Abstract: The present disclosure relates to apparatus and methods for assessing samples using a plurality of charged particle beams. In one arrangement, at least a subset of a beam grid of a plurality of charged particle beams and respective target portions of a sample surface are scanned relative to each other to process the target portions. Signal charged particles from the sample are detected to generate detection signals. A sample surface topographical map is generated that represents a topography of the sample surface by analyzing the detection signals.

Abstract: An improved method and system for correcting inspection image error are disclosed. An improved method comprises acquiring a set of first beam positions on a test wafer while a wafer stage supporting the test wafer moves at a first velocity; acquiring a set of second beam positions, corresponding to the set of first beam positions, on the test wafer while the wafer stage moves at a second velocity; calculating a beam position displacement of a beam while the wafer stage moves at a third velocity in a range of velocities from the first velocity to the second velocity; and adjusting a beam position of the beam based on the calculated beam position displacement.

Abstract: A method includes: forming a first stack of semiconductor channels and a second stack of semiconductor channels over a substrate, the first stack being adjacent the second stack, a transition region overlapping neighboring protruding corners of the first stack and the second stack; forming a plurality of sacrificial gates over the first stack and the second stack, the plurality of sacrificial gates extending in a first direction and being arranged along a second direction transverse the first direction based on a first pitch along a second direction, each of the plurality of sacrificial gates having a first width; simultaneously with the forming a plurality of sacrificial gates, forming a bar structure over the transition region and adjacent to the plurality of sacrificial gates, the bar structure having a second width that exceeds a sum of the first pitch and the first width; forming a plurality of source/drain openings in areas of the first and second stacks of semiconductor channels that are exposed by the

Abstract: A multifunctional strengthened lock structure includes a case and a bolt control unit and a strengthened triangular latch unit arranged in the case. The bolt control unit includes an own-axis rotating plate, a first push plate, a second push plate, a butterfly plate and a first spring, a second spring, and a pressing member, and an arc arrestor. When a lock-cylinder rotating axle is rotated to close, the own-axis rotating plate is rotate to the closed position, and the second push plate is inoperable due to the butterfly plate being pushed to an idle position so as to serve as a blocking plate for the handle rotating axle, thereby achieving a dual-locking effect. A triangular latch includes a latching head, a rod pivotally connected to the latching head, a strengthening ring fit over the rod, and a strengthening screw fastened to the latching head and the rod.

Abstract: An improved particle beam inspection apparatus, and more particularly, a particle beam inspection apparatus including an improved load lock unit is disclosed. An improved load lock system may comprise a plurality of supporting structures configured to support a wafer and a conditioning plate including a heat transfer element configured to adjust a temperature of the wafer. The load lock system may further comprise a gas vent configured to provide a gas between the conditioning plate and the wafer and a controller configured to assist with the control of the heat transfer element.

Abstract: An improved particle beam inspection apparatus, and more particularly, a particle beam inspection apparatus including an improved load lock unit is disclosed. An improved load lock system may comprise a plurality of supporting structures configured to support a wafer and a conditioning plate including a heat transfer element configured to adjust a temperature of the wafer. The load lock system may further comprise a gas vent configured to provide a gas between the conditioning plate and the wafer and a controller configured to assist with the control of the heat transfer element.

Abstract: An entry/exit detection locking device includes a knob axle of a lock and an engaging and holding unit and a retention unit. The knob axle includes upper and lower rotary axles each formed with a notch. The engaging and holding unit is arranged at one side of the knob axle. The retention unit is arranged below the knob axle. The retention unit is connected through a control circuit to a card reader at an outdoor side. Through adjustment, the engaging and holding unit is set in engagement with the notch of the upper rotary axle or the notch of the lower rotary axle to achieve a locked state for exit or entry. Rotating the knob axle for entry or exit triggers the retention unit to make a record of the exit or entry. The engaging and holding unit is connected to the card reader to enable unlocking through card swiping.

Abstract: Apparatuses, systems, and methods for generating a beam for inspecting a wafer positioned on a stage in a charged particle beam system are disclosed. In some embodiments, a controller may include circuitry configured to classify a plurality of regions along a stripe of the wafer by type of region, the stripe being larger than a field of view of the beam, wherein the classification of the plurality of regions includes a first type of region and a second type of region; and scan the wafer by controlling a speed of the stage based on the type of region, wherein the first type of region is scanned at a first speed and the second type of region is scanned at a second speed.

Abstract: Apparatuses, systems, and methods for beam array geometry optimization of a multi-beam inspection tool are disclosed. In some embodiments, a microelectromechanical system (MEMS) may include a first row of apertures; a second row of apertures positioned below the first row of apertures; a third row of apertures positioned below the second row of apertures; and a fourth row of apertures positioned below the third row of apertures; wherein the first, second, third, and fourth rows are parallel to each other in a first direction; the first and third rows are offset from the second and fourth rows in a second direction that is perpendicular to the first direction; the first and third rows have a first length; the second and fourth rows have a second length; and the first length is longer than the second length in the second direction.

Abstract: An improved particle beam inspection apparatus, and more particularly, a particle beam inspection apparatus including an improved load lock unit is disclosed. An improved load lock system may comprise a plurality of supporting structures configured to support a wafer and a conditioning plate including a heat transfer element configured to adjust a temperature of the wafer. The load lock system may further comprise a gas vent configured to provide a gas between the conditioning plate and the wafer and a controller configured to assist with the control of the heat transfer element.

Abstract: An entry/exit detection locking device includes a knob axle of a lock and an engaging and holding unit and a retention unit. The knob axle includes upper and lower rotary axles each formed with a notch. The engaging and holding unit is arranged at one side of the knob axle. The retention unit is arranged below the knob axle. The retention unit is connected through a control circuit to a card reader at an outdoor side. Through adjustment, the engaging and holding unit is set in engagement with the notch of the upper rotary axle or the notch of the lower rotary axle to achieve a locked state for exit or entry. Rotating the knob axle for entry or exit triggers the retention unit to make a record of the exit or entry. The engaging and holding unit is connected to the card reader to enable unlocking through card swiping.

Abstract: An improved particle beam inspection apparatus, and more particularly, a particle beam inspection apparatus including an improved load lock unit is disclosed. An improved load lock system may comprise a plurality of supporting structures configured to support a wafer and a conditioning plate including a heat transfer element configured to adjust a temperature of the wafer. The load lock system may further comprise a gas vent configured to provide a gas between the conditioning plate and the wafer and a controller configured to assist with the control of the heat transfer element.

Abstract: A lock monitoring device includes a detection unit and a plurality of sensors, where the detection unit is configured with a thin circuit board configured with a plurality of detection elements, allowing the detection elements to be connected in parallel with a circuit and then connected to a control circuit; the sensors are configured on parts of the lock such as lock tongues, rotating shaft and correspond to the detection elements; whereby, when the lock is unlocked and locked, the detection elements will detect that the detection elements depart from detection positions and send detection signals to a remote monitoring host, and the monitoring host monitors and records the number and time of the unlocking of the lock, achieving smart access control and further allowing the lock to be safer.

Abstract: A magnetic anti-theft device, includes: a control circuit, in connection with a plurality of magnetic sensors and a control unit; the plurality of magnetic sensors, allowing different magnetic induction strengths to be preset; and an unlock piece, configured with a plurality of magnetic elements corresponding to the magnetic induction strengths of the plurality of magnetic sensors, whereby, when the correct unlock piece is placed on the magnetic sensors, the plurality of magnetic sensors will induct correct magnetic forces, the control unit is driven to release a monitoring state after interpretation of the control circuit; if the induction is incorrect, the control unit is driven to form a warning action after the interpretation of the control circuit so as to achieve an anti-theft effect and increase safety effectively probably because the magnetic force of the magnetic element of the unlock piece is too small or too large.

Abstract: A lock monitoring device includes a detection unit and a plurality of sensors, where the detection unit is configured with a thin circuit board configured with a plurality of detection elements, allowing the detection elements to be connected in parallel with a circuit and then connected to a control circuit; the sensors are configured on parts of the lock such as lock tongues, rotating shaft and correspond to the detection elements; whereby, when the lock is unlocked and locked, the detection elements will detect that the detection elements depart from detection positions and send detection signals to a remote monitoring host, and the monitoring host monitors and records the number and time of the unlocking of the lock, achieving smart access control and further allowing the lock to be safer.

Abstract: An electronic lock core device includes: a housing, a front end thereof configured with an opening; a transmission mechanism, configured inside the housing and with a motor in connection with a gear train, the gear train in engagement with a transmission shaft, and a front end of the transmission shaft configured with a rod; a locking piece, configured with a pendulum and fixing hole, a fixing member passed through the fixing hole and the opening on the front end of the housing and fixed to the rod; and a control circuit, configured inside the housing and in connection with the motor of the transmission mechanism and an induction device adapted to sensing a signal of a chip card or RFID to drive the transmission mechanism to drive the motor to rotate positively or negatively and further to make the locking piece form a lock or unlock action.

Abstract: An improved particle beam inspection apparatus, and more particularly, a particle beam inspection apparatus including an improved load lock unit is disclosed. An improved load lock system may comprise a plurality of supporting structures configured to support a wafer and a conditioning plate including a heat transfer element configured to adjust a temperature of the wafer. The load lock system may further comprise a gas vent configured to provide a gas between the conditioning plate and the wafer and a controller configured to assist with the control of the heat transfer element.

Abstract: A magnetic anti-theft device, includes: a control circuit, in connection with a plurality of magnetic sensors and a control unit; the plurality of magnetic sensors, allowing different magnetic induction strengths to be preset; and a unlock piece, configured with a plurality of magnetic elements corresponding to the magnetic induction strengths of the plurality of magnetic sensors, whereby, when the correct unlock piece is placed on the magnetic sensors, the plurality of magnetic sensors will induct correct magnetic forces, the control unit is driven to release a monitoring state after interpretation of the control circuit; if the induction is incorrect, the control unit is driven to form a warning action after the interpretation of the control circuit so as to achieve an anti-theft effect and increase safety effectively probably because the magnetic force of the magnetic element of the unlock piece is too small or too large.

Abstract: A multiple-latch-locking lock structure includes a casing in which a lock tongue control unit and a lock latch control unit are arranged. The lock tongue control unit includes an operation-linking member, a positioning member, an arresting member, a swinging member, and a slide block. When a lock core is rotated, the rectangular lock tongue and the triangular lock tongue are driven to get pushed out and retracted back for latch-locking and unlocking. The lock latch control unit includes a rotating member, a slide plate, and a slide bar. When a handle is rotated, the lock latch is driven to get pushed out and retracted back, thereby achieving security latch-locking and the slide plate is caused to move up and down to achieve a function of controlling a vertical latch. As such, multiple latch locking can be achieved to provide the lock with better security and better burglary resistance.

Abstract: A multiple-latch-locking lock structure includes a casing in which a lock tongue control unit and a lock latch control unit are arranged. The lock tongue control unit includes an operation-linking member, a positioning member, an arresting member, a swinging member, and a slide block. When a lock core is rotated, the rectangular lock tongue and the triangular lock tongue are driven to get pushed out and retracted back for latch-locking and unlocking. The lock latch control unit includes a rotating member, a slide plate, and a slide bar. When a handle is rotated, the lock latch is driven to get pushed out and retracted back, thereby achieving security latch-locking and the slide plate is caused to move up and down to achieve a function of controlling a vertical latch. As such, multiple latch locking can be achieved to provide the lock with better security and better burglary resistance.