Patents by Inventor Tomonori Takahashi

Tomonori Takahashi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200048584
    Abstract: This disclosure relates to a cleaning composition that contains 1) at least one redox agent; 2) at least one first chelating agent, the first chelating agent being a polyaminopolycarboxylic acid; 3) at least one metal corrosion inhibitor, the metal corrosion inhibitor being a substituted or unsubstituted benzotriazole; 4) at least one organic solvent selected from the group consisting of water soluble alcohols, water soluble ketones, water soluble esters, and water soluble ethers; 5) at least one quaternary ammonium hydroxide; and 6) water. This disclosure also relates to a method of using the above composition for cleaning a semiconductor substrate.
    Type: Application
    Filed: October 22, 2019
    Publication date: February 13, 2020
    Inventors: Tomonori Takahashi, Bing Du, William A. Wojtczak, Thomas Dory, Emil A. Kneer
  • Publication number: 20200020545
    Abstract: This disclosure relates to etching compositions containing 1) at least one oxidizing agent; 2) at least one chelating agent; 3) at least one metal corrosion inhibitor; 4) at least one organic solvent; 5) at least one amidine base; and 6) water.
    Type: Application
    Filed: September 25, 2019
    Publication date: January 16, 2020
    Inventors: Thomas Dory, Emil A. Kneer, Tomonori Takahashi
  • Patent number: 10533146
    Abstract: This disclosure relates to a cleaning composition that contains 1) at least one redox agent; 2) at least one organic solvent selected from the group consisting of water soluble alcohols, water soluble ketones, water soluble esters, and water soluble ethers; 3) at least one metal-containing additive; and 4) water.
    Type: Grant
    Filed: October 5, 2017
    Date of Patent: January 14, 2020
    Assignee: Fujifilm Electronic Materials U.S.A., Inc.
    Inventors: Keeyoung Park, Emil A. Kneer, Thomas Dory, Tomonori Takahashi
  • Patent number: 10490417
    Abstract: This disclosure relates to etching compositions containing 1) at least one oxidizing agent; 2) at least one chelating agent; 3) at least one metal corrosion inhibitor; 4) at least one organic solvent; 5) at least one amidine base; and 6) water.
    Type: Grant
    Filed: March 17, 2015
    Date of Patent: November 26, 2019
    Assignee: Fujifilm Electronic Materials U.S.A., Inc.
    Inventors: Thomas Dory, Emil A. Kneer, Tomonori Takahashi
  • Patent number: 10415005
    Abstract: This disclosure relates to a cleaning composition that contains 1) hydroxylamine in an amount of from about 0.5% to about 20% by weight of the composition; 2) a pH adjusting agent, the pH adjusting agent being a base free of a metal ion and in an amount of at most about 3% by weight of the composition; 3) an alkylene glycol; and 4) water; in which the pH of the composition is from about 7 to about 11. This disclosure also relates to a method of using the above composition for cleaning a semiconductor substrate.
    Type: Grant
    Filed: May 1, 2019
    Date of Patent: September 17, 2019
    Assignee: Fujifilm Electronic Materials U.S.A., Inc.
    Inventors: Tomonori Takahashi, Bing Du, William A. Wojtczak, Thomas Dory, Emil A. Kneer
  • Publication number: 20190256807
    Abstract: This disclosure relates to a cleaning composition that contains 1) hydroxylamine in an amount of from about 0.5% to about 20% by weight of the composition; 2) a pH adjusting agent, the pH adjusting agent being a base free of a metal ion and in an amount of at most about 3% by weight of the composition; 3) an alkylene glycol; and 4) water; in which the pH of the composition is from about 7 to about 11. This disclosure also relates to a method of using the above composition for cleaning a semiconductor substrate.
    Type: Application
    Filed: May 1, 2019
    Publication date: August 22, 2019
    Inventors: Tomonori Takahashi, Bing Du, William A. Wojtczak, Thomas Dory, Emil A. Kneer
  • Publication number: 20190241845
    Abstract: This disclosure relates to a cleaning composition that contains 1) at least one redox agent; 2) at least one first chelating agent, the first chelating agent being a polyaminopolycarboxylic acid; 3) at least one second chelating agent different from the first chelating agent, the second chelating agent containing at least two nitrogen-containing groups; 4) at least one metal corrosion inhibitor, the metal corrosion inhibitor being a substituted or unsubstituted benzotriazole; 5) at least one organic solvent selected from the group consisting of water soluble alcohols, water soluble ketones, water soluble esters, and water soluble ethers; 6) water; and 7) optionally, at least one pH adjusting agent, the pH adjusting agent being a base free of a metal ion. This disclosure also relates to a method of using the above composition for cleaning a semiconductor substrate.
    Type: Application
    Filed: March 22, 2019
    Publication date: August 8, 2019
    Inventors: Tomonori Takahashi, Bing Du, William A. Wojtczak, Thomas Dory, Emil A. Kneer
  • Publication number: 20190177669
    Abstract: An object of the present invention is to provide a treatment liquid for a semiconductor device, which has excellent temporal stability of residue removing performance, and excellent anticorrosion performance for a treatment target. In addition, another object of the present invention is to provide a method for washing a substrate and a method for manufacturing a semiconductor device, each using the treatment liquid. The treatment liquid of an embodiment of the present invention is a treatment liquid for a semiconductor device, including at least one hydroxylamine compound selected from the group consisting of hydroxylamine and a hydroxylamine salt, at least one basic compound selected from the group consisting of an amine compound other than the hydroxylamine compound and a quaternary ammonium hydroxide salt, and at least one selected from the group consisting of a reducing agent other than the hydroxylamine compound and a chelating agent, and having a pH of 10 or more.
    Type: Application
    Filed: February 11, 2019
    Publication date: June 13, 2019
    Applicant: FUJIFILM Corporation
    Inventors: Tetsuya KAMIMURA, Tomonori Takahashi
  • Patent number: 10253282
    Abstract: This disclosure relates to a cleaning composition that contains 1) at least one redox agent; 2) at least one first chelating agent, the first chelating agent being a polyaminopolycarboxylic acid; 3) at least one second chelating agent different from the first chelating agent, the second chelating agent containing at least two nitrogen-containing groups; 4) at least one metal corrosion inhibitor, the metal corrosion inhibitor being a substituted or unsubstituted benzotriazole; 5) at least one organic solvent selected from the group consisting of water soluble alcohols, water soluble ketones, water soluble esters, and water soluble ethers; 6) water; and 7) optionally, at least one pH adjusting agent, the pH adjusting agent being a base free of a metal ion. This disclosure also relates to a method of using the above composition for cleaning a semiconductor substrate.
    Type: Grant
    Filed: December 21, 2016
    Date of Patent: April 9, 2019
    Assignee: Fujifilm Electronic Materials U.S.A., Inc.
    Inventors: Tomonori Takahashi, Bing Du, William A. Wojtczak, Thomas Dory, Emil A. Kneer
  • Publication number: 20190079409
    Abstract: A treatment liquid for a semiconductor device contains an organic alkali compound, a corrosion inhibitor, an organic solvent, Ca, Fe, and Na, in which each of the mass ratio of the Ca, the mass ratio of the Fe, and the mass ratio of the Na to the organic alkali compound in the treatment liquid is 10—12 to 10?4. A method for washing a substrate and a method for removing a resist use the treatment liquid.
    Type: Application
    Filed: November 14, 2018
    Publication date: March 14, 2019
    Applicant: FUJIFILM Corporation
    Inventors: Tomonori TAKAHASHI, Tetsuya KAMIMURA
  • Publication number: 20190071623
    Abstract: A treatment liquid is a treatment liquid for a semiconductor device, containing a fluorine-containing compound, a corrosion inhibitor, and calcium, in which the mass content ratio of the calcium to the fluorine-containing compound in the treatment liquid is 1.0×10?10 to 1.0×10?4.
    Type: Application
    Filed: November 5, 2018
    Publication date: March 7, 2019
    Applicant: FUJIFILM Corporation
    Inventors: Tetsuya KAMIMURA, Tomonori TAKAHASHI
  • Patent number: 9947428
    Abstract: An atomic beam source includes a tubular cathode that includes an emission portion that includes an emission port through which an atomic beam can be emitted, a rod-shaped first anode disposed inside the cathode, and a rod-shaped second anode disposed inside the cathode and spaced from the first anode. At least one selected from the group consisting of a shape of the cathode, a shape of the first anode, a shape of the second anode, and a positional relationship between the cathode, the first anode, and the second anode is predetermined so that emission of sputter particles resulting from collision of cations, which have been generated by plasma between the first anode and the second anode, with at least one selected from the cathode, the first anode, and the second anode is reduced.
    Type: Grant
    Filed: February 10, 2017
    Date of Patent: April 17, 2018
    Assignee: NGK Insulators, Ltd.
    Inventors: Hiroyuki Tsuji, Tomonori Takahashi, Yoshimasa Kondo, Kazumasa Kitamura, Takayoshi Akao, Tomoki Nagae
  • Publication number: 20180100128
    Abstract: This disclosure relates to a cleaning composition that contains 1) at least one redox agent; 2) at least one organic solvent selected from the group consisting of water soluble alcohols, water soluble ketones, water soluble esters, and water soluble ethers; 3) at least one metal-containing additive; and 4) water.
    Type: Application
    Filed: October 5, 2017
    Publication date: April 12, 2018
    Inventors: Keeyoung Park, Emil A. Kneer, Thomas Dory, Tomonori Takahashi
  • Patent number: 9834746
    Abstract: This disclosure relates to a cleaning composition that contains 1) at least one chelating agent, the chelating agent being a polyaminopolycarboxylic acid; 2) at least one organic solvent selected from the group consisting of water soluble alcohols, water soluble ketones, water soluble esters, and water soluble ethers; 3) at least one monocarboxylic acid containing a primary or secondary amino group and at least one additional basic group containing nitrogen; 4) at least one metal corrosion inhibitor, the metal corrosion inhibitor being a substituted or unsubstituted benzotriazole; and 5) water. This disclosure also relates to a method of using the above composition for cleaning a semiconductor substrate.
    Type: Grant
    Filed: September 15, 2014
    Date of Patent: December 5, 2017
    Assignee: Fujifilm Electronic Materials U.S.A., Inc.
    Inventors: Thomas Dory, Bing Du, Tomonori Takahashi, Emil A. Kneer
  • Patent number: 9726978
    Abstract: A cleaning composition for removing plasma etching residue and/or ashing residue formed above a semiconductor substrate is provided that includes (component a) water, (component b) a hydroxylamine and/or a salt thereof, (component c) a basic organic compound, and (component d) an organic acid and has a pH of 7 to 9. There are also provided a cleaning process and a process for producing semiconductor device employing the cleaning composition.
    Type: Grant
    Filed: May 20, 2015
    Date of Patent: August 8, 2017
    Assignee: FUJIFILM Corporation
    Inventors: Tomonori Takahashi, Kazutaka Takahashi, Atsushi Mizutani, Hiroyuki Seki, Hideo Fushimi, Tomoo Kato
  • Patent number: 9688171
    Abstract: A vehicle seat includes an armrest having a body provided with a recessed portion recessed toward a widthwise inward direction of the seat in such a manner as to surround a shaft member, and a hook member attached to a distal end of the shaft member and fitted in the recessed portion. The hook member includes a presser portion for pressing a skin layer of the armrest with the skin layer gripped between the presser portion and the body of the armrest, a baggage engagement portion extending from the presser portion in a widthwise outward direction of the seat for hooking engagement with the baggage, and a flange portion located at a distal end of the baggage engagement portion and extending in a direction substantially perpendicular to an axis of the shaft member for preventing the baggage from displacing off the hook member.
    Type: Grant
    Filed: November 3, 2015
    Date of Patent: June 27, 2017
    Assignee: TACHI-S CO., LTD.
    Inventors: Taichi Yokoyama, Tomonori Takahashi, Yozo Furuta
  • Publication number: 20170154697
    Abstract: An atomic beam source 10 includes a tubular cathode 20 that includes an emission portion 30 that includes an emission port 32 through which an atomic beam can be emitted, a rod-shaped first anode 40 disposed inside the cathode 20, and a rod-shaped second anode 50 disposed inside the cathode 20 and spaced from the first anode 40. At least one selected from the group consisting of a shape of the cathode, a shape of the first anode, a shape of the second anode, and a positional relationship between the cathode, the first anode, and the second anode is predetermined so that emission of sputter particles resulting from collision of cations, which have been generated by plasma between the first anode and the second anode, with at least one selected from the cathode, the first anode, and the second anode is reduced.
    Type: Application
    Filed: February 10, 2017
    Publication date: June 1, 2017
    Applicant: NGK INSULATORS, LTD.
    Inventors: Hiroyuki TSUJI, Tomonori TAKAHASHI, Yoshimasa KONDO, Kazumasa KITAMURA, Takayoshi AKAO, Tomoki NAGAE
  • Publication number: 20170101608
    Abstract: This disclosure relates to a cleaning composition that contains 1) at least one redox agent; 2) at least one first chelating agent, the first chelating agent being a polyaminopolycarboxylic acid; 3) at least one second chelating agent different from the first chelating agent, the second chelating agent containing at least two nitrogen-containing groups; 4) at least one metal corrosion inhibitor, the metal corrosion inhibitor being a substituted or unsubstituted benzotriazole; 5) at least one organic solvent selected from the group consisting of water soluble alcohols, water soluble ketones, water soluble esters, and water soluble ethers; 6) water; and 7) optionally, at least one pH adjusting agent, the pH adjusting agent being a base free of a metal ion. This disclosure also relates to a method of using the above composition for cleaning a semiconductor substrate.
    Type: Application
    Filed: December 21, 2016
    Publication date: April 13, 2017
    Inventors: Tomonori Takahashi, Bing Du, William A. Wojtczak, Thomas Dory, Emil A. Kneer
  • Patent number: 9562211
    Abstract: This disclosure relates to a cleaning composition that contains 1) at least one redox agent; 2) at least one first chelating agent, the first chelating agent being a polyaminopolycarboxylic acid; 3) at least one second chelating agent different from the first chelating agent, the second chelating agent containing at least two nitrogen-containing groups; 4) at least one metal corrosion inhibitor, the metal corrosion inhibitor being a substituted or unsubstituted benzotriazole; 5) at least one organic solvent selected from the group consisting of water soluble alcohols, water soluble ketones, water soluble esters, and water soluble ethers; 6) water; and 7) optionally, at least one pH adjusting agent, the pH adjusting agent being a base free of a metal ion. This disclosure also relates to a method of using the above composition for cleaning a semiconductor substrate.
    Type: Grant
    Filed: December 3, 2014
    Date of Patent: February 7, 2017
    Assignee: Fujifilm Electronic Materials U.S.A., Inc.
    Inventors: Tomonori Takahashi, Bing Du, William A. Wojtczak, Thomas Dory, Emil A. Kneer
  • Publication number: 20160355713
    Abstract: An object of the present invention is to provide a moisture-curable hot melt adhesive which can substantially suppress generation of carbon dioxide bubbles by a reaction of an isocyanate compound and moisture as well as volume expansion when an uncured adhesive is heated. The present invention relates to a moisture-curable hot melt adhesive for lighting appliances comprising: an urethane prepolymer obtained by mixing a polyol compound and an isocyanate compound, a thermoplastic polyacrylic resin and an oxazolidine compound.
    Type: Application
    Filed: August 19, 2016
    Publication date: December 8, 2016
    Inventors: Shingo Tsuno, Masaaki Dobashi, Takahide Mosishita, Tomonori Takahashi