Abstract: When a product substrate passes a reference module which is an n-th module ahead of an inspection module in a transfer path, an inspection reservation signal for performing an inspection to a lot to which the product substrate belongs is outputted to the inspection module. When the inspection module is in trouble, the output of an inspection reservation signal for a product substrate is forbidden, and the product substrates to be transferred to the inspection module are transferred to a module which is next to the inspection module in a transfer order. When the trouble of the inspection module has been resolved and a substrate for confirmation inspection is preferentially transferred to the inspection module, an inspection reservation signal for the substrate for confirmation inspection is outputted, the substrate for confirmation inspection is transferred to the inspection module, and the confirmation inspection for the inspection module is performed.

Abstract: An object of the present invention is to control the discharge amount of unburned fuel components in the internal combustion engine. According the present invention, the number of times of execution of sub fuel injection is changed based on the operation range within which the operation state of the internal combustion engine falls so that the lower the engine load of the internal combustion engine is, and the lower the number of engine revolutions of the internal combustion engine is, the more the number of times of execution of sub fuel injection is increased. Furthermore, the lower the atmospheric pressure is, the lower the temperature of the cooling water of the internal combustion engine is, or the lower the temperature of the intake air of the internal combustion engine is, the more an operation range in which the number of times of execution of sub fuel injection is large is expanded to higher loads and higher revolutions.

Abstract: A fuel injection valve coupled to a common rail is provided. When fuel injection is carried out, the fuel pressure in the fuel injection valve pulsates. An interval between a pilot injection and a main injection is set so that the main injection is carried out at a zero gradient timing as a timing when the gradient of the fuel pressure in the fuel injection valve after the pilot injection is approximately equal to zero. Owing to a fuel injection control apparatus and a fuel injection control method for an internal combustion engine that perform the above-mentioned control, the fuel injection amount for the subsequent fuel injection following the preceding fuel injection can be reliably held equal to a normal amount.

Abstract: A substrate processing apparatus is disclosed equipped with a transfer mechanism that transfers a substrate processed at a processing block to a carrier so that the increase of the number of transfer process is suppressed, improving the processing efficiency. The substrate processing apparatus is configured in such a way that, when a second-transfer module houses at least one substrate and a carrier that can house the at least one substrate is not placed in a carrier-placement unit, the at least one substrate is transferred to a buffer module. When the second transfer module houses at least one substrate and the carrier that can house the at least one substrate is placed in the carrier-placement unit, the at least one substrate is transferred to the carrier, regardless of whether or not a substrate is being transferred from the buffer module to the carrier.

Abstract: An engine comprises an intake control valve disposed in an intake passage at an upstream side of an intake valve in each cylinder for individually opening/closing the intake passage, an actuator for opening/closing the intake control valve, and a control device for controlling an operation of the actuator, wherein the control device controls the actuator to delay opening of the intake control valve in relation to opening of the intake valve, thus performing the supercharge. Supercharge correction is further performed for correcting operating timing of the actuator so that unbalance in a supercharge air quantity between the cylinders in the engine is suppressed.

Abstract: A coating and developing system includes a cassette station, a processing station and an inspection station interposed between the cassette station and the processing station. Time for which a substrate is held uselessly in the inspection module is reduced. A substrate carrying means disposed in the inspection module places priority to transferring a substrate between the cassette station and the processing station, and transfers a substrate to an inspection module in a part of a cycle time in which a substrate carrying means disposed in the processing station carries out one carrying cycle. It is permitted to carry out a substrate from the inspection module in a skip carrying mode, in which a substrate specified by a larger ordinal numeral is carried ahead of a substrate specified by a smaller ordinal numeral. It is inhibited to carry a substrate to the inspection module in the skip carrying mode.

Abstract: In a coating and developing apparatus applied to liquid-immersion light exposure, substrates without an appropriately formed protective film can be recovered without adversely affecting normal-substrate processing efficiency, and in addition, removal of protective films can be simplified. In the coating and developing apparatus of the present invention, abnormal substrates not appropriately surface-coated with a protective film during liquid-immersion light exposure are queued in a queuing module, instead of being loaded into an exposure unit, and after the immediately preceding substrate has been unloaded from the exposure unit and loaded into a designated module, for example, a pre-developing second heating module, each abnormal substrate is loaded into the designated module in order to prevent so-called “scheduled transfer” from being affected, and a protective-film removing unit is also controlled to process the abnormal substrate.

Abstract: A control device for an internal combustion engine (100) controls the internal combustion engine (100) that includes a first EGR device (51) that recirculates exhaust gas from a downstream side of a turbine (23b) to an upstream side of a compressor (23a), and a second EGR device (50) that recirculates exhaust gas from the upstream side of the turbine (23b) to the downstream side of the compressor (23a). EGR control device (7) performs such a control as to change the recirculation of exhaust gas from the recirculation of exhaust gas using the second EGR device (50) to the recirculation of exhaust gas using the first EGR device (51) when the idling-stop is to be executed.

Abstract: An internal combustion engine to which the inventive device for controlling an internal combustion engine is applied includes an intake control valve provided in an air-intake path at a position upstream from an intake valve, the intake control valve being controlled to be either in an operative state operating in relation to the operation of the intake valve or in an non-operative state maintaining the air-intake path always open, and, in the operative state, closed at least prior to the opening of the intake valve and opened after the opening of the intake valve to generate the pressure difference between the upstream and downstream from the intake control valve.

Abstract: A fuel injection valve coupled to a common rail is provided. When fuel injection is carried out, the fuel pressure in the fuel injection valve pulsates. An interval between a pilot injection and a main injection is set so that the main injection is carried out at a zero gradient timing as a timing when the gradient of the fuel pressure in the fuel injection valve after the pilot injection is approximately equal to zero. Owing to a fuel injection control apparatus and a fuel injection control method for an internal combustion engine that perform the above-mentioned control, the fuel injection amount for the subsequent fuel injection following the preceding fuel injection can be reliably held equal to a normal amount.

Abstract: An object of the present invention is to control the discharge amount of unburned fuel components in the internal combustion engine. According the present invention, the number of times of execution of sub fuel injection is changed based on the operation range within which the operation state of the internal combustion engine falls so that the lower the engine load of the internal combustion engine is, and the lower the number of engine revolutions of the internal combustion engine is, the more the number of times of execution of sub fuel injection is increased. Furthermore, the lower the atmospheric pressure is, the lower the temperature of the cooling water of the internal combustion engine is, or the lower the temperature of the intake air of the internal combustion engine is, the more an operation range in which the number of times of execution of sub fuel injection is large is expanded to higher loads and higher revolutions.

Abstract: Techniques can curtail time for which a substrate is held to no purpose and improves the throughput of a coating and developing system. An inspection station through which a substrate processed in a processing station is transferred to a carrier station includes a plurality of different inspection modules respectively taking different inspection times, a buffer unit for temporarily holding a substrate and a substrate carrying means controlled by a controller. When the inspection module is engaged in inspecting a substrate, the substrate carrying means carries another substrate to be inspected by the same inspection module to the buffer unit and the substrate is held in the buffer unit. Thus, holding the wafers W in the inspection modules can be suppressed and the throughput can be improved.

Abstract: When a product substrate passes a reference module which is an n-th module ahead of an inspection module in a transfer path, an inspection reservation signal for performing an inspection to a lot to which the product substrate belongs is outputted to the inspection module. When the inspection module is in trouble, the output of an inspection reservation signal for a product substrate is forbidden, and the product substrates to be transferred to the inspection module are transferred to a module which is next to the inspection module in a transfer order. When the trouble of the inspection module has been resolved and a substrate for confirmation inspection is preferentially transferred to the inspection module, an inspection reservation signal for the substrate for confirmation inspection is outputted, the substrate for confirmation inspection is transferred to the inspection module, and the confirmation inspection for the inspection module is performed.

Abstract: With regard to a group of substrates preceding a substrate of which residence time is under calculation, a time t1 and a time t2 are calculated, t1 being a time interval from a time point in which a substrate B1 under the consideration has become ready from being transferred out from a wait module to a time point in which a heating module used for the substrate B1 has been ready for processing the substrate B1, t2 being a time interface from a time on in which the substrate B1 under calculation has been transferred out from the wait module to a time point of reaching the heating module used for the substrate B1, and a waiting time t of the substrate B1 in the wait module is calculated according to t=t1?t2.

Abstract: An engine comprises an intake control valve disposed in an intake passage at an upstream side of an intake valve in each cylinder for individually opening/closing the intake passage, an actuator for opening/closing the intake control valve, and a control device for controlling an operation of the actuator, wherein the control device controls the actuator to delay opening of the intake control valve in relation to opening of the intake valve, thus performing the supercharge. Supercharge correction is further performed for correcting operating timing of the actuator so that unbalance in a supercharge air quantity between the cylinders in the engine is suppressed.

Abstract: An internal combustion engine to which the inventive device for controlling an internal combustion engine is applied includes an intake control valve provided in an air-intake path at a position upstream from an intake valve, the intake control valve being controlled to be either in an operative state operating in relation to the operation of the intake valve or in an non-operative state maintaining the air-intake path always open, and, in the operative state, closed at least prior to the opening of the intake valve and opened after the opening of the intake valve to generate the pressure difference between the upstream and downstream from the intake control valve.

Abstract: A coating/developing apparatus has a carrier block including a first transfer device, a process block including processing modules, an examination block including examination modules and a second transfer device, and first to forth stages. A controller executes a first operation mode preset to transfer substrates from the process block and carrier block into the examination block in parallel. The first operation mode includes transferring substrates processed by the process block to the third or fourth stage through or not through an examination module by the second transfer device, transferring substrates to be only examined from a carrier in the carrier block to the second stage by the first transfer device, and transferring these substrates from the second stage to an examination modules by the second transfer device, and transferring substrates thus examined from the examination block to the third or fourth stage by the second transfer device.

Abstract: In a coating/developing apparatus, a process section includes post-exposure baking units each having a waiting position and configured to perform a baking process on a substrate. An interface section transfer mechanism includes a first transfer mechanism configured to transfer the substrate to and from the process section and to load the substrate into the post-exposure baking units, and a second transfer mechanism configured to transfer the substrate to and from the light exposure apparatus. An interface section includes a relay position configured to place thereon the substrate transferred by the second transfer mechanism, and to allow the first transfer mechanism to receive the substrate therefrom. A control section is arranged to set the substrate on standby at the relay position and the waiting position, to make a time period constant among substrates from an end of the light exposure process to a start of a post-exposure baking process.

Abstract: With regard to a group of substrates preceding a substrate of which residence time is under calculation, a time t1 and a time t2 are calculated, t1 being a time interval from a time point in which a substrate B1 under the consideration has become ready from being transferred out from a wait module to a time point in which a heating module used for the substrate B1 has been ready for processing the substrate B1, t2 being a time interface from a time on in which the substrate B1 under calculation has been transferred out from the wait module to a time point of reaching the heating module used for the substrate B1, and a waiting time t of the substrate B1 in the wait module is calculated according to t=t1?t2.

Abstract: A coating/developing apparatus has a carrier block including a first transfer device, a process block including processing modules, an examination block including examination modules and a second transfer device, and first to forth stages. A controller executes a first operation mode preset to transfer substrates from the process block and carrier block into the examination block in parallel. The first operation mode includes transferring substrates processed by the process block to the third or fourth stage through or not through an examination module by the second transfer device, transferring substrates to be only examined from a carrier in the carrier block to the second stage by the first transfer device, and transferring these substrates from the second stage to an examination modules by the second transfer device, and transferring substrates thus examined from the examination block to the third or fourth stage by the second transfer device.