Patents by Inventor Tohru Kiuchi

Tohru Kiuchi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11342206
    Abstract: A substrate case includes a shaft portion around which a sheet-shaped substrate having a circuit area in which a circuit manufacturing process is performed is wound; and a cover portion that accommodates the substrate in the state of being wound around the shaft portion, the shaft portion having a holding portion that holds an area different from the circuit area at a winding start portion of the substrate.
    Type: Grant
    Filed: December 12, 2019
    Date of Patent: May 24, 2022
    Assignee: Nikon Corporation
    Inventors: Hideo Mizutani, Tohru Kiuchi, Toru Kawaguchi, Takashi Masukawa
  • Publication number: 20220082458
    Abstract: A flexible sensor includes a substrate having flexibility; and a sensor element provided on the substrate, wherein the sensor element includes a transistor having a gate electrode, a source electrode, and a drain electrode; and a variable resistance portion connected to either of the gate electrode, the source electrode, and the drain electrode, and the variable resistance portion has a resistance value changeable due to a strain, and wherein the variable resistance portion includes an extension portion extending in a direction.
    Type: Application
    Filed: November 23, 2021
    Publication date: March 17, 2022
    Applicant: NIKON CORPORATION
    Inventors: Shohei KOIZUMI, Yoshiaki KITO, Takachika SHIMOYAMA, Katsuhiro HATAYAMA, Kentaro YAMADA, Tohru KIUCHI, Yasuteru FUKAWA
  • Patent number: 11073767
    Abstract: A pattern forming apparatus comprising: a rotary drum that includes a cylindrical outer circumferential surface which is curved at a predetermined radius from a predetermined center line, that rotates about the center line in a state in which a part of a sheet substrate is supported in a length direction of the sheet substrate along the outer circumferential surface; a pattern forming part that forms the pattern on the sheet substrate at a first specific position; a scale disk that is fixed to an end portion of the rotary drum in a direction in which the center line extends while being coaxial with the center line and that includes a circular scale; and a first reading mechanism that is arranged to oppose with the scale formed at the outer circumferential surface of the scale disk, that is arranged at substantially same azimuth as an azimuth.
    Type: Grant
    Filed: May 20, 2020
    Date of Patent: July 27, 2021
    Assignee: Nikon Corporation
    Inventors: Masaki Kato, Tohru Kiuchi
  • Publication number: 20200310253
    Abstract: A pattern forming apparatus comprising: a rotary drum that includes a cylindrical outer circumferential surface which is curved at a predetermined radius from a predetermined center line, that rotates about the center line in a state in which a part of a sheet substrate is supported in a length direction of the sheet substrate along the outer circumferential surface; a pattern forming part that forms the pattern on the sheet substrate at a first specific position; a scale disk that is fixed to an end portion of the rotary drum in a direction in which the center line extends while being coaxial with the center line and that includes a circular scale; and a first reading mechanism that is arranged to oppose with the scale formed at the outer circumferential surface of the scale disk, that is arranged at substantially same azimuth as an azimuth.
    Type: Application
    Filed: May 20, 2020
    Publication date: October 1, 2020
    Applicant: NIKON CORPORATION
    Inventors: Masaki KATO, Tohru KIUCHI
  • Patent number: 10691027
    Abstract: A pattern forming apparatus comprising: a rotary drum that includes a cylindrical outer circumferential surface which is curved at a predetermined radius from a predetermined center line, that rotates about the center line in a state in which a part of a sheet substrate is supported in a length direction of the sheet substrate along the outer circumferential surface; a pattern forming part that forms the pattern on the sheet substrate at a first specific position; a scale disk that is fixed to an end portion of the rotary drum in a direction in which the center line extends while being coaxial with the center line and that includes a circular scale; and a first reading mechanism that is arranged to oppose with the scale formed at the outer circumferential surface of the scale disk, that is arranged at substantially same azimuth as an azimuth.
    Type: Grant
    Filed: November 22, 2019
    Date of Patent: June 23, 2020
    Assignee: Nikon Corporation
    Inventors: Masaki Kato, Tohru Kiuchi
  • Publication number: 20200118847
    Abstract: A substrate case includes a shaft portion around which a sheet-shaped substrate having a circuit area in which a circuit manufacturing process is performed is wound; and a cover portion that accommodates the substrate in the state of being wound around the shaft portion, the shaft portion having a holding portion that holds an area different from the circuit area at a winding start portion of the substrate.
    Type: Application
    Filed: December 12, 2019
    Publication date: April 16, 2020
    Applicant: NIKON CORPORATION
    Inventors: Hideo MIZUTANI, Tohru KIUCHI, Toru KAWAGUCHI, Takashi MASUKAWA
  • Publication number: 20200089129
    Abstract: A pattern forming apparatus comprising: a rotary drum that includes a cylindrical outer circumferential surface which is curved at a predetermined radius from a predetermined center line, that rotates about the center line in a state in which a part of a sheet substrate is supported in a length direction of the sheet substrate along the outer circumferential surface; a pattern forming part that forms the pattern on the sheet substrate at a first specific position; a scale disk that is fixed to an end portion of the rotary drum in a direction in which the center line extends while being coaxial with the center line and that includes a circular scale; and a first reading mechanism that is arranged to oppose with the scale formed at the outer circumferential surface of the scale disk, that is arranged at substantially same azimuth as an azimuth.
    Type: Application
    Filed: November 22, 2019
    Publication date: March 19, 2020
    Applicant: NIKON CORPORATION
    Inventors: Masaki KATO, Tohru KIUCHI
  • Patent number: 10591827
    Abstract: A pattern exposure apparatus comprising: a rotary drum that supports a flexible substrate, which is exposed with a mask pattern formed on an outer circumferential surface of a cylindrical mask that rotates about a first center axis; a rotary drum-side scale portion that is arranged for measuring a movement of the substrate which is fed in a circumferential direction by a rotation of the rotary drum, that includes a scale; a first projection optical system that projects an exposure light; a second projection optical system that projects an exposure light; a first reading device that is arranged to oppose with the rotary drum-side scale portion and that reads the scale; and a second reading device that is arranged to oppose with the rotary drum-side scale portion and that reads the scale.
    Type: Grant
    Filed: September 24, 2018
    Date of Patent: March 17, 2020
    Assignee: Nikon Corporation
    Inventors: Masaki Kato, Tohru Kiuchi
  • Patent number: 10541160
    Abstract: A substrate case includes a shaft portion around which a sheet-shaped substrate having a circuit area in which a circuit manufacturing process is performed is wound; and a cover portion that accommodates the substrate in the state of being wound around the shaft portion, the shaft portion having a holding portion that holds an area different from the circuit area at a winding start portion of the substrate.
    Type: Grant
    Filed: December 22, 2010
    Date of Patent: January 21, 2020
    Assignee: Nikon Corporation
    Inventors: Hideo Mizutani, Tohru Kiuchi, Toru Kawaguchi, Takashi Masukawa
  • Patent number: 10527945
    Abstract: A pattern forming apparatus comprising: a rotary drum that includes a cylindrical outer circumferential surface which is curved at a predetermined radius from a predetermined center line, that rotates about the center line in a state in which a part of a sheet substrate is supported in a length direction of the sheet substrate along the outer circumferential surface; a pattern forming part that forms the pattern on the sheet substrate at a first specific position; a scale disk that is fixed to an end portion of the rotary drum in a direction in which the center line extends while being coaxial with the center line and that includes a circular scale; and a first reading mechanism that is arranged to oppose with the scale formed at the outer circumferential surface of the scale disk, that is arranged at substantially same azimuth as an azimuth.
    Type: Grant
    Filed: July 10, 2019
    Date of Patent: January 7, 2020
    Assignee: Nikon Corporation
    Inventors: Masaki Kato, Tohru Kiuchi
  • Publication number: 20190332018
    Abstract: A pattern forming apparatus comprising: a rotary drum that includes a cylindrical outer circumferential surface which is curved at a predetermined radius from a predetermined center line, that rotates about the center line in a state in which a part of a sheet substrate is supported in a length direction of the sheet substrate along the outer circumferential surface; a pattern forming part that forms the pattern on the sheet substrate at a first specific position; a scale disk that is fixed to an end portion of the rotary drum in a direction in which the center line extends while being coaxial with the center line and that includes a circular scale; and a first reading mechanism that is arranged to oppose with the scale formed at the outer circumferential surface of the scale disk, that is arranged at substantially same azimuth as an azimuth.
    Type: Application
    Filed: July 10, 2019
    Publication date: October 31, 2019
    Applicant: NIKON CORPORATION
    Inventors: Masaki KATO, Tohru KIUCHI
  • Publication number: 20190025713
    Abstract: A substrate processing apparatus includes: a rotary cylindrical member (DR) that includes a cylindrical supporting surface curved with a constant radius from a predetermined center line (AX2) and that feeds a substrate (P) in a length direction of the substrate; a processing mechanism that performs a predetermined process on the substrate at a specific position (PA, EL2) of a part of the substrate; a scale member (SD) that rotates about the center line along with the rotary cylindrical member so as to measure a displacement in a circumferential direction of the supporting surface of the rotary cylindrical member or a displacement in a direction of the center line of the rotary cylindrical member and that includes a scale portion (GP) carved in a ring shape; and a reading mechanism (EN1, EN2) that faces the scale portion, that is disposed in substantially a same direction as the specific position when viewed from the center line, and that reads the scale portion.
    Type: Application
    Filed: September 24, 2018
    Publication date: January 24, 2019
    Applicant: NIKON CORPORATION
    Inventors: Masaki KATO, Tohru KIUCHI
  • Patent number: 10156795
    Abstract: A substrate processing apparatus includes: a rotary cylindrical member (DR) that includes a cylindrical supporting surface curved with a constant radius from a predetermined center line (AX2) and that feeds a substrate (P) in a length direction of the substrate; a processing mechanism that performs a predetermined process on the substrate at a specific position (PA, EL2) of a part of the substrate; a scale member (SD) that rotates about the center line along with the rotary cylindrical member so as to measure a displacement in a circumferential direction of the supporting surface of the rotary cylindrical member or a displacement in a direction of the center line of the rotary cylindrical member and that includes a scale portion (GP) carved in a ring shape; and a reading mechanism (EN1, EN2) that faces the scale portion, that is disposed in substantially a same direction as the specific position when viewed from the center line, and that reads the scale portion.
    Type: Grant
    Filed: May 21, 2018
    Date of Patent: December 18, 2018
    Assignee: NIKON CORPORATION
    Inventors: Masaki Kato, Tohru Kiuchi
  • Publication number: 20180267413
    Abstract: A substrate processing apparatus includes: a rotary cylindrical member (DR) that includes a cylindrical supporting surface curved with a constant radius from a predetermined center line (AX2) and that feeds a substrate (P) in a length direction of the substrate; a processing mechanism that performs a predetermined process on the substrate at a specific position (PA, EL2) of a part of the substrate; a scale member (SD) that rotates about the center line along with the rotary cylindrical member so as to measure a displacement in a circumferential direction of the supporting surface of the rotary cylindrical member or a displacement in a direction of the center line of the rotary cylindrical member and that includes a scale portion (GP) carved in a ring shape; and a reading mechanism (EN1, EN2) that faces the scale portion, that is disposed in substantially a same direction as the specific position when viewed from the center line, and that reads the scale portion.
    Type: Application
    Filed: May 21, 2018
    Publication date: September 20, 2018
    Inventors: Masaki KATO, Tohru KIUCHI
  • Patent number: 10007190
    Abstract: A substrate processing apparatus includes: a rotary cylindrical member (DR) that includes a cylindrical supporting surface curved with a constant radius from a predetermined center line (AX2) and that feeds a substrate (P) in a length direction of the substrate; a processing mechanism that performs a predetermined process on the substrate at a specific position (PA, EL2) of a part of the substrate; a scale member (SD) that rotates about the center line along with the rotary cylindrical member so as to measure a displacement in a circumferential direction of the supporting surface of the rotary cylindrical member or a displacement in a direction of the center line of the rotary cylindrical member and that includes a scale portion (GP) carved in a ring shape; and a reading mechanism (EN1, EN2) that faces the scale portion, that is disposed in substantially a same direction as the specific position when viewed from the center line, and that reads the scale portion.
    Type: Grant
    Filed: February 21, 2017
    Date of Patent: June 26, 2018
    Assignee: NIKON CORPORATION
    Inventors: Masaki Kato, Tohru Kiuchi
  • Publication number: 20170168400
    Abstract: A substrate processing apparatus includes: a rotary cylindrical member (DR) that includes a cylindrical supporting surface curved with a constant radius from a predetermined center line (AX2) and that feeds a substrate (P) in a length direction of the substrate; a processing mechanism that performs a predetermined process on the substrate at a specific position (PA, EL2) of a part of the substrate; a scale member (SD) that rotates about the center line along with the rotary cylindrical member so as to measure a displacement in a circumferential direction of the supporting surface of the rotary cylindrical member or a displacement in a direction of the center line of the rotary cylindrical member and that includes a scale portion (GP) carved in a ring shape; and a reading mechanism (EN1, EN2) that faces the scale portion, that is disposed in substantially a same direction as the specific position when viewed from the center line, and that reads the scale portion.
    Type: Application
    Filed: February 21, 2017
    Publication date: June 15, 2017
    Applicant: NIKON CORPORATION
    Inventors: Masaki KATO, Tohru KIUCHI
  • Patent number: 9651868
    Abstract: A substrate processing apparatus includes: a rotary cylindrical member (DR) that includes a cylindrical supporting surface curved with a constant radius from a predetermined center line (AX2) and that feeds a substrate (P) in a length direction of the substrate; a processing mechanism that performs a predetermined process on the substrate at a specific position (PA, EL2) of a part of the substrate; a scale member (SD) that rotates about the center line along with the rotary cylindrical member so as to measure a displacement in a circumferential direction of the supporting surface of the rotary cylindrical member or a displacement in a direction of the center line of the rotary cylindrical member and that includes a scale portion (GP) carved in a ring shape; and a reading mechanism (EN1, EN2) that faces the scale portion, that is disposed in substantially a same direction as the specific position when viewed from the center line, and that reads the scale portion.
    Type: Grant
    Filed: March 8, 2013
    Date of Patent: May 16, 2017
    Assignee: NIKON CORPORATION
    Inventors: Masaki Kato, Tohru Kiuchi
  • Patent number: 9193560
    Abstract: A leader member includes a connection portion that is connected to a substrate and a position reference portion that is used at least for aligning the substrate with the connection portion.
    Type: Grant
    Filed: May 18, 2012
    Date of Patent: November 24, 2015
    Assignee: NIKON CORPORATION
    Inventors: Tomohide Hamada, Tohru Kiuchi
  • Patent number: 9178155
    Abstract: In a manufacturing apparatus of display element, a display element is formed in a flexible substrate that has a first surface and a second surface that is an opposite surface thereof, and this manufacturing apparatus of display element includes a transportation section that transports the flexible substrate in a predetermined direction that intersects with a width direction of the flexible substrate; a first partition wall formation section that forms a first partition wall for a display element in the first surface; and a second partition wall formation section that forms a second partition wall in the second surface.
    Type: Grant
    Filed: October 9, 2009
    Date of Patent: November 3, 2015
    Assignee: NIKON CORPORATION
    Inventors: Kei Nara, Tomohide Hamada, Masaki Kato, Tohru Kiuchi
  • Patent number: 9152062
    Abstract: Presented are methods for forming a predetermined pattern in a predetermined area of an elongated sheet material. The methods include applying a two-dimensional tension to a portion including the predetermined area of the sheet material, and allowing a flat reference surface to adsorb a rear surface portion corresponding to the predetermined area of the sheet material applied with the two-dimensional tension. The methods then illuminate an energy beam corresponding to the pattern to the predetermined area of the sheet material adsorbed to the reference surface.
    Type: Grant
    Filed: June 18, 2012
    Date of Patent: October 6, 2015
    Assignee: NIKON CORPORATION
    Inventors: Tohru Kiuchi, Hideo Mizutani