Patents by Inventor Ting PAN
Ting PAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240138138Abstract: A semiconductor device and a method of manufacturing the same are provided. The semiconductor device includes a substrate, a plurality of capacitors, and a first supporting layer. The plurality of capacitors are disposed on the substrate. Each of the capacitors extends along a first direction. Each of the plurality of capacitors includes a first capacitor electrode, a second capacitor electrode, and a capacitor dielectric separating the first capacitor electrode from the second capacitor electrode. The first supporting layer is disposed on the substrate. The first supporting layer extends along a second direction different from the first direction. The capacitor dielectric includes a first surface and a second surface which are disposed on two opposite sides along the first direction. The second surface is exposed by the first capacitor electrode. The first supporting layer is disposed between the first surface and the second surface of the capacitor dielectric.Type: ApplicationFiled: October 24, 2022Publication date: April 25, 2024Inventors: SHIH-FAN KUAN, WEI-CHEN PAN, YU-TING LIN, HUEI-RU LIN
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Publication number: 20240138139Abstract: A semiconductor device and a method of manufacturing the same are provided. The semiconductor device includes a substrate, a plurality of capacitors, and a first supporting layer. The plurality of capacitors are disposed on the substrate. Each of the capacitors extends along a first direction. Each of the plurality of capacitors includes a first capacitor electrode, a second capacitor electrode, and a capacitor dielectric separating the first capacitor electrode from the second capacitor electrode. The first supporting layer is disposed on the substrate. The first supporting layer extends along a second direction different from the first direction. The capacitor dielectric includes a first surface and a second surface which are disposed on two opposite sides along the first direction. The second surface is exposed by the first capacitor electrode. The first supporting layer is disposed between the first surface and the second surface of the capacitor dielectric.Type: ApplicationFiled: July 17, 2023Publication date: April 25, 2024Inventors: SHIH-FAN KUAN, WEI-CHEN PAN, YU-TING LIN, HUEI-RU LIN
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Patent number: 11961763Abstract: Devices and methods that a first gate structure wrapping around a channel layer disposed over the substrate, a second gate structure wrapping around another channel layer disposed over the substrate and a dielectric fin structure formed over a shallow trench isolation (STI) feature and between the first and second gate structures. At least one metallization layer is formed on the first gate structure, the dielectric fin structure, and the second gate structure and contiguously extends from the first gate structure to the second gate structure.Type: GrantFiled: April 7, 2021Date of Patent: April 16, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Jia-Chuan You, Kuan-Ting Pan, Shi Ning Ju, Kuo-Cheng Chiang, Chih-Hao Wang
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Publication number: 20240113214Abstract: Semiconductor structures and methods for manufacturing the same are provided. The semiconductor structure includes a first channel member suspended over a substrate and a second channel member suspended over the first channel member and spaced apart from the first channel member along a first direction. The semiconductor structure also includes a gate structure wrapping around the first channel member and the second channel member and a dielectric structure encircled by the first channel member, the second channel member, the gate structure, and the source/drain structure. In addition, the dielectric structure includes a porous material or an air gap. The semiconductor structure also includes a first epitaxial layer attached to the first channel member, and the first epitaxial layer has a first extending portion protruding from a bottom surface of the first channel member along the first direction and extending into the dielectric structure.Type: ApplicationFiled: March 3, 2023Publication date: April 4, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Che-Lun Chang, Kuan-Ting Pan, Wei-Yang Lee
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Publication number: 20240112959Abstract: A method of fabricating a device includes forming a dummy gate over a plurality of fins. Thereafter, a first portion of the dummy gate is removed to form a first trench that exposes a first hybrid fin and a first part of a second hybrid fin. The method further includes filling the first trench with a dielectric material disposed over the first hybrid fin and over the first part of the second hybrid fin. Thereafter, a second portion of the dummy gate is removed to form a second trench and the second trench is filled with a metal layer. The method further includes etching-back the metal layer, where a first plane defined by a first top surface of the metal layer is disposed beneath a second plane defined by a second top surface of a second part of the second hybrid fin after the etching-back the metal layer.Type: ApplicationFiled: December 1, 2023Publication date: April 4, 2024Inventors: Kuan-Ting PAN, Zhi-Chang LIN, Yi-Ruei JHAN, Chi-Hao WANG, Huan-Chieh SU, Shi Ning JU, Kuo-Cheng CHIANG
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Patent number: 11948973Abstract: A method of forming a semiconductor device includes forming semiconductor strips protruding above a substrate and isolation regions between the semiconductor strips; forming hybrid fins on the isolation regions, the hybrid fins comprising dielectric fins and dielectric structures over the dielectric fins; forming a dummy gate structure over the semiconductor strip; forming source/drain regions over the semiconductor strips and on opposing sides of the dummy gate structure; forming nanowires under the dummy gate structure, where the nanowires are over and aligned with respective semiconductor strips, and the source/drain regions are at opposing ends of the nanowires, where the hybrid fins extend further from the substrate than the nanowires; after forming the nanowires, reducing widths of center portions of the hybrid fins while keeping widths of end portions of the hybrid fins unchanged, and forming an electrically conductive material around the nanowires.Type: GrantFiled: August 16, 2021Date of Patent: April 2, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kuo-Cheng Chiang, Huan-Chieh Su, Shi Ning Ju, Kuan-Ting Pan, Chih-Hao Wang
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Publication number: 20240105806Abstract: Semiconductor structures and methods of forming the same are provided. In an embodiment, an exemplary semiconductor structure includes a vertical stack of channel members disposed over a substrate, a gate structure wrapping around each channel member of the vertical stack of channel members, a source/drain feature coupled to the vertical stack of channel members and adjacent the gate structure; and a dielectric feature disposed between the source/drain feature and the substrate, in a cross-sectional view, the dielectric feature includes a V-shape sidewall surface.Type: ApplicationFiled: March 9, 2023Publication date: March 28, 2024Inventors: Che-Lun Chang, Kuan-Ting Pan, Wei-Yang Lee
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Publication number: 20240101956Abstract: The present disclosure discloses a novel strain of Glutamicibacter, derived from insects, which efficiently degrades bifenthrin, belonging to the field of microbial strains. The Glutamicibacter CCTCC NO: M20221445 of the present disclosure was isolated from the intestinal tract of bifenthrin-resistant Ectropis grisescens Warren larvae. It exhibits unique genomic characteristics, growth and phenotypic traits, physiological and biochemical characteristics, as well as the ability to utilize and degrade bifenthrin efficiently. Specifically, it can effectively degrade bifenthrin. Based on phenotypic features, physiological and biochemical characteristics, chemical composition, and molecular biology-based polyphasic classification, Glutamicibacter CCTCC NO: M20221445 is identified as a new species. This bacterium possesses the capability to efficiently degrade bifenthrin, laying the foundation for biological control of E. grisecens and offering new microbial resources to address pesticide residue problems.Type: ApplicationFiled: December 1, 2023Publication date: March 28, 2024Inventors: Yanhua LONG, Xiayu Li, Ting Fang, Hao Gui, Meiqi Wang, Haiyue Wang, Yanru Bao, Anqi Shi, Yuhan Pan, Linlin Zhou, Xiaochun Wan, Yunqiu Yang
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Patent number: 11929287Abstract: The present disclosure describes a semiconductor structure with a dielectric liner. The semiconductor structure includes a substrate and a fin structure on the substrate. The fin structure includes a stacked fin structure, a fin bottom portion below the stacked fin structure, and an isolation layer between the stacked fin structure and the bottom fin portion. The semiconductor structure further includes a dielectric liner in contact with an end of the stacked fin structure and a spacer structure in contact with the dielectric liner.Type: GrantFiled: April 23, 2021Date of Patent: March 12, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Zhi-Chang Lin, Shih-Cheng Chen, Kuo-Cheng Chiang, Kuan-Ting Pan, Jung-Hung Chang, Lo-Heng Chang, Chien Ning Yao
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Publication number: 20240072147Abstract: A semiconductor device includes a substrate, a shallow trench isolation structure, two epitaxial structures, one or more semiconductor channel layers, a gate metal layer and a gate spacer. The shallow trench isolation structure is disposed over the substrate. The epitaxial structures are disposed over the shallow trench isolation structure. The one or more semiconductor channel layers connect the two epitaxial structures. The gate metal layer is located between the epitaxial structures and engages the one or more semiconductor channel layers. The gate spacer is in contact with a sidewall of the gate metal layer. From a cross-section view, a neck portion of the gate metal layer adjacent to and along the one or more semiconductor channel layers, and one side of the neck portion is retracted by a distance relative to the gate spacer, and the distance is greater than 0 and less than or equal to 2 nanometers.Type: ApplicationFiled: August 28, 2022Publication date: February 29, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kuan-Ting Pan, Kuo-Cheng Chiang, Chih-Hao Wang
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Patent number: 11916122Abstract: A method for forming a gate all around transistor includes forming a plurality of semiconductor nanosheets. The method includes forming a cladding inner spacer between a source region of the transistor and a gate region of the transistor. The method includes forming sheet inner spacers between the semiconductor nanosheets in a separate deposition process from the cladding inner spacer.Type: GrantFiled: July 8, 2021Date of Patent: February 27, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Zhi-Chang Lin, Kuan-Ting Pan, Shih-Cheng Chen, Jung-Hung Chang, Lo-Heng Chang, Chien-Ning Yao, Kuo-Cheng Chiang
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Publication number: 20240055479Abstract: A method for manufacturing a semiconductor structure is provided. The method includes forming a fin structure protruding from a substrate, wherein the fin structure includes first semiconductor material layers and second semiconductor material layers alternately stacked. The method includes forming a dummy gate structure across the fin structure. The method includes forming a gate spacer on the sidewall of the dummy gate structure. The method includes removing the dummy gate structure to expose the fin structure. The method includes partially removing the second semiconductor material layers to form concave portions on sidewalls of the second semiconductor material layers. The method includes forming dielectric spacers in the concave portions. The method includes removing the first semiconductor material layers to form gaps. The method includes forming a gate structure in the gaps to wrap around the second semiconductor material layers and the dielectric spacers.Type: ApplicationFiled: August 12, 2022Publication date: February 15, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kuan-Ting PAN, Kuo-Cheng CHIANG, Shi-Ning JU, Yi-Ruei JHAN, Wei-Ting WANG, Chih-Hao WANG
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Publication number: 20240038901Abstract: A device includes: a first stack of nanostructures; a second stack of nanostructures horizontally offset from the first stack; a first source/drain region abutting the first stack of nanostructures; a second source/drain region abutting the second stack of nanostructures; a wall structure between the first and second stacks and spaced apart from the nanostructures of the first stack; and a first gate structure, which includes: a gate dielectric layer that wraps around the nanostructures of the first stack; and a conductive core layer on the gate dielectric layer, wherein thickness of the conductive core layer between one of the nanostructure of the first stack and the wall structure is in a range of 0 nanometers to 1 nanometer, inclusive.Type: ApplicationFiled: February 16, 2023Publication date: February 1, 2024Inventors: Kuan-Ting PAN, Kuo-Cheng CHIANG, Shi Ning JU, Chih-Hao WANG
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Publication number: 20240030066Abstract: Devices and methods that a first gate structure wrapping around a channel layer disposed over the substrate, a second gate structure wrapping around another channel layer disposed over the substrate and a dielectric fin structure formed over a shallow trench isolation (STI) feature and between the first and second gate structures. At least one metallization layer is formed on the first gate structure, the dielectric fin structure, and the second gate structure and contiguously extends from the first gate structure to the second gate structure.Type: ApplicationFiled: August 7, 2023Publication date: January 25, 2024Inventors: Jia-Chuan You, Kuan-Ting Pan, Shi Ning Ju, Kuo-Cheng Chiang, Chia-Hao Wang
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Publication number: 20230416720Abstract: The present disclosure provides a chitosan-modified opto-hydrodynamic micromotor and a preparation method and use thereof, and belongs to the technical field of micromotors. The chitosan-modified opto-hydrodynamic micromotor provided by the present disclosure is composed of Phaeodactylum tricornutum Bohlin and a chitosan solution. The chitosan-modified opto-hydrodynamic micromotor provided by the present disclosure has high biocompatibility, can non-invasively remove biological threats in a microenvironment containing cells with a sterilization rate reaching about 98%, and can achieve high-efficiency sterilization without affecting cell viability.Type: ApplicationFiled: September 20, 2022Publication date: December 28, 2023Applicant: Jinan UniversityInventors: Hongbao Xin, Baojun Li, Jianyun Xiong, Yang Shi, Ting Pan
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Publication number: 20230420532Abstract: A method of manufacturing an integrated circuit device is provided. The method includes forming a semiconductor fin over a semiconductor substrate; forming an isolation structure surrounding the semiconductor fin; etching a trench in the semiconductor fin; forming a dielectric fin in the trench; after forming the dielectric fin, recessing a top surface of the isolation structure, such that the dielectric fin and the semiconductor fin protrude from the recessed top surface of the isolation structure; and forming a first metal gate structure and a second metal gate structure over the dielectric fin and the semiconductor fin, respectively.Type: ApplicationFiled: June 27, 2022Publication date: December 28, 2023Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yi-Ruei JHAN, Kuan-Ting PAN, Wei Ting WANG, Shi Ning JU, Kuo-Cheng CHIANG, Chih-Hao WANG
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Patent number: 11854908Abstract: A method of fabricating a device includes forming a dummy gate over a plurality of fins. Thereafter, a first portion of the dummy gate is removed to form a first trench that exposes a first hybrid fin and a first part of a second hybrid fin. The method further includes filling the first trench with a dielectric material disposed over the first hybrid fin and over the first part of the second hybrid fin. Thereafter, a second portion of the dummy gate is removed to form a second trench and the second trench is filled with a metal layer. The method further includes etching-back the metal layer, where a first plane defined by a first top surface of the metal layer is disposed beneath a second plane defined by a second top surface of a second part of the second hybrid fin after the etching-back the metal layer.Type: GrantFiled: May 9, 2022Date of Patent: December 26, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Kuan-Ting Pan, Huan-Chieh Su, Zhi-Chang Lin, Shi Ning Ju, Yi-Ruei Jhan, Kuo-Cheng Chiang, Chih-Hao Wang
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Publication number: 20230411481Abstract: In a method of manufacturing a semiconductor device, a fin structure in which first semiconductor layers and second semiconductor layers are alternately stacked is formed over a substrate, a sacrificial gate structure is formed over the fin structure, a source/drain region of the fin structure is etched thereby forming a source/drain space, ends of the first semiconductor layers is laterally etched, an insulating layer is formed on a sidewall of the source/drain space, the insulating layer is partially etched, thereby forming one or more inner spacers on an etched end face of each of one or more first semiconductor layers and leaving a part of the insulating layer as a remaining insulating layer, and a source/drain epitaxial layer is formed in the source/drain space. After the source/drain epitaxial layer is formed, an end face of at least one of the second semiconductor layers is covered by the remaining insulating layer.Type: ApplicationFiled: June 16, 2022Publication date: December 21, 2023Inventors: Che-Lun CHANG, Kuan-Ting PAN, Wei-Yang LEE, Chia-Pin LIN
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Publication number: 20230411499Abstract: A semiconductor structure includes a plurality of fin structures extending along a first direction, a plurality of gate structure segments positioned along a line extending in a second direction, the second direction being orthogonal to the first direction, wherein the gate structure segments are separated by dummy fin structures. The semiconductor structure further includes a conductive layer disposed over both the gate structure segments and the dummy fin structures to electrically connect at least some of the gate structure segments, and a cut feature aligned with one of the dummy fin structures and positioned to electrically isolate gate structure segments on both sides of the one of the dummy fin structures.Type: ApplicationFiled: July 28, 2023Publication date: December 21, 2023Inventors: Kuan-Ting Pan, Huan-Chieh Su, Jia-Chuan You, Shi Ning Ju, Kuo-Cheng Chiang, Yi-Ruei Jhan, Li-Yang Chuang, Chih-Hao Wang
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Publication number: 20230402509Abstract: In an embodiment, a device includes: an isolation region on a substrate; first nanostructures above the isolation region; second nanostructures above the isolation region; a first gate spacer on the first nanostructures; a second gate spacer on the second nanostructures; a dielectric wall between the first gate spacer and the second gate spacer along a first direction in a top-down view, the dielectric wall disposed between the first nanostructures and the second nanostructures along a second direction in the top-down view, the first direction perpendicular to the second direction; and a gate structure around the first nanostructures and around the second nanostructures, a first portion of the gate structure filling a first area between the dielectric wall and the first nanostructures, a second portion of the gate structure filling a second area between the dielectric wall and the second nanostructures.Type: ApplicationFiled: January 5, 2023Publication date: December 14, 2023Inventors: Chung-Wei Hsu, Kuan-Ting Pan, Lung-Kun Chu, Kuo-Cheng Chiang, Chih-Hao Wang, Jia-Ni Yu