histogram of the defect data and a dual mode defect decision algorithm and post processor assess defects. Darkfield radiation is provided by two adjustable height laser beams which illuminate the surface of the wafer from approximately 6 to 39 degrees. Each laser is oriented at an azimuth angle 45 degrees from the orientation of the manhattan geometry on the wafer, and 90 degrees in azimuth from one another. Vertical angular adjustability is provided by modifying cylindrical lens position to compensate for angular mirror change by translating an adjustable mirror, positioning the illumination spot into the sensor field of view, rotating and subsequently moving the cylindrical lens.Type: ApplicationFiled: July 9, 2004Publication date: December 16, 2004Applicant: KLA-Tencor Technologies CorporationInventors: Christopher R. Fairley, Tao-Yi Fu, Gershon Perelman, Bin-Ming Benjamin Tsai
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Patent number: 6816249Abstract: The broadband brightfield/darkfield wafer inspection system provided receives broadband brightfield illumination information via a defect detector, which signals for initiation of darkfield illumination. The defect detector forms a two dimensional histogram of the defect data and a dual mode defect decision algorithm and post processor assess defects. Darkfield radiation is provided by two adjustable height laser beams which illuminate the surface of the wafer from approximately 6 to 39 degrees. Each laser is oriented at an azimuth angle 45 degrees from the orientation of the manhattan geometry on the wafer, and 90 degrees in azimuth from one another. Vertical angular adjustability is provided by modifying cylindrical lens position to compensate for angular mirror change by translating an adjustable mirror, positioning the illumination spot into the sensor field of view, rotating and subsequently moving the cylindrical lens.Type: GrantFiled: July 17, 2001Date of Patent: November 9, 2004Assignee: KLA-Tencor CorporationInventors: Christopher R Fairley, Tao-Yi Fu, Gershon Perelman, Bin-Ming Benjamin Tsai
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Publication number: 20040130710Abstract: A system and method for coherent optical inspection are described. In one embodiment, an illuminating beam illuminates a sample, such as a semiconductor wafer, to generate a reflected beam. A reference beam then interferes with the reflected beam to generate an interference pattern at a detector, which records the interference pattern. The interference pattern may then be compared with a comparison image to determine differences between the interference pattern and the comparison image. According to another aspect, the phase difference between the reference beam and the reflected beam may be adjusted to enhance signal contrast. Another embodiment provides for using differential interference techniques to suppress a regular pattern in the sample.Type: ApplicationFiled: October 2, 2003Publication date: July 8, 2004Inventors: Shiow-Hwei Hwang, Tao-Yi Fu
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Patent number: 6584218Abstract: An automated photomask inspection apparatus including an XY state (12) for transporting a substrate (14) under test in a serpentine path in an XY plane, an optical system (16) comprising a laser (30), a transmission light detector (34), a reflected light detector (36), optical elements defining reference beam paths and illuminating beam paths between the laser, the substrate and the detectors and an acousto-optical beam scanner (40, 42) for reciprocatingly scanning the illuminating and reference beams relative to the substrate surface, and an electronic control, analysis and display system for controlling the operation of the stage and optical system and for interpreting and storing the signals output by the detectors. The apparatus can operate in a die-to-die comparison mode or a die-to-database mode.Type: GrantFiled: November 14, 2001Date of Patent: June 24, 2003Assignee: KLA-Tencor CorporationInventors: Mark Joseph Wihl, Tao-Yi Fu, Marek Zywno, Damon Floyd Kvamme, Michael E. Fein
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Publication number: 20020118359Abstract: The broadband brightfield/darkfield wafer inspection system provided receives broadband brightfield illumination information via a defect detector, which signals for initiation of darkfield illumination. The defect detector forms a two dimensional histogram of the defect data and a dual mode defect decision algorithm and post processor assess defects. Darkfield radiation is provided by two adjustable height laser beams which illuminate the surface of the wafer from approximately 6 to 39 degrees. Each laser is oriented at an azimuth angle 45 degrees from the orientation of the manhattan geometry on the wafer, and 90 degrees in azimuth from one another. Vertical angular adjustability is provided by modifying cylindrical lens position to compensate for angular mirror change by translating an adjustable mirror, positioning the illumination spot into the sensor field of view, rotating and subsequently moving the cylindrical lens.Type: ApplicationFiled: July 17, 2001Publication date: August 29, 2002Applicant: KLA-Tencor Technologies CorporationInventors: Christopher R. Fairley, Tao-Yi Fu, Gershon Perelman, Bin-Ming Benjamin Tsai