Abstract: A charged particle beam apparatus capable of automatically measuring an image magnification error of an apparatus and capable of automatically calibrating the image magnification in high precision is provided. To this end, while an image processing operation of either an auto-correlation function or an FFT transformation is employed with respect to a scanning image of a reference material having a periodic structure, the averaged pitch dimension of which is known, averaged periodic information owned by the scanning image is detected so as to measure an image magnification error of the apparatus. Also, the information as to the acquired image magnification error is fed back to an image magnification control means of the apparatus so as to automatically execute a calibration as to the image magnification in high precision.

Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.

Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.

Abstract: A combined terminal fitting assembly is provided to fix ends of three or more wires to one fixing place. Engaging portions (25, 26, 34, 35) for holding a right terminal fitting (TR) and a left terminal fitting (TL) assembled are provided on both upper and lower surfaces of terminal main bodies. Thus, the right terminal fittings (TR) and the left terminal fittings (TL) can be placed alternately one over another. As a result three or more wires (W) can be fixed to one fixing place. Upon assembling, the wire (W) of the right terminal fitting (TR) and the wire (W) of the left terminal fitting (TL) are brought gradually closer to each other from most distant positions. Thus, the left and right wires (W) neither overlap nor interfere with each other.

Abstract: An inspection method and an inspection system of a terminal metal fitting which can securely judge the good or bad of the fastening condition of an electric wire by a crimping piece of the terminal metal fitting is provided. The inspection system 1 of the terminal metal fitting has an illuminating lamp 4, a CCD camera 5, a dark box 6, and a control unit 7. The CCD camera 5 is arranged at a position of the light thrown from the illuminating lamp 4 and reflected by crimping pieces 212a,212b of a pressure welding terminal 200 not entering the CCD camera 5. The dark box 6 covers the illuminating lamp 4, an object side 5a of the CCD camera 5, and the pressure welding terminal 200. The control unit 7 makes a binary processing on an image of a wire connecting portion 204 taken by the CCD camera 5.

Abstract: A combined terminal fitting assembly is provided to fix ends of three or more wires to one fixing place. Engaging portions (25, 26, 34, 35) for holding a right terminal fitting (TR) and a left terminal fitting (TL) assembled are provided on both upper and lower surfaces of terminal main bodies. Thus, the right terminal fittings (TR) and the left terminal fittings (TL) can be placed alternately one over another. As a result three or more wires (W) can be fixed to one fixing place. Upon assembling, the wire (W) of the right terminal fitting (TR) and the wire (W) of the left terminal fitting (TL) are brought gradually closer to each other from most distant positions. Thus, the left and right wires (W) neither overlap nor interfere with each other.

Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a finction for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.

Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.

Abstract: A terminal fitting (1) is provided with a wire connecting portion (3) to be connected with an end of a wire (W) and a shaft fixing portion (5) through which a bolt (4) is insertable. The shaft fixing portion (5) is formed by folding a metallic plate material in three. Each of exposed surface portions (8, 9) located at the front and rear surfaces of the shaft fixing portion (5) is provided with engaging portions (10, 11) for holding the adjacent terminal fittings fixed by engaging with the mating engaging portions (11, 10).

Abstract: A terminal fitting (1) is provided with a wire connecting portion (3) to be connected with an end of a wire (W) and a shaft fixing portion (5) through which a bolt (4) is insertable. The shaft fixing portion (5) is formed by folding a metallic plate material in three. Each of exposed surface portions (8, 9) located at the front and rear surfaces of the shaft fixing portion (5) is provided with engaging portions (10, 11) for holding the adjacent terminal fittings fixed by engaging with the mating engaging portions (11, 10).

Abstract: An inspection apparatus of an electric junction box is provided, by which improper mounting of electric parts can be detected. The inspection apparatus 1 has a CCD camera 5, an image-processing device 7 and a control device 8. The CCD camera picks up images of fuse 14 in the electric junction box 12 as a subject of the inspection. The image-processing device 7 stores an image consulting data 60. The image consulting data 60 includes a plurality of images of each fuse 14 having the same item symbol with regard to every item symbol, the fuses 14 being used in the electric junction box 12. The control device 8 stores normal data indicating the proper item symbol of the fuse 14 to be mounted on a corresponding mount 13. The image-processing device 7 extracts the image most analogous to the image picked up by the CCD camera 5 from the images in the image consulting data. The control device 8 judge the quality of the item symbol of the fuse 14 having the most analogous image on the basis of the normal data.

Abstract: An inspection method and an inspection system of a terminal metal fitting which can securely judge the good or bad of the fastening condition of an electric wire by a crimping piece of the terminal metal fitting is provided. The inspection system 1 of the terminal metal fitting has an illuminating lamp 4, a CCD camera 5, a dark box 6, and a control unit 7. The CCD camera 5 is arranged at a position of the light thrown from the illuminating lamp 4 and reflected by crimping pieces 212a, 212b of a pressure welding terminal 200 not entering the CCD camera 5. The dark box 6 covers the illuminating lamp 4, an object side 5a of the CCD camera 5, and the pressure welding terminal 200. The control unit 7 makes a binary processing on an image of a wire connecting portion 204 taken by the CCD camera 5.

Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed.

Abstract: A data storing method and a data searching method for the stored data for improving memory employment efficiency of RDS reception data while maintaining searching processing speed of PI code, in the data storing method and the data searching method for the stored data, read-address is set to head of PI area, there is judged whether or not the read-address agrees with PI code of storing candidate, when the read-address disagrees with PI code of storing candidate, the read-address is set to next PI storing position. Next, there is judged whether or not check of all PI code is terminated. When the check is not terminated, the processing after judgement of agreement between address PI code and PI code of storing candidate is implemented repeatedly. When there is no agreed PI code in spite of termination of check of all PI code, the storing candidate PI code and AF data are stored at the next of the rearmost of the AF data.

Abstract: A terminal crimping device is composed of an elevating crimper for crimping terminals onto the exposed conductors of cables and an anvil positioned opposite said crimper. The crimper is caused to ascend and descend by means of drive means including a servo motor. The controlling of the terminal crimping operation is done by monitoring the height of the crimper at the time of terminal crimping and the load applied to said drive means and comparing a detected load to the height with the preset reference data to determine whether the terminal crimping performance is good or not. Thus, a reliable determination whether the terminal crimping performance is good or not is performed.

Abstract: A method of controlling a terminal press attaching device by providing a elevating crimper for crimping terminals onto exposed conductors of the cables, setting an anvil opposite to the crimper, and elevating the drive means including a servo motor. More specifically, the crimp height for press attached terminals is monitored, a detected height and the predetermined set value are compared to control said drive means such that the detected height is made equal to the set value. Thus, the crimp height of the terminal to be attached (or the crimper height) is automatically and easily adjusted.

Abstract: A method of controlling the terminal crimping device is proposed by providing an elevating crimper for crimping terminals onto exposed conductors of cables, positioning an anvil opposite to said crimper, elevating the drive means including a servo motor. The standard value for determining whether or not the crimper height is out of conformity with the standard value, the administration value for administering the crimper height, and the decision value for determining whether or not the crimping performance is good or not on the basis of the crimper height are recorded such that an alarm is issued when the crimper height is out of conformity with said standard value, said administration value, and said decision value at the time of terminal crimping operation.

Abstract: A terminal crimping device includes an elevating crimper for crimping terminals onto exposed conductors of cables and an anvil positioned opposite to said elevating crimper so that the ascend/descend of the crimper is carried out by a servo motor. The terminal crimping device further includes a height sensor for outputting a crimp height at the time of crimping said terminals, a data storage unit for storing a pressing time range for determination on whether or not terminal crimping is normal and a crimper height value for determination of said pressing time; and determining unit for time measuring the time during which an output from said height sensor is not larger than the crimper height and determining that crimping is normal if the measured time is within said pressing time range. Thus, the determination on whether or not the terminal crimping is normal can be surely made.

Abstract: An electron beam is focused on a specimen by a focusing lens. A light beam is incident on the position of irradiation of the specimen with the electron beam and the reflected light beam is detected by a linear light detector. The output of the detector is used to measure the height of the specimen at the position of irradiation of the electron beam. The specimen is moved in a plane perpendicular to an optical axis of the focusing lens. A specimen height measuring device carries out the height measurement of the specimen at a position to be observed on the specimen and at positions thereon which are in the vicinity of the position to be observed, when those positions are located at the position of irradiation of the electron beam. The specimen height measuring device averages the measured values so as to produce a focusing correction signal on the basis thereof and controls the focusing lens on the basis of the focusing correction signal.

Abstract: An electron beam apparatus focusses an electron beam onto a specimen by means of an objective magnetic lens. In order to detect changes in the height of the specimen, a laser light beam from a laser source is incident on the specimen and the reflected laser beam is detected by a light detector. Any change in the height of the specimen changes the path of the laser beam to the detector. Therefore, by monitoring the detector, the focussing of the electron beam on the specimen can be controlled by varying the current to an excitation coil of the objective magnetic lens or by moving the specimen via a mounting stage. At least one of the pole pieces of the objective lens is on the opposite side of the path of the laser beam to the source of the electron beam, so that the objective magnetic lens may be close to the specimen, permitting a short focal length. Thus, the laser beam may pass between the pole pieces. An optical microscope may also be provided to permit the specimen to be viewed.