Patents by Inventor Thomas Mark Pratt

Thomas Mark Pratt has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • REMOTE PLASMA CLEAN (RPC) DELIVERY INLET ADAPTER
    Publication number: 20250062106
    Abstract: A gas delivery apparatus includes an inlet portion and an outlet portion. The inlet portion can comprise a plurality of inlet ports configured to receive gas from a gas source. The inlet portion can also comprise a corresponding plurality of tapered surfaces associated with the plurality of inlet ports. Each tapered surface of the plurality of tapered surfaces surrounds a corresponding inlet port of the plurality of inlet ports. The outlet portion can be configured to deliver the gas to a gas showerhead of a process chamber. Each tapered surface of the plurality of tapered surfaces can comprise a first region and a second region. The first region is associated with a first curvature. The second region is associated with a second curvature. The first curvature can be different from the second curvature.
    Type: Application
    Filed: December 12, 2022
    Publication date: February 20, 2025
    Inventors: Danae Nicole Kay, Thomas Mark Pratt, Matthew Palmer Kwan
  • Inlet adapter component
    Patent number: D1069043
    Type: Grant
    Filed: December 17, 2021
    Date of Patent: April 1, 2025
    Assignee: Lam Research Corporation
    Inventors: Danae Nicole Kay, Thomas Mark Pratt, Matthew Palmer Kwan