Abstract: A positioning system for positioning an object. The positioning system includes a stage, a balance mass and an actuator system. The stage is for holding the object. The actuator system is arranged to drive the stage in a first direction while driving the balance mass in a second direction opposite to the first direction. The stage is moveable in the first direction in a movement range. When the stage is moving in the first direction and is at an end of the movement range, the positioning system is arranged to collide the stage frontally into the balance mass.

Abstract: A positioning system for positioning an object. The positioning system includes a stage, a balance mass and an actuator system. The stage is for holding the object. The actuator system is arranged to drive the stage in a first direction while driving the balance mass in a second direction opposite to the first direction. The stage is moveable in the first direction in a movement range. When the stage is moving in the first direction and is at an end of the movement range, the positioning system is arranged to collide the stage frontally into the balance mass.

Abstract: A movable support configured to support an object, the support including: a support plane to support the object, an actuator assembly to move the movable support in a first direction and in a second direction perpendicular to the first direction, wherein the first direction and the second direction extend in a plane parallel to the support plane, wherein the actuator assembly includes: a first actuator configured to exert a first actuation force in a first actuation direction, the first actuation direction being parallel to the support plane, a second actuator configured to exert a second actuation force in a second actuation direction, the second actuation direction being parallel to the support plane, wherein the first actuation direction and the second actuation direction are arranged non-parallel and non-perpendicular with respect to each other.

Abstract: The present invention relates to a movable support (1) configured to support an object, comprising: a support plane (2) to support the object, an actuator assembly to move the movable support in a first direction and in a second direction perpendicular to the first direction, wherein the first direction and the second direction extend in a plane parallel to the support plane, wherein the actuator assembly comprises: a first actuator (3) configured to exert a first actuation force (F1) in a first actuation direction (A1), said first actuation direction being parallel to the support plane, a second actuator (4) configured to exert a second actuation force (F2) in a second actuation direction (A2), said second actuation direction being parallel to the support plane, wherein the first actuation direction and the second actuation direction are arranged non-parallel and non-perpendicular with respect to each other.

Abstract: A stage positioning system, includes a first body, a second body and a coupling arranged to couple the first body and the second body to each other. The coupling includes a visco-elastic element arranged to couple the first body and the second body to each other. The stage positioning system may further include a sensor to provide a signal representative of a position of the first body. The stage positioning system may further include an actuator to move the first body. The second body may be arranged to couple the actuator and the coupling to each other.

Abstract: A stage positioning system, includes a first body, a second body and a coupling arranged to couple the first body and the second body to each other. The coupling includes a visco-elastic element arranged to couple the first body and the second body to each other. The stage positioning system may further include a sensor to provide a signal representative of a position of the first body. The stage positioning system may further include an actuator to move the first body. The second body may be arranged to couple the actuator and the coupling to each other.

Abstract: The toothbrush includes a handle portion (12 or 55) and a brushhead portion (14 or 57) with a bristle set (20 or 53) at one end of the brushhead. At least one sensor (16 or 56 is located either on the handle of the toothbrush or on the bristle set back plate (54) of the toothbrush. When the sensor is located on the handle of the toothbrush, the position of the brushhead is determined by a processor (44 or 58) relative to the inside or outside surfaces of the teeth on the basis of the temperature detected by the sensor, either the outside environmental temperature or the skin temperature of the user. When the sensor is located on the bristle set back plate, the determination is made on the basis of the position of the bristle set relative to the cheek of the user.

Abstract: The invention relates to a suction unit and relates to a vacuum cleaner. The suction unit comprises a drive system for driving the suction unit over a surface to be treated; a chassis supporting the drive system; a nozzle for removing particles from a surface to be treated which nozzle is configured to move with relation to the chassis in a direction away from the surface to be treated, the nozzle having an interior space defining an opening that faces the surface to be treated; and an outlet communicating with the interior space, the outlet being arranged for communication with a fan unit in operating conditions. The suction unit further comprises coupling means for coupling the nozzle to the chassis, wherein the coupling means is arranged to exert a force that is directed away from the surface to be treated when the under pressure in the interior space increases. In this manner the problem of the suction unit getting stuck on the floor can be overcome or at least be reduced.

Abstract: The toothbrush includes a handle portion (12 or 55) and a brushhead portion (14 or 57) with a bristle set (20 or 53) at one end of the brushhead. At least one sensor (16 or 56 is located either on the handle of the toothbrush or on the bristle set back plate (54) of the toothbrush. When the sensor is located on the handle of the toothbrush, the position of the brushhead is determined by a processor (44 or 58) relative to the inside or outside surfaces of the teeth on the basis of the temperature detected by the sensor, either the outside environmental temperature or the skin temperature of the user. When the sensor is located on the bristle set back plate, the determination is made on the basis of the position of the bristle set relative to the cheek of the user.

Abstract: The toothbrush includes a handle portion (12 or 55) and a brushhead portion (14 or 57) with a bristle set (20 or 53) at one end of the brushhead. At least one sensor (16 or 56 is located either on the handle of the toothbrush or on the bristle set back plate (54) of the toothbrush. When the sensor is located on the handle of the toothbrush, the position of the brushhead is determined by a processor (44 or 58) relative to the inside or outside surfaces of the teeth on the basis of the temperature detected by the sensor, either the outside environmental temperature or the skin temperature of the user. When the sensor is located on the bristle set back plate, the determination is made on the basis of the position of the bristle set relative to the cheek of the user.

Abstract: The toothbrush includes a handle portion (12 or 55) and a brushhead portion (14 or 57) with a bristle set (20 or 53) at one end of the brushhead. At least one sensor (16 or 56 is located either on the handle of the toothbrush or on the bristle set back plate (54) of the toothbrush. When the sensor is located on the handle of the toothbrush, the position of the brushhead is determined by a processor (44 or 58) relative to the inside or outside surfaces of the teeth on the basis of the temperature detected by the sensor, either the outside environmental temperature or the skin temperature of the user. When the sensor is located on the bristle set back plate, the determination is made on the basis of the position of the bristle set relative to the cheek of the user.

Abstract: The toothbrush includes a handle portion (12 or 55) and a brushhead portion (14 or 57) with a bristle set (20 or 53) at one end of the brushhead. At least one sensor (16 or 56 is located either on the handle of the toothbrush or on the bristle set back plate (54) of the toothbrush. When the sensor is located on the handle of the toothbrush, the position of the brushhead is determined by a processor (44 or 58) relative to the inside or outside surfaces of the teeth on the basis of the temperature detected by the sensor, either the outside environmental temperature or the skin temperature of the user. When the sensor is located on the bristle set back plate, the determination is made on the basis of the position of the bristle set relative to the cheek of the user.

Abstract: Actuator arrangement with an actuator (8), a reference mass (22), a spring (24) and a first sensor (26; 42, 43; 32, 36). The actuator (8) applies a force between a first object (2) and to a second object (16; 54). The reference mass (22) is, in use, supported by a third object (16; 56) by means of the spring (24). The first sensor (26; 42, 43; 32, 36) generates a first distance signal that depends on a first distance (z2; z5, z6; z3, z4) between the reference mass (22) and the first object (2) and is applied to a controller (6) to actuate the actuator (8).

Abstract: The invention relates to a suction unit and a vacuum cleaner. The suction unit comprises a drive system for driving the suction unit on a surface to be treated; a chassis supporting the drive system; a nozzle for removing particles from a surface to be treated, which nozzle is configured to move with relation to the chassis in a direction away from the surface to be treated, the nozzle having an interior space defining an opening that faces the surface to be treated; and an outlet communicating with the interior space, the outlet being arranged for communication with a fan unit during operating conditions. The suction unit further comprises coupling means for coupling the nozzle to the chassis, wherein the coupling means is arranged to exert a force that is directed away from the surface to be treated when the underpressure in the interior space increases. In this manner the problem of the suction unit getting stuck on the floor can be overcome or at least reduced.

Abstract: The invention relates to a system (1) for detecting motion of a body (2) comprising a first elongated grating strip (4) coupled to said body and a separate and substantially stationary second elongated grating strip (5) crossing said first elongated grating strip. The system further comprises optical detection means (6) arranged to receive one or more light beams diffracted at said first and second elongated grating strips to detect motion of said body. The invention further relates to a method for detecting motion of a body (2) and to a body processing or inspection system.

Abstract: A temperature regulation method and system (100) includes a reservoir (112) having a fluid with a temperature of a value such that, within a control range of a local temperature controller, a local set point temperature is achievable. A piping system (101) delivers the fluid from the reservoir to one or more elements needing temperature control. A heat generator/removal device (110) in one of the fluid paths is disposed at or near an element needing temperature control. For each heat generator/removal device, a local temperature controller (116) and a feedback sensor (114) are configured to control the heat generator/removal device such that an amount of heat exchanged with the fluid, at or near the element needing temperature control, results in a local temperature, monitored by the control feedback sensor to be locally and accurately maintained at the local set point temperature.

Abstract: The invention relates to a system (1) for detecting motion of a body (2) comprising a first elongated grating strip (4) coupled to said body and a separate and substantially stationary second elongated grating strip (5) crossing said first elongated grating strip. The system further comprises optical detection means (6) arranged to receive one or more light beams diffracted at said first and second elongated grating strips to detect motion of said body. The invention further relates to a method for detecting motion of a body (2) and to a body processing or inspection system.

Abstract: Method and device for rotating a wafer which is arranged floating in a reactor. The wafer is treated in a reactor of this nature, and it is important for this treatment to be carried out as uniformly as possible. For this purpose, it is proposed to rotate the wafer by allowing the gas flow to emerge perpendicular to the surface of the wafer and then to impart to this gas a component which is tangential with respect to the wafer, thus generating rotation. This tangential component may be generated by the provision of grooves, which may be of spiral or circular design.

Abstract: A coordinate measuring device having a probe for contacting the object (15) to be measured. The probe comprises a sensing member (18) for contacting the object (15), a support unit (13), a supporting element (25) connecting said sensing member (18) to said support unit (13), a detection member (22), detection means (23) for detecting the position of said detection member (22). Said detection member (22) is carried by a connection element (26) and said connection element (26) is attached to said sensing member (18). The detection member may be shaped as pyramid having three reflective surfaces. The position of the detection member can be determined by using three fibers for illuminating the surfaces and three detector screens for capturing the reflected light.

Abstract: A gas bearing system comprising two opposing substantially parallel bearing surfaces (2, 3) and at least one gas duct (6) for supplying gas through an orifice (7) to the bearing gap (5) between the bearing surfaces (2, 3). At least one of the bearing surfaces (2, 3) is provided with at least one cavity (8, 9) extending over 0.3 mm2 to 3 mm2 of the at least one bearing surface (2, 3). The content of the cavity (8, 9) may be between 0.3 mm3 and 4 mm3. The gas duct (6) may supply gas to the cavity (8) through an orifice (7) in the wall of the cavity (8).