Patents by Inventor Thomas Schafbauer

Thomas Schafbauer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8921166
    Abstract: A chip includes a number a plurality of functional areas of a layer and a number of dummy structures within the layer. The dummy structures are spaced from the functional areas. Each dummy structure has a size that is a function of the size and density of the functional areas.
    Type: Grant
    Filed: May 31, 2013
    Date of Patent: December 30, 2014
    Assignee: Infineon Technologies AG
    Inventors: Sebastian Schmidt, Thomas Schafbauer, Hang Yip Liu, Yayi Wei
  • Publication number: 20130267048
    Abstract: A chip includes a number a plurality of functional areas of a layer and a number of dummy structures within the layer. The dummy structures are spaced from the functional areas. Each dummy structure has a size that is a function of the size and density of the functional areas.
    Type: Application
    Filed: May 31, 2013
    Publication date: October 10, 2013
    Inventors: Sebastian Schmidt, Thomas Schafbauer, Hang Yip Liu, Yayi Wei
  • Publication number: 20110133304
    Abstract: A chip includes a number a plurality of functional areas of a layer and a number of dummy structures within the layer. The dummy structures are spaced from the functional areas. Each dummy structure has a size that is a function of the size and density of the functional areas.
    Type: Application
    Filed: December 28, 2010
    Publication date: June 9, 2011
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Sebastian Schmidt, Thomas Schafbauer, Hang Yip Liu, Yayi Wei
  • Patent number: 7868427
    Abstract: A material layer on a substrate being processed, e.g. to form chips, includes one or more functional structures. In order to control pattern density during fabrication of the chip, dummy fill structures of different sizes and shapes are added to the chip at different distances from the functional structures of the material layer. In particular, the placement, size and shape of the dummy structures are determined as a function of a distance to, and density of, the functional structures of the material layer.
    Type: Grant
    Filed: January 13, 2009
    Date of Patent: January 11, 2011
    Assignee: Infineon Technologies AG
    Inventors: Sebastian Schmidt, Hang-Yip Liu, Thomas Schafbauer, Yayi Wei
  • Patent number: 7615440
    Abstract: In a method of fabricating a semiconductor device, a level of metal is formed within an interval dielectric. The level of metal includes a first metal line separated from a second metal line by a region of the interlevel dielectric. The region of interlevel dielectric is removed between the first metal line and the second metal line. A high-k dielectric is formed between the first metal line and the second metal line in the region where the interlevel dielectric was removed such that a capacitor is formed by the first metal line, the second metal line and the high-k dielectric.
    Type: Grant
    Filed: September 7, 2007
    Date of Patent: November 10, 2009
    Assignee: Infineon Technologies AG
    Inventors: Petra Felsner, Thomas Schafbauer, Uwe Kerst, Hans-Joachim Barth, Erdem Kaltalioglu
  • Publication number: 20090124027
    Abstract: A material layer on a substrate being processed, e.g. to form chips, includes one or more functional structures. In order to control pattern density during fabrication of the chip, dummy fill structures of different sizes and shapes are added to the chip at different distances from the functional structures of the material layer. In particular, the placement, size and shape of the dummy structures are determined as a function of a distance to, and density of, the functional structures of the material layer.
    Type: Application
    Filed: January 13, 2009
    Publication date: May 14, 2009
    Inventors: Sebastian Schmidt, Thomas Schafbauer, Hang Yip Liu, Yayi Wei
  • Patent number: 7494930
    Abstract: A material layer on a substrate being processed, e.g. to form chips, includes one or more functional structures. In order to control pattern density during fabrication of the chip, dummy fill structures of different sizes and shapes are added to the chip at different distances from the functional structures of the material layer. In particular, the placement, size and shape of the dummy structures are determined as a function of a distance to, and density of, the functional structures of the material layer.
    Type: Grant
    Filed: May 26, 2006
    Date of Patent: February 24, 2009
    Assignee: Infineon Technologies AG
    Inventors: Sebastian Schmidt, Thomas Schafbauer, Hang Yip Liu, Yayi Wei
  • Publication number: 20070294871
    Abstract: In a method of fabricating a semiconductor device, a level of metal is formed within an interval dielectric. The level of metal includes a first metal line separated from a second metal line by a region of the interlevel dielectric. The region of interlevel dielectric is removed between the first metal line and the second metal line. A high-k dielectric is formed between the first metal line and the second metal line in the region where the interlevel dielectric was removed such that a capacitor is formed by the first metal line, the second metal line and the high-k dielectric.
    Type: Application
    Filed: September 7, 2007
    Publication date: December 27, 2007
    Inventors: Petra Felsner, Thomas Schafbauer, Uwe Kerst, Hans-Joachim Barth, Erdem Kaltalioglu
  • Patent number: 7268383
    Abstract: Semiconductor devices having capacitors formed of a high-k dielectric and a pair of interconnections on either side of the dielectric are provided along with methods of fabricating such semiconductor devices. The interconnections comprise a via and a metal layer.
    Type: Grant
    Filed: February 20, 2003
    Date of Patent: September 11, 2007
    Assignee: Infineon Technologies AG
    Inventors: Petra Felsner, Thomas Schafbauer, Uwe Kerst, Hans-Joachim Barth, Erdem Kaltalioglu
  • Publication number: 20060216905
    Abstract: A material layer on a substrate being processed, e.g. to form chips, includes one or more functional structures. In order to control pattern density during fabrication of the chip, dummy fill structures of different sizes and shapes are added to the chip at different distances from the functional structures of the material layer. In particular, the placement, size and shape of the dummy structures are determined as a function of a distance to, and density of, the functional structures of the material layer.
    Type: Application
    Filed: May 26, 2006
    Publication date: September 28, 2006
    Inventors: Sebastian Schmidt, Thomas Schafbauer, Hang Liu, Yayi Wei
  • Patent number: 7071074
    Abstract: A material layer on a substrate being processed, e.g. to form chips, includes one or more functional structures. In order to control pattern density during fabrication of the chip, dummy fill structures of different sizes and shapes are added to the chip at different distances from the functional structures of the material layer. In particular, the placement, size and shape of the dummy structures are determined as a function of a distance to, and density of, the functional structures of the material layer.
    Type: Grant
    Filed: September 24, 2003
    Date of Patent: July 4, 2006
    Assignee: Infineon Technologies AG
    Inventors: Sebastian Schmidt, Thomas Schafbauer, Hang Yip Liu, Yayi Wei
  • Publication number: 20050263817
    Abstract: A transistor contains a source region and a drain region. Two or more fill areas are formed such that the fill areas and the source and/or drain region engage in one another. The fill areas have vertical dimensions which are at least of equal size to the vertical dimensions of the source and/or of the drain region. The fill areas and the source and/or drain region extend at least partially over a common vertical section. The fill areas are formed from an oxide and/or a nitride.
    Type: Application
    Filed: May 26, 2005
    Publication date: December 1, 2005
    Inventors: Martin Wendel, Martin Streibl, Kai Esmark, Philipp Riess, Thomas Schafbauer
  • Publication number: 20050064634
    Abstract: A material layer on a substrate being processed, e.g. to form chips, includes one or more functional structures. In order to control pattern density during fabrication of the chip, dummy fill structures of different sizes and shapes are added to the chip at different distances from the functional structures of the material layer. In particular, the placement, size and shape of the dummy structures are determined as a function of a distance to, and density of, the functional structures of the material layer.
    Type: Application
    Filed: September 24, 2003
    Publication date: March 24, 2005
    Applicant: Infineon Technologies North America Corp.
    Inventors: Sebastian Schmidt, Thomas Schafbauer, Hang Liu, Yayi Wei
  • Patent number: 6828647
    Abstract: A method for electrically determining in a semiconductor wafer the location of edges of a well that underlies an insulating layer that includes forming in the wafer before forming of the well and the insulating layer a plurality of conductive stripes will that pass under the future insulating layer and extend to varying distances under the insulating layer so as to include stripes that will penetrate an edge to be located so as to form a low resistance connection thereto and stripes that will fall short of an edge to be located. From the stripes of minimum penetration that make low resistance can be determined the location of the well edges.
    Type: Grant
    Filed: April 5, 2001
    Date of Patent: December 7, 2004
    Assignee: Infineon Technologies AG
    Inventors: Thomas Schafbauer, Andreas Von Ehrenwall, Tobias Mono
  • Patent number: 6815317
    Abstract: A method of fabricating an integrated circuit in and on a semiconductor substrate with deep implantations by applying a scattered ion capturing layer in the resist mask opening to capture any implanted ions scattered in the resist and deflected out of the resist into the mask opening to prevent these ions from reaching the semiconductor substrate and affecting the concentration of ions at the edge of the mask and thus the performance of the integrated circuit.
    Type: Grant
    Filed: June 5, 2002
    Date of Patent: November 9, 2004
    Assignees: International Business Machines Corporation, Infineon Technologies, AG
    Inventors: Thomas Schafbauer, Sandrine E. Sportouch
  • Publication number: 20040164339
    Abstract: Semiconductor devices having capacitors formed of a high-k dielectric and a pair of interconnections on either side of the dielectric are provided along with methods of fabricating such semiconductor devices. The interconnections comprise a via and a metal layer.
    Type: Application
    Filed: February 20, 2003
    Publication date: August 26, 2004
    Applicant: Infineon Technologies North America Corp.
    Inventors: Petra Felsner, Thomas Schafbauer, Uwe Kerst, Hans-Joachim Barth, Erdem Kaltalioglu
  • Patent number: 6750122
    Abstract: A method of forming a semiconductor structure (see e.g., FIG. 3) includes forming a silicon (e.g., polysilicon) layer 14. The silicon layer 14 is patterned and etched so that at least one sidewall 20 is exposed. An oxygen bearing species (e.g., O2+) is then implanted into the sidewall 20 of the silicon layer 14. In the preferred embodiment, the oxygen bearing species is implanted at an acute angle relative to the plane of the silicon layer 14.
    Type: Grant
    Filed: September 29, 1999
    Date of Patent: June 15, 2004
    Assignee: Infineon Technologies AG
    Inventor: Thomas Schafbauer
  • Publication number: 20040053439
    Abstract: A method of fabricating a semiconductor connective region of a first conductivity type through a semiconductor layer of a second conductivity type which at least partly separates a bulk portion of semiconductor body (substrate) of the first conductivity type from a semiconductor well of the first conductivity type includes a step of implanting ions into a portion of the layer to convert the conductivity of the implanted portion to the first conductivity type. This electrically connects the well to the bulk portion of the body. Any biasing potential applied to the bulk portion of the body is thus applied to the well. This eliminates any need to form a contact in the well for biasing the well and thus allows the well to be reduced in size.
    Type: Application
    Filed: September 17, 2002
    Publication date: March 18, 2004
    Applicant: Infineon Technologies North America Corp.
    Inventors: Thomas Schafbauer, Klaus Schruefer, Odin Prigge, Reinhard Mahnkopf, Walter Neumueller
  • Publication number: 20030228741
    Abstract: A method of fabricating an integrated circuit in and on a semiconductor substrate with deep implantations by applying a scattered ion capturing layer in the resist mask opening to capture any implanted ions scattered in the resist and deflected out of the resist into the mask opening to prevent these ions from reaching the semiconductor substrate and affecting the concentration of ions at the edge of the mask and thus the performance of the integrated circuit.
    Type: Application
    Filed: June 5, 2002
    Publication date: December 11, 2003
    Applicants: INTERNATIONAL BUSINESS MACHINES CORPORATION, Infineon Technologies North America Corp.
    Inventors: Thomas Schafbauer, Sandrine E. Sportouch
  • Publication number: 20030186470
    Abstract: A method for electrically determining in a semiconductor wafer the location of edges of a well that underlies an insulating layer that includes forming in the wafer before forming of the well and the insulating layer a plurality of conductive stripes will that pass under the future insulating layer and extend to varying distances under the insulating layer so as to include stripes that will penetrate an edge to be located so as to form a low resistance connection thereto and stripes that will fall short of an edge to be located. From the stripes of minimum penetration that make low resistance can be determined the location of the well edges.
    Type: Application
    Filed: April 5, 2001
    Publication date: October 2, 2003
    Inventors: Thomas Schafbauer, Andreas Von Ehrenwall, Tobias Mono