Patents by Inventor Tetsuya Terada
Tetsuya Terada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20250058431Abstract: There is provided an apparatus for polishing, comprising a table configured to support a polishing pad; a polishing head configured to hold a substrate; and a polishing solution supply device configured to supply a polishing solution between the polishing pad and the substrate. The polishing solution supply device comprises a plurality of polishing solution supply ports arrayed in a direction intersecting with a rotating direction of the polishing pad in a state that the polishing solution supply device is placed on an upstream side in rotation of the polishing pad relative to the substrate. The polishing solution supply device supplies the polishing solution, such that the polishing solution supplied from the plurality of polishing solution supply ports has a predetermined flow rate distribution.Type: ApplicationFiled: October 31, 2024Publication date: February 20, 2025Inventors: Takuya MORIURA, Hiroshi SOTOZAKI, Tadakazu SONE, Masayoshi ITO, Itsuki KOBATA, Hisanori MATSUO, Tetsuya TERADA
-
Patent number: 12179312Abstract: There is provided an apparatus for polishing, comprising a table configured to support a polishing pad; a polishing head configured to hold a substrate; and a polishing solution supply device configured to supply a polishing solution between the polishing pad and the substrate. The polishing solution supply device comprises a plurality of polishing solution supply ports arrayed in a direction intersecting with a rotating direction of the polishing pad in a state that the polishing solution supply device is placed on an upstream side in rotation of the polishing pad relative to the substrate. The polishing solution supply device supplies the polishing solution, such that the polishing solution supplied from the plurality of polishing solution supply ports has a predetermined flow rate distribution.Type: GrantFiled: March 5, 2021Date of Patent: December 31, 2024Assignee: EBARA CORPORATIONInventors: Takuya Moriura, Hiroshi Sotozaki, Tadakazu Sone, Masayoshi Ito, Itsuki Kobata, Hisanori Matsuo, Tetsuya Terada
-
Publication number: 20240308028Abstract: A liquid supply device includes a swing arm capable of horizontally swinging above a polishing table, and a plurality of spray nozzles that is arranged in a longitudinal direction of the swing arm and sprays a cleaning fluid onto the polishing table, in which each of the plurality of spray nozzles has a slit-shaped fluid outlet, and a fluid outlet of the spray nozzle closer to a distal end of the swing arm is oriented to have a larger inclination angle with respect to a longitudinal direction of the swing arm in plan view.Type: ApplicationFiled: March 14, 2024Publication date: September 19, 2024Inventors: Noriyuki SATO, Masayuki TAMURA, Kuniaki YAMAGUCHI, Tetsuya TERADA
-
Publication number: 20240286246Abstract: A technique is disclosed that can allow an elastic membrane to be inflated into a desired shape when a workpiece is released from a polishing head, or when the workpiece is held on the polishing head, thereby avoiding excessive stress on the workpiece. The method includes supplying a gas into a first pressure chamber and a second pressure chamber at a first flow rate and a second flow rate regulated by a first flow-rate control valve and a second flow-rate control valve to inflate an elastic membrane of a polishing head when a polished workpiece is released from the polishing head, or when a workpiece to be polished is held on the polishing head. The first pressure chamber and the second pressure chamber are formed by the elastic membrane.Type: ApplicationFiled: February 14, 2024Publication date: August 29, 2024Inventors: Masayuki TAMURA, Yusuke MOCHIDA, Tetsuya TERADA, Noriyuki SATO, Kuniaki YAMAGUCHI
-
Publication number: 20240227115Abstract: When a polishing liquid is supplied while moving a polishing liquid supply head including a plurality of polishing liquid supply ports above a polishing pad, a uniformity of a polishing liquid supply range is improved. A polishing apparatus 1 includes a polishing table for supporting a polishing pad 100, a polishing head 30 for holding an object, and a polishing liquid supply device 40 for supplying a polishing liquid between the polishing pad 100 and the object. The polishing liquid supply device 40 includes a polishing liquid supply head 41 including a plurality of polishing liquid supply ports 414, a link mechanism 60 configured to move the polishing liquid supply head 41 along a polishing surface of the polishing pad 100, and a drive mechanism 90 configured to drive the link mechanism 60.Type: ApplicationFiled: May 19, 2022Publication date: July 11, 2024Inventors: Tetsuya TERADA, Hiroshi SOTOZAKI, Takuya MORIURA
-
Publication number: 20240197571Abstract: A medicine dispensing system and a program which can support dispensing of medicines using a medicine dispensing part capable of dispensing different types of medicines are provided. A medicine dispensing system (500) according to the present invention includes a determination processing part (212) that determines whether or not a medicine has been dispensed from a medicine dispensing part (2) that can be adjusted to a plurality of states capable of dispensing different types of medicine and a storage processing part (213) that stores dispensing confirmation information in a storage part (206, 202) in a state in which a correspondence relationship with the medicine dispensing part (2) can be specified when the determination processing part determines that the medicine has been dispensed from the medicine dispensing part (2).Type: ApplicationFiled: March 16, 2022Publication date: June 20, 2024Applicant: YUYAMA MFG. CO., LTD.Inventors: Tetsuya TERADA, Tomoya MIYAGAWA, Noriyoshi FUJII
-
Publication number: 20210283746Abstract: There is provided an apparatus for polishing, comprising a table configured to support a polishing pad; a polishing head configured to hold a substrate; and a polishing solution supply device configured to supply a polishing solution between the polishing pad and the substrate. The polishing solution supply device comprises a plurality of polishing solution supply ports arrayed in a direction intersecting with a rotating direction of the polishing pad in a state that the polishing solution supply device is placed on an upstream side in rotation of the polishing pad relative to the substrate. The polishing solution supply device supplies the polishing solution, such that the polishing solution supplied from the plurality of polishing solution supply ports has a predetermined flow rate distribution.Type: ApplicationFiled: March 5, 2021Publication date: September 16, 2021Inventors: Takuya MORIURA, Hiroshi SOTOZAKI, Tadakazu SONE, Masayoshi ITO, Itsuki KOBATA, Hisanori MATSUO, Tetsuya TERADA
-
Patent number: 10045914Abstract: Provided is a medicine dispensing apparatus including a plurality of medicine cassettes for respectively dispensing desired types of medicines. The medicine dispensing apparatus allocates medicine information on a medicine to be dispensed to one of the medicine cassettes when the medicine information is given. Then, the medicine dispensing apparatus drives the medicine cassette according to a predetermined driving condition corresponding to the medicine information allocated to the medicine cassette to dispense the medicine from the medicine cassette. By using the medicine dispensing apparatus, it is possible to reduce a user work for dispensing the desired types of medicines.Type: GrantFiled: December 3, 2013Date of Patent: August 14, 2018Assignee: YUYAMA MFG. CO., LTD.Inventors: Hiroyuki Yuyama, Tooru Tanaka, Tomohiro Sugimoto, Tetsuya Terada, Kento Miwa
-
Publication number: 20150190312Abstract: Provided is a medicine dispensing apparatus including a plurality of medicine cassettes for respectively dispensing desired types of medicines. The medicine dispensing apparatus allocates medicine information on a medicine to be dispensed to one of the medicine cassettes when the medicine information is given. Then, the medicine dispensing apparatus drives the medicine cassette according to a predetermined driving condition corresponding to the medicine information allocated to the medicine cassette to dispense the medicine from the medicine cassette. By using the medicine dispensing apparatus, it is possible to reduce a user work for dispensing the desired types of medicines.Type: ApplicationFiled: December 3, 2013Publication date: July 9, 2015Inventors: Hiroyuki Yuyama, Tooru Tanaka, Tomohiro Sugimoto, Tetsuya Terada, Kento Miwa
-
Patent number: 7552917Abstract: A sheet processing apparatus includes: a buffer unit which stores plural supplied sheets with upstream edges in a conveying direction thereof aligned; a processing tray on which sheets discharged from the buffer unit are stacked; and an oscillation roller pair and a return roller which convey the sheet stacked on the processing tray to bring the sheet into abutment against a stopper for receiving the upstream edge of the sheet. The buffer unit is adapted to align the upstream edges of only sheets to be stored before a sheet to be supplied last among the sheets to be stored.Type: GrantFiled: February 6, 2008Date of Patent: June 30, 2009Assignees: Canon Finetech Inc., Canon Kabushiki KaishaInventors: Kenichi Hayashi, Tomokazu Nakamura, Naoto Watanabe, Yusuke Obuchi, Hitoshi Kato, Shunsuke Nishimura, Tetsuya Terada, Yasutaka Iwasa, Daisuke Matsukura, Norio Motoi, Masayoshi Kubo
-
Publication number: 20080136083Abstract: A sheet processing apparatus includes: a buffer unit which stores plural supplied sheets with upstream edges in a conveying direction thereof aligned; a processing tray on which sheets discharged from the buffer unit are stacked; and an oscillation roller pair and a return roller which convey the sheet stacked on the processing tray to bring the sheet into abutment against a stopper for receiving the upstream edge of the sheet. The buffer unit is adapted to align the upstream edges of only sheets to be stored before a sheet to be supplied last among the sheets to be stored.Type: ApplicationFiled: February 6, 2008Publication date: June 12, 2008Applicant: Canon Finetech Inc.Inventors: Kenichi Hayashi, Tomokazu Nakamura, Naoto Watanabe, Yusuke Obuchi, Hitoshi Kato, Shunsuke Nishimura, Tetsuya Terada, Yasutaka Iwasa, Daisuke Matsukura, Norio Motoi, Masayoshi Kubo
-
Patent number: 7377511Abstract: A sheet stacking apparatus including a first tray on which sheets discharged form an outlet are stacked, the first tray being movable between a stacking position at which sheets discharged from an outlet are stacked and a first retracted position above the staking position; a second tray on which sheets discharged from an outlet are stacked, the first tray being disposed below the first tray and being movable independently of the first tray, the second tray being movable between the stacking position and a second retracted position below the stacking position; and a controller that causes the second tray to descend when the sheets are to be stacked on the first tray, the controller causing the second tray to stop descending when the second tray reaches a standby position where a distance between the outlet and a top surface of the sheets stacked on the second tray is a predetermined distance.Type: GrantFiled: June 15, 2006Date of Patent: May 27, 2008Assignees: Canon Kabushiki Kaisha, Canon Finetech Inc.Inventors: Naoto Watanabe, Yoshinori Isobe, Masahiro Yonenuma, Tetsuya Terada
-
Patent number: 7354036Abstract: A sheet processing apparatus includes: a buffer unit which stores plural supplied sheets with upstream edges in a conveying direction thereof aligned; a processing tray on which sheets discharged from the buffer unit are stacked; and an oscillation roller pair and a return roller which convey the sheet stacked on the processing tray to bring the sheet into abutment against a stopper for receiving the upstream edge of the sheet. The buffer unit is adapted to align the upstream edges of only sheets to be stored before a sheet to be supplied last among the sheets to be stored.Type: GrantFiled: November 16, 2006Date of Patent: April 8, 2008Assignees: Canon Finetech Inc., Canon Kabushiki KaishaInventors: Kenichi Hayashi, Tomokazu Nakamura, Naoto Watanabe, Yusuke Obuchi, Hitoshi Kato, Shunsuke Nishimura, Tetsuya Terada, Yasutaka Iwasa, Daisuke Matsukura, Norio Motoi, Masayoshi Kubo
-
Patent number: 7264236Abstract: A pressing member is provided on a shutter member provided in a main body of an apparatus and adapted to open and close a folded sheet discharging port upon upward and downward shifting movement of sheet stacking means in such a manner that, after folding processing is performed by folding means as the shutter member is lowered, a sheet discharged onto folded sheet stacking means is pressed down by the pressing member. Further, if there is any sheet on the folded sheet stacking means, by stopping the sheet stacking means at a predetermined position where the shutter member lightly abuts against the sheet discharged on the folded sheet stacking means, the sheet is prevented from being pinched between the shutter member and the sheet stacking means.Type: GrantFiled: November 28, 2005Date of Patent: September 4, 2007Assignees: Canon Finetech Inc., Canon Kabushiki KaishaInventors: Yusuke Obuchi, Hitoshi Kato, Hiroshi Suzuki, Tetsuya Terada
-
Publication number: 20070102860Abstract: A sheet processing apparatus includes: a buffer unit which stores plural supplied sheets with upstream edges in a conveying direction thereof aligned; a processing tray on which sheets discharged from the buffer unit are stacked; and an oscillation roller pair and a return roller which convey the sheet stacked on the processing tray to bring the sheet into abutment against a stopper for receiving the upstream edge of the sheet. The buffer unit is adapted to align the upstream edges of only sheets to be stored before a sheet to be supplied last among the sheets to be stored.Type: ApplicationFiled: November 16, 2006Publication date: May 10, 2007Applicants: Canon Finetech Inc., Canon Kabushiki KaishaInventors: KENICHI HAYASHI, Tomokazu Nakamura, Naoto Watanabe, Yusuke Obuchi, Hitoshi Kato, Shunsuke Nishimura, Tetsuya Terada, Yasutaka Iwasa, Daisuke Matsukura, Norio Motoi, Masayoshi Kubo
-
Patent number: 7192020Abstract: A sheet processing apparatus includes: a buffer unit which stores plural supplied sheets with upstream edges in a conveying direction thereof aligned; a processing tray on which sheets discharged from the buffer unit are stacked; and an oscillation roller pair and a return roller which convey the sheet stacked on the processing tray to bring the sheet into abutment against a stopper for receiving the upstream edge of the sheet. The buffer unit is adapted to align the upstream edges of only sheets to be stored before a sheet to be supplied last among the sheets to be stored.Type: GrantFiled: March 2, 2004Date of Patent: March 20, 2007Assignees: Canon Finetech Inc., Canon Kabushiki KaishaInventors: Kenichi Hayashi, Tomokazu Nakamura, Naoto Watanabe, Yusuke Obuchi, Hitoshi Kato, Shunsuke Nishimura, Tetsuya Terada, Yasutaka Iwasa, Daisuke Matsukura, Norio Motoi, Masayoshi Kubo
-
Patent number: 7185883Abstract: A sheet treating apparatus including, a conveying device for conveying sheets, a sheet stack tray for stacking the sheets conveyed by the conveying device, a sensor detecting the sheets conveyed to the sheet stack tray, a pressure-contact conveying device for conveying the sheets on the sheet stack tray in pressure contact with the sheets, a pressure-contact device for bringing the pressure-contact conveying device into pressure-contact with the sheets, and a controlling device for varying a time from when the sensor detects the sheets to when the pressure-contact device starts operating according to a sheet conveyance speed of the conveying device.Type: GrantFiled: August 30, 2004Date of Patent: March 6, 2007Assignees: Canon Kabushiki Kaisha, Canon Finetech Inc.Inventors: Hitoshi Kato, Tetsuya Terada, Yasutaka Iwasa, Masahiro Yonenuma
-
Publication number: 20060232002Abstract: A sheet stacking apparatus including a first tray on which sheets discharged form an outlet are stacked, the first tray being movable between a stacking position at which sheets discharged from an outlet are stacked and a first retracted position above the staking position; a second tray on which sheets discharged from an outlet are stacked, the first tray being disposed below the first tray and being movable independently of the first tray, the second tray being movable between the stacking position and a second retracted position below the stacking position; and a controller that causes the second tray to descend when the sheets are to be stacked on the first tray, the controller causing the second tray to stop descending when the second tray reaches a standby position where a distance between the outlet and a top surface of the sheets stacked on the second tray is a predetermined distance.Type: ApplicationFiled: June 15, 2006Publication date: October 19, 2006Applicants: CANON FINETECH INC., CANON KABUSHIKI KAISHAInventors: Naoto Watanabe, Yoshinori Isobe, Masahiro Yonenuma, Tetsuya Terada
-
Publication number: 20060076724Abstract: A pressing member is provided on a shutter member provided in a main body of an apparatus and adapted to open and close a folded sheet discharging port upon upward and downward shifting movement of sheet stacking means in such a manner that, after folding processing is performed by folding means as the shutter member is lowered, a sheet discharged onto folded sheet stacking means is pressed down by the pressing member. Further, if there is any sheet on the folded sheet stacking means, by stopping the sheet stacking means at a predetermined position where the shutter member lightly abuts against the sheet discharged on the folded sheet stacking means, the sheet is prevented from being pinched between the shutter member and the sheet stacking means.Type: ApplicationFiled: November 28, 2005Publication date: April 13, 2006Applicants: Canon Fintech Inc., Canon Kabushiki KaishaInventors: Yusuke Obuchi, Hitoshi Kato, Hiroshi Suzuki, Tetsuya Terada
-
Patent number: 6997449Abstract: A pressing member is provided on a shutter member provided in a main body of an apparatus and adapted to open and close a folded sheet discharging port upon upward and downward shifting movement of sheet stacking means in such a manner that, after folding processing is performed by folding means as the shutter member is lowered, a sheet discharged onto folded sheet stacking means is pressed down by the pressing member. Further, if there is any sheet on the folded sheet stacking means, by stopping the sheet stacking means at a predetermined position where the shutter member lightly abuts against the sheet discharged on the folded sheet stacking means, the sheet is prevented from being pinched between the shutter member and the sheet stacking means.Type: GrantFiled: February 25, 2004Date of Patent: February 14, 2006Assignees: Canon Finetech, Inc., Canon Kabushiki KaishaInventors: Yusuke Obuchi, Hitoshi Kato, Hiroshi Suzuki, Tetsuya Terada