Inlet adapter component
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The shade lines show surface contour and not surface ornamentation. The broken lines depict portions of the inlet adapter component that form no part of the claimed design.
Claims
The ornamental design for an inlet adapter component, as shown and described.
D380535 | July 1, 1997 | Joergensen |
D663385 | July 10, 2012 | Marquis-Martin |
D668751 | October 9, 2012 | Fitton |
D717405 | November 11, 2014 | Coronado |
D726869 | April 14, 2015 | Lepine |
D767746 | September 27, 2016 | Moredock |
D781402 | March 14, 2017 | Yan |
D785775 | May 2, 2017 | McPhilliamy |
D875053 | February 11, 2020 | Shono |
D875054 | February 11, 2020 | Shono |
D898878 | October 13, 2020 | Sprenger |
D900036 | October 27, 2020 | Wuester |
D905842 | December 22, 2020 | Rahn |
D930111 | September 7, 2021 | Pitman |
D1010788 | January 9, 2024 | Jiang |
D1013098 | January 30, 2024 | Liu |
RE50058 | July 30, 2024 | Brill |
D1038886 | August 13, 2024 | Li |
D1043924 | September 24, 2024 | Sprenger |
D1044679 | October 1, 2024 | Hebert |
D1051070 | November 12, 2024 | Liu |
D1051305 | November 12, 2024 | Yoo |
20090263184 | October 22, 2009 | Riedel |
20170348447 | December 7, 2017 | Lu |
20180327283 | November 15, 2018 | Pemen |
20190083161 | March 21, 2019 | Harle |
20210313155 | October 7, 2021 | Takikawa |
20220023823 | January 27, 2022 | Reis Da Costa Labanca |
20220087002 | March 17, 2022 | Sato |
20240287784 | August 29, 2024 | Jiang |
- “Japanese Application Serial No. 30-2022-0023865, Response filed Apr. 20, 2023 to Preliminary Examination Report mailed Feb. 26, 2023”, w o English claims, 7 pgs.
Type: Grant
Filed: Dec 17, 2021
Date of Patent: Apr 1, 2025
Assignee: Lam Research Corporation (Fremont, CA)
Inventors: Danae Nicole Kay (Austin, TX), Thomas Mark Pratt (Los Gatos, CA), Matthew Palmer Kwan (Pleasanton, CA)
Primary Examiner: Jennifer Rivard
Assistant Examiner: Jonathan E Fiencke
Application Number: 29/819,868