Patents by Inventor Thomas Petasch

Thomas Petasch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20020167740
    Abstract: In the case of a lens system (1), in particular in the case of a projection lens system for semiconductor lithography, it is possible to exchange at least one optical element, in particular the final optical element in the beam direction in the form of an end plate (3). For adjusting the exchangeable optical element (3), an optical quality fit with a fitting surface (6) is set between the optical element (3) and a mount (5) or a part connected to a mount (5).
    Type: Application
    Filed: April 25, 2002
    Publication date: November 14, 2002
    Inventors: Karlfrid Osterried, Thomas Petasch, Jens Kugler
  • Publication number: 20020152627
    Abstract: An apparatus for adjusting devices and for setting adjustments, in particular in a &mgr;m range, nm range and below, in particular of optical elements in semiconductor lithography, comprising a base part and a head part spaced apart therefrom., the two parts being connected to one another by at least one adjustment device, and the adjustment device having side parts, the angle of which, or the spacing between which, can be adjusted or see by a length-adjustment device.
    Type: Application
    Filed: March 25, 2002
    Publication date: October 24, 2002
    Inventors: Klaus-Dieter Klein, Thomas Petasch, Hartmut Muenker