Abstract: A vehicle drive device includes a rotating electrical machine, transmission mechanism, and inverter device. The rotating electrical machine and a pair of output members have a two-axis configuration. The transmission mechanism includes, coaxially with the output members, an output gear drivingly connected to the output members. A first output member is between the rotating electrical machine and inverter device horizontally in an up-down direction where both the rotating electrical machine and inverter device are disposed. The output gear overlaps each rotating electrical machine and inverter device as viewed in an axial direction. The inverter device is on the opposite side of the first output member from the rotating electrical machine and above the first output member. A case includes a peripheral wall portion that separates the first output member and the inverter device from each other. The peripheral wall portion overlaps the output gear as viewed in the axial direction.

Abstract: A resist composition containing: (A) a resin containing a repeating unit having an acid-labile group; (B) a photo-acid generator shown by a general formula (B-1); and (C) a solvent, where W1 represents a cyclic divalent hydrocarbon group having 4 to 12 carbon atoms and containing a heteroatom; W2 represents a cyclic monovalent hydrocarbon group having 4 to 14 carbon atoms and not containing a heteroatom; Rf represents a divalent organic group shown by the following general formula; and M+ represents an onium cation. This provides a resist composition and a patterning process that uses the resist composition that show a particularly favorable mask dimension dependency (mask error factor: MEF), LWR, and critical dimension uniformity (CDU) particularly in photolithography where a high-energy beam such as an ArF excimer laser beam is used as a light source.

Abstract: A drive unit may include a case comprising an electric motor chamber and a gear chamber; an electric motor comprising a rotor housed in the electric motor chamber; a specific gear housed in the gear chamber; lubricant stored in the electric motor chamber and the gear chamber; and a through hole connecting the electric motor chamber and the gear chamber. An opening of the through hole on a gear chamber side may be positioned so as to face a side surface of the specific gear. A region below a center of the specific gear is defined as a lower region, a part of the lower region that is located rearward of a vertical plane passing through a center axis of the specific gear in a rotation direction of the specific gear is defined as a lower rear region, and the opening may be in the lower rear region.

Abstract: A vehicle drive apparatus includes: a rotary electric machine disposed on a first axis; a differential gear mechanism disposed on a second axis; an output member disposed on the second axis; an inverter device; and a case. The case is a single-piece case internally including: a first housing chamber housing the rotary electric machine; and a second housing chamber housing the inverter device and divided from the first housing chamber with a partition. At least a specified portion of the output member is housed in the first housing chamber. A location of the specified portion in an axial direction overlaps with the rotary electric machine. The partition is provided between the specified portion and the inverter device.

Abstract: A vehicle drive apparatus includes: a rotary electric machine disposed on a first axis; a differential gear mechanism disposed on a second axis; an output member disposed on the second axis; an inverter device; and a case. The case is a single-piece case internally including: a first housing chamber housing the rotary electric machine; and a second housing chamber housing the inverter device and divided from the first housing chamber with a partition. At least a specified portion of the output member is housed in the first housing chamber. A location of the specified portion in an axial direction overlaps with the rotary electric machine. The partition is provided between the specified portion and the inverter device.

Abstract: A vehicle drive apparatus includes: a rotary electric machine disposed on a first axis; a differential gear mechanism disposed on a second axis; an output member disposed on the second axis; an inverter device; and a case. The case is a single-piece case internally including: a first housing chamber housing the rotary electric machine; and a second housing chamber housing the inverter device and divided from the first housing chamber with a partition. At least a specified portion of the output member is housed in the first housing chamber. A location of the specified portion in an axial direction overlaps with the rotary electric machine. The partition is provided between the specified portion and the inverter device.

Abstract: Provided is a mounting structure including an electronic control unit, a plurality of support brackets, a transaxle case, an intermediate bracket protruding from the transaxle case toward a rear side of the vehicle, and an engaging projection. The engaging projection is a projection that is provided to at least one of an upper surface of the intermediate bracket or a bottom surface of the electronic control unit in a region where the intermediate bracket is in surface contact with a mounting surface of the transaxle case, the engaging projection protruding in a direction toward the upper surface of the intermediate bracket and the bottom surface of the electronic control unit. The engaging projection presses the intermediate bracket against the mounting surface of the transaxle case responding to displacement of the electronic control unit at the time of vehicle collision.

Abstract: Provided is a mounting structure including an electronic control unit, a plurality of support brackets, a transaxle case, an intermediate bracket protruding from the transaxle case toward a rear side of the vehicle, and an engaging projection. The engaging projection is a projection that is provided to at least one of an upper surface of the intermediate bracket or a bottom surface of the electronic control unit in a region where the intermediate bracket is in surface contact with a mounting surface of the transaxle case, the engaging projection protruding in a direction toward the upper surface of the intermediate bracket and the bottom surface of the electronic control unit. The engaging projection presses the intermediate bracket against the mounting surface of the transaxle case responding to displacement of the electronic control unit at the time of vehicle collision.

Abstract: A portable closed container has a container body, and a lid for opening and hermetically closing the opening of the container body, in which an internal atmosphere thereof is replaced with an inner atmosphere suitable for an article contained in the container through a gas purging operation. The container is improved such that the lid is a hollowed body with at least one purging wall hole.

Abstract: Disclosed is an electronic substrate processing system comprising a processing equipment for processing electronic substrates including semiconductor wafers and liquid crystal substrates; a cleaning equipment for cleaning said electronic substrate in a predetermined processing step; a portable closed container for accommodating a cassette containing said electronic substrate; a purging station for gas-purging said portable closed containers; and a storage member for storing said portable closed containers, wherein said cassette accommodates said electronic substrates which have been cleaned by said cleaning equipment being set in said portable closed container and purged with an inert gas in said purging station, and said portable closed container or containers is stored in said storing section when necessary.

Abstract: A conveying system provides a cassette accommodating workpieces; a container containing the cassette; a transferring device for conveying the cassette while supporting it or conveying the container which is empty or contains the cassette while supporting it, the transferring device having a supporting device for supporting the cassette. In the conveying system, a handle is provided on the upper surface of the container so that it is supported by the supporting device.

Abstract: Disclosed is an electronic substrate processing system comprising a processing equipment for processing electronic substrates including semiconductor wafers and liquid crystal substrates; a cleaning equipment for cleaning said electronic substrate in a predetermined processing step; a portable closed container for accommodating a cassette containing said electronic substrate; a purging station for gas-purging said portable closed containers; and a storage member for storing said portable closed containers, wherein said cassette accommodates said electronic substrates which have been cleaned by said cleaning equipment being set in said portable closed container and purged with an inert gas in said purging station, and said portable closed container or containers is stored in said storing section when necessary.

Abstract: Disclosed is a wafer conveying system for a clean room which is high in wafer conveying efficiency, and makes it possible to achieve a variety of processing operations with high efficiency.

Abstract: A gas purge unit for a portable closed container is defined by a purge box including an opening, and a container stand around the opening on which a closed container is set; a gas supplying inlet coupled to a gas supplying source, and a gas discharging outlet; and a lifting mechanism for closing the opening from inside of the purge box and controlling the locking and unlocking operations of a locking mechanism provided in the lid of the container.

Abstract: An ID recognizing system for a semiconductor manufacturing system includes IC modules set in surfaces of containers which accommodate wafers and are conveyed from one device to another in the semiconductor manufacturing system. Each IC module is capable of transmitting and receiving signals from fixed stations and includes a reloadable memory. The semiconductor manufacturing system is made up of a number of devices for performing manufacturing operations on the wafers in the containers, and each of the devices include one of the fixed stations. The IC module is powered by the energy of radio waves received from the fixed station in the device in which said container has been placed for processing of the wafers therein. The radio communication is in the form of communication packets which include data on individual wafers in the cassettes so that the individual wafers can be processed separately.

Abstract: An article storage house in a clean room for airtightly accommodating a wafer cassette, etc. in which the wafer cassette carried in from the outside of an article carry-in/out portion is accommodated into a container by an automatic article delivery unit disposed in the article carry-in/out portion or it is carried in the article storage house while it is accommodated in the container and is stored in sections of the article storage house. An inert gas purge mechanism and an automatic container cleaning portion are disposed in the automatic article delivery unit or each section.

Abstract: An unmanned conveying device for a clean room is capable of restraining a spontaneous oxide film from growing in case that an unmanned carriage is obliged to stop for a long time due to its own cause of a cause at a destination spot while it conveys a semiconductor wafer from one spot to the destination spot. It is a first aspect of the invention to provide the unmanned conveying device which is self-propelled for conveying an object from a ground facility to a destination spot while loading an object to be conveyed thereon, characterized in that the object is accommodated in a container and the container is connected to an inert gas reservoir through a gas supply passage so that the atmosphere in the container can be replaced by a nitrogen gas.

Abstract: A wafer storing, closed container for use in a clean room of a semiconductor manufacturing system is provided with an attached inert gas tank so as to eliminate the need to convey the container to an inert gas purge station to supplement the inert gas supply in the container due to leakage. A gas passageway is formed in a body of the container in such a manner that one end thereof is open inside the container. The other end is open outside the container. The portable inert gas tank is detachably connected to the other end of the gas passageway so as to automatically supplement the container with the inert gas.

Abstract: A wafer keeping apparatus includes a closed wafer keeping space, and an arrangement for circulating an inert gas through a filter and then through the wafer keeping space. In one embodiment, several wafer keeping shelves are each provided within the space, and the inert gas is supplied through a respective filter to flow across each shelf. In another embodiment, a plurality of wafer keeping spaces are each accessible through a respective door which forms an airtight seal when it is closed, and respective filters are provided on opposite sides of the space, the inert gas being supplied to the space through one filter and exiting the space through the other filter. In a further embodiment, several of the wafer keeping spaces are provided at angularly and vertically spaced locations in a rotatable stocker body provided within a casing, and several vertically spaced doors are provided on the casing to provide access to respective wafer keeping spaces in the stocker body.

Abstract: A moving robot system, employing a charging control system for robots, is configured by plural moving robots, at least one charging station and a control station. Each moving robot is designed to perform an operation thereof in accordance with programs stored therein under control of the control station. When the power of a charging-type-battery equipped in each moving robot is consumed and lowered to the predetermined level, it automatically moves to its nearest charging station designated by the control station other than the charging station which is used for another moving robot. In this case, the control station controls the moving robots such that plural moving robots are not simultaneously concentrated to one charging station.