Patents by Inventor Thomas L. Duer

Thomas L. Duer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Large area substrate processing system with between chamber platform
    Patent number: 8092138
    Abstract: Embodiments of the invention generally relate to a vacuum processing system for processing large area substrates, such as flat panel displays (i.e., LCD, OLED, and other types of flat panel displays), solar panels, and the like. In one embodiment, a vacuum processing system includes a plurality of processing chambers coupled to a vacuum transfer chamber suitable to accommodate a large area substrate and a least one horizontal platform disposed between adjacent processing chambers. The vacuum transfer chamber has a robot disposed therein. The platform is coupled to a base supporting one of the adjacent processing chambers.
    Type: Grant
    Filed: December 21, 2009
    Date of Patent: January 10, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Thomas L. Duer, John A. Miller
  • LARGE AREA SUBSTRATE PROCESSING SYSTEM WITH BETWEEN CHAMBER PLATFORM
    Publication number: 20100158642
    Abstract: Embodiments of the invention generally relate to a vacuum processing system for processing large area substrates, such as flat panel displays (i.e., LCD, OLED, and other types of flat panel displays), solar panels, and the like. In one embodiment, a vacuum processing system includes a plurality of processing chambers coupled to a vacuum transfer chamber suitable to accommodate a large area substrate and a least one horizontal platform disposed between adjacent processing chambers. The vacuum transfer chamber has a robot disposed therein. The platform is coupled to a base supporting one of the adjacent processing chambers.
    Type: Application
    Filed: December 21, 2009
    Publication date: June 24, 2010
    Inventors: Thomas L. Duer, John A. Miller
  • Large area substrate processor
    Patent number: D623673
    Type: Grant
    Filed: December 24, 2008
    Date of Patent: September 14, 2010
    Assignee: Applied Materials, Inc.
    Inventors: Thomas L. Duer, John A. Miller