Abstract: In a container for transporting a reticle during a semiconductor manufacturing process, the reticle including a base made of isolating material and a metallic layer deposited onto a surface of the base, disclosed is a method for isolating and removing environmental contaminants which includes filling the container with inert gas, thereby purging the environmental contaminants, as well as inlet and outlet features to allow for the purging of clean inert gas and impurities.

Abstract: A method and system is disclosed for reducing and monitoring precipitated defects on mask reticles. A predetermined gas is provided into an environment surrounding the reticle assembly for reducing a formation of the precipitated defects around the mask reticle caused by photolithography under a light source having a small wavelength.

Abstract: A Bluetooth network topology. The Bluetooth network system includes a plurality of piconets, containing a plurality of Bluetooth units, including one master unit and a plurality of slave units. These piconets are linked by the bridge units to form a scatternet ring. The scatternet ring is formed by a centralized forming mechanism, operated by a simple yet efficient routing protocol and maintained by recovery and extension mechanisms.