Patents by Inventor Te-Chang Hsu
Te-Chang Hsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240339501Abstract: A method for fabricating a semiconductor device includes the steps of forming a gate structure on a substrate, forming a fin-shaped structure on the substrate, forming a gate structure on the fin-shaped structure, removing the fin-shaped structure to form a recess, forming a first epitaxial layer in the recess adjacent to the gate structure, and then forming a second epitaxial layer on the first epitaxial layer. Preferably, the semiconductor device further includes a first protrusion on one side of the first epitaxial layer and a second protrusion on another side of the first epitaxial layer.Type: ApplicationFiled: May 4, 2023Publication date: October 10, 2024Applicant: UNITED MICROELECTRONICS CORP.Inventors: Che-Hsien Lin, Te-Chang Hsu, Chun-Jen Huang, Chun-Chia Chen
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Patent number: 12068527Abstract: An antenna structure with wide radiation bandwidth in a reduced physical space includes a housing, a first feed portion, and a second feed portion. The housing includes a metallic side frame, a metallic middle frame, and a metallic back board. The metallic side frame defines first and second gaps, and the metallic back board defines a slot. The slot, the first gap, and the second gap divide the metallic side frame to give a first radiation portion. The first and second feed portions are both electrically connected to the first radiation portion. When the first feed portion supplies a current, the current flows through the first radiation portion, toward the second gap to excite a first working mode. When the second feed portion supplies a current, the current flows through the first radiation portion, toward the first gap to excite a second working mode.Type: GrantFiled: December 29, 2020Date of Patent: August 20, 2024Assignee: Chiun Mai Communication Systems, Inc.Inventors: Cho-Kang Hsu, Min-Hui Ho, Te-Chang Lin
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Publication number: 20240268059Abstract: An example compute cabinet assembly includes an equipment room configured to implement electrical components therein, an air inlet channel coupled to a first side of the equipment room, and a cabinet fan module coupled to a second side of the equipment room opposite the first side. A first air outlet channel is coupled to the cabinet fan module and extends along a third side of the equipment room towards a first outlet of the first air outlet channel. Moreover, electric fans are positioned in the cabinet fan module, the electric fans being configured to create an airflow path originating at an inlet of the air inlet channel. The airflow path further extends through the equipment room and cabinet fan module. A guide plate is also positioned adjacent to an inlet of the equipment room, the guide plate being configured to uniformly distribute the airflow path through the equipment room.Type: ApplicationFiled: February 7, 2023Publication date: August 8, 2024Inventors: Yi-Chieh CHEN, Yueh-Chang WU, Te-Chuan WANG, Tzu-Hsuan HSU
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Publication number: 20240265903Abstract: An example compute cabinet assembly includes an equipment room, an air inlet channel coupled to the equipment room, and a cabinet fan module coupled to the equipment room. The compute cabinet assembly further includes first and second air outlet channels. The first air outlet channel extends along a side of the equipment room towards an outlet of the first air outlet channel. The second air outlet channel extends along another side of the equipment room towards an outlet of the second air outlet channel. The compute cabinet assembly also includes electric fans positioned in the cabinet fan module. The electric fans are configured to create airflow originating at an inlet of the air inlet channel, extending through the equipment room and cabinet fan module, and exiting the compute cabinet assembly at the outlets of the first and second air outlet channels.Type: ApplicationFiled: February 7, 2023Publication date: August 8, 2024Inventors: Yi-Chieh CHEN, Yueh-Chang WU, Te-Chuan WANG, Tzu-Hsuan HSU
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Publication number: 20240268057Abstract: An example assembly includes an equipment room, a cabinet fan module having fans, and a processor configured to execute logic. Temperature sensors are positioned in the air inlet channel and the equipment room. An electrical component having an air inlet area is also positioned in the equipment room. The logic causes the fans to operate at a predetermined speed, and compare a temperature in the air inlet channel with a temperature at the air inlet area. In response to determining that the temperature at the air inlet area is greater than the temperature in the air inlet channel plus a constant value, the operating speed of the fans is increased. Moreover, the operating speed of the fans is decreased in response to determining that the ambient temperature in the air inlet channel plus a constant value is greater than or equal to the temperature at the air inlet area.Type: ApplicationFiled: February 7, 2023Publication date: August 8, 2024Inventors: Yi-Chieh CHEN, Yueh-Chang WU, Te-Chuan WANG, Tzu-Hsuan HSU
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Publication number: 20240154026Abstract: A semiconductor device includes a gate structure on a substrate, an offset spacer adjacent to the gate structure, a main spacer around the offset spacer, a source/drain region adjacent to two sides of the main spacer, a contact etch stop layer (CESL) adjacent to the main spacer, and an interlayer dielectric (ILD) layer around the CESL. Preferably, a dielectric constant of the offset spacer is higher than a dielectric constant of the main spacer.Type: ApplicationFiled: January 17, 2024Publication date: May 9, 2024Inventors: Te-Chang Hsu, Chun-Chia Chen, Yao-Jhan Wang
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Publication number: 20240071818Abstract: A semiconductor device and method of fabricating the same include a substrate, a first epitaxial layer, a first protection layer, and a contact etching stop layer. The substrate includes a PMOS transistor region, and the first epitaxial layer is disposed on the substrate, within the PMOS transistor region. The first protection layer is disposed on the first epitaxial layer, covering surfaces of the first epitaxial layer. The contact etching stop layer is disposed on the first protection layer and the substrate, wherein a portion of the first protection layer is exposed from the contact etching stop layer.Type: ApplicationFiled: September 22, 2022Publication date: February 29, 2024Applicant: UNITED MICROELECTRONICS CORP.Inventors: I-Wei Chi, Te-Chang Hsu, Yao-Jhan Wang, Meng-Yun Wu, Chun-Jen Huang
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Patent number: 11901437Abstract: A semiconductor device includes a gate structure on a substrate, an offset spacer adjacent to the gate structure, a main spacer around the offset spacer, a source/drain region adjacent to two sides of the main spacer, a contact etch stop layer (CESL) adjacent to the main spacer, and an interlayer dielectric (ILD) layer around the CESL. Preferably, a dielectric constant of the offset spacer is higher than a dielectric constant of the main spacer.Type: GrantFiled: May 15, 2022Date of Patent: February 13, 2024Assignee: Marlin Semiconductor LimitedInventors: Te-Chang Hsu, Chun-Chia Chen, Yao-Jhan Wang
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Publication number: 20230352565Abstract: A method for fabricating semiconductor device includes the steps of: forming a gate structure on a substrate; forming a spacer around the gate structure; forming a first contact etch stop layer (CESL) around the spacer; forming a mask layer on the first CESL; removing part of the mask layer; removing part of the first CESL; forming a second CESL on the mask layer and the gate structure; and removing part of the second CESL.Type: ApplicationFiled: July 6, 2023Publication date: November 2, 2023Applicant: UNITED MICROELECTRONICS CORP.Inventors: Te-Chang Hsu, Chun-Chia Chen, Yao-Jhan Wang, Chun-Jen Huang
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Patent number: 11742412Abstract: A method for fabricating semiconductor device includes the steps of: forming a gate structure on a substrate; forming a spacer around the gate structure; forming a first contact etch stop layer (CESL) around the spacer; forming a mask layer on the first CESL; removing part of the mask layer; removing part of the first CESL; forming a second CESL on the mask layer and the gate structure; and removing part of the second CESL.Type: GrantFiled: August 5, 2020Date of Patent: August 29, 2023Assignee: UNITED MICROELECTRONICS CORP.Inventors: Te-Chang Hsu, Chun-Chia Chen, Yao-Jhan Wang, Chun-Jen Huang
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Publication number: 20220278225Abstract: A semiconductor device includes a gate structure on a substrate, an offset spacer adjacent to the gate structure, a main spacer around the offset spacer, a source/drain region adjacent to two sides of the main spacer, a contact etch stop layer (CESL) adjacent to the main spacer, and an interlayer dielectric (ILD) layer around the CESL. Preferably, a dielectric constant of the offset spacer is higher than a dielectric constant of the main spacer.Type: ApplicationFiled: May 15, 2022Publication date: September 1, 2022Applicant: Marlin Semiconductor LimitedInventors: Te-Chang Hsu, Chun-Chia Chen, Yao-Jhan Wang
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Patent number: 11355619Abstract: A semiconductor device includes a gate structure on a substrate, an offset spacer adjacent to the gate structure, a main spacer around the offset spacer, a source/drain region adjacent to two sides of the main spacer, a contact etch stop layer (CESL) adjacent to the main spacer, and an interlayer dielectric (ILD) layer around the CESL. Preferably, a dielectric constant of the offset spacer is higher than a dielectric constant of the main spacer.Type: GrantFiled: March 31, 2020Date of Patent: June 7, 2022Assignee: Marlin Semiconductor LimitedInventors: Te-Chang Hsu, Chun-Chia Chen, Yao-Jhan Wang
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Patent number: 10957762Abstract: A manufacturing method of a semiconductor device includes the following steps. A semiconductor substrate with gate structures formed thereon is provided. A source/drain region is formed in the semiconductor substrate and formed between the gate structures. A dielectric layer is formed on the source/drain region and located between the gate structures. An opening penetrating the dielectric layer on the source/drain region is formed. A lower portion of a first conductive structure is formed in the opening. A dielectric spacer is formed on the lower portion and on an inner wall of the opening. An upper portion of the first conductive structure is formed in the opening and on the lower portion. The dielectric spacer surrounds the upper portion of the first conductive structure. The first conductive structure is formed by two steps for forming the dielectric spacer surrounding the upper portion and improving the electrical performance of the semiconductor device.Type: GrantFiled: May 19, 2020Date of Patent: March 23, 2021Assignee: UNITED MICROELECTRONICS CORP.Inventors: Te-Chang Hsu, Che-Hsien Lin, Cheng-Yeh Huang, Chun-Jen Huang, Yu-Chih Su, Yao-Jhan Wang
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Patent number: 10892365Abstract: A semiconductor structure includes a semiconductor substrate, at least a silicon germanium (SiGe) epitaxial region disposed in the semiconductor substrate, and a contact structure disposed on the SiGe epitaxial region. The contact structure includes a titanium nitride (TiN) barrier layer and a metal layer surrounded by the TiN barrier layer. A crystalline titanium germanosilicide stressor layer is disposed in the SiGe epitaxial region and between the TiN barrier layer and the SiGe epitaxial region.Type: GrantFiled: February 14, 2020Date of Patent: January 12, 2021Assignee: UNITED MICROELECTRONICS CORP.Inventors: Cheng-Yeh Huang, Te-Chang Hsu, Chun-Jen Huang, Che-Hsien Lin, Yao-Jhan Wang
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Publication number: 20200365710Abstract: A method for fabricating semiconductor device includes the steps of: forming a gate structure on a substrate; forming a spacer around the gate structure; forming a first contact etch stop layer (CESL) around the spacer; forming a mask layer on the first CESL; removing part of the mask layer; removing part of the first CESL; forming a second CESL on the mask layer and the gate structure; and removing part of the second CESL.Type: ApplicationFiled: August 5, 2020Publication date: November 19, 2020Inventors: Te-Chang Hsu, Chun-Chia Chen, Yao-Jhan Wang, Chun-Jen Huang
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Patent number: 10777657Abstract: A method for fabricating semiconductor device includes the steps of: forming a gate structure on a substrate; forming a spacer around the gate structure; forming a first contact etch stop layer (CESL) around the spacer; forming a mask layer on the first CESL; removing part of the mask layer; removing part of the first CESL; forming a second CESL on the mask layer and the gate structure; and removing part of the second CESL.Type: GrantFiled: September 20, 2017Date of Patent: September 15, 2020Assignee: UNITED MICROELECTRONICS CORP.Inventors: Te-Chang Hsu, Chun-Chia Chen, Yao-Jhan Wang, Chun-Jen Huang
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Publication number: 20200279917Abstract: A manufacturing method of a semiconductor device includes the following steps. A semiconductor substrate with gate structures formed thereon is provided. A source/drain region is formed in the semiconductor substrate and formed between the gate structures. A dielectric layer is formed on the source/drain region and located between the gate structures. An opening penetrating the dielectric layer on the source/drain region is formed. A lower portion of a first conductive structure is formed in the opening. A dielectric spacer is formed on the lower portion and on an inner wall of the opening. An upper portion of the first conductive structure is formed in the opening and on the lower portion. The dielectric spacer surrounds the upper portion of the first conductive structure. The first conductive structure is formed by two steps for forming the dielectric spacer surrounding the upper portion and improving the electrical performance of the semiconductor device.Type: ApplicationFiled: May 19, 2020Publication date: September 3, 2020Inventors: Te-Chang Hsu, Che-Hsien Lin, Cheng-Yeh Huang, Chun-Jen Huang, Yu-Chih Su, Yao-Jhan Wang
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Publication number: 20200235224Abstract: A semiconductor device includes a gate structure on a substrate, an offset spacer adjacent to the gate structure, a main spacer around the offset spacer, a source/drain region adjacent to two sides of the main spacer, a contact etch stop layer (CESL) adjacent to the main spacer, and an interlayer dielectric (ILD) layer around the CESL. Preferably, a dielectric constant of the offset spacer is higher than a dielectric constant of the main spacer.Type: ApplicationFiled: March 31, 2020Publication date: July 23, 2020Inventors: Te-Chang Hsu, Chun-Chia Chen, Yao-Jhan Wang
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Patent number: 10700163Abstract: A manufacturing method of a semiconductor device includes the following steps. A semiconductor substrate with gate structures formed thereon is provided. A source/drain region is formed in the semiconductor substrate and formed between the gate structures. A dielectric layer is formed on the source/drain region and located between the gate structures. An opening penetrating the dielectric layer on the source/drain region is formed. A lower portion of a first conductive structure is formed in the opening. A dielectric spacer is formed on the lower portion and on an inner wall of the opening. An upper portion of the first conductive structure is formed in the opening and on the lower portion. The dielectric spacer surrounds the upper portion of the first conductive structure. The first conductive structure is formed by two steps for forming the dielectric spacer surrounding the upper portion and improving the electrical performance of the semiconductor device.Type: GrantFiled: November 18, 2018Date of Patent: June 30, 2020Assignee: UNITED MICROELECTRONICS CORP.Inventors: Te-Chang Hsu, Che-Hsien Lin, Cheng-Yeh Huang, Chun-Jen Huang, Yu-Chih Su, Yao-Jhan Wang
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Publication number: 20200194058Abstract: The present invention provides a static random access memory (SRAM), the SRAM includes a substrate, a SRAM pattern disposed on the substrate, wherein the SRAM pattern at least includes a first gate structure, a second gate structure and a third gate structure, arranged along a first direction, wherein the second gate structure and the third gate structure are parallel to the first gate structure, and a gap is disposed between the second gate structure and the third gate structure, and wherein the first gate structure is composed of a first elongated structure, a second elongated structure and a curved structure disposed between the first elongated structure and the second elongated structure, and wherein the curved structure is aligned with the gap along a second direction, and an interconnection contact structure disposed between the first gate structure and the second gate structure, and arranged along the first direction.Type: ApplicationFiled: December 12, 2018Publication date: June 18, 2020Inventors: Te-Chang Hsu, Cheng-Pu Chiu, Chun-Jen Huang, Cheng-Yeh Huang, Che-Hsien Lin, Yao-Jhan Wang