Patents by Inventor Tetsuya Terada

Tetsuya Terada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250058431
    Abstract: There is provided an apparatus for polishing, comprising a table configured to support a polishing pad; a polishing head configured to hold a substrate; and a polishing solution supply device configured to supply a polishing solution between the polishing pad and the substrate. The polishing solution supply device comprises a plurality of polishing solution supply ports arrayed in a direction intersecting with a rotating direction of the polishing pad in a state that the polishing solution supply device is placed on an upstream side in rotation of the polishing pad relative to the substrate. The polishing solution supply device supplies the polishing solution, such that the polishing solution supplied from the plurality of polishing solution supply ports has a predetermined flow rate distribution.
    Type: Application
    Filed: October 31, 2024
    Publication date: February 20, 2025
    Inventors: Takuya MORIURA, Hiroshi SOTOZAKI, Tadakazu SONE, Masayoshi ITO, Itsuki KOBATA, Hisanori MATSUO, Tetsuya TERADA
  • Patent number: 12179312
    Abstract: There is provided an apparatus for polishing, comprising a table configured to support a polishing pad; a polishing head configured to hold a substrate; and a polishing solution supply device configured to supply a polishing solution between the polishing pad and the substrate. The polishing solution supply device comprises a plurality of polishing solution supply ports arrayed in a direction intersecting with a rotating direction of the polishing pad in a state that the polishing solution supply device is placed on an upstream side in rotation of the polishing pad relative to the substrate. The polishing solution supply device supplies the polishing solution, such that the polishing solution supplied from the plurality of polishing solution supply ports has a predetermined flow rate distribution.
    Type: Grant
    Filed: March 5, 2021
    Date of Patent: December 31, 2024
    Assignee: EBARA CORPORATION
    Inventors: Takuya Moriura, Hiroshi Sotozaki, Tadakazu Sone, Masayoshi Ito, Itsuki Kobata, Hisanori Matsuo, Tetsuya Terada
  • Publication number: 20240308028
    Abstract: A liquid supply device includes a swing arm capable of horizontally swinging above a polishing table, and a plurality of spray nozzles that is arranged in a longitudinal direction of the swing arm and sprays a cleaning fluid onto the polishing table, in which each of the plurality of spray nozzles has a slit-shaped fluid outlet, and a fluid outlet of the spray nozzle closer to a distal end of the swing arm is oriented to have a larger inclination angle with respect to a longitudinal direction of the swing arm in plan view.
    Type: Application
    Filed: March 14, 2024
    Publication date: September 19, 2024
    Inventors: Noriyuki SATO, Masayuki TAMURA, Kuniaki YAMAGUCHI, Tetsuya TERADA
  • Publication number: 20240286246
    Abstract: A technique is disclosed that can allow an elastic membrane to be inflated into a desired shape when a workpiece is released from a polishing head, or when the workpiece is held on the polishing head, thereby avoiding excessive stress on the workpiece. The method includes supplying a gas into a first pressure chamber and a second pressure chamber at a first flow rate and a second flow rate regulated by a first flow-rate control valve and a second flow-rate control valve to inflate an elastic membrane of a polishing head when a polished workpiece is released from the polishing head, or when a workpiece to be polished is held on the polishing head. The first pressure chamber and the second pressure chamber are formed by the elastic membrane.
    Type: Application
    Filed: February 14, 2024
    Publication date: August 29, 2024
    Inventors: Masayuki TAMURA, Yusuke MOCHIDA, Tetsuya TERADA, Noriyuki SATO, Kuniaki YAMAGUCHI
  • Publication number: 20240227115
    Abstract: When a polishing liquid is supplied while moving a polishing liquid supply head including a plurality of polishing liquid supply ports above a polishing pad, a uniformity of a polishing liquid supply range is improved. A polishing apparatus 1 includes a polishing table for supporting a polishing pad 100, a polishing head 30 for holding an object, and a polishing liquid supply device 40 for supplying a polishing liquid between the polishing pad 100 and the object. The polishing liquid supply device 40 includes a polishing liquid supply head 41 including a plurality of polishing liquid supply ports 414, a link mechanism 60 configured to move the polishing liquid supply head 41 along a polishing surface of the polishing pad 100, and a drive mechanism 90 configured to drive the link mechanism 60.
    Type: Application
    Filed: May 19, 2022
    Publication date: July 11, 2024
    Inventors: Tetsuya TERADA, Hiroshi SOTOZAKI, Takuya MORIURA
  • Publication number: 20240197571
    Abstract: A medicine dispensing system and a program which can support dispensing of medicines using a medicine dispensing part capable of dispensing different types of medicines are provided. A medicine dispensing system (500) according to the present invention includes a determination processing part (212) that determines whether or not a medicine has been dispensed from a medicine dispensing part (2) that can be adjusted to a plurality of states capable of dispensing different types of medicine and a storage processing part (213) that stores dispensing confirmation information in a storage part (206, 202) in a state in which a correspondence relationship with the medicine dispensing part (2) can be specified when the determination processing part determines that the medicine has been dispensed from the medicine dispensing part (2).
    Type: Application
    Filed: March 16, 2022
    Publication date: June 20, 2024
    Applicant: YUYAMA MFG. CO., LTD.
    Inventors: Tetsuya TERADA, Tomoya MIYAGAWA, Noriyoshi FUJII
  • Publication number: 20210283746
    Abstract: There is provided an apparatus for polishing, comprising a table configured to support a polishing pad; a polishing head configured to hold a substrate; and a polishing solution supply device configured to supply a polishing solution between the polishing pad and the substrate. The polishing solution supply device comprises a plurality of polishing solution supply ports arrayed in a direction intersecting with a rotating direction of the polishing pad in a state that the polishing solution supply device is placed on an upstream side in rotation of the polishing pad relative to the substrate. The polishing solution supply device supplies the polishing solution, such that the polishing solution supplied from the plurality of polishing solution supply ports has a predetermined flow rate distribution.
    Type: Application
    Filed: March 5, 2021
    Publication date: September 16, 2021
    Inventors: Takuya MORIURA, Hiroshi SOTOZAKI, Tadakazu SONE, Masayoshi ITO, Itsuki KOBATA, Hisanori MATSUO, Tetsuya TERADA
  • Patent number: 10045914
    Abstract: Provided is a medicine dispensing apparatus including a plurality of medicine cassettes for respectively dispensing desired types of medicines. The medicine dispensing apparatus allocates medicine information on a medicine to be dispensed to one of the medicine cassettes when the medicine information is given. Then, the medicine dispensing apparatus drives the medicine cassette according to a predetermined driving condition corresponding to the medicine information allocated to the medicine cassette to dispense the medicine from the medicine cassette. By using the medicine dispensing apparatus, it is possible to reduce a user work for dispensing the desired types of medicines.
    Type: Grant
    Filed: December 3, 2013
    Date of Patent: August 14, 2018
    Assignee: YUYAMA MFG. CO., LTD.
    Inventors: Hiroyuki Yuyama, Tooru Tanaka, Tomohiro Sugimoto, Tetsuya Terada, Kento Miwa
  • Publication number: 20150190312
    Abstract: Provided is a medicine dispensing apparatus including a plurality of medicine cassettes for respectively dispensing desired types of medicines. The medicine dispensing apparatus allocates medicine information on a medicine to be dispensed to one of the medicine cassettes when the medicine information is given. Then, the medicine dispensing apparatus drives the medicine cassette according to a predetermined driving condition corresponding to the medicine information allocated to the medicine cassette to dispense the medicine from the medicine cassette. By using the medicine dispensing apparatus, it is possible to reduce a user work for dispensing the desired types of medicines.
    Type: Application
    Filed: December 3, 2013
    Publication date: July 9, 2015
    Inventors: Hiroyuki Yuyama, Tooru Tanaka, Tomohiro Sugimoto, Tetsuya Terada, Kento Miwa
  • Patent number: 7552917
    Abstract: A sheet processing apparatus includes: a buffer unit which stores plural supplied sheets with upstream edges in a conveying direction thereof aligned; a processing tray on which sheets discharged from the buffer unit are stacked; and an oscillation roller pair and a return roller which convey the sheet stacked on the processing tray to bring the sheet into abutment against a stopper for receiving the upstream edge of the sheet. The buffer unit is adapted to align the upstream edges of only sheets to be stored before a sheet to be supplied last among the sheets to be stored.
    Type: Grant
    Filed: February 6, 2008
    Date of Patent: June 30, 2009
    Assignees: Canon Finetech Inc., Canon Kabushiki Kaisha
    Inventors: Kenichi Hayashi, Tomokazu Nakamura, Naoto Watanabe, Yusuke Obuchi, Hitoshi Kato, Shunsuke Nishimura, Tetsuya Terada, Yasutaka Iwasa, Daisuke Matsukura, Norio Motoi, Masayoshi Kubo
  • Publication number: 20080136083
    Abstract: A sheet processing apparatus includes: a buffer unit which stores plural supplied sheets with upstream edges in a conveying direction thereof aligned; a processing tray on which sheets discharged from the buffer unit are stacked; and an oscillation roller pair and a return roller which convey the sheet stacked on the processing tray to bring the sheet into abutment against a stopper for receiving the upstream edge of the sheet. The buffer unit is adapted to align the upstream edges of only sheets to be stored before a sheet to be supplied last among the sheets to be stored.
    Type: Application
    Filed: February 6, 2008
    Publication date: June 12, 2008
    Applicant: Canon Finetech Inc.
    Inventors: Kenichi Hayashi, Tomokazu Nakamura, Naoto Watanabe, Yusuke Obuchi, Hitoshi Kato, Shunsuke Nishimura, Tetsuya Terada, Yasutaka Iwasa, Daisuke Matsukura, Norio Motoi, Masayoshi Kubo
  • Patent number: 7377511
    Abstract: A sheet stacking apparatus including a first tray on which sheets discharged form an outlet are stacked, the first tray being movable between a stacking position at which sheets discharged from an outlet are stacked and a first retracted position above the staking position; a second tray on which sheets discharged from an outlet are stacked, the first tray being disposed below the first tray and being movable independently of the first tray, the second tray being movable between the stacking position and a second retracted position below the stacking position; and a controller that causes the second tray to descend when the sheets are to be stacked on the first tray, the controller causing the second tray to stop descending when the second tray reaches a standby position where a distance between the outlet and a top surface of the sheets stacked on the second tray is a predetermined distance.
    Type: Grant
    Filed: June 15, 2006
    Date of Patent: May 27, 2008
    Assignees: Canon Kabushiki Kaisha, Canon Finetech Inc.
    Inventors: Naoto Watanabe, Yoshinori Isobe, Masahiro Yonenuma, Tetsuya Terada
  • Patent number: 7354036
    Abstract: A sheet processing apparatus includes: a buffer unit which stores plural supplied sheets with upstream edges in a conveying direction thereof aligned; a processing tray on which sheets discharged from the buffer unit are stacked; and an oscillation roller pair and a return roller which convey the sheet stacked on the processing tray to bring the sheet into abutment against a stopper for receiving the upstream edge of the sheet. The buffer unit is adapted to align the upstream edges of only sheets to be stored before a sheet to be supplied last among the sheets to be stored.
    Type: Grant
    Filed: November 16, 2006
    Date of Patent: April 8, 2008
    Assignees: Canon Finetech Inc., Canon Kabushiki Kaisha
    Inventors: Kenichi Hayashi, Tomokazu Nakamura, Naoto Watanabe, Yusuke Obuchi, Hitoshi Kato, Shunsuke Nishimura, Tetsuya Terada, Yasutaka Iwasa, Daisuke Matsukura, Norio Motoi, Masayoshi Kubo
  • Patent number: 7264236
    Abstract: A pressing member is provided on a shutter member provided in a main body of an apparatus and adapted to open and close a folded sheet discharging port upon upward and downward shifting movement of sheet stacking means in such a manner that, after folding processing is performed by folding means as the shutter member is lowered, a sheet discharged onto folded sheet stacking means is pressed down by the pressing member. Further, if there is any sheet on the folded sheet stacking means, by stopping the sheet stacking means at a predetermined position where the shutter member lightly abuts against the sheet discharged on the folded sheet stacking means, the sheet is prevented from being pinched between the shutter member and the sheet stacking means.
    Type: Grant
    Filed: November 28, 2005
    Date of Patent: September 4, 2007
    Assignees: Canon Finetech Inc., Canon Kabushiki Kaisha
    Inventors: Yusuke Obuchi, Hitoshi Kato, Hiroshi Suzuki, Tetsuya Terada
  • Publication number: 20070102860
    Abstract: A sheet processing apparatus includes: a buffer unit which stores plural supplied sheets with upstream edges in a conveying direction thereof aligned; a processing tray on which sheets discharged from the buffer unit are stacked; and an oscillation roller pair and a return roller which convey the sheet stacked on the processing tray to bring the sheet into abutment against a stopper for receiving the upstream edge of the sheet. The buffer unit is adapted to align the upstream edges of only sheets to be stored before a sheet to be supplied last among the sheets to be stored.
    Type: Application
    Filed: November 16, 2006
    Publication date: May 10, 2007
    Applicants: Canon Finetech Inc., Canon Kabushiki Kaisha
    Inventors: KENICHI HAYASHI, Tomokazu Nakamura, Naoto Watanabe, Yusuke Obuchi, Hitoshi Kato, Shunsuke Nishimura, Tetsuya Terada, Yasutaka Iwasa, Daisuke Matsukura, Norio Motoi, Masayoshi Kubo
  • Patent number: 7192020
    Abstract: A sheet processing apparatus includes: a buffer unit which stores plural supplied sheets with upstream edges in a conveying direction thereof aligned; a processing tray on which sheets discharged from the buffer unit are stacked; and an oscillation roller pair and a return roller which convey the sheet stacked on the processing tray to bring the sheet into abutment against a stopper for receiving the upstream edge of the sheet. The buffer unit is adapted to align the upstream edges of only sheets to be stored before a sheet to be supplied last among the sheets to be stored.
    Type: Grant
    Filed: March 2, 2004
    Date of Patent: March 20, 2007
    Assignees: Canon Finetech Inc., Canon Kabushiki Kaisha
    Inventors: Kenichi Hayashi, Tomokazu Nakamura, Naoto Watanabe, Yusuke Obuchi, Hitoshi Kato, Shunsuke Nishimura, Tetsuya Terada, Yasutaka Iwasa, Daisuke Matsukura, Norio Motoi, Masayoshi Kubo
  • Patent number: 7185883
    Abstract: A sheet treating apparatus including, a conveying device for conveying sheets, a sheet stack tray for stacking the sheets conveyed by the conveying device, a sensor detecting the sheets conveyed to the sheet stack tray, a pressure-contact conveying device for conveying the sheets on the sheet stack tray in pressure contact with the sheets, a pressure-contact device for bringing the pressure-contact conveying device into pressure-contact with the sheets, and a controlling device for varying a time from when the sensor detects the sheets to when the pressure-contact device starts operating according to a sheet conveyance speed of the conveying device.
    Type: Grant
    Filed: August 30, 2004
    Date of Patent: March 6, 2007
    Assignees: Canon Kabushiki Kaisha, Canon Finetech Inc.
    Inventors: Hitoshi Kato, Tetsuya Terada, Yasutaka Iwasa, Masahiro Yonenuma
  • Publication number: 20060232002
    Abstract: A sheet stacking apparatus including a first tray on which sheets discharged form an outlet are stacked, the first tray being movable between a stacking position at which sheets discharged from an outlet are stacked and a first retracted position above the staking position; a second tray on which sheets discharged from an outlet are stacked, the first tray being disposed below the first tray and being movable independently of the first tray, the second tray being movable between the stacking position and a second retracted position below the stacking position; and a controller that causes the second tray to descend when the sheets are to be stacked on the first tray, the controller causing the second tray to stop descending when the second tray reaches a standby position where a distance between the outlet and a top surface of the sheets stacked on the second tray is a predetermined distance.
    Type: Application
    Filed: June 15, 2006
    Publication date: October 19, 2006
    Applicants: CANON FINETECH INC., CANON KABUSHIKI KAISHA
    Inventors: Naoto Watanabe, Yoshinori Isobe, Masahiro Yonenuma, Tetsuya Terada
  • Publication number: 20060076724
    Abstract: A pressing member is provided on a shutter member provided in a main body of an apparatus and adapted to open and close a folded sheet discharging port upon upward and downward shifting movement of sheet stacking means in such a manner that, after folding processing is performed by folding means as the shutter member is lowered, a sheet discharged onto folded sheet stacking means is pressed down by the pressing member. Further, if there is any sheet on the folded sheet stacking means, by stopping the sheet stacking means at a predetermined position where the shutter member lightly abuts against the sheet discharged on the folded sheet stacking means, the sheet is prevented from being pinched between the shutter member and the sheet stacking means.
    Type: Application
    Filed: November 28, 2005
    Publication date: April 13, 2006
    Applicants: Canon Fintech Inc., Canon Kabushiki Kaisha
    Inventors: Yusuke Obuchi, Hitoshi Kato, Hiroshi Suzuki, Tetsuya Terada
  • Patent number: 6997449
    Abstract: A pressing member is provided on a shutter member provided in a main body of an apparatus and adapted to open and close a folded sheet discharging port upon upward and downward shifting movement of sheet stacking means in such a manner that, after folding processing is performed by folding means as the shutter member is lowered, a sheet discharged onto folded sheet stacking means is pressed down by the pressing member. Further, if there is any sheet on the folded sheet stacking means, by stopping the sheet stacking means at a predetermined position where the shutter member lightly abuts against the sheet discharged on the folded sheet stacking means, the sheet is prevented from being pinched between the shutter member and the sheet stacking means.
    Type: Grant
    Filed: February 25, 2004
    Date of Patent: February 14, 2006
    Assignees: Canon Finetech, Inc., Canon Kabushiki Kaisha
    Inventors: Yusuke Obuchi, Hitoshi Kato, Hiroshi Suzuki, Tetsuya Terada