Patents by Inventor Ting Fu Chang

Ting Fu Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11955397
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a substrate, a channel layer, a barrier layer, a compound semiconductor layer, a gate electrode, and a stack of dielectric layers. The channel layer is disposed on the substrate. The barrier layer is disposed on the channel layer. The compound semiconductor layer is disposed on the barrier layer. The gate electrode is disposed on the compound semiconductor layer. The stack of dielectric layers is disposed on the gate electrode. The stack of dielectric layers includes layers having different etching rates.
    Type: Grant
    Filed: November 9, 2020
    Date of Patent: April 9, 2024
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Shin-Cheng Lin, Cheng-Wei Chou, Ting-En Hsieh, Yi-Han Huang, Kwang-Ming Lin, Yung-Fong Lin, Cheng-Tao Chou, Chi-Fu Lee, Chia-Lin Chen, Shu-Wen Chang
  • Publication number: 20240014176
    Abstract: Various embodiments of the present disclosure are directed towards a three-dimensional (3D) semiconductor structure for wide-bandgap semiconductor devices in which the wide-bandgap semiconductor devices are split amongst a first IC die and a second IC die. The first IC die includes a first substrate and a first semiconductor device. The first substrate includes a first wide-bandgap material, and the first semiconductor device overlies the first substrate and is formed in part by the first wide-bandgap material. The second IC die overlies the first IC die and is bonded to the first IC die by a bond structure between the first and second IC dies. Further, the second IC die includes a second substrate and a second semiconductor device. The second substrate includes a second wide-bandgap material, and the second semiconductor device underlies the second substrate and is formed in part by the second wide-bandgap material.
    Type: Application
    Filed: January 4, 2023
    Publication date: January 11, 2024
    Inventors: Ting-Fu Chang, Jiun-Lei Yu, Man-Ho Kwan, Chun-Lin Tsai
  • Patent number: 11843047
    Abstract: In some embodiments, the present disclosure relates to an integrated transistor device, including a first barrier layer arranged over a substrate. Further, an undoped layer may be arranged over the first barrier layer and have a n-channel device region laterally next to a p-channel device region. The n-channel device region of the undoped layer has a topmost surface that is above a topmost surface of the p-channel device region of the undoped layer. The integrated transistor device may further comprise a second barrier layer over the n-channel device region of the undoped layer. A first gate electrode is arranged over the second barrier layer, and a second gate electrode is arranged over the p-channel device region of the undoped layer.
    Type: Grant
    Filed: May 24, 2022
    Date of Patent: December 12, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Man-Ho Kwan, Fu-Wei Yao, Chun Lin Tsai, Jiun-Lei Jerry Yu, Ting-Fu Chang
  • Publication number: 20230387281
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip a first undoped layer overlies a substrate. A first barrier layer overlies the first undoped layer and has a first thickness. A first doped layer overlies the first barrier layer and is disposed laterally within an n-channel device region of the substrate. A second barrier layer overlies the first barrier layer and is disposed within a p-channel device region that is laterally adjacent to the n-channel device region. The second barrier layer has a second thickness that is greater than the first thickness. A second undoped layer overlies the second barrier layer. A second doped layer overlies the second undoped layer. The second undoped layer and the second doped layer are disposed within the p-channel device region.
    Type: Application
    Filed: August 3, 2023
    Publication date: November 30, 2023
    Inventors: Man-Ho Kwan, Fu-Wei Yao, Chun Lin Tsai, Jiun-Lei Jerry Yu, Ting-Fu Chang
  • Patent number: 11824109
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip a first undoped layer overlies a substrate. A first barrier layer overlies the first undoped layer and has a first thickness. A first doped layer overlies the first barrier layer and is disposed laterally within an n-channel device region of the substrate. A second barrier layer overlies the first barrier layer and is disposed within a p-channel device region that is laterally adjacent to the n-channel device region. The second barrier layer has a second thickness that is greater than the first thickness. A second undoped layer overlies the second barrier layer. A second doped layer overlies the second undoped layer. The second undoped layer and the second doped layer are disposed within the p-channel device region.
    Type: Grant
    Filed: July 20, 2022
    Date of Patent: November 21, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Man-Ho Kwan, Fu-Wei Yao, Chun Lin Tsai, Jiun-Lei Jerry Yu, Ting-Fu Chang
  • Patent number: 11522077
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip a first undoped layer overlies a substrate. A first barrier layer overlies the first undoped layer and has a first thickness. A first doped layer overlies the first barrier layer and is disposed laterally within an n-channel device region of the substrate. A second barrier layer overlies the first barrier layer and is disposed within a p-channel device region that is laterally adjacent to the n-channel device region. The second barrier layer has a second thickness that is greater than the first thickness. A second undoped layer overlies the second barrier layer. A second doped layer overlies the second undoped layer. The second undoped layer and the second doped layer are disposed within the p-channel device region.
    Type: Grant
    Filed: May 27, 2020
    Date of Patent: December 6, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Man-Ho Kwan, Fu-Wei Yao, Chun Lin Tsai, Jiun-Lei Jerry Yu, Ting-Fu Chang
  • Publication number: 20220359738
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip a first undoped layer overlies a substrate. A first barrier layer overlies the first undoped layer and has a first thickness. A first doped layer overlies the first barrier layer and is disposed laterally within an n-channel device region of the substrate. A second barrier layer overlies the first barrier layer and is disposed within a p-channel device region that is laterally adjacent to the n-channel device region. The second barrier layer has a second thickness that is greater than the first thickness. A second undoped layer overlies the second barrier layer. A second doped layer overlies the second undoped layer. The second undoped layer and the second doped layer are disposed within the p-channel device region.
    Type: Application
    Filed: July 20, 2022
    Publication date: November 10, 2022
    Inventors: Man-Ho Kwan, Fu-Wei Yao, Chun Lin Tsai, Jiun-Lei Jerry Yu, Ting-Fu Chang
  • Publication number: 20220285540
    Abstract: In some embodiments, the present disclosure relates to an integrated transistor device, including a first barrier layer arranged over a substrate. Further, an undoped layer may be arranged over the first barrier layer and have a n-channel device region laterally next to a p-channel device region. The n-channel device region of the undoped layer has a topmost surface that is above a topmost surface of the p-channel device region of the undoped layer. The integrated transistor device may further comprise a second barrier layer over the n-channel device region of the undoped layer. A first gate electrode is arranged over the second barrier layer, and a second gate electrode is arranged over the p-channel device region of the undoped layer.
    Type: Application
    Filed: May 24, 2022
    Publication date: September 8, 2022
    Inventors: Man-Ho Kwan, Fu-Wei Yao, Chun Lin Tsai, Jiun-Lei Jerry Yu, Ting-Fu Chang
  • Patent number: 11349023
    Abstract: In some embodiments, the present disclosure relates to an integrated transistor device, including a first barrier layer arranged over a substrate. Further, an undoped layer may be arranged over the first barrier layer and have a n-channel device region laterally next to a p-channel device region. The n-channel device region of the undoped layer has a topmost surface that is above a topmost surface of the p-channel device region of the undoped layer. The integrated transistor device may further comprise a second barrier layer over the n-channel device region of the undoped layer. A first gate electrode is arranged over the second barrier layer, and a second gate electrode is arranged over the p-channel device region of the undoped layer.
    Type: Grant
    Filed: October 1, 2019
    Date of Patent: May 31, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Man-Ho Kwan, Fu-Wei Yao, Chun Lin Tsai, Jiun-Lei Jerry Yu, Ting-Fu Chang
  • Publication number: 20210376135
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip a first undoped layer overlies a substrate. A first barrier layer overlies the first undoped layer and has a first thickness. A first doped layer overlies the first barrier layer and is disposed laterally within an n-channel device region of the substrate. A second barrier layer overlies the first barrier layer and is disposed within a p-channel device region that is laterally adjacent to the n-channel device region. The second barrier layer has a second thickness that is greater than the first thickness. A second undoped layer overlies the second barrier layer. A second doped layer overlies the second undoped layer. The second undoped layer and the second doped layer are disposed within the p-channel device region.
    Type: Application
    Filed: May 27, 2020
    Publication date: December 2, 2021
    Inventors: Man-Ho Kwan, Fu-Wei Yao, Chun Lin Tsai, Jiun-Lei Jerry Yu, Ting-Fu Chang
  • Publication number: 20210098615
    Abstract: In some embodiments, the present disclosure relates to an integrated transistor device, including a first barrier layer arranged over a substrate. Further, an undoped layer may be arranged over the first barrier layer and have a n-channel device region laterally next to a p-channel device region. The n-channel device region of the undoped layer has a topmost surface that is above a topmost surface of the p-channel device region of the undoped layer. The integrated transistor device may further comprise a second barrier layer over the n-channel device region of the undoped layer. A first gate electrode is arranged over the second barrier layer, and a second gate electrode is arranged over the p-channel device region of the undoped layer.
    Type: Application
    Filed: October 1, 2019
    Publication date: April 1, 2021
    Inventors: Man-Ho Kwan, Fu-Wei Yao, Chun Lin Tsai, Jiun-Lei Jerry Yu, Ting-Fu Chang
  • Publication number: 20170207085
    Abstract: A horizontal semiconductor device includes an electrically conductive substrate having a first surface, a buffer layer disposed on the first surface of the substrate, an epitaxial unit disposed on the buffer layer opposite to the substrate, a first electrode unit disposed on the epitaxial unit, and a second electrode unit. The substrate has an exposed region that is exposed from the buffer layer and the epitaxial unit. The second electrode unit includes a first conductive member disposed on the epitaxial unit and spaced apart from the first electrode unit, and a second conductive member extending from the first conductive member to the exposed region.
    Type: Application
    Filed: June 21, 2016
    Publication date: July 20, 2017
    Applicant: National Tsing Hua University
    Inventors: Chih-Fang HUANG, Keh-Yung CHENG, Wei-Chen YANG, Ting-Fu CHANG, Po-Ju CHU, Jian-Lin LIN, Ya-Chu LIAO, Hsin-Ying TSENG
  • Patent number: 9502602
    Abstract: A structure of high electron mobility light emitting transistor comprises a substrate, a HEMT region disposed on the substrate, and a gallium nitride LED (GaN-LED) region disposed on the substrate. A two-dimensional electron gas layer is present in each of the HEMI region and the LED region, and the HEMT region is coupled to the LED region through the two-dimensional electron gas layer.
    Type: Grant
    Filed: December 31, 2014
    Date of Patent: November 22, 2016
    Assignee: NATIONAL TSING HUA UNIVERSITY
    Inventors: Chih-Fang Huang, Yi-Chen Li, Ting-Fu Chang, Keh-Yung Cheng, Yu-Li Wang, Chun-Hung Wu, Wei-Chen Yang, Shao-Yen Chiu
  • Patent number: 9412807
    Abstract: A semiconductor structure comprises a substrate, an epitaxial layer, an active area and a termination. The substrate has a first conducting type of semiconductor material. The epitaxial layer disposed on the substrate has a first conducting type of semiconductor material. The active area is a working area of the semiconductor structure. The termination protects the active area. The termination has a junction termination extension (JTE) having a second conducting type of semiconductor material. The counter-doped area is disposed in the JTE area and has the first conducting type of semiconductor material. A dose of the first conducting type of semiconductor material in the counter-doped area increases along one direction.
    Type: Grant
    Filed: October 1, 2015
    Date of Patent: August 9, 2016
    Assignee: NATIONAL TSING HUA UNIVERSITY
    Inventors: Chih-Fang Huang, Ting-Fu Chang, Hua-Chih Hsu, Jheng-Yi Jiang
  • Publication number: 20160190384
    Abstract: A structure of high electron mobility light emitting transistor comprises a substrate, a HEMT region disposed on the substrate, and a gallium nitride LED (GaN-LED) region disposed on the substrate. A two-dimensional electron gas layer is present in each of the HEMI region and the LED region, and the HEMT region is coupled to the LED region through the two-dimensional electron gas layer.
    Type: Application
    Filed: December 31, 2014
    Publication date: June 30, 2016
    Inventors: Chih-Fang HUANG, Yi-Chen LI, Ting-Fu CHANG, Keh-Yung CHENG, Yu-Li WANG, Chun-Hung WU, Wei-Chen YANG, Shao-Yen CHIU
  • Patent number: 9362381
    Abstract: The present invention discloses an insulated gate bipolar transistor (IGBT) and a manufacturing method thereof. The IGBT includes: a gallium nitride (GaN) substrate, a first GaN layer with a first conductive type, a second GaN layer with a first conductive type, a third GaN layer with a second conductive type or an intrinsic conductive type, and a gate formed on the GaN substrate. The first GaN layer is formed on the GaN substrate and has a side wall vertical to the GaN substrate. The second GaN layer is formed on the GaN substrate and is separated from the first GaN layer by the gate. The third GaN layer is formed on the first GaN layer and is separated from the GaN substrate by the first GaN layer. The gate has a side plate adjacent to the side wall in a lateral direction to control a channel.
    Type: Grant
    Filed: December 16, 2015
    Date of Patent: June 7, 2016
    Assignee: RICHTEK TECHNOLOGY CORPORATION
    Inventors: Chih-Fang Huang, Tsung-Yi Huang, Chien-Wei Chiu, Tsung-Yu Yang, Ting-Fu Chang, Tsung-Chieh Hsiao, Ya-Hsien Liu, Po-Chin Peng
  • Publication number: 20160111519
    Abstract: The present invention discloses an insulated gate bipolar transistor (IGBT) and a manufacturing method thereof. The IGBT includes: a gallium nitride (GaN) substrate, a first GaN layer with a first conductive type, a second GaN layer with a first conductive type, a third GaN layer with a second conductive type or an intrinsic conductive type, and a gate formed on the GaN substrate. The first GaN layer is formed on the GaN substrate and has a side wall vertical to the GaN substrate. The second GaN layer is formed on the GaN substrate and is separated from the first GaN layer by the gate. The third GaN layer is formed on the first GaN layer and is separated from the GaN substrate by the first GaN layer. The gate has a side plate adjacent to the side wall in a lateral direction to control a channel.
    Type: Application
    Filed: December 16, 2015
    Publication date: April 21, 2016
    Applicant: RICHTEK TECHNOLOGY CORPORATION
    Inventors: Chih-Fang Huang, Tsung-Yi Huang, Chien-Wei Chiu, Tsung-Yu Yang, Ting-Fu Chang, Tsung-Chieh Hsiao, Ya-Hsien Liu, Po-Chin Peng
  • Patent number: 9252219
    Abstract: The present invention discloses an insulated gate bipolar transistor (IGBT) and a manufacturing method thereof. The IGBT includes: a gallium nitride (GaN) substrate, a first GaN layer with a first conductive type, a second GaN layer with a first conductive type, a third GaN layer with a second conductive type or an intrinsic conductive type, and a gate formed on the GaN substrate. The first GaN layer is formed on the GaN substrate and has a side wall vertical to the GaN substrate. The second GaN layer is formed on the GaN substrate and is separated from the first GaN layer by the gate. The third GaN layer is formed on the first GaN layer and is separated from the GaN substrate by the first GaN layer. The gate has a side plate adjacent to the side wall in a lateral direction to control a channel.
    Type: Grant
    Filed: August 20, 2014
    Date of Patent: February 2, 2016
    Assignee: RICHTEK TECHNOLOGY CORPORATION
    Inventors: Chih-Fang Huang, Tsung-Yi Huang, Chien-Wei Chiu, Tsung-Yu Yang, Ting-Fu Chang, Tsung-Chieh Hsiao, Ya-Hsien Liu, Po-Chin Peng
  • Publication number: 20150279961
    Abstract: Compared with the typical Si and GaAs material, a wide bandgap material (III-N compound) has the better electronic properties, particularly the operation stability and the temperature sensitivity, and is extremely suitable for the high power electronic application. The invention proposes a high power vertical GaN device for providing the reverse breakdown voltage higher than or equal to 600 V, the lower on-resistance is lower than or equal to 5 m?-cm2 and the forward current as high as 3 A/mm2.
    Type: Application
    Filed: March 31, 2014
    Publication date: October 1, 2015
    Applicant: NATIONAL TSING HUA UNIVERSITY
    Inventors: CHIH-FANG HUANG, TING-FU CHANG, GE-CHENG LIU, YU-TENG TSENG, SHAO-YEN CHIU
  • Patent number: 9105757
    Abstract: The present invention discloses a junction barrier Schottky (JBS) diode and a manufacturing method thereof. The JBS diode includes: an N-type gallium nitride (GaN) substrate; an aluminum gallium nitride (AlGaN) barrier layer, which is formed on the N-type GaN substrate; a P-type gallium nitride (GaN) layer, which is formed on or above the N-type GaN substrate; an anode conductive layer, which is formed at least partially on the AlGaN barrier layer, wherein a Schottky contact is formed between part of the anode conductive layer and the AlGaN barrier layer; and a cathode conductive layer, which is formed on the N-type GaN substrate, wherein an ohmic contact is formed between the cathode conductive layer and the N-type GaN substrate, and the cathode conductive layer is not directly connected to the anode conductive layer.
    Type: Grant
    Filed: September 28, 2013
    Date of Patent: August 11, 2015
    Assignee: Richtek Technology Corporation, R.O.C.
    Inventors: Chih-Fang Huang, Tsung-Yi Huang, Chien-Wei Chiu, Tsung-Yu Yang, Ting-Fu Chang, Tsung-Chieh Hsiao, Ya-Hsien Liu, Po-Chin Peng