Patents by Inventor Thomas Lehnhardt

Thomas Lehnhardt has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11888083
    Abstract: In an embodiment an electronic semiconductor chip includes a growth substrate with a growth surface including a flat region having a plurality of three-dimensionally designed surface structures on the flat region, a nucleation layer composed of oxygen-containing AlN in direct contact with the growth surface at the flat region and the three-dimensionally designed surface structures and a nitride-based semiconductor layer sequence on the nucleation layer, wherein the semiconductor layer sequence overlays the three-dimensionally designed surface structures, and wherein the oxygen content in the nucleation layer is greater than 1019 cm?3.
    Type: Grant
    Filed: July 11, 2022
    Date of Patent: January 30, 2024
    Assignee: OSRAM Opto Semiconductors GmbH
    Inventors: Werner Bergbauer, Thomas Lehnhardt, Jürgen Off, Joachim Hertkorn
  • Patent number: 11616164
    Abstract: A method for producing a nitride compound semiconductor component is disclosed. In an embodiment the method includes providing a growth substrate, growing a nucleation layer of an aluminum-containing nitride compound semiconductor onto the growth substrate, growing a tension layer structure for generating a compressive stress, wherein the tension layer structure comprises at least a first GaN semiconductor layer and a second GaN semiconductor layer, and wherein an Al(Ga)N interlayer for generating the compressive stress is disposed between the first GaN semiconductor layer and the second GaN semiconductor layer and growing a functional semiconductor layer sequence of the nitride compound semiconductor component onto the tension layer structure, wherein a growth of the second GaN semiconductor layer is preceded by a growth of a first 3D AlGaN layer on the Al(Ga)N interlayer in such a way that it has nonplanar structures.
    Type: Grant
    Filed: January 17, 2019
    Date of Patent: March 28, 2023
    Assignee: OSRAM OLED GMBH
    Inventors: Philipp Drechsel, Werner Bergbauer, Thomas Lehnhardt, Jürgen Off, Joachim Hertkorn
  • Publication number: 20220393062
    Abstract: In an embodiment an optoelectronic semiconductor chip includes a semiconductor layer sequence including a first semiconductor region of a first conductivity type, an active zone having a multiple quantum well structure composed of a plurality of quantum well layers and barrier layers, a second semiconductor region of a second conductivity type and a plurality of channels extending through the active zone, wherein the second semiconductor region is located in the channels and is configured for lateral current injection into the active zone, wherein the channels have a first aperture half-angle in the first semiconductor region and a second aperture half-angle in the active zone, and wherein the second aperture half-angle is greater than zero and less than the first aperture half-angle.
    Type: Application
    Filed: October 6, 2020
    Publication date: December 8, 2022
    Applicants: OSRAM Opto Semiconductors GmbH, OSRAM Opto Semiconductors GmbH
    Inventors: Xiaojun Chen, Heng Wang, Jong Ho Na, Alvaro Gomez-Iglesias, Jürgen Off, Philipp Drechsel, Thomas Lehnhardt
  • Publication number: 20220344532
    Abstract: In an embodiment an electronic semiconductor chip includes a growth substrate with a growth surface including a flat region having a plurality of three-dimensionally designed surface structures on the flat region, a nucleation layer composed of oxygen-containing AlN in direct contact with the growth surface at the flat region and the three-dimensionally designed surface structures and a nitride-based semiconductor layer sequence on the nucleation layer, wherein the semiconductor layer sequence overlays the three-dimensionally designed surface structures, and wherein the oxygen content in the nucleation layer is greater than 1019 cm?3.
    Type: Application
    Filed: July 11, 2022
    Publication date: October 27, 2022
    Inventors: Werner Bergbauer, Thomas Lehnhardt, Jürgen Off, Joachim Hertkorn
  • Patent number: 11430907
    Abstract: In an embodiment a method includes providing a growth substrate comprising a growth surface formed by a planar region having a plurality of three-dimensional surface structures on the planar region, directly applying a nucleation layer of oxygen-containing AlN to the growth surface and growing a nitride-based semiconductor layer sequence on the nucleation layer, wherein growing the semiconductor layer sequence includes selectively growing the semiconductor layer sequence upwards from the planar region such that a growth of the semiconductor layer sequence on surfaces of the three-dimensional surface structures is reduced or non-existent compared to a growth on the planar region, wherein the nucleation layer is applied onto both the planar region and the three-dimensional surface structures of the growth surface, and wherein a selectivity of the growth of the semiconductor layer sequence on the planar region is targetedly adjusted by an oxygen content of the nucleation layer.
    Type: Grant
    Filed: March 19, 2021
    Date of Patent: August 30, 2022
    Assignee: OSRAM OLED GMBH
    Inventors: Werner Bergbauer, Thomas Lehnhardt, Jürgen Off, Joachim Hertkorn
  • Patent number: 11329193
    Abstract: An optoelectronic semiconductor component and a method for producing an optoelectronic semiconductor component are disclosed.
    Type: Grant
    Filed: October 19, 2018
    Date of Patent: May 10, 2022
    Assignee: OSRAM OLED GMBH
    Inventors: Xiaojun Chen, Alexander Frey, Philipp Drechsel, Thomas Lehnhardt, Lise Lahourcade, Jürgen Off
  • Publication number: 20210210651
    Abstract: In an embodiment a method includes providing a growth substrate comprising a growth surface formed by a planar region having a plurality of three-dimensional surface structures on the planar region, directly applying a nucleation layer of oxygen-containing AlN to the growth surface and growing a nitride-based semiconductor layer sequence on the nucleation layer, wherein growing the semiconductor layer sequence includes selectively growing the semiconductor layer sequence upwards from the planar region such that a growth of the semiconductor layer sequence on surfaces of the three-dimensional surface structures is reduced or non-existent compared to a growth on the planar region, wherein the nucleation layer is applied onto both the planar region and the three-dimensional surface structures of the growth surface, and wherein a selectivity of the growth of the semiconductor layer sequence on the planar region is targetedly adjusted by an oxygen content of the nucleation layer.
    Type: Application
    Filed: March 19, 2021
    Publication date: July 8, 2021
    Inventors: Werner Bergbauer, Thomas Lehnhardt, Jürgen Off, Joachim Hertkorn
  • Patent number: 11005003
    Abstract: A semiconductor chip and a method for producing a semiconductor chip are disclosed. In an embodiment an electronic semiconductor chip includes a growth substrate with a growth surface, which is formed by a planar region having a plurality of three-dimensional surface structures on the planar region, a nucleation layer composed of oxygen-containing AlN directly disposed on the growth surface and a nitride-based semiconductor layer sequence disposed on the nucleation layer, wherein the semiconductor layer sequence is selectively grown from the planar region such that a growth of the semiconductor layer sequence on surfaces of the three-dimensional surface structures is reduced or non-existent compared to a growth on the planar region, and wherein a selectivity of the growth of the semiconductor layer sequence on the planar region is targetedly adjusted by an oxygen content of the nucleation layer.
    Type: Grant
    Filed: April 15, 2019
    Date of Patent: May 11, 2021
    Assignee: OSRAM OLED GMBH
    Inventors: Werner Bergbauer, Thomas Lehnhardt, Jürgen Off, Joachim Hertkorn
  • Patent number: 10950752
    Abstract: A method of producing a radiation-emitting semiconductor chip includes providing a growth substrate, epitaxially growing a buffer layer on the growth substrate such that a plurality of V-pits is generated in the buffer layer, epitaxially growing a radiation-generating active semiconductor layer sequence on the buffer layer, wherein the structure of the V-pits continues into the active semiconductor layer sequence, epitaxially growing a further layer sequence on the active semiconductor layer sequence, wherein the structure of the V-pits continues into the further layer sequence, selectively removing the further layer sequence from facets of the V-pits, wherein the further layer sequence remains on a main surface of the active semiconductor layer sequence, and epitaxially growing a p-doped semiconductor layer that completely or partially fills the V-pits.
    Type: Grant
    Filed: February 22, 2017
    Date of Patent: March 16, 2021
    Assignee: OSRAM OLED GmbH
    Inventors: Werner Bergbauer, Thomas Lehnhardt, Jürgen Off, Lise Lahourcade, Philipp Drechsel
  • Patent number: 10862003
    Abstract: A component having an enhanced efficiency and a method for producing a component are disclosed. In an embodiment, a component includes a semiconductor layer sequence comprising a p-conducting semiconductor layer, an n-conducting semiconductor layer and an active zone located therebetween, wherein the active zone comprises recesses on a side of the p-conducting semiconductor layer, each recess having facets extending obliquely to a main surface of the active zone, and wherein the p-conducting semiconductor layer extends into the recesses, and a barrier structure, wherein the active zone is arranged between the barrier structure and the n-conducting semiconductor layer so that an injection of positively charged charge carriers into the active zone via the main surface is hindered in a targeted manner so that an injection of positively charged charge carriers into the active zone via the facets is promoted.
    Type: Grant
    Filed: May 18, 2017
    Date of Patent: December 8, 2020
    Assignee: OSRAM OLD GMBH
    Inventors: Thomas Lehnhardt, Werner Bergbauer, Jürgen Off, Lise Lahourcade, Philipp Drechsel
  • Publication number: 20200365765
    Abstract: An optoelectronic semiconductor component and a method for producing an optoelectronic semiconductor component are disclosed.
    Type: Application
    Filed: October 19, 2018
    Publication date: November 19, 2020
    Inventors: Xiaojun Chen, Alexander Frey, Philipp Drechsel, Thomas Lehnhardt, Lise Lahourcade, Jürgen Off
  • Publication number: 20200335658
    Abstract: A method for producing a nitride compound semiconductor component is disclosed. In an embodiment the method includes providing a growth substrate, growing a nucleation layer of an aluminum-containing nitride compound semiconductor onto the growth substrate, growing a tension layer structure for generating a compressive stress, wherein the tension layer structure comprises at least a first GaN semiconductor layer and a second GaN semiconductor layer, and wherein an Al(Ga)N interlayer for generating the compressive stress is disposed between the first GaN semiconductor layer and the second GaN semiconductor layer and growing a functional semiconductor layer sequence of the nitride compound semiconductor component onto the tension layer structure, wherein a growth of the second GaN semiconductor layer is preceded by a growth of a first 3D AlGaN layer on the Al(Ga)N interlayer in such a way that it has nonplanar structures.
    Type: Application
    Filed: January 17, 2019
    Publication date: October 22, 2020
    Applicant: OSRAM OLED GmbH
    Inventors: Philipp Drechsel, Werner Bergbauer, Thomas Lehnhardt, Jürgen Off, Joachim Hertkorn
  • Publication number: 20200243716
    Abstract: A method of producing a radiation-emitting semiconductor chip includes providing a growth substrate, epitaxially growing a buffer layer on the growth substrate such that a plurality of V-pits is generated in the buffer layer, epitaxially growing a radiation-generating active semiconductor layer sequence on the buffer layer, wherein the structure of the V-pits continues into the active semiconductor layer sequence, epitaxially growing a further layer sequence on the active semiconductor layer sequence, wherein the structure of the V-pits continues into the further layer sequence, selectively removing the further layer sequence from facets of the V-pits, wherein the further layer sequence remains on a main surface of the active semiconductor layer sequence, and epitaxially growing a p-doped semiconductor layer that completely or partially fills the V-pits.
    Type: Application
    Filed: February 22, 2017
    Publication date: July 30, 2020
    Inventors: Werner Bergbauer, Thomas Lehnhardt, Jürgen Off, Lise Lahourcade, Philipp Drechsel
  • Publication number: 20200119228
    Abstract: A component having an enhanced efficiency and a method for producing a component are disclosed. In an embodiment, a component includes a semiconductor layer sequence comprising a p-conducting semiconductor layer, an n-conducting semiconductor layer and an active zone located therebetween, wherein the active zone comprises recesses on a side of the p-conducting semiconductor layer, each recess having facets extending obliquely to a main surface of the active zone, and wherein the p-conducting semiconductor layer extends into the recesses, and a barrier structure, wherein the active zone is arranged between the barrier structure and the n-conducting semiconductor layer so that an injection of positively charged charge carriers into the active zone via the main surface is hindered in a targeted manner so that an injection of positively charged charge carriers into the active zone via the facets is promoted.
    Type: Application
    Filed: May 18, 2017
    Publication date: April 16, 2020
    Applicant: OSRAM Opto Semiconductors GmbH
    Inventors: Thomas Lehnhardt, Werner Bergbauer, Jürgen Off, Lise Lahourcade, Philipp Drechsel
  • Patent number: 10497830
    Abstract: An optoelectronic semiconductor component is specified, comprising a multiplicity of radiation generating elements (14) arranged at a distance from one another on a surface (22) of a carrier element (20), wherein each of the radiation generating elements has a diameter of less than 10 ?m in a direction perpendicular to the surface of the carrier element and adheres to the surface of the carrier element in the region of a respective connection location (26), and wherein the optoelectronic semiconductor component is free of a growth substrate (2).
    Type: Grant
    Filed: January 11, 2016
    Date of Patent: December 3, 2019
    Assignee: OSRAM OPTO SEMICONDUCTORS GMBH
    Inventors: Thomas Lehnhardt, Martin Mandl
  • Patent number: 10475959
    Abstract: The invention relates to a method for producing a nitride semiconductor component (100), comprising the steps of: —providing a growth substrate (1) having a growth surface (10) formed from a planar area (11) with a plurality of three-dimensionally shaped surface structures (12) on said planar area (11), —growing a nitride-based semiconductor layer sequence (30) on the growth surface (10), growth beginning selectively on a growth area (13) of said growth substrate, and the growth area (13) being less than 45% of the growth surface (10). The invention also relates to a nitride semiconductor component (100) which can be produced according to said method.
    Type: Grant
    Filed: June 15, 2016
    Date of Patent: November 12, 2019
    Assignee: OSRAM Opto Semiconductors GmbH
    Inventors: Tobias Gotschke, Bastian Galler, Juergen Off, Werner Bergbauer, Thomas Lehnhardt
  • Publication number: 20190245110
    Abstract: A semiconductor chip and a method for producing a semiconductor chip are disclosed. In an embodiment an electronic semiconductor chip includes a growth substrate with a growth surface, which is formed by a planar region having a plurality of three-dimensional surface structures on the planar region, a nucleation layer composed of oxygen-containing AlN directly disposed on the growth surface and a nitride-based semiconductor layer sequence disposed on the nucleation layer, wherein the semiconductor layer sequence is selectively grown from the planar region such that a growth of the semiconductor layer sequence on surfaces of the three-dimensional surface structures is reduced or non-existent compared to a growth on the planar region, and wherein a selectivity of the growth of the semiconductor layer sequence on the planar region is targetedly adjusted by an oxygen content of the nucleation layer.
    Type: Application
    Filed: April 15, 2019
    Publication date: August 8, 2019
    Inventors: Werner Bergbauer, Thomas Lehnhardt, Jürgen Off, Joachim Hertkorn
  • Patent number: 10312401
    Abstract: A method for producing an electronic semiconductor chip and a semiconductor chip are disclosed. In embodiments, the method includes providing a growth substrate having a growth surface formed by a flat region having a plurality of three-dimensional surface structures on the flat region, directly applying a nucleation layer of oxygen-containing AlN over a large area to the growth surface and growing a nitride-based semiconductor layer sequence on the nucleation layer, wherein growing the semiconductor layer sequence includes selectively growing the semiconductor layer sequence upwards from the flat region.
    Type: Grant
    Filed: February 13, 2015
    Date of Patent: June 4, 2019
    Assignee: OSRAM Opto Semiconductors GmbH
    Inventors: Werner Bergbauer, Thomas Lehnhardt, Jürgen Off, Joachim Hertkorn
  • Patent number: 10249787
    Abstract: The invention relates to a component (10) having a semiconductor layer sequence, which has a p-conducting semiconductor layer (1), an n-conducting semiconductor layer (2), and an active zone (3) arranged between the p-conducting semiconductor layer and the n-conducting semiconductor layer, wherein the active zone has a multiple quantum well structure, which, from the p-conducting semiconductor layer to the n-conducting semiconductor layer, has a plurality of p-side barrier layers (32p) having intermediate quantum well layers (31) and a plurality of n-side barrier layers (32n) having intermediate quantum layers (31). Recesses (4) having flanks are formed in the semiconductor layer sequence on the part of the p-conducting semiconductor layer, wherein the quantum well layers and/or the n- and p-side barrier layers extend in a manner conforming to the flanks of the recesses at least in regions. The interior barrier layers have a larger average layer thickness than the p-side barrier layers.
    Type: Grant
    Filed: March 1, 2016
    Date of Patent: April 2, 2019
    Assignee: OSRAM OPTO SEMICONDUCTORS GMBH
    Inventors: Tobias Meyer, Thomas Lehnhardt, Matthias Peter, Asako Hirai, Juergen Off, Philipp Drechsel, Peter Stauss
  • Publication number: 20180175243
    Abstract: The invention relates to a method for producing a nitride semiconductor component (100), comprising the steps of: —providing a growth substrate (1) having a growth surface (10) formed from a planar area (11) with a plurality of three-dimensionally shaped surface structures (12) on said planar area (11), —growing a nitride-based semiconductor layer sequence (30) on the growth surface (10), growth beginning selectively on a growth area (13) of said growth substrate, and the growth area (13) being less than 45% of the growth surface (10). The invention also relates to a nitride semiconductor component (100) which can be produced according to said method.
    Type: Application
    Filed: June 15, 2016
    Publication date: June 21, 2018
    Inventors: Tobias GOTSCHKE, Bastian GALLER, Juergen OFF, Werner BERGBAUER, Thomas LEHNHARDT