Patents by Inventor Te-Yu Chen
Te-Yu Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250101965Abstract: A pulsed-plasma thruster using an unbalanced theta-pinch includes a gas-puff generator, an ionization convergent-divergent nozzle, and an accelerating coil set. The gas-puff generator supplies a gas puff in a pulsed manner; and the accelerating coil set is arranged on a side of a throat of the ionization convergent-divergent nozzle. After the gas puff enters the ionization convergent-divergent nozzle, an electric arc is generated between the pair of electrodes of the ionization convergent-divergent nozzle so that the gas puff is ionized and forms a plasma plume, and the electrodes are utilized to drive the accelerating coil set to generate axially non-uniform magnetic fields, to accelerate the plasma plume. Based on this, the control of thrust force generation is simple and reliable, with high energy utilization efficiency.Type: ApplicationFiled: January 4, 2024Publication date: March 27, 2025Applicant: National Cheng Kung UniversityInventors: Po-Yu CHANG, Te-Yueh CHEN
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Patent number: 12261203Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a substrate including a base and a fin structure over the base. The fin structure includes a nanostructure. The semiconductor device structure includes a gate stack over the base and wrapped around the nanostructure. The gate stack has an upper portion and a sidewall portion, the upper portion is over the nanostructure, and the sidewall portion is over a first sidewall of the nanostructure. The semiconductor device structure includes a first inner spacer and a second inner spacer over opposite sides of the sidewall portion. A sum of a first width of the first inner spacer and a second width of the second inner spacer is greater than a third width of the sidewall portion as measured along a longitudinal axis of the fin structure.Type: GrantFiled: January 19, 2022Date of Patent: March 25, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chien-Chih Lin, Yun-Ju Pan, Szu-Chi Yang, Jhih-Yang Yan, Shih-Hao Lin, Chung-Shu Wu, Te-An Yu, Shih-Chiang Chen
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Publication number: 20250034103Abstract: A method for isomerizing methyltetrahydrophthalic anhydride includes the following processes. A liquid reactant is provided. Under a condition of injecting nitrogen gas, an alkaline catalyst is added into the liquid reactant for an isomerization reaction, so as to obtain an isomerization product. The liquid reactant includes 3-methyltetrahydrophthalic anhydride and 4-methyltetrahydrophthalic anhydride. Based on a total weight of the isomerization product being 100 wt %, an amount of a methyltetrahydrophthalic anhydride dimer is lower than 1.6 wt %.Type: ApplicationFiled: September 25, 2023Publication date: January 30, 2025Inventors: TE-CHAO LIAO, JUNG-JEN CHUANG, CHUNG-YU CHEN, JUNG-TSU WU
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Publication number: 20250037961Abstract: An improved method and system for correcting inspection image error are disclosed. An improved method comprises acquiring a set of first beam positions on a test wafer while a wafer stage supporting the test wafer moves at a first velocity; acquiring a set of second beam positions, corresponding to the set of first beam positions, on the test wafer while the wafer stage moves at a second velocity; calculating a beam position displacement of a beam while the wafer stage moves at a third velocity in a range of velocities from the first velocity to the second velocity; and adjusting a beam position of the beam based on the calculated beam position displacement.Type: ApplicationFiled: November 2, 2022Publication date: January 30, 2025Applicant: ASML Netherlands B.V.Inventors: Martin Frans, Pierre SMEETS, Niels Johannes, Maria BOSCH, Willem Petrus VAN AAKEN, Jef GOOSSENS, Te-Yu CHEN, Funda SAHIN
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Publication number: 20240395813Abstract: A method includes: forming a first stack of semiconductor channels and a second stack of semiconductor channels over a substrate, the first stack being adjacent the second stack, a transition region overlapping neighboring protruding corners of the first stack and the second stack; forming a plurality of sacrificial gates over the first stack and the second stack, the plurality of sacrificial gates extending in a first direction and being arranged along a second direction transverse the first direction based on a first pitch along a second direction, each of the plurality of sacrificial gates having a first width; simultaneously with the forming a plurality of sacrificial gates, forming a bar structure over the transition region and adjacent to the plurality of sacrificial gates, the bar structure having a second width that exceeds a sum of the first pitch and the first width; forming a plurality of source/drain openings in areas of the first and second stacks of semiconductor channels that are exposed by theType: ApplicationFiled: October 31, 2023Publication date: November 28, 2024Inventors: Chih-Hsiung PENG, Shih-Chi FU, Kuei-Shun CHEN, Te-Yu CHEN
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Publication number: 20240337133Abstract: A multifunctional strengthened lock structure includes a case and a bolt control unit and a strengthened triangular latch unit arranged in the case. The bolt control unit includes an own-axis rotating plate, a first push plate, a second push plate, a butterfly plate and a first spring, a second spring, and a pressing member, and an arc arrestor. When a lock-cylinder rotating axle is rotated to close, the own-axis rotating plate is rotate to the closed position, and the second push plate is inoperable due to the butterfly plate being pushed to an idle position so as to serve as a blocking plate for the handle rotating axle, thereby achieving a dual-locking effect. A triangular latch includes a latching head, a rod pivotally connected to the latching head, a strengthening ring fit over the rod, and a strengthening screw fastened to the latching head and the rod.Type: ApplicationFiled: April 6, 2023Publication date: October 10, 2024Inventor: Rick Te-Yu Chen
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Publication number: 20240258138Abstract: An improved particle beam inspection apparatus, and more particularly, a particle beam inspection apparatus including an improved load lock unit is disclosed. An improved load lock system may comprise a plurality of supporting structures configured to support a wafer and a conditioning plate including a heat transfer element configured to adjust a temperature of the wafer. The load lock system may further comprise a gas vent configured to provide a gas between the conditioning plate and the wafer and a controller configured to assist with the control of the heat transfer element.Type: ApplicationFiled: January 25, 2024Publication date: August 1, 2024Inventors: Jeroen Gerard GOSEN, Te-Yu CHEN, Dennis Herman, Caspar VAN BANNING, Edwin Cornelis KADIJK, Martijn Petrus, Christianus VAN HEUMEN, Erheng WANG, Johannes Andreas, Henricus, Maria JACOBS
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Patent number: 11942340Abstract: An improved particle beam inspection apparatus, and more particularly, a particle beam inspection apparatus including an improved load lock unit is disclosed. An improved load lock system may comprise a plurality of supporting structures configured to support a wafer and a conditioning plate including a heat transfer element configured to adjust a temperature of the wafer. The load lock system may further comprise a gas vent configured to provide a gas between the conditioning plate and the wafer and a controller configured to assist with the control of the heat transfer element.Type: GrantFiled: July 6, 2022Date of Patent: March 26, 2024Assignee: ASML Netherlands B.V.Inventors: Jeroen Gerard Gosen, Te-Yu Chen, Dennis Herman Caspar Van Banning, Edwin Cornelis Kadijk, Martijn Petrus Christianus Van Heumen, Erheng Wang, Johannes Andreas Henricus Maria Jacobs
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Patent number: 11887425Abstract: An entry/exit detection locking device includes a knob axle of a lock and an engaging and holding unit and a retention unit. The knob axle includes upper and lower rotary axles each formed with a notch. The engaging and holding unit is arranged at one side of the knob axle. The retention unit is arranged below the knob axle. The retention unit is connected through a control circuit to a card reader at an outdoor side. Through adjustment, the engaging and holding unit is set in engagement with the notch of the upper rotary axle or the notch of the lower rotary axle to achieve a locked state for exit or entry. Rotating the knob axle for entry or exit triggers the retention unit to make a record of the exit or entry. The engaging and holding unit is connected to the card reader to enable unlocking through card swiping.Type: GrantFiled: April 23, 2021Date of Patent: January 30, 2024Inventor: Te-Yu Chen
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Publication number: 20230116381Abstract: Apparatuses, systems, and methods for generating a beam for inspecting a wafer positioned on a stage in a charged particle beam system are disclosed. In some embodiments, a controller may include circuitry configured to classify a plurality of regions along a stripe of the wafer by type of region, the stripe being larger than a field of view of the beam, wherein the classification of the plurality of regions includes a first type of region and a second type of region; and scan the wafer by controlling a speed of the stage based on the type of region, wherein the first type of region is scanned at a first speed and the second type of region is scanned at a second speed.Type: ApplicationFiled: March 9, 2021Publication date: April 13, 2023Applicant: ASML Netherlands B.V.Inventors: Long MA, Zhonghua DONG, Te-Yu CHEN
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Publication number: 20230086984Abstract: Apparatuses, systems, and methods for beam array geometry optimization of a multi-beam inspection tool are disclosed. In some embodiments, a microelectromechanical system (MEMS) may include a first row of apertures; a second row of apertures positioned below the first row of apertures; a third row of apertures positioned below the second row of apertures; and a fourth row of apertures positioned below the third row of apertures; wherein the first, second, third, and fourth rows are parallel to each other in a first direction; the first and third rows are offset from the second and fourth rows in a second direction that is perpendicular to the first direction; the first and third rows have a first length; the second and fourth rows have a second length; and the first length is longer than the second length in the second direction.Type: ApplicationFiled: February 24, 2021Publication date: March 23, 2023Applicant: ASML Netherlands B.V.Inventors: Te-Yu CHEN, Martinus Gerardus Johannes Maria MAASSEN
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Publication number: 20220415678Abstract: An improved particle beam inspection apparatus, and more particularly, a particle beam inspection apparatus including an improved load lock unit is disclosed. An improved load lock system may comprise a plurality of supporting structures configured to support a wafer and a conditioning plate including a heat transfer element configured to adjust a temperature of the wafer. The load lock system may further comprise a gas vent configured to provide a gas between the conditioning plate and the wafer and a controller configured to assist with the control of the heat transfer element.Type: ApplicationFiled: July 6, 2022Publication date: December 29, 2022Inventors: Jeroen Gerard GOSEN, Te-Yu CHEN, Dennis Herman, Caspar VAN BANNING, Edwin Cornelis KADIJK, Martijn Petrus, Christianus VAN HEUMEN, Erheng WANG, Johannes Andreas, Henricus, Maria JACOBS
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Publication number: 20220343711Abstract: An entry/exit detection locking device includes a knob axle of a lock and an engaging and holding unit and a retention unit. The knob axle includes upper and lower rotary axles each formed with a notch. The engaging and holding unit is arranged at one side of the knob axle. The retention unit is arranged below the knob axle. The retention unit is connected through a control circuit to a card reader at an outdoor side. Through adjustment, the engaging and holding unit is set in engagement with the notch of the upper rotary axle or the notch of the lower rotary axle to achieve a locked state for exit or entry. Rotating the knob axle for entry or exit triggers the retention unit to make a record of the exit or entry. The engaging and holding unit is connected to the card reader to enable unlocking through card swiping.Type: ApplicationFiled: April 23, 2021Publication date: October 27, 2022Inventor: Te-Yu Chen
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Patent number: 11430678Abstract: An improved particle beam inspection apparatus, and more particularly, a particle beam inspection apparatus including an improved load lock unit is disclosed. An improved load lock system may comprise a plurality of supporting structures configured to support a wafer and a conditioning plate including a heat transfer element configured to adjust a temperature of the wafer. The load lock system may further comprise a gas vent configured to provide a gas between the conditioning plate and the wafer and a controller configured to assist with the control of the heat transfer element.Type: GrantFiled: July 17, 2019Date of Patent: August 30, 2022Assignee: ASML Netherlands B.V.Inventors: Jeroen Gerard Gosen, Te-Yu Chen, Dennis Herman Caspar Van Banning, Edwin Cornelis Kadijk, Martijn Petrus Christianus Van Heumen, Erheng Wang, Johannes Andreas Henricus Maria Jacobs
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Patent number: 11408753Abstract: A lock monitoring device includes a detection unit and a plurality of sensors, where the detection unit is configured with a thin circuit board configured with a plurality of detection elements, allowing the detection elements to be connected in parallel with a circuit and then connected to a control circuit; the sensors are configured on parts of the lock such as lock tongues, rotating shaft and correspond to the detection elements; whereby, when the lock is unlocked and locked, the detection elements will detect that the detection elements depart from detection positions and send detection signals to a remote monitoring host, and the monitoring host monitors and records the number and time of the unlocking of the lock, achieving smart access control and further allowing the lock to be safer.Type: GrantFiled: May 6, 2020Date of Patent: August 9, 2022Inventor: Te-Yu Chen
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Patent number: 11199026Abstract: A magnetic anti-theft device, includes: a control circuit, in connection with a plurality of magnetic sensors and a control unit; the plurality of magnetic sensors, allowing different magnetic induction strengths to be preset; and an unlock piece, configured with a plurality of magnetic elements corresponding to the magnetic induction strengths of the plurality of magnetic sensors, whereby, when the correct unlock piece is placed on the magnetic sensors, the plurality of magnetic sensors will induct correct magnetic forces, the control unit is driven to release a monitoring state after interpretation of the control circuit; if the induction is incorrect, the control unit is driven to form a warning action after the interpretation of the control circuit so as to achieve an anti-theft effect and increase safety effectively probably because the magnetic force of the magnetic element of the unlock piece is too small or too large.Type: GrantFiled: July 6, 2018Date of Patent: December 14, 2021Inventor: Te-Yu Chen
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Publication number: 20210348946Abstract: A lock monitoring device includes a detection unit and a plurality of sensors, where the detection unit is configured with a thin circuit board configured with a plurality of detection elements, allowing the detection elements to be connected in parallel with a circuit and then connected to a control circuit; the sensors are configured on parts of the lock such as lock tongues, rotating shaft and correspond to the detection elements; whereby, when the lock is unlocked and locked, the detection elements will detect that the detection elements depart from detection positions and send detection signals to a remote monitoring host, and the monitoring host monitors and records the number and time of the unlocking of the lock, achieving smart access control and further allowing the lock to be safer.Type: ApplicationFiled: May 6, 2020Publication date: November 11, 2021Inventor: Te-Yu Chen
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Patent number: 11008779Abstract: An electronic lock core device includes: a housing, a front end thereof configured with an opening; a transmission mechanism, configured inside the housing and with a motor in connection with a gear train, the gear train in engagement with a transmission shaft, and a front end of the transmission shaft configured with a rod; a locking piece, configured with a pendulum and fixing hole, a fixing member passed through the fixing hole and the opening on the front end of the housing and fixed to the rod; and a control circuit, configured inside the housing and in connection with the motor of the transmission mechanism and an induction device adapted to sensing a signal of a chip card or RFID to drive the transmission mechanism to drive the motor to rotate positively or negatively and further to make the locking piece form a lock or unlock action.Type: GrantFiled: April 15, 2020Date of Patent: May 18, 2021Inventor: Te-Yu Chen
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Publication number: 20200027763Abstract: An improved particle beam inspection apparatus, and more particularly, a particle beam inspection apparatus including an improved load lock unit is disclosed. An improved load lock system may comprise a plurality of supporting structures configured to support a wafer and a conditioning plate including a heat transfer element configured to adjust a temperature of the wafer. The load lock system may further comprise a gas vent configured to provide a gas between the conditioning plate and the wafer and a controller configured to assist with the control of the heat transfer element.Type: ApplicationFiled: July 17, 2019Publication date: January 23, 2020Inventors: Jeroen Gerard GOSEN, Te-Yu CHEN, Dennis Herman, Caspar VAN BANNING, Edwin Cornelis KADIJK, Martijn Petrus, Christianus VAN HEUMEN, Erheng WANG, Johannes Andreas, Henricus, Maria JACOBS
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Publication number: 20200011091Abstract: A magnetic anti-theft device, includes: a control circuit, in connection with a plurality of magnetic sensors and a control unit; the plurality of magnetic sensors, allowing different magnetic induction strengths to be preset; and a unlock piece, configured with a plurality of magnetic elements corresponding to the magnetic induction strengths of the plurality of magnetic sensors, whereby, when the correct unlock piece is placed on the magnetic sensors, the plurality of magnetic sensors will induct correct magnetic forces, the control unit is driven to release a monitoring state after interpretation of the control circuit; if the induction is incorrect, the control unit is driven to form a warning action after the interpretation of the control circuit so as to achieve an anti-theft effect and increase safety effectively probably because the magnetic force of the magnetic element of the unlock piece is too small or too large.Type: ApplicationFiled: July 6, 2018Publication date: January 9, 2020Inventor: Te-Yu Chen