Patents by Inventor Ting PAN

Ting PAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12272690
    Abstract: Self-aligned gate cutting techniques are disclosed herein that provide dielectric gate isolation fins for isolating gates of multigate devices from one another. An exemplary device includes a first multigate device having first source/drain features and a first metal gate that surrounds a first channel layer and a second multigate device having second source/drain features and a second metal gate that surrounds a second channel layer. A dielectric gate isolation fin separates the first metal gate from the second metal gate. The dielectric gate isolation fin includes a first dielectric layer having a first dielectric constant and a second dielectric layer having a second dielectric constant disposed over the first dielectric layer. The second dielectric constant is greater than the first dielectric constant. The first metal gate and the second metal gate physically contact the first channel layer and the second channel layer, respectively, and the dielectric gate isolation fin.
    Type: Grant
    Filed: March 27, 2023
    Date of Patent: April 8, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shi Ning Ju, Zhi-Chang Lin, Shih-Cheng Chen, Chih-Hao Wang, Kuo-Cheng Chiang, Kuan-Ting Pan
  • Publication number: 20250113602
    Abstract: A device includes a substrate, a first semiconductor channel over the substrate, and a second semiconductor channel over the substrate laterally offset from the first semiconductor channel. A first gate structure and a second gate structure are over and laterally surround the first and second semiconductor channels, respectively. A first inactive fin is between the first gate structure and the second gate structure. A dielectric feature over the inactive fin includes multiple layers of dielectric material formed through alternating deposition and etching steps.
    Type: Application
    Filed: December 12, 2024
    Publication date: April 3, 2025
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yi-Ruei JHAN, Chih-Hao WANG, Kuo-Cheng CHIANG, Kuan-Lun CHENG, Kuan-Ting PAN
  • Publication number: 20250081594
    Abstract: A semiconductor device structure, along with methods of forming such, are described. The structure includes a first and second gate electrode layers, and a dielectric feature disposed between the first and second gate electrode layers. The dielectric feature has a first surface. The structure further includes a first conductive layer disposed on the first gate electrode layer. The first conductive layer has a second surface. The structure further includes a second conductive layer disposed on the second gate electrode layer. The second conductive layer has a third surface, and the first, second, and third surfaces are coplanar. The structure further includes a third conductive layer disposed over the first conductive layer, a fourth conductive layer disposed over the second conductive layer, and a dielectric layer disposed on the first surface of the dielectric feature. The dielectric layer is disposed between the third conductive layer and the fourth conductive layer.
    Type: Application
    Filed: November 20, 2024
    Publication date: March 6, 2025
    Inventors: Kuan-Ting PAN, Kuo-Cheng CHIANG, Shang-Wen CHANG, Ching-Wei TSAI, Kuan-Lun CHENG, Chih-Hao WANG
  • Publication number: 20250072054
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes multiple first semiconductor nanostructures over a substrate and multiple second semiconductor nanostructures over the substrate. The semiconductor device structure also includes a dielectric structure between the first semiconductor nanostructures and the second semiconductor nanostructures. The semiconductor device structure further includes a metal gate stack wrapped around the first semiconductor nanostructures and the second semiconductor nanostructures. The metal gate stack has a gate dielectric layer and a gate electrode. The gate dielectric layer extends along a sidewall of a lower portion of the dielectric structure. A topmost surface of the gate dielectric layer is between a topmost surface of the first semiconductor nanostructures and a topmost surface of the dielectric structure.
    Type: Application
    Filed: November 8, 2024
    Publication date: February 27, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuo-Cheng CHIANG, Huan-Chieh SU, Kuan-Ting PAN, Shi-Ning JU, Chih-Hao WANG
  • Patent number: 12237405
    Abstract: A method includes forming a plurality of fin structures extending along a first direction. The method includes forming a dummy fin structure disposed between two adjacent fin structures. The dummy fin structure also extends along the first direction and includes a deformable layer. The method includes recessing portions of each fin structure. The method includes forming source/drain structures over the recessed fin structures. The method includes deforming the deformable layer of the dummy fin structure to apply either a tensile stress or a compressive stress on the source/drain structures coupled to each of the two adjacent fin structures.
    Type: Grant
    Filed: July 26, 2022
    Date of Patent: February 25, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yi-Ruei Jhan, Kuan-Ting Pan, Kuo-Cheng Chiang, Kuan-Lun Cheng, Chih-Hao Wang
  • Publication number: 20250061005
    Abstract: A method for dynamic adaptive threading is provided. The method comprises receiving a query request for a recommended number of threads from an application. The method comprises determining the recommended number of threads according to a resource status of a system-on-a-chip (SoC) platform. The method comprises transmitting the recommended number of threads to the application.
    Type: Application
    Filed: August 15, 2024
    Publication date: February 20, 2025
    Inventors: Chung-Yang CHEN, Cheng-Che CHEN, Chung-Hao HO, Yi-Wei HO, Yen-Po CHIEN, Yen-Ting PAN
  • Publication number: 20250063779
    Abstract: Provided are devices and methods for forming devices. An exemplary method includes etching a cavity in a vertical direction into a fin structure including at least one semiconductor nanosheet overlying a sacrificial layer, wherein the cavity is formed with a sidewall; recessing the sacrificial layer by a lateral distance to a recessed surface; forming an inner spacer laterally adjacent to the recessed surface of the sacrificial layer, wherein the inner spacer has a lateral width greater than the lateral distance; and growing epitaxial material in the cavity to form a source/drain region laterally adjacent to the inner spacer.
    Type: Application
    Filed: August 14, 2023
    Publication date: February 20, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Che-Lun Chang, Kuan-Ting Pan
  • Publication number: 20250063808
    Abstract: A semiconductor structure includes a first dielectric wall over a substrate, and two metal gate structures disposed at two sides of the first dielectric wall. Each of the metal gate structures includes a plurality of nanosheets stacked over the substrate and separated from each other, a high-k gate dielectric layer covering each of the nanosheets, and a metal layer covering and over the plurality of nanosheets and the high-k gate dielectric layer. The high-k gate dielectric layer of each metal gate structure is disposed between the metal layer of each metal gate structure and the first dielectric wall.
    Type: Application
    Filed: August 17, 2023
    Publication date: February 20, 2025
    Inventors: KUAN-TING PAN, JIA-CHUAN YOU, CHIA-HAO CHANG, KUO-CHENG CHIANG, CHIH-HAO WANG
  • Publication number: 20250040187
    Abstract: Various embodiments of the present disclosure provide a semiconductor device structure. In one embodiment, the semiconductor device structure includes a dielectric wall disposed over a substrate, first and second metal gate structure portions respectively disposed at either side of the dielectric wall. Each first and second metal gate structure portion includes a plurality of semiconductor layers vertically stacked and separated from each other, a high-K (HK) dielectric layer disposed to surround at least three surfaces of each of the semiconductor layers, and a gate electrode layer disposed between two neighboring semiconductor layers. The semiconductor device structure also includes a metal layer disposed on two opposing sidewalls of the dielectric wall.
    Type: Application
    Filed: December 4, 2023
    Publication date: January 30, 2025
    Inventors: Chia-Hao CHANG, Kuan-Ting PAN, Jia-Chuan YOU, Kuo-Cheng CHIANG, Chih-Hao WANG
  • Publication number: 20250039007
    Abstract: Web conferencing is enhanced with conversation groups having individual group volume controls. Multiple conversations are perceived by participants, the conversations having varied microphone volume levels that allows a participant to engage in one conversation group while, at the same time, listening in on other simultaneous conversations having a relatively lower volume setting. A user interface provides for user-selection of conversation groups in which to participate. Group conversations are established according to conditional rules related to number of participants and time lapse between mentions of a particular topic and/or multiple comments by a one participant responsive to another participant.
    Type: Application
    Filed: July 25, 2023
    Publication date: January 30, 2025
    Inventors: Angelo Danducci, II, Mohamad O. Mohamad, Ting Pan, Emanuel Vargas
  • Publication number: 20250025497
    Abstract: Use of phosphorus-based material in preparation of medicament for treating tumors. The phosphorus-based material is selected from a material which is convertible to produce phosphate ions in an acidic environment, and the phosphorus-based material can be converted by tumor cells phagocytosis to produce a large number of phosphate ions to change the intraceullar environment and extracellular environment, thereby inhibiting proliferation of tumor cells and inducing death of tumor cells. This process has no significant effect on normal cell activities. By applying the phosphorus-based material to the preparation of a medicament for treating tumor in a manner as mentioned above, the amplification and metastasis of tumor cells can be effectively inhibited, thereby the metastasis of the tumor cells and recurrence of the tumor can be prevented more effectively, improving the therapeutic effect of the tumor. The phosphorus-based material has little effect on normal cells and tissues in the course of treatment.
    Type: Application
    Filed: October 9, 2024
    Publication date: January 23, 2025
    Applicant: SHENZHEN INSTITUTES OF ADVANCED TECHNOLOGY, CHINESE ACADEMY OF SCIENCES
    Inventors: Xuefeng YU, Wenhua ZHOU, Ting PAN, Haodong CUI
  • Publication number: 20250023255
    Abstract: A method of forming first and second fin field effect transistors (finFETs) on a substrate includes forming first and second fin structures of the first and second finFETs, respectively, on the substrate and forming first and second oxide regions having first and second thicknesses on top surfaces of the first and second fin structures, respectively. The method further includes forming third and fourth oxide regions having third and fourth thicknesses on sidewalls on the first and second fin structures, respectively. The first and second thicknesses are greater than the third and fourth thicknesses, respectively. The method further includes forming a first polysilicon structure on the first and third oxide regions and forming a second polysilicon structure on the second and fourth oxide regions.
    Type: Application
    Filed: June 17, 2024
    Publication date: January 16, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuo-Cheng CHIANG, Chih-Hao Wang, Kuan-Ting Pan
  • Patent number: 12199097
    Abstract: A device includes a substrate, a first semiconductor channel over the substrate, and a second semiconductor channel over the substrate laterally offset from the first semiconductor channel. A first gate structure and a second gate structure are over and laterally surround the first and second semiconductor channels, respectively. A first inactive fin is between the first gate structure and the second gate structure. A dielectric feature over the inactive fin includes multiple layers of dielectric material formed through alternating deposition and etching steps.
    Type: Grant
    Filed: September 22, 2021
    Date of Patent: January 14, 2025
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yi-Ruei Jhan, Kuan-Ting Pan, Kuo-Cheng Chiang, Kuan-Lun Cheng, Chih-Hao Wang
  • Publication number: 20240429278
    Abstract: A semiconductor device includes a semiconductor substrate, a first semiconductor structure, a second semiconductor structure, a third semiconductor structure, a dielectric wall, and a first isolation feature. The first semiconductor structure, the second semiconductor structure and the third semiconductor structure are disposed on the semiconductor substrate. The first semiconductor structure is disposed between the second semiconductor structure and the third semiconductor structure. The dielectric wall is disposed on the semiconductor substrate and is connected between the first semiconductor structure and the second semiconductor structure. The first isolation feature is disposed between the first semiconductor structure and the third semiconductor structure, and extends into the semiconductor substrate.
    Type: Application
    Filed: June 20, 2023
    Publication date: December 26, 2024
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kuan-Ting PAN, Kuo-Cheng CHIANG, Chih-Hao WANG
  • Publication number: 20240421185
    Abstract: A device includes a substrate, a first semiconductor fin over the substrate extending in a first lateral direction, a first vertical stack of semiconductor nanosheets over the substrate extending in the first lateral direction, and an inactive fin between the first semiconductor fin and the first vertical stack extending in the first lateral direction. A first gate structure surrounds and covers the first semiconductor fin, and extends in a second lateral direction substantially perpendicular to the first lateral direction. A second gate structure surrounds and covers the first vertical stack, and extends in the second lateral direction.
    Type: Application
    Filed: July 26, 2024
    Publication date: December 19, 2024
    Inventors: Kuan-Ting PAN, Kuo-Cheng CHIANG, Shi-Ning JU, Yi-Ruei JHAN, Yen-Ming CHEN, Chih-Hao WANG
  • Patent number: 12165926
    Abstract: A semiconductor device structure, along with methods of forming such, are described. The structure includes a first and second gate electrode layers, and a dielectric feature disposed between the first and second gate electrode layers. The dielectric feature has a first surface. The structure further includes a first conductive layer disposed on the first gate electrode layer. The first conductive layer has a second surface. The structure further includes a second conductive layer disposed on the second gate electrode layer. The second conductive layer has a third surface, and the first, second, and third surfaces are coplanar. The structure further includes a third conductive layer disposed over the first conductive layer, a fourth conductive layer disposed over the second conductive layer, and a dielectric layer disposed on the first surface of the dielectric feature. The dielectric layer is disposed between the third conductive layer and the fourth conductive layer.
    Type: Grant
    Filed: July 20, 2023
    Date of Patent: December 10, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kuan-Ting Pan, Kuo-Cheng Chiang, Shang-Wen Chang, Ching-Wei Tsai, Kuan-Lun Cheng, Chih-Hao Wang
  • Publication number: 20240405021
    Abstract: A device includes first nanostructures over a substrate; second nanostructures over the substrate, wherein the first nanostructures are laterally separated from the second nanostructures by an isolation structure between the first nanostructures and the second nanostructures; a first gate structure around each first nanostructure and around each second nanostructure, wherein the first gate structure extends over the isolation structure; third nanostructures over the substrate; and a second gate structure around each third nanostructure, wherein the second gate structure is separated from the first gate structure by a dielectric wall.
    Type: Application
    Filed: September 15, 2023
    Publication date: December 5, 2024
    Inventors: Kuan-Ting Pan, Chia-Hao Chang, Jia-Chuan You, Kuo-Cheng Chiang, Chih-Hao Wang
  • Patent number: 12158385
    Abstract: An anti-overload torque sensor based on thin film sputtering includes an output cable, a circuit board, a cushion column, a shell, an elastic body, strain beams and thin film strain gauges. The elastic body is sequentially divided into an inner edge section, a mounting ring section and an outer edge section from inside to outside, and the mounting ring section is provided with integrally formed rectangular protrusions as the strain beams. The shell is coaxially installed on the mounting ring section of the elastic body. Strain resistors of the thin film strain gauges are sputtered on the strain beams of the elastic body by the sputtering coating technology.
    Type: Grant
    Filed: April 5, 2022
    Date of Patent: December 3, 2024
    Assignee: Shaanxi Electric Appliance Research Institute
    Inventors: Xin Jiang, Bo Gao, Wenxuan Qu, Ting Pan, Lu Lin
  • Publication number: 20240395888
    Abstract: Semiconductor structures and methods for manufacturing the same are provided. The semiconductor structure includes a substrate and first nanostructures and second nanostructures formed over the substrate. The semiconductor structure also includes a gate structure including a first portion wrapping around the first nanostructures and a second portion wrapping around the second nanostructures. The semiconductor structure also includes a dielectric feature sandwiched between the first portion and the second portion of the gate structure. In addition, the dielectric feature includes a bottom portion and a top portion over the bottom portion, and the top portion of the dielectric feature includes a shell layer and a core portion surrounded by the shell layer.
    Type: Application
    Filed: July 30, 2024
    Publication date: November 28, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuan-Ting PAN, Kuo-Cheng CHIANG, Yi-Ruei JHAN, Shi-Ning JU, Chih-Hao WANG
  • Publication number: 20240395880
    Abstract: A method of making a semiconductor device includes manufacturing an active area fin extending in a first direction over a substrate, wherein the active area fin comprises a source region, a drain region, and a channel region between the source region and the drain region. The method includes manufacturing an isolation structure next to the active area fin. The method includes manufacturing isolating fins next to the active area fin and over the isolation structure. The method includes trimming the isolating fins in first fin regions adjacent to the channel regions of the active area fin. The method includes depositing a gate electrode material against the first fin region and the gate dielectric in the channel region.
    Type: Application
    Filed: July 31, 2024
    Publication date: November 28, 2024
    Inventors: Jia-Chuan YOU, Kuan-Ting PAN, Shi Ning JU, Kuo-Cheng CHIANG, Chih-Hao WANG