Abstract: It is a task of the present invention to provide an electrolytic apparatus for producing fluorine or nitrogen trifluoride by electrolyzing a hydrogen fluoride-containing molten salt, the electrolytic apparatus being advantageous in that the electrolysis can be performed without the occurrence of the anode effect even at a high current density and without the occurrence of an anodic dissolution. In the present invention, this task has been accomplished by an electrolytic apparatus for producing fluorine or nitrogen trifluoride by electrolyzing a hydrogen fluoride-containing molten salt at an applied current density of from 1 to 1,000 A/dm2, the electrolytic apparatus using a conductive diamond-coated electrode as an anode.

Abstract: It is a task of the present invention to provide an electrolytic apparatus for producing fluorine or nitrogen trifluoride by electrolyzing a hydrogen fluoride-containing molten salt, the electrolytic apparatus being advantageous in that the electrolysis can be performed without the occurrence of the anode effect even at a high current density and without the occurrence of an anodic dissolution. In the present invention, this task has been accomplished by an electrolytic apparatus for producing fluorine or nitrogen trifluoride by electrolyzing a hydrogen fluoride-containing molten salt at an applied current density of from 1 to 1,000 A/dm2, the electrolytic apparatus using a conductive diamond-coated electrode as an anode.

Abstract: A fluorine gas generator is provided with which the gases used and/or generated, in case of leakage thereof, can be prevented from mixing together as far as possible and, even in case of gas leakage into the outside of the generator system, the leakage gas can be treated safely and in which the maintenance, exchange and other operations are easy to carry out. The generator comprises a box-shaped body containing an electrolyzer for fluorine gas generation, and the box-shaped body is divided into two or more compartments, including a compartment containing the electrolyzer.

Abstract: A high power lithium-ion secondary battery having an increased capacity and capable of maintaining high discharge voltage and repeating charging/discharging high current. A lithium-ion secondary battery having an electrode group formed by laminating or winding a negative electrode layer and a positive electrode layer so as to interpose a separator made of synthetic resin, the negative electrode layer containing a material capable of intercalating/deintercalating lithium-ion, and the positive electrode layer including a lithium-containing metallic oxide; and a non-aqueous electrolyte containing lithium salt, where the electrode group is immersed. The positive electrode material unit contains a fluorinated lithium-containing metallic oxide as a main material, and the separator possesses a hydrophilic group. Further, the positive electrode material preferably contains a main material including LiNixCoyMnzO2, where 0.6?x<1, 0<y?0.2, 0<z?0.2, and x+y+z=1.

Abstract: A fluorine gas generator for generating highly pure fluorine gas in a stable and safe manner by electrolyzing an electrolytic bath 2 comprising hydrogen fluoride in the form of a molten mixed gas is provided which comprises an electrolytic cell 1 divided, by a partition wall 16, into an anode chamber 3 in which an anode is disposed and a cathode chamber 4 in which a cathode is disposed, pressure maintenance means for maintaining the anode chamber 3 and cathode chamber 4 at atmospheric pressure, and liquid level sensing means 5, 6 capable of sensing the levels of the electrolytic bath 2 in the anode chamber 3 and in the cathode chamber 4, respectively, at three or more level stages.

Abstract: The invention provides an anode material for lithium ion secondary battery using a coated graphite powder as a raw material, which is coated thermoplastic resin of a carbonization yield of ?20 wt % in a proportion of ?10 parts by weight the carbonized material per 100 parts by weight graphite powder. Coating with thermoplastic resin increases the accumulative pore volume by ?5%, relative to the uncoated powder, and results in pore sizes of 0.012-40 ?m via mercury porosimeter method. Calculated with the BJH method as viewed from desorption isotherm, the coated graphite powder has a mesopore volume ?0.01 cc/g or ?60% of the pore volume of the uncoated graphite powder. This coated powder also has an average particle size ranging from 10-50 ?m measured by a laser-scattering-particle-size-distribution measuring device, and a standard deviation to the average particle size (?/D) ratio of ?0.02.

Abstract: A purification method for a carbon material containing carbon nanotubes is provided, which satisfies the following requirements: The method should prevent carbon nanotubes from being damaged, broken or flocculated; the method should be capable of removing the catalyst metal and carbon components other than the carbon nanotubes; and the method should be applicable to not only multi-walled carbon nanotubes but also single-walled carbon nanotubes which will undergo significant structural changes when heated to 1400° C. or higher temperatures. The method is characterized by including a carbon material preparation process for preparing a carbon material containing carbon nanotubes by an arc discharge method, using an anode made of a material containing at least carbon and a catalyst metal; and a halogen treatment process for bringing the carbon material into contact with a gas containing a halogen and/or halogen compound.

Abstract: Fluorine gas generators are connected with semiconductor manufacturing apparatuses through a gas supplying system including a storage tank that can store a predetermined quantity of fluorine gas generated in the on-site fluorine gas generators. When one or more of the on-site fluorine gas generators are stopped, fluorine gas is supplied to the semiconductor manufacturing apparatuses from the storage tank storing a predetermined quantity of fluorine gas, so as to keep the operations of the semiconductor manufacturing apparatuses. Thereby obtained is a semiconductor manufacturing plant in which fluorine gas generated in the fluorine gas generators can be safely and stably supplied to the semiconductor manufacturing apparatuses, and with superior cost performance.

Abstract: A separator of the present invention for a nonaqueous electrolyte secondary battery is obtained by fluorinating a polyolefin based resin. A contact angle of the separator with a nonaqueous solvent electrolyte is 40° or less a shutdown temperature of the separator is 170° C. or less. Further, a multilayered separator of the present invention for a nonaqueous electrolyte secondary battery includes a plurality of layers, at least one of which is the foregoing separator for a nonaqueous electrolyte secondary battery. These separators for nonaqueous electrolyte secondary battery have both a favorable electrolyte-retaining characteristic and a suitable shutdown performance.

Abstract: It is an object of the present invention to provide a cathode active material capable of reducing degradation in an operation voltage and capacity as compared conventionally when used for a lithium ion secondary battery, and a method for manufacturing the same. The cathode active material contains a composite oxide of lithium and a transition metal (s), wherein a reduction loss of TLC in the composite oxide is 20 to 60%. Also, the composite oxide has a particle diameter of 0.5 to 100 ?m, and is preferably fluorinated. The method for manufacturing the cathode active material includes the step of fluorinating the cathode active material. The composite oxide has a particle diameter of 0.5 to 100 ?m. The fluorinating step is to fluorinate the composite oxide in a reaction vessel under conditions where fluorine gas partial pressure is 1 to 200 kPa, a reaction time is 10 minutes to 10 days, and a reaction temperature is ?10 to 200° C.

Abstract: A carbon electrode for producing gaseous nitrogen trifluoride comprising a dense texture with an average pore size of 0.5 ?m or less is provided. The carbon electrode contains a carbonaceous material, and 3 to 10 wt % of at least one selected from magnesium fluoride and aluminum fluoride which have a melting point not lower than the baking temperature of the carbonaceous material.

Abstract: A fluorine/fluoride gas generator which has an electrolyte made of mixed molten salt containing hydrogen fluoride in an electrolytic cell including an anode chamber and a cathode chamber, and generates a gas containing fluorine by electrolyzing the electrolyte, includes a raw material supply pipe for supplying an electrolysis raw material, reaching the inside of the electrolyte in the electrolytic cell, a normally-closed valve provided in the middle of the raw material supply pipe, and a bypass pipe provided with a normally-open valve, joining the raw material supply pipe on the downstream side from the normally-closed valve to a gas phase area of the electrolytic cell. Accordingly, the electrolyte is prevented from being suctioned into the raw material supply pipe in the fluorine/fluoride gas generator, and solidification of the electrolyte inside the raw material supply pipe can be prevented.

Abstract: A high power lithium-ion secondary battery having an increased capacity and capable of maintaining high discharge voltage and repeating charging/discharging high current. A lithium-ion secondary battery having; an electrode group formed by laminating or winding a negative electrode layer and a positive electrode layer so as to interpose a separator made of synthetic resin, the negative electrode layer containing a material capable of intercalating/deintercalating lithium-ion, and a positive electrode layer including a lithium-containing metallic oxide; and a non-aqueous electrolyte containing lithium salt, where the electrode group is immersed. The positive electrode material unit contains a fluorinated lithium-containing metallic oxide as a main material, and the separator possesses a hydrophilic group. Further, the positive electrode material preferably contains a main material including LiNixCoyMnzO2, where 0.4?x?1, 0?y?0.2, 0?z 0.2, x+y+z=1.

Abstract: The problem of the present invention is to provide, in high current-low energy type ion implantation apparatuses, a graphite member for a beam line inner member of an ion implantation apparatus, which graphite member can markedly reduce particles incorporated in a wafer surface. This problem can be solved by the graphite member of the present invention, which is a graphite member for a beam line inner member of an ion implantation apparatus, which member having a bulk density of not less than 1.80 Mg/m3 and an electric resistivity of not more than 9.5 ??·m. Preferably, the R value obtained by dividing D band intensity at 1370 cm?1 by G band intensity at 1570 cm?1 in the Raman spectrum of a spontaneous fracture surface of the graphite member is not more than 0.20.

Abstract: A gas generator is provided in which the filter life is prolonged and the pressure regulating valve is thereby protected for a prolonged periods. The gas generator is intended for electrolyzing an electrolyte in an electrolytic cell to generate a gas or gases and comprises at least one absorber for absorbing an unnecessary by-products generated from the gas generator, a filter for removing the mist generated from the absorber, and at least one pressure regulating valve for adjusting the pressure in the electrolytic cell, wherein the filter is inserted downstream from the absorber and, further, the pressure regulating valve is disposed downstream from the filter.

Abstract: An electrolytic apparatus for molten salt disposed on an electrolytic cell to electrolyze an electrolytic bath consisting of the mixed molten salt. The apparatus including a first heat exchanging means to heat and/or cool an electrolytic cell body. The apparatus including a support member comprising one of a flange part and an upper lid. The apparatus including a cover member. The apparatus including an electric insulating material and a gas sealing material disposed between the support member and the cover member for simultaneous electric insulation and gas sealing.

Abstract: A fluorine gas generator for generating fluorine gas by electrolysis of an electrolytic bath comprising a hydrogen fluoride-containing mixed molten salt in which generator the position of the electrolytic bath liquid surface in the electrolytic cell can be safely controlled even during suspension of electrolysis therein is provided. The generator comprises an anode chamber and a cathode chamber separated from each other by a partition wall and is provided with electrolytic bath liquid level controlling means for controlling the electrolytic bath liquid level in at least one of the anode chamber and cathode chamber during suspension of fluorine gas generation.

Abstract: Since the system for supplying gas comprises a storage container, a compressor which pressurizes fluorine gas in the storage container, and a pressurized storing container which presses fit and stores the fluorine gas, by supplying fluorine gas or the like to the destination from this system for supplying gas, it is not necessary to change gas source such as a gas cylinder or the like. In this way, fluorine gas or the like can be supplied to the destination inexpensively and safely.

Abstract: Single-crystal silicon carbide is obtained, which finds a wide variety of applications including semiconductors, and an etching method for single-crystal silicon carbide is provided, by which nitrogen trifluoride plasma is used in single-crystal silicon carbide to obtain a smooth surface. In order to obtain single-crystal silicon carbide having the smoothness (surface roughness) within 150 nm and the material, nitrogen trifluoride-containing gas is subjected to plasma excitation to obtain single-crystal silicon carbide with a smooth surface. It is preferable that the pressure of nitrogen trifluoride gas is in the range of 0.5 to 10 Pa. It is also preferable that the flow rate of the nitrogen trifluoride gas is in the range of 5 to 15 sccm.

Abstract: The present invention provides an electrolytic anode for use in electrolytically synthesizing a fluorine-containing substance by using an electrolytic bath containing a fluoride ion including: an electroconductive substrate having a sure including an electroconductive carbonaceous material; and an electroconductive carbonaceous film having a diamond structure, the electroconductive carbonaceous film coating a part of the electroconductive carbonaceous substrate, and a method for electrolytically synthesizing a fluorine-containing substance using the electrolytic anode.