Abstract: The invention provides a vacuum processing system of a semiconductor processing substrate and a vacuum processing method using the same, comprising an atmospheric transfer chamber having a plurality of cassette stands, a lock chamber arranged on a rear side of the atmospheric transfer chamber, and a first vacuum transfer chamber connected to a rear side of the lock chamber, wherein the first vacuum transfer chamber does not have any vacuum processing chamber connected thereto and has transfer intermediate chambers connected thereto, and the transfer intermediate chambers have subsequent vacuum transfer chambers connected thereto, and wherein the wafers are transferred via the lock chamber to the first vacuum transfer chamber to be processed in each of the subsequent vacuum processing chambers, which are further transferred via any of the transfer intermediate chambers connected to the first vacuum transfer chamber to the subsequent vacuum transfer chambers, and the respective wafers transferred to the subsequ

Abstract: The system and method accepts the inputs of an aggregate (long-range) production plan draft, a profit and loss target, a sales target, and a stock target. Then, the accepted long-range production plan draft is deployed into master production schedule and then a feasibility of the long-range production schedule draft is simulated. Based on the simulated result, the system and method calculates an amended schedule, a predicted profit and loss, and predicted sales of the long-range production schedule draft. Further, a supply schedule is calculated on the middle-range production schedule draft deployed from the long-range plan draft. Based on the supply schedule, the middle-range production schedule draft, and a planned buying unit price, the system and method calculates a predicted stock, an estimated loss of inventory price decline, and a planned acquisition cost of inventory. Each calculated prediction data item is displayed on screen.

Abstract: The system and method accepts the inputs of an aggregate (long-range) production plan draft, a profit and loss target, a sales target, and a stock target. Then, the accepted long-range production plan draft is deployed into master production schedule and then a feasibility of the long-range production schedule draft is simulated. Based on the simulated result, the system and method calculates an amended schedule, a predicted profit and loss, and predicted sales of the long-range production schedule draft. Further, a supply schedule is calculated on the middle-range production schedule draft deployed from the long-range plan draft. Based on the supply schedule, the middle-range production schedule draft, and a planned buying unit price, the system and method calculates a predicted stock, an estimated loss of inventory price decline, and a planned acquisition cost of inventory. Each calculated prediction data item is displayed on screen.