Patents by Inventor Tetsuya OYAMADA

Tetsuya OYAMADA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12388044
    Abstract: There is provided an Al bonding wire which can achieve a sufficient bonding reliability of bonded parts of the bonding wire under a high temperature state where a semiconductor device using the Al bonding wire is operated. The Al bonding wire is characterized in that the wire contains 0.02 to 1% by mass of Fe, further contains 0.05 to 0.5% by mass in total of at least one or more of Mn and Cr, and the balance includes Al and inevitable impurities, wherein a total content of Fe, Mn and Cr in solid solution is 0.01 to 1% by mass. The Al bonding wire contains Mn and Cr in addition to Fe, so that Fe, Mn and Cr can be promoted to form a solid solution in quenching treatment after the solution treatment. Accordingly, the Al bonding wire can achieve an effect of solid-solution strengthening of the wire due to the increase in the total content of Fe, Mn and Cr in solid solution and an effect of preventing recrystallization from proceeding during use of the semiconductor device at a high temperature for a long time.
    Type: Grant
    Filed: March 25, 2020
    Date of Patent: August 12, 2025
    Assignees: NIPPON MICROMETAL CORPORATION, NIPPON STEEL Chemical & Material Co., Ltd.
    Inventors: Takashi Yamada, Akihito Nishibayashi, Teruo Haibara, Daizo Oda, Motoki Eto, Tetsuya Oyamada, Takayuki Kobayashi, Tomohiro Uno
  • Patent number: 12334467
    Abstract: There is provided a copper bonding wire that exhibits a favorable bondability even when a scrub at the time of bonding is reduced. The copper bonding wire is characterized in that when a sum of percentages of Cu, Cu2O, CuO and Cu(OH)2 on a surface of the wire as measured by X-ray Photoelectron Spectroscopy (XPS) is defined as 100%, Cu[II]/Cu[I] which is a ratio of a total percentage of CuO and Cu(OH)2 (Cu[II]) corresponding to bivalent Cu to a percentage of Cu2O (Cu[I]) corresponding to monovalent Cu falls within a range from 0.8 to 12.
    Type: Grant
    Filed: February 19, 2021
    Date of Patent: June 17, 2025
    Assignees: NIPPON MICROMETAL CORPORATION, NIPPON STEEL Chemical & Material Co., Ltd.
    Inventors: Tomohiro Uno, Tetsuya Oyamada, Daizo Oda, Kota Shimomura, Tadashi Yamaguchi
  • Patent number: 12325901
    Abstract: There is provided an Al wiring material which suppresses a chip crack and achieves thermal shock resistance while suppressing lowering of a yield at the time of manufacture. The Al wiring material contains at least Sc and Zr so as to satisfy 0.01?x1?0.5 and 0.01?x2?0.3 where x1 is a content of Sc [% by weight] and x2 is a content of Zr [% by weight], with the balance comprising Al.
    Type: Grant
    Filed: September 17, 2020
    Date of Patent: June 10, 2025
    Assignees: NIPPON MICROMETAL CORPORATION, NIPPON STEEL Chemical & Material Co., Ltd.
    Inventors: Yuto Kurihara, Ryo Oishi, Motoki Eto, Daizo Oda, Tetsuya Oyamada, Yuya Suto, Tomohiro Uno
  • Patent number: 12166006
    Abstract: A bonding wire includes a core material of Cu or Cu alloy, and a coating layer containing a conductive metal other than Cu on a surface of the core material. In a concentration profile in a depth direction of the wire obtained, an average value of sum of a Pd concentration CPd (atomic %) and an Ni concentration CNi (atomic %) for measurement points in the coating layer is 50 atomic % or more, an average value of a ratio of CPd to CNi for measurement points in the coating layer is from 0.2 to 20 and a thickness of the coating layer is from 20 nm to 180 nm. An Au concentration CAu at a surface of the wire is from 10 atomic % to 85 atomic %. An average size of crystal grains in a circumferential direction of the wire is from 35 nm to 200 nm.
    Type: Grant
    Filed: October 18, 2022
    Date of Patent: December 10, 2024
    Assignees: NIPPON STEEL Chemical & Material Co., Ltd., NIPPON MICROMETAL CORPORATION
    Inventors: Tomohiro Uno, Tetsuya Oyamada, Daizo Oda, Motoki Eto
  • Patent number: 12132026
    Abstract: A bonding wire includes a core material of Cu or Cu alloy, and a coating layer containing a conductive metal other than Cu on a surface of the core material. In a concentration profile in a depth direction of the wire obtained, an average value of sum of a Pd concentration CPd (atomic %) and an Ni concentration CNi (atomic %) for measurement points in the coating layer is 50 atomic % or more, an average value of a ratio of CPd to CNi for measurement points in the coating layer is from 0.2 to 20 and a thickness of the coating layer is from 20 nm to 180 nm. An Au concentration CAu at a surface of the wire is from 10 atomic % to 85 atomic %. An average size of crystal grains in a circumferential direction of the wire is from 35 nm to 200 nm.
    Type: Grant
    Filed: October 18, 2022
    Date of Patent: October 29, 2024
    Assignees: NIPPON STEEL Chemical & Material Co., Ltd., NIPPON MICROMETAL CORPORATION
    Inventors: Tomohiro Uno, Tetsuya Oyamada, Daizo Oda, Motoki Eto
  • Patent number: 12132025
    Abstract: There is provided a metal-coated Al bonding wire which can provide a sufficient bonding reliability of bonded parts of the bonding wire under a high temperature state where a semiconductor device using the metal-coated Al bonding wire is operated. The bonding wire includes a core wire of Al or Al alloy, and a coating layer of Ag, Au or an alloy containing them formed on the outer periphery of the core wire, and the bonding wire is characterized in that when measuring crystal orientations on a cross-section of the core wire in a direction perpendicular to a wire axis of the bonding wire, a crystal orientation <111> angled at 15 degrees or less to a wire longitudinal direction has a proportion of 30 to 90% among crystal orientations in the wire longitudinal direction. Preferably, the surface roughness of the wire is 2 ?m or less in terms of Rz.
    Type: Grant
    Filed: March 12, 2020
    Date of Patent: October 29, 2024
    Assignees: NIPPON MICROMETAL CORPORATION, NIPPON STEEL Chemical & Material Co., Ltd.
    Inventors: Takashi Yamada, Akihito Nishibayashi, Teruo Haibara, Daizo Oda, Motoki Eto, Tetsuya Oyamada, Takayuki Kobayashi, Tomohiro Uno
  • Publication number: 20240312946
    Abstract: To provide an Al bonding wire for semiconductor devices that stably exhibits a favorable bonding strength at a second bonded part. An Al bonding wire for semiconductor devices containing equal to or larger than 0.01 mass % and smaller than 0.8 mass % of one or more of Sc, Zr, and Mg in total, wherein, as a result of measuring a crystal orientation on a cross-section parallel to a wire axis direction including a wire axis of the bonding wire, 10 an orientation ratio of a <100> crystal orientation angled at 15 degrees or less to the wire axis direction is equal to or higher than 30% and equal to or lower than 90%.
    Type: Application
    Filed: January 31, 2022
    Publication date: September 19, 2024
    Inventors: Tetsuya OYAMADA, Yuya SUTO, Tomohiro UNO, Daizo ODA, Ryo OISHI, Yuto KURIHARA
  • Patent number: 12090578
    Abstract: There is provided an Al bonding wire which can provide a sufficient bonding reliability of bonded parts of the bonding wire under a high temperature state where a semiconductor device using the Al bonding wire is operated. The bonding wire is composed of Al or Al alloy, and is characterized in that an average crystal grain size in a cross-section of a core wire in a direction perpendicular to a wire axis of the bonding wire is 0.01 to 50 ?m, and when measuring crystal orientations on the cross-section of the core wire in the direction perpendicular to the wire axis of the bonding wire, a crystal orientation <111> angled at 15 degrees or less to a wire longitudinal direction has a proportion of 30 to 90% among crystal orientations in the wire longitudinal direction.
    Type: Grant
    Filed: March 12, 2020
    Date of Patent: September 17, 2024
    Assignees: NIPPON MICROMETAL CORPORATION, NIPPON STEEL Chemical & Material Co., Ltd.
    Inventors: Takashi Yamada, Akihito Nishibayashi, Teruo Haibara, Daizo Oda, Motoki Eto, Tetsuya Oyamada, Takayuki Kobayashi, Tomohiro Uno
  • Publication number: 20240266313
    Abstract: A bonding wire includes a core material of Cu or Cu alloy, and a coating layer containing a conductive metal other than Cu on a surface of the core material. In a concentration profile in a depth direction of the wire obtained, an average value of sum of a Pd concentration CPd (atomic %) and an Ni concentration CNi (atomic %) for measurement points in the coating layer is 50 atomic % or more, an average value of a ratio of CPd to CNi for measurement points in the coating layer is from 0.2 to 20 and a thickness of the coating layer is from 20 nm to 180 nm. An Au concentration CAu at a surface of the wire is from 10 atomic % to 85 atomic %. An average size of crystal grains in a circumferential direction of the wire is from 35 nm to 200 nm.
    Type: Application
    Filed: October 18, 2022
    Publication date: August 8, 2024
    Inventors: Tomohiro UNO, Tetsuya OYAMADA, Daizo ODA, Motoki ETO
  • Publication number: 20240110262
    Abstract: There is provided an Al wiring material which can achieve sufficient bond reliability of bonded parts in a high-temperature environment at the time when a semiconductor device operates. The Al wiring material containing one or more of Pd and Pt so as to satisfy 3?x1a?90 or 10?x1b?250, and 3?(x1a+x1b)?300, where x1a and x1b are respectively a content of Pd [mass ppm] and a content of Pt [mass ppm], with the balance comprising Al, and an average crystal grain diameter on a cross-section perpendicular to a longitudinal direction of the Al wiring material is 3 to 35 ?m.
    Type: Application
    Filed: January 31, 2022
    Publication date: April 4, 2024
    Inventors: Tomohiro UNO, Yuya SUTO, Tetsuya OYAMADA, Daizo ODA, Yuto KURIHARA, Motoki ETO
  • Publication number: 20240105668
    Abstract: There is provided a novel Al wiring material that achieves both of a suppression of chip damage and a thermal shock resistance. In aspect 1, the Al wiring material includes an Al core material and an Al coating layer formed on a surface of the Al core material, and satisfies 1.2?H1h/H1s where H1h is a Vickers hardness of the Al core material (Hv) and H1s is a Vickers hardness of the Al coating layer (Hv). In aspect 2, the Al wiring material includes an Al core material and an Al coating layer formed on a surface of the Al core material, and satisfies 1.2?H2h/H2s where H2s is a Vickers hardness of the Al core material (Hv) and H2h is a Vickers hardness of the Al coating layer (Hv).
    Type: Application
    Filed: January 31, 2022
    Publication date: March 28, 2024
    Inventors: Yuto KURIHARA, Daizo ODA, Motoki ETO, Ryo OISHI, Tetsuya OYAMADA, Tomohiro UNO
  • Publication number: 20240071978
    Abstract: To provide an Al bonding wire exhibiting a favorable high-temperature and high-humidity service life in a high-temperature and high-humidity environment required for next-generation vehicle-mounted power devices. The Al bonding wire for semiconductor devices containing equal to or larger than 3 mass ppm and equal to or smaller than 500 mass ppm of one or more of Pd and Pt in total, in which, as a result of measuring a crystal orientation on a cross section parallel to a wire axis direction including a wire axis of the bonding wire, an orientation ratio of a <100> crystal orientation angled at 15 degrees or less to the wire axis direction is equal to or higher than 30% and equal to or lower than 90%.
    Type: Application
    Filed: January 31, 2022
    Publication date: February 29, 2024
    Inventors: Yuya SUTO, Tomohiro UNO, Tetsuya OYAMADA, Daizo ODA, Motoki ETO, Yuto KURIHARA
  • Publication number: 20230402422
    Abstract: There is provided a novel Ag alloy bonding wire for semiconductor devices which provides an excellent bonded ball shape during ball bonding, which is required for high-density packaging. The Ag alloy bonding wire for semiconductor devices is made of an Ag alloy that contains one or more elements selected from the group consisting of Te, Bi and Sb and that satisfies at least one of the following conditions (1) to (3): (1) a concentration of Te is 5 to 500 at. ppm; (2) a concentration of Bi is 5 to 500 at. ppm; and (3) a concentration of Sb is 5 to 1,500 at. ppm.
    Type: Application
    Filed: September 24, 2021
    Publication date: December 14, 2023
    Inventors: Noritoshi Araki, Takumi OOKABE, Daizo ODA, Tomohiro UNO, Tetsuya OYAMADA
  • Publication number: 20230302584
    Abstract: There is provided a novel Al wiring material that achieves a favorable high-temperature reliability as well as a favorable workability and bondability during installation and connection to a device. The Al wiring material contains Mg and Si so as to satisfy 0.05?x1a?2.5, 0.02?x1b?1, and 0.1?(x1a+x1b)?3 where x1a is a content of Mg [% by mass] and x1b is a content of Si [% by mass], and contains one or more selected from the group consisting of Sc, Er, Yb, Gd, Ce and Y so as to satisfy 0.001?x2?0.5 where x2 is a total content thereof [% by mass], with the balance comprising Al.
    Type: Application
    Filed: August 24, 2021
    Publication date: September 28, 2023
    Inventors: Tomohiro UNO, Tetsuya OYAMADA, Yuya SUTO, Daizo ODA, Yuto KURIHARA, Ryo OISHI
  • Publication number: 20230154884
    Abstract: There is provided an Ag alloy bonding wire for semiconductor devices which exhibits a favorable bond reliability in a high-temperature environment even when using a mold resin of high S content and can suppress a chip damage at the time of ball bonding. The Ag alloy bonding wire is characterized by containing at least one element selected from the group consisting of Pd and Pt (hereinafter referred to as a “first element”) and at least one element selected from the group consisting of P, Cr, Zr and Mo (hereinafter referred to as a “second element”) so as to satisfy 0.05 ? ? ? ? ? x 1 ? ? ? ? ? 3.0 , ? ? and 15 ? ? ? x 2 ? ? ? 700 where x1 is a total concentration of the first element [at.%] and x2 is a total concentration of the second element [at. ppm], with the balance including Ag.
    Type: Application
    Filed: March 29, 2021
    Publication date: May 18, 2023
    Inventors: Daizo ODA, Takumi OOKABE, Motoki ETO, Noritoshi ARAKI, Ryo OISHI, Teruo HAIBARA, Tomohiro UNO, Tetsuya OYAMADA
  • Publication number: 20230146315
    Abstract: There is provided an Al bonding wire which can achieve a sufficient bonding reliability of bonded parts of the bonding wire under a high temperature state where a semiconductor device using the Al bonding wire is operated. The Al bonding wire contains 0.01 to 1% of Sc, and further contains 0.01 to 0.1% in total of at least one or more of Y, La, Ce, Pr and Nd. With regard to the Al bonding wire, a recrystallization temperature thereof is increased, so that the proceeding of recrystallization of the bonding wire can be suppressed, and strength of the wire can be prevented from being decreased even when the semiconductor device is continuously used under a high temperature environment. Accordingly, the Al bonding wire can sufficiently secure the reliability of the bonded parts after a high-temperature long-term hysteresis.
    Type: Application
    Filed: March 13, 2020
    Publication date: May 11, 2023
    Inventors: Takashi YAMADA, Akihito NISHIBAYASHI, Teruo HAIBARA, Daizo ODA, Motoki ETO, Tetsuya OYAMADA, Takayuki KOBAYASHI, Tomohiro UNO
  • Publication number: 20230148306
    Abstract: There is provided a bonding wire for semiconductor devices that exhibits a favorable bondability even when being applied to wedge bonding at the room temperature, and also achieves an excellent bond reliability. The bonding wire includes a core material of Cu or Cu alloy (hereinafter referred to as a “Cu core material”), and a coating containing a noble metal formed on a surface of the Cu core material. A concentration of Cu at a surface of the wire is 30 to 80 at%.
    Type: Application
    Filed: March 18, 2021
    Publication date: May 11, 2023
    Inventors: Motoki ETO, Daizo ODA, Tomohiro UNO, Tetsuya OYAMADA
  • Publication number: 20230142531
    Abstract: There is provided an Al bonding wire which can achieve a sufficient bonding reliability of bonded parts of the bonding wire under a high temperature state where a semiconductor device using the Al bonding wire is operated. The Al bonding wire is characterized in that the wire contains 0.02 to 1% by mass of Fe, further contains 0.05 to 0.5% by mass in total of at least one or more of Mn and Cr, and the balance includes Al and inevitable impurities, wherein a total content of Fe, Mn and Cr in solid solution is 0.01 to 1% by mass. The Al bonding wire contains Mn and Cr in addition to Fe, so that Fe, Mn and Cr can be promoted to form a solid solution in quenching treatment after the solution treatment. Accordingly, the Al bonding wire can achieve an effect of solid-solution strengthening of the wire due to the increase in the total content of Fe, Mn and Cr in solid solution and an effect of preventing recrystallization from proceeding during use of the semiconductor device at a high temperature for a long time.
    Type: Application
    Filed: March 25, 2020
    Publication date: May 11, 2023
    Inventors: Takashi YAMADA, Akihito NISHIBAYASHI, Teruo HAIBARA, Daizo ODA, Motoki ETO, Tetsuya OYAMADA, Takayuki KOBAYASHI, Tomohiro UNO
  • Publication number: 20230105851
    Abstract: There is provided a copper bonding wire that exhibits a favorable bondability even when a scrub at the time of bonding is reduced. The copper bonding wire is characterized in that when a sum of percentages of Cu, Cu2O, CuO and Cu(OH)2 on a surface of the wire as measured by X-ray Photoelectron Spectroscopy (XPS) is defined as 100%, Cu[II]/Cu[I] which is a ratio of a total percentage of CuO and Cu(OH)2 (Cu[II]) corresponding to bivalent Cu to a percentage of Cu2O (Cu[I]) corresponding to monovalent Cu falls within a range from 0.8 to 12.
    Type: Application
    Filed: February 19, 2021
    Publication date: April 6, 2023
    Inventors: Tomohiro UNO, Tetsuya OYAMADA, Daizo ODA, Kota SHIMOMURA, Tadashi YAMAGUCHI
  • Patent number: 11612966
    Abstract: An object of the present invention is to provide an Ag alloy bonding wire for a semiconductor device capable of extending the high-temperature life of a wire, reducing chip damage during ball bonding, and improving characteristics such as ball bonding strength in applications of on-vehicle memory devices. The Ag alloy bonding wire for a semiconductor device according to the present invention contains one or more of In and Ga for a total of 110 at ppm or more and less than 500 at ppm, and one or more of Pd and Pt for a total of 150 at ppm or more and less than 12,000 at ppm, and a balance being made up of Ag and unavoidable impurities.
    Type: Grant
    Filed: November 12, 2020
    Date of Patent: March 28, 2023
    Assignees: NIPPON STEEL CHEMICAL & MATERIAL CO., LTD., NIPPON MICROMETAL CORPORATION
    Inventors: Tetsuya Oyamada, Tomohiro Uno, Daizo Oda, Motoki Eto, Takumi Ohkabe