Abstract: A system and method of providing RF to a transducer includes an oscillator, an RF generator, and a voltage phase detector. The oscillator has a frequency control input and an RF signal output. The RF generator has an input coupled to the oscillator RF signal output and an RF generator output coupled to the transducer. The voltage phase detector includes a first phase input coupled to the RF signal output of the oscillator, a second phase input coupled to the RF generator output, and a frequency control signal output coupled to the oscillator frequency control voltage input.

Abstract: The present invention is a system for controlling a pad conditioner in a CMP device. The system includes a roughness-sensing device mounted in proximity to a polishing pad. The roughness-sensing device generates an output responsive to a roughness of the polishing pad. A signal-processing unit then generates a roughness value of the polishing pad in response to the output from the roughness-sensing device, and generates a control signal in response to the generated roughness value. Finally, a control device controls motion of the pad conditioner in response to the control signal.

Abstract: A system and method of generating RF includes a supply voltage source, an oscillator, an output amplifier, a load network, a peak voltage detector and a comparator circuit. The oscillator has a control signal input and an RF signal output. The output amplifier is coupled to the oscillator output. The load network is coupled between an output of the output amplifier and an output of the RF generator. The peak voltage detector is coupled across the output amplifier. The comparator circuit includes a first input coupled to the supply voltage source, a second input coupled to an output of the peak voltage detector, and a comparator output coupled to the oscillator control signal input.

Abstract: A system and method of cleaning a substrate includes a megasonic chamber that includes a transducer and a substrate. The transducer is being oriented toward the substrate. A variable distance d separates the transducer and the substrate. The system also includes a dynamically adjustable RF generator that has an output coupled to the transducer.

Abstract: In one of the many embodiments, a method for processing a substrate is provided which includes generating a first fluid meniscus and a second fluid meniscus on a surface of the substrate where the first fluid meniscus being substantially adjacent to the second fluid meniscus. The meniscus also includes substantially separating the first fluid meniscus and the second fluid meniscus with a barrier.

Abstract: The present invention is a system for controlling a pad conditioner in a CMP device. The system includes a roughness-sensing device mounted in proximity to a polishing pad. The roughness-sensing device generates an output responsive to a roughness of the polishing pad. A signal-processing unit then generates a roughness value of the polishing pad in response to the output from the roughness-sensing device, and generates a control signal in response to the generated roughness value. Finally, a control device controls motion of the pad conditioner in response to the control signal.

Abstract: A system and method of generating RF includes an RF generator, a variable DC power supply, and a comparator. The RF generator has an RF output coupled to an input of the transducer. The variable DC power supply has a control input and a DC output coupled to the RF generator. The comparator includes a first input coupled to a set point control signal, a second input coupled to the RF generator RF output, and a control signal output coupled to a voltage control input on the variable DC power supply.

Abstract: A system and method of providing RF to a transducer includes an oscillator, an RF generator, and a voltage phase detector. The oscillator has a frequency control input and an RF signal output. The RF generator has an input coupled to the oscillator RF signal output and an RF generator output coupled to the transducer. The voltage phase detector includes a first phase input coupled to the RF signal output of the oscillator, a second phase input coupled to the RF generator output, and a frequency control signal output coupled to the oscillator frequency control voltage input.

Abstract: A system and method of cleaning a substrate includes a megasonic chamber that includes a transducer and a substrate. The transducer is being oriented toward the substrate. A variable distance d separates the transducer and the substrate. The system also includes a dynamically adjustable RF generator that has an output coupled to the transducer.

Abstract: A system and method of generating RF includes a supply voltage source, an oscillator, an output amplifier, a load network, a peak voltage detector and a comparator circuit. The oscillator has a control signal input and an RF signal output. The output amplifier is coupled to the oscillator output. The load network is coupled between an output of the output amplifier and an output of the RF generator. The peak voltage detector is coupled across the output amplifier. The comparator circuit includes a first input coupled to the supply voltage source, a second input coupled to an output of the peak voltage detector, and a comparator output coupled to the oscillator control signal input.

Abstract: A four-stroke cycle I C E with a special cylinder head containing three valves per cylinder, an air accumulator, carburetor, and special air inlet valve for use during coasting. Valves and fuel injection being computer controled such that the two exit valves are opened or closed at such times that either the products of combustion are after power strokes and the alternate exhaust valve opens when the vehicle is coasting alowing compressed air to go to the accumulator. Two air inlets are provided for the two ocassions. Necessary computer controls included.

Abstract: An apparatus and a method for lifting a wafer off of an electrostatic chuck after wafer processing operations are provided. In a specific example, a wafer lifting mechanism for controlling the lifting of the wafer off of an electrostatic chuck at a completion of processing is defined. The wafer lifting mechanism includes a pin lifter yoke that is oriented below an electrostatic chuck. The pin lifter yoke has a set of pins connected thereto, and the set of pins are configured to traverse through the electrostatic chuck and contact a bottom surface of the wafer. A link is also provided and connected to the pin lifter yoke. The link is moveable so as to cause the pin lifter yoke and the set of pins to move within the electrostatic chuck and contact the bottom surface of the wafer, and once in contact with the bottom surface of the wafer, the set of pins are capable of lifting the wafer off of the electrostatic chuck.

Abstract: A keyboard of the general type that is compatable with computers and related equipment. A keyboard consisting of two equal sized halves so mounted that either half cam be rotated independly about a common axis that is located at the top inside edge of both halves.

Abstract: An apparatus and a method for lifting a wafer off of an electrostatic chuck after wafer processing operations are provided. In a specific example, a wafer lifting mechanism for controlling the lifting of the wafer off of an electrostatic chuck at a completion of processing is defined. The wafer lifting mechanism includes a pin lifter yoke that is oriented below an electrostatic chuck. The pin lifter yoke has a set of pins connected thereto, and the set of pins are configured to traverse through the electrostatic chuck and contact a bottom surface of the wafer. A link is also provided and connected to the pin lifter yoke. The link is moveable so as to cause the pin lifter yoke and the set of pins to move within the electrostatic chuck and contact the bottom surface of the wafer, and once in contact with the bottom surface of the wafer, the set of pins are capable of lifting the wafer off of the electrostatic chuck.

Abstract: A functionally and structurally modular, parallelogram-shaped spacecraft. The spacecraft includes a plurality of modules joined to one another along an axis of the spacecraft, wherein each module is devoted to a particular function of the spacecraft, and wherein all of the modules have the same cross-sectional size and geometry. The geometry is approximately a parallelogram in a plane normal to the axis of the spacecraft. The functions include power, processing, propulsion, and the like.

Abstract: A modular control system for an automated manufacturing facility, especially for use with a semiconductor fabrication facility having a number of discrete process components, provides a master control computer connected by a parallel bus to a series of modular interface cards. Each of the interface cards are organized to communicate with all the I/O located on a specific process component or group of process components. A plurality of daughter cards are provided on each of the interface cards. The daughter cards contain data translation and acquisition circuitry for translating the various forms of I/O signals from and into a database format. The signal list used to communicate between the master computer and the I/O is generated at startup, enabling easy modification, addition and deletion of I/O. Network-based communication protocols can also be employed for communication between the interface cards and the master computer.

Abstract: A hockey stick blade application/removal tool for applying a replacement blade to or removing a replacement blade from the blade receiving end of a hockey stick handle. The tool includes a wrap-around heat panel, an insulative layer surrounding the heat panel and a connection member for connecting the heat panel in such wrap around configuration.

Abstract: A system and method to provide voice enhancement circuits on a voice path on an individual basis, without having in-line circuits inserted into the lines or trunks. The enhancement circuit is inserted within one or more of the switches. This system comprises a switching system having a switching fabric and a central control, wherein the switching fabric includes several extended time slot interchange (XTSI) units connected to a time multiplex switch. The extended time slot interchange unit has approximately twice the capacity of a standard time slot interchange unit. Such XTSI is connected to voice enhancing circuits, which the TSI may then switch enhancement circuits into a call path. A method of setting up a call according to this invention includes routing the call to a switch, routing the call in the switch into an XTSI, which routes a call through the enhancement circuit, and then back through the XTSI.

Abstract: A conference bridge that receives speech data in the form of data packets, and transmits data in the same form, without transforming the data in the conference bridge. The conference bridge according to this invention includes a plurality of inputs that have speech detectors that detect the presence of speech data. The speech detectors report the presence of speech to a controller. The controller causes data packets from one of the inputs detecting speech to be replicated for all outputs. If there is speech at more than one input at a time, then a decision is made as to which input to replicate. Advantageously, the decision is based on who is the loudest speaker. Further, the data that is replicated is not sent to the output for the originator in order to prevent echo.

Abstract: A network monitor and associated control system is provided to monitor a toll network for customer signaling. A multi-tone signal processor and associated control is provided such that when signaling is detected, such signaling is validated against a provisioned list. A valid signal is reported to a central control of the network switch, which takes action in response to the signal.