Large area substrate processor

- Applied Materials, Inc.
Skip to: Description  ·  Claims  ·  References Cited  · Patent History  ·  Patent History
Description

FIG. 1 is a top plan view of a processing system for processing large area substrates.

FIG. 2 is a front elevation of the processing system of FIG. 1. The back elevation being the same as the front elevation.

FIGS. 3-4 are side views of the processing system of FIG. 1.

FIG. 5 is a bottom view of the processing system of FIG. 1; and,

FIG. 6 is a perspective view of the processing system of FIG. 1.

The present invention generally includes a vacuum processing system for processing large area substrates, such as flat panel displays (i.e., LCD, OLED, and other types of flat panel displays), solar panels, and the like.

The broken lines in the drawings depict unclaimed environmental subject matter.

Claims

The ornamental design for a large area substrate processor, as shown and described.

Referenced Cited
U.S. Patent Documents
6235634 May 22, 2001 White et al.
6319373 November 20, 2001 Takeyama et al.
20040053184 March 18, 2004 Bachrach et al.
20050095088 May 5, 2005 Kurita et al.
20060008134 January 12, 2006 Ikeno et al.
20060054495 March 16, 2006 Rohrmann et al.
20070065581 March 22, 2007 Shiraiwa
20070212816 September 13, 2007 Nishimura
20080040061 February 14, 2008 Osada
20080099440 May 1, 2008 Hayashi
20080141509 June 19, 2008 Nishimura
20090014414 January 15, 2009 Tomioka et al.
Patent History
Patent number: D623673
Type: Grant
Filed: Dec 24, 2008
Date of Patent: Sep 14, 2010
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: Thomas L. Duer (Salinas, CA), John A. Miller (Brentwood, CA)
Primary Examiner: Sandra Snapp
Assistant Examiner: Patricia Palasik
Attorney: Patterson & Sheridan, LLP
Application Number: 29/330,000
Classifications
Current U.S. Class: Miscellaneous (D15/199)