Patents by Inventor Tetsuya OYAMADA

Tetsuya OYAMADA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240110262
    Abstract: There is provided an Al wiring material which can achieve sufficient bond reliability of bonded parts in a high-temperature environment at the time when a semiconductor device operates. The Al wiring material containing one or more of Pd and Pt so as to satisfy 3?x1a?90 or 10?x1b?250, and 3?(x1a+x1b)?300, where x1a and x1b are respectively a content of Pd [mass ppm] and a content of Pt [mass ppm], with the balance comprising Al, and an average crystal grain diameter on a cross-section perpendicular to a longitudinal direction of the Al wiring material is 3 to 35 ?m.
    Type: Application
    Filed: January 31, 2022
    Publication date: April 4, 2024
    Inventors: Tomohiro UNO, Yuya SUTO, Tetsuya OYAMADA, Daizo ODA, Yuto KURIHARA, Motoki ETO
  • Publication number: 20240105668
    Abstract: There is provided a novel Al wiring material that achieves both of a suppression of chip damage and a thermal shock resistance. In aspect 1, the Al wiring material includes an Al core material and an Al coating layer formed on a surface of the Al core material, and satisfies 1.2?H1h/H1s where H1h is a Vickers hardness of the Al core material (Hv) and H1s is a Vickers hardness of the Al coating layer (Hv). In aspect 2, the Al wiring material includes an Al core material and an Al coating layer formed on a surface of the Al core material, and satisfies 1.2?H2h/H2s where H2s is a Vickers hardness of the Al core material (Hv) and H2h is a Vickers hardness of the Al coating layer (Hv).
    Type: Application
    Filed: January 31, 2022
    Publication date: March 28, 2024
    Inventors: Yuto KURIHARA, Daizo ODA, Motoki ETO, Ryo OISHI, Tetsuya OYAMADA, Tomohiro UNO
  • Publication number: 20240071978
    Abstract: To provide an Al bonding wire exhibiting a favorable high-temperature and high-humidity service life in a high-temperature and high-humidity environment required for next-generation vehicle-mounted power devices. The Al bonding wire for semiconductor devices containing equal to or larger than 3 mass ppm and equal to or smaller than 500 mass ppm of one or more of Pd and Pt in total, in which, as a result of measuring a crystal orientation on a cross section parallel to a wire axis direction including a wire axis of the bonding wire, an orientation ratio of a <100> crystal orientation angled at 15 degrees or less to the wire axis direction is equal to or higher than 30% and equal to or lower than 90%.
    Type: Application
    Filed: January 31, 2022
    Publication date: February 29, 2024
    Inventors: Yuya SUTO, Tomohiro UNO, Tetsuya OYAMADA, Daizo ODA, Motoki ETO, Yuto KURIHARA
  • Publication number: 20230402422
    Abstract: There is provided a novel Ag alloy bonding wire for semiconductor devices which provides an excellent bonded ball shape during ball bonding, which is required for high-density packaging. The Ag alloy bonding wire for semiconductor devices is made of an Ag alloy that contains one or more elements selected from the group consisting of Te, Bi and Sb and that satisfies at least one of the following conditions (1) to (3): (1) a concentration of Te is 5 to 500 at. ppm; (2) a concentration of Bi is 5 to 500 at. ppm; and (3) a concentration of Sb is 5 to 1,500 at. ppm.
    Type: Application
    Filed: September 24, 2021
    Publication date: December 14, 2023
    Inventors: Noritoshi Araki, Takumi OOKABE, Daizo ODA, Tomohiro UNO, Tetsuya OYAMADA
  • Publication number: 20230302584
    Abstract: There is provided a novel Al wiring material that achieves a favorable high-temperature reliability as well as a favorable workability and bondability during installation and connection to a device. The Al wiring material contains Mg and Si so as to satisfy 0.05?x1a?2.5, 0.02?x1b?1, and 0.1?(x1a+x1b)?3 where x1a is a content of Mg [% by mass] and x1b is a content of Si [% by mass], and contains one or more selected from the group consisting of Sc, Er, Yb, Gd, Ce and Y so as to satisfy 0.001?x2?0.5 where x2 is a total content thereof [% by mass], with the balance comprising Al.
    Type: Application
    Filed: August 24, 2021
    Publication date: September 28, 2023
    Inventors: Tomohiro UNO, Tetsuya OYAMADA, Yuya SUTO, Daizo ODA, Yuto KURIHARA, Ryo OISHI
  • Publication number: 20230154884
    Abstract: There is provided an Ag alloy bonding wire for semiconductor devices which exhibits a favorable bond reliability in a high-temperature environment even when using a mold resin of high S content and can suppress a chip damage at the time of ball bonding. The Ag alloy bonding wire is characterized by containing at least one element selected from the group consisting of Pd and Pt (hereinafter referred to as a “first element”) and at least one element selected from the group consisting of P, Cr, Zr and Mo (hereinafter referred to as a “second element”) so as to satisfy 0.05 ? ? ? ? ? x 1 ? ? ? ? ? 3.0 , ? ? and 15 ? ? ? x 2 ? ? ? 700 where x1 is a total concentration of the first element [at.%] and x2 is a total concentration of the second element [at. ppm], with the balance including Ag.
    Type: Application
    Filed: March 29, 2021
    Publication date: May 18, 2023
    Inventors: Daizo ODA, Takumi OOKABE, Motoki ETO, Noritoshi ARAKI, Ryo OISHI, Teruo HAIBARA, Tomohiro UNO, Tetsuya OYAMADA
  • Publication number: 20230142531
    Abstract: There is provided an Al bonding wire which can achieve a sufficient bonding reliability of bonded parts of the bonding wire under a high temperature state where a semiconductor device using the Al bonding wire is operated. The Al bonding wire is characterized in that the wire contains 0.02 to 1% by mass of Fe, further contains 0.05 to 0.5% by mass in total of at least one or more of Mn and Cr, and the balance includes Al and inevitable impurities, wherein a total content of Fe, Mn and Cr in solid solution is 0.01 to 1% by mass. The Al bonding wire contains Mn and Cr in addition to Fe, so that Fe, Mn and Cr can be promoted to form a solid solution in quenching treatment after the solution treatment. Accordingly, the Al bonding wire can achieve an effect of solid-solution strengthening of the wire due to the increase in the total content of Fe, Mn and Cr in solid solution and an effect of preventing recrystallization from proceeding during use of the semiconductor device at a high temperature for a long time.
    Type: Application
    Filed: March 25, 2020
    Publication date: May 11, 2023
    Inventors: Takashi YAMADA, Akihito NISHIBAYASHI, Teruo HAIBARA, Daizo ODA, Motoki ETO, Tetsuya OYAMADA, Takayuki KOBAYASHI, Tomohiro UNO
  • Publication number: 20230146315
    Abstract: There is provided an Al bonding wire which can achieve a sufficient bonding reliability of bonded parts of the bonding wire under a high temperature state where a semiconductor device using the Al bonding wire is operated. The Al bonding wire contains 0.01 to 1% of Sc, and further contains 0.01 to 0.1% in total of at least one or more of Y, La, Ce, Pr and Nd. With regard to the Al bonding wire, a recrystallization temperature thereof is increased, so that the proceeding of recrystallization of the bonding wire can be suppressed, and strength of the wire can be prevented from being decreased even when the semiconductor device is continuously used under a high temperature environment. Accordingly, the Al bonding wire can sufficiently secure the reliability of the bonded parts after a high-temperature long-term hysteresis.
    Type: Application
    Filed: March 13, 2020
    Publication date: May 11, 2023
    Inventors: Takashi YAMADA, Akihito NISHIBAYASHI, Teruo HAIBARA, Daizo ODA, Motoki ETO, Tetsuya OYAMADA, Takayuki KOBAYASHI, Tomohiro UNO
  • Publication number: 20230148306
    Abstract: There is provided a bonding wire for semiconductor devices that exhibits a favorable bondability even when being applied to wedge bonding at the room temperature, and also achieves an excellent bond reliability. The bonding wire includes a core material of Cu or Cu alloy (hereinafter referred to as a “Cu core material”), and a coating containing a noble metal formed on a surface of the Cu core material. A concentration of Cu at a surface of the wire is 30 to 80 at%.
    Type: Application
    Filed: March 18, 2021
    Publication date: May 11, 2023
    Inventors: Motoki ETO, Daizo ODA, Tomohiro UNO, Tetsuya OYAMADA
  • Publication number: 20230105851
    Abstract: There is provided a copper bonding wire that exhibits a favorable bondability even when a scrub at the time of bonding is reduced. The copper bonding wire is characterized in that when a sum of percentages of Cu, Cu2O, CuO and Cu(OH)2 on a surface of the wire as measured by X-ray Photoelectron Spectroscopy (XPS) is defined as 100%, Cu[II]/Cu[I] which is a ratio of a total percentage of CuO and Cu(OH)2 (Cu[II]) corresponding to bivalent Cu to a percentage of Cu2O (Cu[I]) corresponding to monovalent Cu falls within a range from 0.8 to 12.
    Type: Application
    Filed: February 19, 2021
    Publication date: April 6, 2023
    Inventors: Tomohiro UNO, Tetsuya OYAMADA, Daizo ODA, Kota SHIMOMURA, Tadashi YAMAGUCHI
  • Patent number: 11612966
    Abstract: An object of the present invention is to provide an Ag alloy bonding wire for a semiconductor device capable of extending the high-temperature life of a wire, reducing chip damage during ball bonding, and improving characteristics such as ball bonding strength in applications of on-vehicle memory devices. The Ag alloy bonding wire for a semiconductor device according to the present invention contains one or more of In and Ga for a total of 110 at ppm or more and less than 500 at ppm, and one or more of Pd and Pt for a total of 150 at ppm or more and less than 12,000 at ppm, and a balance being made up of Ag and unavoidable impurities.
    Type: Grant
    Filed: November 12, 2020
    Date of Patent: March 28, 2023
    Assignees: NIPPON STEEL CHEMICAL & MATERIAL CO., LTD., NIPPON MICROMETAL CORPORATION
    Inventors: Tetsuya Oyamada, Tomohiro Uno, Daizo Oda, Motoki Eto, Takumi Ohkabe
  • Publication number: 20230013769
    Abstract: There is provided a copper bonding wire having an improved storage life in the atmosphere. There is specifically provided a copper bonding wire for semiconductor devices characterized in that a density of crystal grain boundary on a surface of the wire is 0.6 (?m/?m2) or more and 1.6 (?m/?m2) or less.
    Type: Application
    Filed: November 20, 2020
    Publication date: January 19, 2023
    Inventors: Ryo OISHI, Daizo ODA, Noritoshi ARAKI, Kota SHIMOMURA, Tomohiro UNO, Tetsuya OYAMADA
  • Publication number: 20220341004
    Abstract: There is provided an Al wiring material which suppresses a chip crack and achieves thermal shock resistance while suppressing lowering of a yield at the time of manufacture. The Al wiring material contains at least Sc and Zr so as to satisfy 0.01?x1?0.5 and 0.01?x2?0.3 where x1 is a content of Sc [% by weight] and x2 is a content of Zr [% by weight], with the balance comprising Al.
    Type: Application
    Filed: September 17, 2020
    Publication date: October 27, 2022
    Inventors: Yuto KURIHARA, Ryo OISHI, Motoki ETO, Daizo ODA, Tetsuya OYAMADA, Yuya SUTO, Tomohiro UNO
  • Publication number: 20220266396
    Abstract: An object of the present invention is to provide an Ag alloy bonding wire for a semiconductor device capable of extending the high-temperature life of a wire, reducing chip damage during ball bonding, and improving characteristics such as ball bonding strength in applications of on-vehicle memory devices. The Ag alloy bonding wire for a semiconductor device according to the present invention contains one or more of In and Ga for a total of 110 at ppm or more and less than 500 at ppm, and one or more of Pd and Pt for a total of 150 at ppm or more and less than 12,000 at ppm, and a balance being made up of Ag and unavoidable impurities.
    Type: Application
    Filed: November 12, 2020
    Publication date: August 25, 2022
    Inventors: Tetsuya OYAMADA, Tomohiro UNO, Daizo ODA, Motoki ETO, Takumi OHKABE
  • Patent number: 11342299
    Abstract: The present invention has as its object the provision of a bonding wire for semiconductor devices mainly comprised of Ag, in which bonding wire for semiconductor devices, the bond reliability demanded for high density mounting is secured and simultaneously a sufficient, stable bond strength is realized at a ball bond, no neck damage occurs even in a low loop, the leaning characteristic is excellent, and the FAB shape is excellent. To solve this problem, the bonding wire for semiconductor devices according to the present invention contains one or more of Be, B, P, Ca, Y, La, and Ce in a total of 0.031 at % to obtain a 0.180 at %, further contains one or more of In, Ga, and Cd in a total of 0.05 at % to 5.00 at %, and has a balance of Ag and unavoidable impurities.
    Type: Grant
    Filed: September 23, 2016
    Date of Patent: May 24, 2022
    Assignees: NIPPON MICROMETAL CORPORATION, NIPPON STEEL CHEMICAL & MATERIAL CO., LTD.
    Inventors: Daizo Oda, Takumi Ohkabe, Teruo Haibara, Takashi Yamada, Tetsuya Oyamada, Tomohiro Uno
  • Publication number: 20220157766
    Abstract: There is provided a metal-coated Al bonding wire which can provide a sufficient bonding reliability of bonded parts of the bonding wire under a high temperature state where a semiconductor device using the metal-coated Al bonding wire is operated. The bonding wire includes a core wire of Al or Al alloy, and a coating layer of Ag, Au or an alloy containing them formed on the outer periphery of the core wire, and the bonding wire is characterized in that when measuring crystal orientations on a cross-section of the core wire in a direction perpendicular to a wire axis of the bonding wire, a crystal orientation <111> angled at 15 degrees or less to a wire longitudinal direction has a proportion of 30 to 90% among crystal orientations in the wire longitudinal direction. Preferably, the surface roughness of the wire is 2 ?m or less in terms of Rz.
    Type: Application
    Filed: March 12, 2020
    Publication date: May 19, 2022
    Inventors: Takashi YAMADA, Akihito NISHIBAYASHI, Teruo HAIBARA, Daizo ODA, Motoki ETO, Tetsuya OYAMADA, Takayuki KOBAYASHI, Tomohiro UNO
  • Publication number: 20220152749
    Abstract: There is provided an Al bonding wire which can provide a sufficient bonding reliability of bonded parts of the bonding wire under a high temperature state where a semiconductor device using the Al bonding wire is operated. The bonding wire is composed of Al or Al alloy, and is characterized in that an average crystal grain size in a cross-section of a core wire in a direction perpendicular to a wire axis of the bonding wire is 0.01 to 50 ?m, and when measuring crystal orientations on the cross-section of the core wire in the direction perpendicular to the wire axis of the bonding wire, a crystal orientation <111> angled at 15 degrees or less to a wire longitudinal direction has a proportion of 30 to 90% among crystal orientations in the wire longitudinal direction.
    Type: Application
    Filed: March 12, 2020
    Publication date: May 19, 2022
    Inventors: Takashi YAMADA, Akihito NISHIBAYASHI, Teruo HAIBARA, Daizo ODA, Motoki ETO, Tetsuya OYAMADA, Takayuki KOBAYASHI, Tomohiro UNO
  • Publication number: 20220108971
    Abstract: Bonding wire for semiconductor devices contains one or more of Be, B, P, Ca, Y, La, and Ce in a total of 0.031 at % to obtain a 0.180 at %, further contains one or more of In, Ga, and Cd in a total of 0.05 at % to 5.00 at %, and has a balance of Ag and unavoidable impurities. Due to this, it is possible to obtain a bonding wire for semiconductor devices sufficiently forming an intermetallic compound layer at a ball bond interface to secure the bond strength of the ball bond, not causing neck damage even in a low loop, having a good leaning characteristic, and having a good FAB shape.
    Type: Application
    Filed: December 16, 2021
    Publication date: April 7, 2022
    Inventors: Daizo ODA, Takumi OHKABE, Teruo HAIBARA, Takashi YAMADA, Tetsuya OYAMADA, Tomohiro UNO
  • Patent number: 10991672
    Abstract: The present invention provides a bonding wire for a semiconductor device, where the bonding wire can inhibit wear of capillary. In a Cu alloy bonding wire for a semiconductor device, a total of abundance ratios of a crystal orientations <110> and <111> having an angular difference of 15 degrees or less from a direction perpendicular to one plane including a wire center axis is to crystal orientations on a wire surface 40% or more and 90% or less, in average area percentage.
    Type: Grant
    Filed: August 7, 2018
    Date of Patent: April 27, 2021
    Assignees: NIPPON STEEL CHEMICAL & MATERIAL CO., LTD., NIPPON MICROMETAL CORPORATION
    Inventors: Tetsuya Oyamada, Tomohiro Uno, Takashi Yamada, Daizo Oda
  • Patent number: 10985130
    Abstract: It is an object to provide a Cu alloy bonding wire for a semiconductor device that can satisfy required performance in high-density LSI applications. In the Cu alloy bonding wire for a semiconductor device according to the present invention, each of abundance ratios of crystal orientations <100>, <110> and <111> having an angular difference of 15 degrees or less from a direction perpendicular to one plane including a wire center axis out of crystal orientations on a wire surface is 3% or more and less than 27% in average area percentage.
    Type: Grant
    Filed: September 20, 2019
    Date of Patent: April 20, 2021
    Assignees: NIPPON STEEL CHEMICAL & MATERIAL CO., LTD., NIPPON MICROMETAL CORPORATION
    Inventors: Tetsuya Oyamada, Tomohiro Uno, Takashi Yamada, Daizo Oda