Patents by Inventor Tomoya Ujiie

Tomoya Ujiie has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220148861
    Abstract: A chamber is provided where an exhaust port for exhausting a gas in an inside thereof is formed thereon and substrate processing for a substrate is executed in the inside. A partition member partitions the inside of the chamber into a processing region where the substrate processing is executed and an exhaust region that leads to the exhaust port. The partition member is configured to include a plurality of plate-shaped members. The plurality of plate-shaped members are provided in such a manner that at least a part of each thereof is arranged obliquely at intervals in a side view from a side of a side surface of the chamber and an upper end part of each thereof is arranged so as to overlap with a lower end part of the plate-shaped member that is adjacent thereto in a top view from an upper side of the chamber.
    Type: Application
    Filed: November 8, 2021
    Publication date: May 12, 2022
    Applicant: Tokyo Electron Limited
    Inventors: Wataru SHIMIZU, Ryoya ABE, Tomoya UJIIE
  • Publication number: 20220122814
    Abstract: A plasma processing apparatus includes a processing chamber; a placing table disposed in the processing chamber to place a substrate thereon; an upper electrode facing the placing table; a member configured to adjust a temperature of the upper electrode; a first sensor provided within the member configured to adjust the temperature of the upper electrode, and configured to measure the temperature of the upper electrode; and a first sheet member, disposed between the upper electrode and the first sensor, having a relative dielectric constant of 2.4 or higher at a frequency of 1 MHz.
    Type: Application
    Filed: October 15, 2021
    Publication date: April 21, 2022
    Inventors: Takahiro Senda, Yuzo Uemura, Yusei Kuwabara, Tomoya Ujiie